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2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)最新文献

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Photonic Debond: Scalability and Advancements 光子剥离:可扩展性和进步
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00207
Luke Prenger, Xavier Martinez, Andrea M. Chacko, Vikram Turkani, Lauren Reimnitz, V. Akhavan, K. Schroder
Advanced packaging technology has continuously evolved over the past 10-20 years to become a major driving force in improving integrated circuit (IC) performance. This improvement in IC performance is assisted by the ability to place specialized components near each other for shorter interconnects in the IC packages. Temporary bond and debond (TB/DB) is an enabling technique for this work. TB/DB facilitates many advanced packaging methods such as 2.5D, 3D-IC, fan-out wafer-level packaging (FOWLP), and system-in-package (SiP). All these architectures require a carrier support system to allow for backside processing of device wafers, including wafer thinning. A variety of TB/DB methods exist, such as thermal slide debond, mechanical debond, chemical release, and laser debond. Each of these methods has its own advantages and disadvantages and require proper material selection particular for each method.This paper describes a recently developed debond method called photonic debond. We compare this method with existing TB/DB methods and demonstrate the feasibility of this technique to process a wide range of devices. Additionally, the photonic debond method has a fundamentally different thermal load profile on the devices, enabling novel material selection. This is modeled in this paper.Photonic debond has transitioned from a manually operated debond method to an automated debond system. The new automated debond system enables higher wafer throughput as compared to the four existing debond methods. Advancements made with new debond system enables TB/DB from variety of device wafer sizes and types. Evaluation of debonding for wafers with device topography will be presented.
在过去的10-20年里,先进的封装技术不断发展,成为提高集成电路(IC)性能的主要推动力。这种IC性能的改进得益于将专用组件彼此靠近以缩短IC封装中的互连时间的能力。临时债券和债券(TB/DB)是这项工作的一种启用技术。TB/DB促进了许多先进的封装方法,如2.5D, 3D-IC,扇出晶圆级封装(FOWLP)和系统级封装(SiP)。所有这些架构都需要一个载波支持系统,以允许器件晶圆的背面处理,包括晶圆减薄。TB/DB方法多种多样,如热滑动脱粘、机械脱粘、化学脱粘、激光脱粘等。每种方法都有自己的优点和缺点,需要针对每种方法选择合适的材料。本文介绍了最近发展起来的一种剥离方法——光子剥离。我们将这种方法与现有的TB/DB方法进行了比较,并证明了这种技术处理各种器件的可行性。此外,光子脱键方法在器件上具有根本不同的热负载分布,从而可以选择新的材料。本文对此进行了建模。光子脱粘已经从人工脱粘方法过渡到自动脱粘系统。与现有的四种脱粘方法相比,新的自动脱粘系统可实现更高的晶圆吞吐量。新脱粘系统的进步使TB/DB能够适应各种器件晶圆尺寸和类型。对具有器件形貌的晶圆进行脱粘的评价。
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引用次数: 0
Non-oil bleed thermal gap fillers for long-term reliability of Solid State Drive 固态硬盘长期可靠性的无排油热间隙填料
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00201
Vigneshwarram Kumaresan, M. Devarajan
Liquid thermal gap fillers play a vital role in dissipating heat from electronic components to enclosure surfaces. However, oil bleed from silicone-based liquid thermal gap filler causes contamination on enclosure substrates. It is essential to develop a non-oil bleed, thermally reliable thermal gap filler for solid state drive (SSD). In this work, a novel two-part thermal gap filler was synthesized. The long-term stability and reliability of thermal gap filler were evaluated using a highly accelerated temperature and humidity stress test (HAST). Thermal conductivity of cured thermal gap fillers were investigated before and after HAST. It was found that newly formulated thermal gap filler was stable even at high temperature and high humidity environments. Thus, the newly formulated thermal gap filler can effectively dissipate heat and enhance the performance and reliability of SSD.
