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2006 IEEE International Conference on Semiconductor Electronics最新文献

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The Use of Photoluminescence Spectra of TiO2 Nanoparticles Coated With Porphyrin Dye Thin Film for Grading Agarwood Oil 卟啉染料薄膜包覆TiO2纳米粒子光致发光光谱用于沉香油分级
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.381046
N. H. Yusoff, M.M. Salleha, M. Yahaya, M. Awang
This paper explores the possibility using nanostructure thin film of TiO2 nanoparticles coated with porphyrin dye based on fluorescence technique to grade agarwood oil. The sensing material was prepared using synthesized of TiO2 nanoparticles colloid is in a sol-gel form. Then the nanoparticles were coated with dye, Iron (III) meso tetraphenyl porphine chloride. The coated nanoparticles were deposited on quartz substrate using self- assembly through dip coating technique. The sensing properties of the thin film toward five grades of agarwood oil were studied using luminescence spectrometer. It was found that the thin film produced different emission spectra peaks for different grades of agarwood oil. Hence the thin film potentially be use as sensing material for grading agarwood oil and others nature product for the future.
本文探讨了基于荧光技术的涂覆卟啉染料的TiO2纳米结构薄膜对沉香油进行分级的可能性。该传感材料采用溶胶-凝胶形式合成TiO2纳米颗粒胶体制备。然后用染料铁(III)中位四苯基卟啉氯包覆纳米颗粒。采用浸镀自组装技术在石英衬底上制备了包覆的纳米颗粒。利用发光光谱仪研究了该薄膜对五种沉香油的传感性能。结果表明,不同等级沉香油的发射光谱峰不同。因此,该薄膜将来有可能用作沉香油和其他自然产品分级的传感材料。
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引用次数: 4
Challenges in Implementing RFID Tag in a Conventional Library 在传统图书馆中实现RFID标签的挑战
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.381060
M.S. Selamat, B. Majlis
Operating a library involves in keeping track large number of resources such as books and magazines. Radio Frequency Identification (RFID) technology has been promoted in recent years as an alternative technology in improving asset management in a library. The RFID tags were applied to replace bar code and magnetic stripe functions as identification and anti-theft detection. This paper is written based on an actual implementation of RFID tagging system in a library one of local university in Malaysia. It focuses on three main challenges during the implementation which relates to system integration, parallel operation with existing system, and procedure changes. In conclusion, implementing RFID tag in a library faced many challenges; however the library could harness the technology advantages in improving its operation.
经营图书馆需要跟踪大量的资源,如书籍和杂志。无线射频识别(RFID)技术近年来作为一种改进图书馆资产管理的替代技术得到了推广。应用RFID标签代替条形码和磁条进行身份识别和防盗检测。本文是根据马来西亚一所地方大学图书馆RFID标签系统的实际实施情况编写的。重点分析了实施过程中面临的三个主要挑战,即系统集成、与现有系统并行运行和流程变更。综上所述,在图书馆实施RFID标签面临诸多挑战;然而,图书馆可以利用技术优势来改善其运作。
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引用次数: 14
A VLSI Design Framework with Freeware CAD Tools 一个使用免费CAD工具的VLSI设计框架
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.380768
Y. Teh, F. Mohd-Yasin, M. Reaz, A. Kordesch
This work presents a PC-based freeware CAD environment to design and tape out VLSI microelectronic circuits, starting from schematic capture all the way to a foundry compatible GDS II database. These free tools will help more Malaysian universities to set up low cost VLSI CAD laboratories and tape out circuits using Silterra's University Program. This will help grow local IC design culture and skills. FreeVLSI uses common freeware CAD tools: 5SPICE, LASI, and WinSPICE, and some custom scripts to interface between these tools. Currently FreeVLSI is able to cater to full custom design flow from schematic capture to circuit layout.
