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2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)最新文献

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Co-design and Signal-Power Integrity/EMI Co-analysis of a Switchable High-speed Inter-Chiplet Serial Link on an Active Interposer 主动式中介器上可切换高速芯片间串行链路的协同设计和信号功率完整性/EMI协同分析
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00214
M. Miao, Xiaolong Duan, Liang Sun, Tao Li, Shiliang Zhu, Zhuanzhuan Zhang, Jin Li, Danya Zhang, Hao Wen, Xuena Liu, Zhensong Li
This paper proposes a chiplet-based domain specific architecture (DSA) module on active interposer for convolutions in various scenarios. By constructing an integral development frame, the I/O and inter-chiplet links behaviors together with signal integrity (SI), power integrity (PI) and electromagnetic interference (EMI) issues can be co-considered and co-analyzed in the early phases, facilitating efficient implementation of heterogeneous integration. Additionally, the proposed solution takes advantage of the flexibility of a novel network-on-chip (NoC) switching fabric for inter-chiplet data exchange and versatile auxiliary circuitry enabled by an active interposer, to enhance its performance and extend the scope of application. The design and analysis results are shown, as well as associated options and potentials of the development frame. Up to now, the prototype chip samples for the switching fabric has been delivered by foundry; detailed physical design and assembly of the DSA module with off-the-shell dies and cost- effective Si interposer solution are under way.
本文提出了一种基于芯片的域特定结构(DSA)模块,用于各种场景下的卷积。通过构建集成开发框架,I/O和芯片间链路行为以及信号完整性(SI)、功率完整性(PI)和电磁干扰(EMI)问题可以在早期阶段共同考虑和共同分析,从而促进异构集成的有效实现。此外,提出的解决方案利用了用于芯片间数据交换的新型片上网络(NoC)交换结构的灵活性和由有源中间层启用的多功能辅助电路,以提高其性能并扩展应用范围。最后给出了设计和分析结果,以及开发框架的相关选项和潜力。截止目前,开关面料的原型芯片样品已经代工交付;DSA模块的详细物理设计和装配与现成的模具和具有成本效益的硅中间层解决方案正在进行中。
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引用次数: 1
Fabrication and Characterization of Nanoporous Gold (NPG) Interconnects for Wafer Level Packaging 晶圆级封装用纳米孔金互连的制备与表征
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00143
L. Dietrich, H. Oppermann, C. Lopper, P. Mackowiak
A novel bumping and bonding technology using sponge-like gold depots with nanometer-scale skeleton construction has been developed and verified. The nanoporous gold (NPG) is formed up by selective etching the silver content from silver/gold alloys, which have been previously electrodeposited on lithographically patterned wafers. Due to the high resolution of the used photoresist systems, highest I/O densities and smallest bump sizes down to 1 μm are achieved. The desired alloy composition is adjustable in a wide range by adequate choice of the metal ion concentration in the electrolyte and by adaption of the deposition rate. The final porosity of the gold can be adjusted by sufficient choice of the etching conditions, and a final coarsening of the NPG texture can be achieved by thermal treatment prior to the bonding process. Thermal as well as mechanical tests were performed to get statements about the characteristics of the skeleton substructure and the reliability of the NPG interconnection. Exemplarily, some thermocompression (TC) bonding results are presented with focus on the NPG interconnect formation.