液体热间隙填充物在从电子元件到外壳表面散热方面起着至关重要的作用。然而,从硅基液体热间隙填料中渗出的油会对外壳基材造成污染。开发一种无漏油、热可靠的固态硬盘热间隙填料是十分必要的。本文合成了一种新型的两组分热隙填充剂。采用高加速温湿应力试验(HAST)对热隙填料的长期稳定性和可靠性进行了评价。研究了固化热间隙填料在采用HAST技术前后的导热性能。结果表明,新制备的热间隙填料在高温高湿环境下也能保持稳定。因此,新配制的热隙填充剂可以有效地散热,提高SSD的性能和可靠性。
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引用次数: 0
Large-scale production of boron nitride nanosheets-based epoxy nanocomposites with ultrahigh through-plane thermal conductivity for electronic encapsulation 电子封装用超高通平面热导率氮化硼纳米片基环氧纳米复合材料的大规模生产
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00206
Zhijian Sun, Michael Yu, Jiaxiong Li, Macleary Moran, M. Kathaperumal, K. Moon, Madhavan Swaminathan, C. Wong
Recent advances in two-dimensional (2D) nanomaterials have generated great interest in the investigations of these materials for wide ranging applications in the micro-to nano-scale electronics, healthcare, and energy storage areas. In particular, 2D materialas such as boron nitride nanosheets (BNNS) have been studied extensively due to their unique material properties that include a large specific surface area, high thermal conductivity (~750 W/mK), and wide bandgap (~5.5 eV), along with the associated electrical insulation. In this paper, we prepared BNNS by liquid exfoliation of hexagonal boron nitride (h-BN). Liquid exfoliation is an enhanced method to achieve large-scale and low-cost production, which is more suitable for large volume applications. In this paper, we have combined low-energy ball milling and sonication methods to produce BNNS on a large scale.BNNS have a high in-plane thermal conductivity due to their 2D morphology but a lower through-plane thermal conductivity. Also, the thermal interface resistance between BNNS is also an important factor that impedes the through-plane thermal conductivity. Thus, we employed a vacuum filtration method to obtain thick BNNS cakes. These cakes have a high x-y/in-plane thermal conductivity and a low z/through plane thermal conductivity. After slicing the cake vertically, it is rolled over to covert the strong x-y plane thermal conductivity to the z-plane. The now high thermal conductivity z-plane allows for effective 3D electronic packaging. Following this, BNNS are infiltrated into epoxy resins to fabricate epoxy nanocomposites with a low filler loading. This paper presents detailed studies on the coefficient of thermal expansion (CTE), electrical resistivity, thermal stability, and thermomechanical properties of the synthesized BNNS-epoxy nanocomposites. This study reveals the promising applications of high performance, thermally conductive epoxy nanocomposites in advanced packaging technologies such as 2.5D/ 3D packaging.
二维(2D)纳米材料的最新进展引起了人们对这些材料在微观到纳米级电子学、医疗保健和能量存储领域广泛应用的研究的极大兴趣。特别是,二维材料,如氮化硼纳米片(BNNS),由于其独特的材料特性,包括大的比表面积,高导热系数(~750 W/mK),宽带隙(~5.5 eV),以及相关的电绝缘,已经得到了广泛的研究。本文采用六方氮化硼(h-BN)的液体剥离法制备了BNNS。液体去角质是实现大规模低成本生产的增强方法,更适合大批量应用。在本文中,我们将低能球磨和超声相结合,大规模生产了BNNS。由于其二维形态,BNNS具有较高的面内导热系数,但通过面导热系数较低。同时,BNNS之间的热界面阻力也是阻碍其通平面导热性的重要因素。因此,我们采用真空过滤的方法来获得较厚的BNNS饼。这些饼具有高的x-y/面内导热系数和低的z/通平面导热系数。在垂直切割蛋糕后,将其翻转以将强x-y平面的导热性转移到z平面。现在高导热z平面允许有效的3D电子封装。然后,将BNNS渗透到环氧树脂中,制备低填料负载的环氧纳米复合材料。本文对合成的bnns -环氧纳米复合材料的热膨胀系数(CTE)、电阻率、热稳定性和热力学性能进行了详细的研究。该研究揭示了高性能导热环氧纳米复合材料在先进封装技术(如2.5D/ 3D封装)中的应用前景。
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引用次数: 3
Antenna-Integrated, Die-Embedded Glass Package for 6G Wireless Applications 天线集成,芯片嵌入玻璃封装6G无线应用
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00069
Xiaofan Jia, Xingchen Li, K. Moon, Joon Woo Kim, Kai-Qi Huang, M. Jordan, Madhavan Swaminathan
This work presents the implementation and characterization of a die-embedded, antenna-integrated glass package for RF modules in D-Band. The proposed package uses glass as the core material which can match the coefficient-of-thermal-expansion (CTE) well for RF chips and printed circuit board (PCB). The redistribution layer (RDL) for electrical connections is built on low-loss polymeric build-up dielectric films (ABF-GL102). Dummy dies are embedded in the glass cavities for characterization. The interconnects between die pads and the package are implemented using micro-vias. An 8-elements series-fed microstrip patch antenna is also integrated on the low-loss RDL. The proposed glass panel embedded package addresses the electrical loss and parasitic from the interconnects. With micro-vias and transmission lines built on low-loss RDL, the glass embedded package provides low-loss and low-parasitic chip-to-chip and chip-to-antenna interconnects. Using temporary thermal release tapes, this package also shows great potential to address the high heat dissipation from D-band power amplifiers.