这项工作提出了一个基于pc的免费CAD环境来设计和磁带VLSI微电子电路,从原理图捕获一直到铸造厂兼容的GDS II数据库。这些免费工具将帮助更多的马来西亚大学建立低成本的VLSI CAD实验室,并使用Silterra的大学计划制作电路。这将有助于发展当地的IC设计文化和技能。FreeVLSI使用常见的免费CAD工具:5SPICE, LASI和WinSPICE,以及一些自定义脚本来连接这些工具。目前,FreeVLSI能够满足从原理图捕获到电路布局的完整定制设计流程。
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引用次数: 0
Studies on Failure Mechanism of ET High Via Resistance in Wafer Fabrication ET高通孔电阻在晶圆制造中的失效机理研究
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.380765
H. Younan, Tan Sock Khim, Li Kun, Z. Siping
In this paper, an ET high via resistance case was investigated. TEM/EDX technique was used for identification of the root cause. Failure mechanism of Al fluoride defects is discussed. Some preventive actions/solutions were implemented to improve the process margin and eliminate the problem.
本文研究了一种ET高通孔电阻的情况。采用TEM/EDX技术确定了根本原因。讨论了氟化铝缺陷的失效机理。实施了一些预防措施/解决方案以提高工艺裕度并消除问题。
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引用次数: 0
High-Performance In0.52Al0.48As/In0.6Ga0.4As Power Metamorphic HEMT for Ka-Band Applications 用于ka波段应用的高性能In0.52Al0.48As/In0.6Ga0.4As功率变质HEMT
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.381095
Chia-Yuan Chang, E. Chang, Y. Lien, Y. Miyamoto, Szu-Hung Chen, L. Chu
A 70-nm In0.52Al0.48As/In0.6Ga0.4 power MHEMT with double delta-doping was fabricated and evaluated. The device has a high transconductance of 827 mS/mni. The saturated drain-source current of the device is 890 niA/mm. A current gain cutoff frequency (fT) of 200 GHz and a maximum oscillation frequency (fmax ) of 300 GHz were achieved due to the nanometer gate length and the high Indium content in the channel. When measured at 32 GHz, the 4 times 40 mum device demonstrates a maximum output power of 14.5 dBm with PldB of 11.1 dBm and the power gain is 9.5 dB. The excellent DC and RF performance of the 70-nm MHEMT shows a great potential for Ka-band power applications.
制备了双δ掺杂的70 nm In0.52Al0.48As/In0.6Ga0.4功率MHEMT并对其性能进行了评价。该器件具有827 mS/mni的高跨导。该器件的漏源饱和电流为890nia /mm。由于纳米栅极长度和通道中铟的高含量,实现了200 GHz的电流增益截止频率(fT)和300 GHz的最大振荡频率(fmax)。在32ghz下测量时,4倍40ma器件的最大输出功率为14.5 dBm, PldB为11.1 dBm,功率增益为9.5 dB。70纳米MHEMT具有优异的直流和射频性能,在ka波段功率应用中具有巨大的潜力。
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引用次数: 1
Fabrication Study of Solid Microneedles Array Using HNA 利用海航技术制备固体微针阵列的研究
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.381012
N. A. Aziz, B. Majlis
This paper presents an approach for the process development of the out of plane silicon microneedles array fabrication. This study utilizes the wet etching technology using HNA to build a structure of sharp-tipped microneedles; biconvex-conical shaped. The height of the fabricated microneedle is 41.8 mum and the tip radii is 1.4 mum. Investigation on the effect of varying the mask opening window had been carried out. The design approach and the fabrication process are well explained here.