开发并验证了一种基于纳米骨架结构的海绵状金库碰撞键合新技术。纳米孔金(NPG)是通过选择性蚀刻银/金合金中的银含量而形成的,银/金合金先前已被电沉积在光刻图案的晶圆上。由于所使用的光刻胶系统具有高分辨率,因此可以实现最高的I/O密度和最小的凹凸尺寸(小至1 μm)。通过适当选择电解液中的金属离子浓度和适应沉积速率,所期望的合金成分可在很宽的范围内调节。通过充分选择蚀刻条件可以调整金的最终孔隙率,并且可以通过在粘合过程之前的热处理来实现NPG织构的最终粗化。进行了热学和力学测试,以获得骨架子结构特性和NPG互连可靠性的陈述。举例来说,一些热压(TC)键合的结果,重点是NPG互连的形成。
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引用次数: 1
A Novel Equivalent Model for Underfill Molding Process On 2.2D Structure for High Performance Applications 一种适用于高性能2.2D结构下填充成型工艺的新型等效模型
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00090
Yu Liang, Chia-Peng Sun, Chih Chung Hsu, D. Hu, E. Chen, J. Lee
A novel methodology of 3D CAE modeling of capillary underfill of multi-chip packages with a large number of micro bumps is employed in this study. The capillary underfill flow is mainly driven by the surface-tension force based on the contact angle between bumps and substrate. On the other hand, the propagation of the melt front is mainly dominated by the dispensing design of underfill and the distribution of micro bumps. For the simulation of dispensing behavior, 3D modeling is unavoidable. However, the computing cost will become unaffordable due to the number of bumps. To ease the computing cost, an equivalent technique -The Equivalent Bump Group (EBG) model is proposed to the simulation. A simple package is studied to validate the proposed methodology. The case shows that the modeling solution of melt front by EBG model has a good agreement to the detailed model by according dispensing passes. Therefore, it is convinced that the proposed methodology provides a promising simulation solution for the microchip encapsulation for multi-chip packages with large number of micro bumps. A study for a multi-array package of different dispensing designs by EBG model is also conducted. The result shows that filling time can be predicted to get the best dispensing design with minimum filling time.
本文采用了一种新型的多芯片封装毛细管下充填体的三维CAE建模方法。毛细下填土流动主要受基于凸点与衬底接触角的表面张力驱动。另一方面,熔体前缘的扩展主要受下填料的分配设计和微凸起的分布所支配。对于点胶行为的仿真,三维建模是不可避免的。然而,由于大量的颠簸,计算成本将变得难以承受。为了降低计算成本,提出了一种等效技术——等效碰撞组(EBG)模型。研究了一个简单的包来验证所提出的方法。实例表明,EBG模型对熔体前缘的建模解与按点胶道次计算的详细模型吻合较好。因此,该方法为具有大量微凸点的多芯片封装提供了一种有前途的仿真解决方案。利用EBG模型对不同点胶设计的多阵列封装进行了研究。结果表明,通过对灌装时间的预测,可以在最短的灌装时间内得到最佳的配药方案。
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引用次数: 3
RF Characterization on Nb-based Superconducting Silicon Interconnect Fabric for Future Large Scale Quantum Applications 面向未来大规模量子应用的铌基超导硅互连结构的射频特性研究
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00154
Yu-Tao Yang, Haoxiang Ren, S. Chong, Gang Qiu, Shu-Yun Ku, Yang Cheng, Chaowei Hu, Tiema Qian, Kuan-Neng Chen, Ni Ni, Kang L. Wang, S. Iyer
To preserve delicate quantum signals (few hundreds to a few tens of µV), low-loss and low-crosstalk inter-dielet communication is a must in a wafer-scale integrated quantum system using Superconducting-IF. In this paper, inter-dielet links (short: 125 μm and 500 μm; long: 1750 μm) with L/S (2/2 and 5/5 μm) are characterized in a broadband 20 GHz range through simulation and experiments at 4K A compact assembly (inter-dielet spacing of 100 μm) through the quantum-compatible fine-pitch (10 um) Au interlayer is conducted. For insertion loss and crosstalk characterization, the simulated and measured results are presented to be low-loss (<1 dB) and low-crosstalk (< -23 dB) in the broadband 20 GHz range with short (≤ 500 um) and long (1750 um) links and two L/S (2/2 and 5/5 um). It is one of the first 20 GHz broadband RF characterization of short superconducting links (≤ 500 um) through advanced packaging for cryogenic inter-dielet quantum communication. This work brings large-scale quantum computing closer to being realized through compact heterogeneous integration.