这项工作提出了一种用于d波段射频模块的嵌入式天线集成玻璃封装的实现和特性。该封装采用玻璃作为核心材料,可以很好地匹配射频芯片和印刷电路板的热膨胀系数(CTE)。用于电气连接的再分配层(RDL)建立在低损耗聚合物堆积介质薄膜(ABF-GL102)上。假模嵌入在玻璃腔中进行表征。模垫和封装之间的互连是通过微孔实现的。在低损耗RDL上还集成了一个8单元串联馈电微带贴片天线。所提出的玻璃面板嵌入式封装解决了互连产生的电损耗和寄生。玻璃嵌入式封装采用基于低损耗RDL的微过孔和传输线,提供低损耗、低寄生的芯片对芯片和芯片对天线互连。使用临时热释放磁带,该封装还显示出解决d波段功率放大器高散热问题的巨大潜力。
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引用次数: 7
Co-design of Thermal Management with System Architecture and Power Management for 3D ICs 3D集成电路的热管理与系统架构和电源管理协同设计
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00044
Rishav Roy, Shidhartha Das, Benoît Labbé, R. Mathur, Supreet Jeloka
The stacking of multiple dies to create 3D ICs has offered an attractive avenue to counter the slowing of Moore’s law. Stacking dies, however, leads to increased power densities that require effective heat extraction mechanisms. In this work, we perform thermal simulations to study the impact of stacking dies. The package is subject to air-based and liquid-based cooling solutions, under significantly different heat transfer coefficients. A case study is performed on a many-core 3D system to investigate the thermal impact of introducing dedicated low dropout regulators (LDOs) in 3D ICs. These LDOs enable percore dynamic voltage and frequency scaling (DVFS) for efficient power management but potentially add thermal hot spots. We also study the transient thermal behavior of a package subject to different cooling solutions, providing guidelines for thermal throttling. This study demonstrates that system architecture design guided by thermal considerations can effectively utilize the power management efficiencies of 3D ICs without exceeding thermal limits.