本文提出了一种面外硅微针阵列的工艺开发方法。本研究利用湿法刻蚀技术,利用HNA构建了尖尖微针结构;biconvex-conical形状。制备的微针高度为41.8微米,针尖半径为1.4微米。对不同的掩模开启窗的效果进行了研究。设计方法和制造过程在这里有很好的解释。
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引用次数: 5
Comparison of the Growth Si-based Crystalline Silicon Carbide (SiC) by Chemical Vapor Deposition (CVD) using Carbon Monoxide (CO) and Treated Carbon Dioxide (CO2) 用一氧化碳(CO)和处理过的二氧化碳(CO2)化学气相沉积(CVD)生长硅基晶体碳化硅(SiC)的比较
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.381081
A.Y.K. Lim, K. Ibrahim
Abstract Silicon carbide (SiC) has received special attention in recent years because of its remarkable properties. This work presents the investigation on the growth of Si-based SiC using carbon monoxide (CO) compared to the treated carbon dioxide (CO2) as reported earlier. Experiments results has revealed the existence of Si-C bond and the bond formed on silicon (Si) surface through the characterization using X-ray diffraction (XRD) and Raman spectroscopy (RS). Thickness study is carried out show that growth using carbon monoxide has a thicker layer of SiC at the same growth condition compared to treated carbon dioxide. The reflective index (RI) of the growth SiC was measured. This growth technique is promising and shows great potential of producing relatively desirable quality SiC films for electronic devices fabrication.
碳化硅(SiC)由于其优异的性能,近年来受到了人们的广泛关注。这项工作介绍了使用一氧化碳(CO)和之前报道的处理过的二氧化碳(CO2)来生长si基SiC的研究。通过x射线衍射(XRD)和拉曼光谱(RS)表征,实验结果表明硅(Si)表面存在Si- c键并形成键。厚度研究表明,在相同的生长条件下,用一氧化碳生长的碳化硅层比用二氧化碳处理的碳化硅层厚。测定了生长SiC的反射指数(RI)。这种生长技术是有前途的,并显示出巨大的潜力,以生产相对理想的质量SiC薄膜用于电子器件制造。
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引用次数: 0
FPGA Implementation of a Canonical Signed Digit Multiplier-less based FFT Processor for Wireless Communication Applications 一种用于无线通信的标准无乘法器FFT处理器的FPGA实现
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.380712
Mahmud Benhamid, Masuri Othman
This paper proposes a novel fully parallel FFT architecture based on canonical signed digit (CSD) multiplier-less targeting wireless communication applications, such as IEEE802.15.3a wireless personal area network (WPAN) baseband. The proposed architecture has the advantages of high throughput, less latency, and smaller area. The multiplier-less architecture uses shift- and-add operations to realize the complex multiplier and uses the CSD to optimize these operations. The design has been coded in Verilog HDL targeting Xilinx Virtex-II FPGA series. It is fully implemented and tested on real hardware using Virtex-II FG456 prototype board. Based on this architecture, the implementation of 8-points FFT on Virtex-II can run at a maximum clock frequency of about 400 MHz which lead to about 3.2 GS/s throughput with a latency of 6 clock cycles using 16,580 equivalent gates. Comparison with a conventional parallel architecture design of the same size can run only at a maximum clock frequency of 220 MHz or 1.76 GS/s throughput with a latency of 12 clock cycles using 77,418 equivalent gates for the design. The resulting throughput increases by about 82% while the equivalent gates and latency decrease by about 79% and 50% respectively.
针对IEEE802.15.3a无线个人局域网(WPAN)基带等无线通信应用,提出了一种基于正则签名数(CSD)无乘法器的全并行FFT架构。该体系结构具有吞吐量高、时延小、占地小等优点。无乘法器架构使用移位加运算来实现复杂乘法器,并使用CSD来优化这些运算。针对赛灵思Virtex-II FPGA系列,用Verilog HDL进行了设计编码。它在使用Virtex-II FG456原型板的实际硬件上完全实现和测试。基于这种架构,在Virtex-II上实现8点FFT可以在大约400 MHz的最大时钟频率下运行,这导致大约3.2 GS/s的吞吐量,使用16,580等效门,延迟为6个时钟周期。与相同尺寸的传统并行架构设计相比,该设计可以在最大时钟频率为220 MHz或1.76 GS/s的吞吐量下运行,延迟为12个时钟周期,使用77,418个等效门。由此产生的吞吐量增加了约82%,而等效门和延迟分别减少了约79%和50%。
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引用次数: 10
Aluminum based Two-Port-Clamped-Clamped Resonators 铝基双端口箝位谐振器
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.381045
M. Al Khusheiny, B. Majlis
In this paper a new structure of clamped-clamped muresonator (CCMR) of resonance frequency (fo) of 180 kHz, is designed, modeled, fabricated and tested, using aluminum as structural material. IntelliSuite simulator is used to model the mechanical properties of the new MEMS resonator using a static displacement analysis and to get the optimum values of the beams parameters. The effective spring constant and mass of the resonator were calculated using a special proposed simulator, based on Mapple, besides using it to model the mechanical parameters into equivalent electrical circuit for the resonator, and determine the electrical properties just by giving the physical dimensions of the muresonator. Surface micromachining technology was used to fabricate the proposed MEMS resonator in IMEN's Clean Room.