为了保持微妙的量子信号(几百到几十µV),在使用超导中频的晶圆级集成量子系统中,低损耗和低串扰的介子间通信是必须的。在本文中,介子间链路(短:125 μm和500 μm;通过在4K条件下的模拟和实验,对长1750 μm、L/S(2/2和5/5 μm)的光纤在宽带20 GHz范围内的特性进行了表征。对于插入损耗和串扰特性,模拟和测量结果表明,在宽带20ghz范围内,具有短(≤500 um)和长(1750 um)链路和两个L/S(2/2和5/5 um),低损耗(<1 dB)和低串扰(< -23 dB)。这是第一个通过先进封装实现低温介子间量子通信的短超导链路(≤500 um)的20 GHz宽带RF表征之一。这项工作使大规模量子计算更接近于通过紧凑的异构集成实现。
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引用次数: 0
Mechanical simulation and modeling for reliability of 6-in-1 power module 6合1电源模块可靠性力学仿真与建模
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00258
Rathin Mandal, Kazunori Yamamoto, G. Tang
numerical modeling and simulation of temperature cycling test (TCT) and power cycling test (PCT) are applied to the design reliability analysis for a proposed 6-in-1 power module (PM) package. The fatigue life for both 95Sn5Sb solder interconnect and sintered Ag die attach (DA) joints under TCT and PCT conditions are calculated and compared with a reference power module package which has already passed the reliability test. The Coffin-mansion life model ductility factor is calculated from the test data for the reference power module and applied to the analysis of the fatigue life for the PM. The reliability of solder interconnect is in the same level as the reference module which passed the 1000 cycles of TCT and 50000 cycles of PCT. Sintered Ag DA joint has a very high reliability life. The structural reliability of interconnect for the proposed PM could be further enhanced by using sintered Ag as both DA and interconnect materials. Effect of package parameters such as DA and copper clip thickness are also investigated in this study. The results provided important guidelines for the PM package design.
将温度循环试验(TCT)和功率循环试验(PCT)的数值模拟和仿真应用于一种6合1功率模块(PM)封装的设计可靠性分析。计算了95Sn5Sb焊料互连和烧结银片连接(DA)接头在TCT和PCT条件下的疲劳寿命,并与已通过可靠性试验的参考功率模块封装进行了比较。根据参考电源模块的试验数据,计算出棺材-豪宅寿命模型的延性系数,并将其应用于PM的疲劳寿命分析。焊料互连的可靠性与通过TCT 1000次循环和PCT 50000次循环的参考模块处于同一水平,烧结Ag - DA接头具有很高的可靠性寿命。采用烧结银作为DA材料和互连材料,可以进一步提高所提出的PM互连结构的可靠性。同时考察了封装参数(DA)、铜夹厚度等参数的影响。研究结果为PM包设计提供了重要的指导。
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引用次数: 0
Co-design of Thermal Management with System Architecture and Power Management for 3D ICs 3D集成电路的热管理与系统架构和电源管理协同设计
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00044
Rishav Roy, Shidhartha Das, Benoît Labbé, R. Mathur, Supreet Jeloka
The stacking of multiple dies to create 3D ICs has offered an attractive avenue to counter the slowing of Moore’s law. Stacking dies, however, leads to increased power densities that require effective heat extraction mechanisms. In this work, we perform thermal simulations to study the impact of stacking dies. The package is subject to air-based and liquid-based cooling solutions, under significantly different heat transfer coefficients. A case study is performed on a many-core 3D system to investigate the thermal impact of introducing dedicated low dropout regulators (LDOs) in 3D ICs. These LDOs enable percore dynamic voltage and frequency scaling (DVFS) for efficient power management but potentially add thermal hot spots. We also study the transient thermal behavior of a package subject to different cooling solutions, providing guidelines for thermal throttling. This study demonstrates that system architecture design guided by thermal considerations can effectively utilize the power management efficiencies of 3D ICs without exceeding thermal limits.
用多个晶片堆叠来制造3D集成电路提供了一个有吸引力的途径来对抗摩尔定律的放缓。然而,堆积模具会导致功率密度的增加,这需要有效的热提取机制。在这项工作中,我们进行了热模拟来研究堆积模具的影响。包是受空气和液体冷却解决方案,在显着不同的传热系数。在多核3D系统上进行了一个案例研究,以研究在3D ic中引入专用低差稳压器(ldo)的热影响。这些ldo支持动态电压和频率缩放(DVFS),以实现高效的电源管理,但可能会增加热热点。我们还研究了不同冷却方案下封装的瞬态热行为,为热节流提供指导。该研究表明,以热因素为指导的系统架构设计可以有效地利用3D集成电路的电源管理效率,而不会超过热限制。
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引用次数: 2
Yield Improvement in Chip to Wafer Hybrid Bonding 晶片-晶片混合键合的良率提升
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00311
Ser Choong Chong, Ismael Cereno Daniel, S. Lim Pei Siang, Joseph Shim Cheng Yi, Alvin Lai Wai Song, Woon Leng Loh
Chip to Wafer Hybrid Bonding is an attractive way to achieve ultra-fine pitch interconnect down to 6μm. Conventional way such as solder interconnects has issues of solder merging, underfill voids, and weak intermetallic solder joints that unable to implement in ultra-fine pitch interconnects.Hybrid Bonding itself also has many issues such as Cu dishing or protrusion, oxide surface roughness and the cleanliness of the bonding surface. Singulation process is known to introduce particles such as silicon debris on the wafer’s surface. A protective layer is deposited on the wafer before the singulation process to prevent the silicon debris from sticking on the wafer’s surface. Detail optimization of cleaning process involving different protective layer and cleaning parameters were done. Yield of the diced wafer with respect to the cleanliness of the wafer’s surface has improved with optimized cleaning parameters and the right protective layer. The improved cleaning process was adopted in the preparation of the diced wafer for chip to wafer bonding. The study clearly showed that the void has drastically reduced to less than 3% in the diced wafer prepared with protective layer as compared to range of 0.2 to 91% voids for the diced wafer prepared without protective layer.