用多个晶片堆叠来制造3D集成电路提供了一个有吸引力的途径来对抗摩尔定律的放缓。然而,堆积模具会导致功率密度的增加,这需要有效的热提取机制。在这项工作中,我们进行了热模拟来研究堆积模具的影响。包是受空气和液体冷却解决方案,在显着不同的传热系数。在多核3D系统上进行了一个案例研究,以研究在3D ic中引入专用低差稳压器(ldo)的热影响。这些ldo支持动态电压和频率缩放(DVFS),以实现高效的电源管理,但可能会增加热热点。我们还研究了不同冷却方案下封装的瞬态热行为,为热节流提供指导。该研究表明,以热因素为指导的系统架构设计可以有效地利用3D集成电路的电源管理效率,而不会超过热限制。
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引用次数: 2
Reliability Challenges of High-Density Fan-out Packaging for High-Performance Computing Applications 面向高性能计算应用的高密度扇出封装的可靠性挑战
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00232
L. Yip, Rosa Lin, C.W. Lai, C. Peng
As the cost of advanced silicon nodes continue to rise, high-performance devices are shifting towards advanced packaging to reduce the overall cost, increase functionality, and improve performance. Fan-out packaging technology is an advanced packaging approach that has increasingly been adopted for networking, artificial intelligence, and high-performance computing (HPC) applications. Fan-out technology enables multi-chip integration using fine pitch and small line width copper redistribution layer (RDL) technology to interconnect different dies resulting in a flexible and cost-effective package solution. However, as the fan-out package size increases to accommodate higher I/O counts and higher bandwidth, package warpage and reliability become more challenging. The main challenges in building large size packages (ı65x65mm2) with fan-out technology are warpage, RDL integrity, and package reliability. In this paper, we discuss the reliability assessment of a 1.6X reticle size integrated fan-out multi-chip assembly on large organic substrates for networking applications. The package integrates a 7 nm ASIC die and 8 I/O chiplets with 3 layers of fine-pitch RDL interconnection. The coefficient of thermal expansion (CTE) mismatch between different materials in the package structure can cause the device to warp and induce mechanical stresses that can cause RDL cracking and other failures in the package. We will discuss package design and processing methods for improving RDL integrity to enhance overall package reliability. By using finite element stress analysis to optimize the RDL design, robust large format multi-chip fan-out packages were developed and validated through reliability testing.
随着先进硅节点成本的不断上升,高性能器件正转向先进封装,以降低总体成本、增加功能和提高性能。扇出封装技术是一种先进的封装方法,已越来越多地用于网络、人工智能和高性能计算(HPC)应用。扇出技术使用细间距和小线宽铜再分布层(RDL)技术实现多芯片集成,从而实现不同芯片的互连,从而形成灵活且经济高效的封装解决方案。然而,随着扇形输出封装尺寸的增加以适应更高的I/O计数和更高的带宽,封装翘曲和可靠性变得更加具有挑战性。使用扇出技术构建大尺寸封装(ı65x65mm2)的主要挑战是翘曲、RDL完整性和封装可靠性。在本文中,我们讨论了用于网络应用的大型有机基板上1.6X光栅尺寸集成扇出多芯片组件的可靠性评估。该封装集成了一个7nm ASIC芯片和8个I/O小芯片,具有3层细间距RDL互连。封装结构中不同材料之间的热膨胀系数(CTE)不匹配会导致器件翘曲并产生机械应力,从而导致封装中的RDL开裂和其他故障。我们将讨论提高RDL完整性以提高整体封装可靠性的封装设计和加工方法。通过有限元应力分析对RDL设计进行优化,开发了稳健的大尺寸多芯片扇出封装,并通过可靠性测试对其进行了验证。
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引用次数: 8
Signal Integrity Design and Analysis with Link Budget Results of HBM2E Module on Latest High Density Organic Laminate 最新高密度有机层压板上HBM2E模块的信号完整性设计与链路预算结果分析
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00338
F. Libsch, H. Mori, X. Gu
The focus of this work encompasses signal integrity (SI) design and analysis in hybrid integration of the latest generation of High Bandwidth Memory (HBM2E) onto the latest generation high density Organic Package now capable of 1.5um line and space interconnects. In this paper, for the first time, we design and analyze the whole system HBM2E link budget components on latest generation high density Organic Package where the methodology details all the interconnect signal uncertainties.
这项工作的重点包括信号完整性(SI)设计和分析,将最新一代高带宽存储器(HBM2E)混合集成到最新一代高密度有机封装上,现在能够实现1.5um的线路和空间互连。在本文中,我们首次在最新一代高密度有机封装上设计和分析了整个系统的HBM2E链路预算组件,其中的方法详细说明了所有互连信号的不确定性。
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引用次数: 4
Multi-layer FCCSP organic packaging for D-band millimeter wave applications 用于d波段毫米波应用的多层FCCSP有机封装
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00067
N. P. Gaunkar, G. Dogiamis, T. Kamgaing, A. Elsherbini, J. Swan
A multi-layer, organic, low-loss flip-chip chip-scale package (FCCSP) for sub-THz applications has been developed and validated with on-package passive structures operating in the frequency band of 100 GHz to 140 GHz. The designed package co-integrates an electromagnetic wave launcher, a dual band multiplexer and a wideband through package transition. The wave launcher includes two rectangular patches separated by dielectric layers and supports a radiation bandwidth of 40 GHz. It has a return loss better than 10 dB in the designed bandwidth and an insertion loss between 1 to 1.5 dB. The on-package multiplexer (diplexer) combines two bandpass hairpin resonator filters. The two filters are designed to have a minimum bandwidth of 12 GHz each. The designed diplexer also has a return loss better than 10 dB and an insertion loss between 4 to 5 dB. Our work is a leading demonstrator for FCCSP packaging in the 100 to 140 GHz frequency range. We show that with the current fabrication processes, organic packaging is a valuable low-loss solution for sub-THz millimeter wave applications.