本文以铝为结构材料,设计、建模、制作和试验了一种谐振频率为180 kHz的钳位-钳位谐振器(CCMR)的新结构。利用IntelliSuite仿真器对新型MEMS谐振器的力学性能进行了模拟,并进行了静态位移分析,得到了光束参数的最佳值。利用本文提出的基于Mapple的仿真器计算谐振器的有效弹簧常数和质量,并将谐振器的力学参数建模为等效电路,通过给出谐振器的物理尺寸来确定谐振器的电学性质。采用表面微加工技术在IMEN的洁净室中制造了所提出的MEMS谐振器。
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引用次数: 5
Queue Time Impact on Defectivity at Post Copper Barrier Seed, Electrochemical Plating, Anneals and Chemical Mechanical Polishing 排队时间对后铜屏障种、电化学镀、退火和化学机械抛光缺陷的影响
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.380777
Y. A. Wahab, A. Ahmad, Z. Awang
As design rules shrink beyond 0.1.3 mum the development focus has been a gradual shift in the defectivity on copper electroplating integrated circuit manufacturing applications. Effective process inspection and defect identification are key issues for the failure mechanisms in semiconductor manufacturing. In this paper, copper deposition with He in-situ and furnace anneal splits were performed on the Applied Materials SlimCellTM ECP system. The paper outlines the queue time challenges from a defectivity perspective and the solutions implemented that addresses each issue. The analytical techniques used to classify these defects and the methods used to determine their origin is discussed. This paper will attempt to describe the impact of queue time on defectivity challenges and we introduce a new defect characterization scheme that takes the defect generation mechanism and the potential source into account. Further investigation implemented to study the possibility of imposing a time window between seed deposition and plating, plating to anneal duration as well as anneal to CMP in order to posed a significant challenge in differentiating between plating and CMP induced defects. Most defects were observed after chemical-mechanical planarization (CMP) was performed and defects that were generally categorized as missing copper could have resulted from corrosion, from scratches during CMP process from incomplete filling of fine features after plating.
随着设计规则缩小到0.1.3 m以上,开发重点逐渐转移到铜电镀集成电路制造应用的缺陷上。有效的工艺检查和缺陷识别是半导体制造中失效机制的关键问题。本文在应用材料公司的SlimCellTM ECP系统上进行了He原位沉积和炉内退火劈裂。本文从缺陷的角度概述了排队时间的挑战,并实现了解决每个问题的解决方案。讨论了用于对这些缺陷进行分类的分析技术和确定其来源的方法。本文将尝试描述排队时间对缺陷挑战的影响,并引入一种新的缺陷表征方案,该方案考虑了缺陷产生机制和潜在来源。进一步研究了在种子沉积和电镀、电镀到退火时间以及退火到CMP之间施加时间窗口的可能性,从而对区分电镀和CMP诱导缺陷提出了重大挑战。大多数缺陷是在化学机械刨平(CMP)后观察到的,通常被归类为缺铜的缺陷可能是由于腐蚀、CMP过程中的划痕或镀后精细特征未完全填充造成的。
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引用次数: 2
期刊
2006 IEEE International Conference on Semiconductor Electronics
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