芯片与晶圆之间的混合键合是实现低至6μm的超细间距互连的一种有吸引力的方法。传统的焊料互连方式存在焊料合并、欠填充空隙和弱金属间焊点等问题,无法实现超细间距互连。混合键合本身也存在许多问题,如铜盘或突出,氧化物表面粗糙度和键合表面的清洁度。众所周知,模拟过程会在晶圆表面引入硅碎片等颗粒。在模拟过程之前,在晶圆上沉积一保护层,以防止硅屑粘附在晶圆表面。对不同保护层和清洗参数的清洗工艺进行了详细的优化。通过优化的清洗参数和正确的保护层,晶圆片的成品率与晶圆片表面的清洁度有关。采用改进的清洗工艺制备了片与片之间键合的晶圆片。研究清楚地表明,与没有保护层的晶圆片的0.2 - 91%的空隙相比,有保护层的晶圆片的空隙急剧减少到3%以下。
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引用次数: 4
Antenna-Integrated, Die-Embedded Glass Package for 6G Wireless Applications 天线集成,芯片嵌入玻璃封装6G无线应用
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00069
Xiaofan Jia, Xingchen Li, K. Moon, Joon Woo Kim, Kai-Qi Huang, M. Jordan, Madhavan Swaminathan
This work presents the implementation and characterization of a die-embedded, antenna-integrated glass package for RF modules in D-Band. The proposed package uses glass as the core material which can match the coefficient-of-thermal-expansion (CTE) well for RF chips and printed circuit board (PCB). The redistribution layer (RDL) for electrical connections is built on low-loss polymeric build-up dielectric films (ABF-GL102). Dummy dies are embedded in the glass cavities for characterization. The interconnects between die pads and the package are implemented using micro-vias. An 8-elements series-fed microstrip patch antenna is also integrated on the low-loss RDL. The proposed glass panel embedded package addresses the electrical loss and parasitic from the interconnects. With micro-vias and transmission lines built on low-loss RDL, the glass embedded package provides low-loss and low-parasitic chip-to-chip and chip-to-antenna interconnects. Using temporary thermal release tapes, this package also shows great potential to address the high heat dissipation from D-band power amplifiers.
这项工作提出了一种用于d波段射频模块的嵌入式天线集成玻璃封装的实现和特性。该封装采用玻璃作为核心材料,可以很好地匹配射频芯片和印刷电路板的热膨胀系数(CTE)。用于电气连接的再分配层(RDL)建立在低损耗聚合物堆积介质薄膜(ABF-GL102)上。假模嵌入在玻璃腔中进行表征。模垫和封装之间的互连是通过微孔实现的。在低损耗RDL上还集成了一个8单元串联馈电微带贴片天线。所提出的玻璃面板嵌入式封装解决了互连产生的电损耗和寄生。玻璃嵌入式封装采用基于低损耗RDL的微过孔和传输线,提供低损耗、低寄生的芯片对芯片和芯片对天线互连。使用临时热释放磁带,该封装还显示出解决d波段功率放大器高散热问题的巨大潜力。
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引用次数: 7
Demonstration of Glass-based 3D Package Architectures with Embedded Dies for High Performance Computing 基于玻璃的3D封装架构与嵌入式芯片的高性能计算演示
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00180
Siddharth Ravichandran, V. Smet, Madhavan Swaminathan, R. Tummala
This paper presents a technology demonstration of two novel 3D glass-based architectures for high performance computing applications. Current 3D technologies are limited by Through Silicon Vias (TSVs), and the proposed approached based on Glass Panel Embedding (GPE) eliminates TSVs resulting in a more robust 3D packaging platform that supports a variety of architectures. Two such architectures are designed and demonstrated in this paper. The first test vehicle shows multiple dies embedded and interconnected in a glass cavity, along with dies assembled on top using a microbump interface. The second test vehicle shows a 50x50 mm glass interposer package with 4 dies embedded in the core, 8 HBM emulators & 2 large SoCs assembled on top at 35 micron-bump pitch.