一种用于亚太赫兹应用的多层、有机、低损耗倒装芯片芯片级封装(FCCSP)已经开发出来,并通过在100 GHz至140 GHz频段工作的封装上无源结构进行了验证。设计的封装集成了一个电磁波发射器、一个双频多路复用器和一个宽带通过封装转换。波发射器包括两个由介电层隔开的矩形片,支持40 GHz的辐射带宽。在设计带宽内,回波损耗大于10db,插入损耗在1 ~ 1.5 dB之间。封装多路复用器(双工器)结合了两个带通发夹谐振器滤波器。这两个滤波器的最小带宽都设计为12ghz。所设计的双工器回波损耗优于10db,插入损耗在4 ~ 5db之间。我们的工作是100至140 GHz频率范围内FCCSP封装的领先演示。我们表明,在目前的制造工艺下,有机封装是亚太赫兹毫米波应用的一种有价值的低损耗解决方案。
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引用次数: 1
Pressure-assist Silver Sintering Paste for SiC Power Device Attachment on Lead Frame Based Package 用于引线框架封装SiC功率器件附件的压力辅助银烧结浆料
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00349
L. Wai, Kazunori Yamamoto, G. Tang, Jacob Jordon Soh
The process development of a novel pressure-assist pates for high performance silicon carbide metal-oxide semiconductor field-effect transistor (SiC MOSFET) was carried out. In this study, high shear strength on silver sintered die attach layer can be achieved. Interconnect process developed for gate pad (pad size = 0.8mm x 0.5mm) and source pad (pad size= 1.04mmx3.97mm) with copper clips and tin antimony (SnSb) solder passed the criteria of power cycling test. Highly densify silver sintered layer can be achieved by pressure-laser sintering process for pressure-assist type silver sintering paste.
研究了一种用于高性能碳化硅金属氧化物半导体场效应晶体管(SiC MOSFET)的新型助压阀的工艺。在本研究中,银烧结模具附着层可以获得较高的剪切强度。采用铜夹和锡锑(SnSb)焊料开发的栅极焊盘(焊盘尺寸= 0.8mm × 0.5mm)与源焊盘(焊盘尺寸= 1.04mm × 3.97mm)互连工艺通过了电源循环试验标准。压力辅助型银烧结浆料采用压力激光烧结工艺可获得高密度的银烧结层。
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引用次数: 0
X-band Passive Circuits Using 3-D Printed Hollow Substrate Integrated Waveguides 使用3d打印空心衬底集成波导的x波段无源电路
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00150
Yihang Chu, Yamini Kotriwar, Ethan Kepros, Brian Wright, P. Chahal
This paper investigates the use of additive manufacturing (AM) for the fabrication of hollow or air substrate integrated waveguides (SIW or reduced height waveguides). The method relies on additive manufacturing (3-D fabrication) using a simple resin printer. A bandpass filter and a slot antenna working in the X-band are demonstrated. The simulation and measured results match closely and show that low-cost table top resin printers can fabricate microwave passive components with good performance.
本文研究了使用增材制造(AM)来制造中空或空气基板集成波导(SIW或低高度波导)。该方法依赖于使用简单的树脂打印机的增材制造(3d制造)。演示了一种工作在x波段的带通滤波器和缝隙天线。仿真结果与实测结果吻合较好,表明桌面型树脂打印机可以制造出性能良好的微波无源元件。
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引用次数: 0
期刊
2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)
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