本文介绍了两种新型的基于三维玻璃的高性能计算架构的技术演示。目前的3D技术受到硅通孔(tsv)的限制,而基于玻璃面板嵌入(GPE)的方法消除了tsv,从而形成了一个更强大的3D封装平台,支持各种架构。本文设计并演示了两个这样的体系结构。第一辆测试车展示了多个嵌在玻璃腔内并相互连接的模具,以及使用微碰撞接口组装在顶部的模具。第二辆测试车展示了一个50x50毫米的玻璃中间层封装,核心中嵌入了4个芯片,8个HBM模拟器和2个大型soc,顶部以35微米的凹凸间距组装。
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引用次数: 1
Stability Analysis of Nanoscale Copper-Carbon Hybrid Interconnects 纳米级铜碳杂化互连的稳定性分析
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00158
B. Kumari, Rohit Sharma, Manodipan Sahoo
Copper Carbon (Cu-Carbon) hybrid interconnect is a new and an extremely promising candidate for future VLSI circuit applications, so it needs to be analyzed for not only propagation delay but its stability should also be examined in order to consolidate its claim as an alternative to existing interconnect configurations. In this work, stability analysis of the recently proposed Cu-Carbon hybrid interconnect is performed and compared with existing alternate hybrid interconnect candidates (i.e. copper, copper-graphene hybrid and copper-carbon nanotube composite). A three-line coupled interconnect system for 7 nm technology node is considered in this study whose dimensional parameters are adopted as per the IRDS roadmap guidelines. The unit-step response of Cu-Carbon hybrid interconnect is steepest as compared to others because of its lowest switching delay. Cu-Carbon hybrid appears to be the most stable as its nyquist plot intersects farthest from the critical point (-1, j0) towards origin. The effect of crosstalk leads to undershoots as seen in the time domain response of copper interconnects, but it does not have any notable effect on Cu-Carbon hybrid interconnects. It is evident that as the fraction of carbon nanotube in Cu-Carbon hybrid (Fcnt) increases, bandwidth increases due to decrease in resistance. Also, Cu-Carbon with Fcnt = 0.8 is most stable amongst all configurations. We conclude that Cu-Carbon hybrid is the most stable candidate among all the alternative interconnect configurations, claiming it to be a desirable interconnect alternative for near-future VLSI applications.
铜碳(Cu-Carbon)混合互连是未来VLSI电路应用中极有前途的新候选,因此不仅需要分析其传播延迟,还应检查其稳定性,以巩固其作为现有互连配置替代方案的主张。在这项工作中,对最近提出的cu -碳杂化互连进行了稳定性分析,并与现有的替代杂化互连候选(即铜,铜-石墨烯杂化和铜-碳纳米管复合材料)进行了比较。本研究考虑7纳米技术节点的三线耦合互连系统,其尺寸参数采用IRDS路线图指南。铜碳混合互连的单位阶跃响应是最快的,因为它的切换延迟最低。cu -碳杂化的奈奎斯特图在离原点(- 1,0)最远的地方相交最稳定。串扰的影响导致铜互连的时域响应出现欠冲现象,但对铜碳杂化互连没有显著影响。结果表明,随着碳纳米管在铜碳杂化材料(Fcnt)中所占比例的增加,由于电阻的降低,带宽增加。此外,Fcnt = 0.8的Cu-Carbon是所有构型中最稳定的。我们得出结论,铜碳混合是所有替代互连配置中最稳定的候选者,声称它是近期VLSI应用的理想互连替代方案。
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引用次数: 2
期刊
2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)
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