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2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)最新文献

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The investigation of dry plasma technology in each steps for the fabrication of high performance redistribution layer 研究了干等离子体技术制备高性能重分布层的各个步骤
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00308
Daisuke Hironiwa, Haw Wen Chen, Y. Morikawa, Takashi Kurimoto, R. Kamimura
With the increasing demand for high-performance devices, the achievement of high-density package products become a crucial topic. However, the scale of semiconductor chips is difficult to miniature furthermore. Against this background, the technology of the semiconductor packages is focused to improve device performance. The package structure changes greatly depending on the intended use of the device. Thus, the process of miniaturizing the wiring layer is an important item to improve the performance of almost packaged products. This report describes plasma treatment for the fabrication of redistribution layer (RDL) using photosensitive polyimide (PI) by the dry ashing equipment with the method of surface wave plasma (SWP) and capacitively coupled plasma (CCP). In order to fabricate a high-performance RDL, it is necessary to control the surface situation of copper wiring, PI, and photoresist (PR) more delicately than ever before. In this paper, we report the survey results for each process to fabricate RDL.
随着高性能器件需求的不断增加,实现高密度封装产品成为一个至关重要的课题。然而,半导体芯片的尺寸很难进一步小型化。在此背景下,半导体封装技术成为提高器件性能的焦点。根据设备的预期用途,封装结构会发生很大的变化。因此,布线层的小型化是提高几乎封装产品性能的一个重要项目。本文介绍了用表面波等离子体(SWP)和电容耦合等离子体(CCP)方法在干灰化设备上对光敏聚酰亚胺(PI)制备重分布层(RDL)的等离子体处理方法。为了制造高性能的RDL,需要比以往更精细地控制铜线、PI和光刻胶(PR)的表面状况。本文报告了制备RDL的各工序的调查结果。
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引用次数: 0
Solder Joint Fatigue Studies Subjected to Board-level Random Vibration for Automotive Applications 汽车用板级随机振动下焊点疲劳研究
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00280
Valeriy Khaldarov, Andy Zhang, Dongji Xie, J. Lee, Xue Shi, R. Roucou, S. Doranga, A. Shalumov
In this paper, a simplified methodology is presented for the evaluation of test-to-failure board-level random vibrations using a combination of experimental and finite element modeling techniques in calculating equivalent stresses for SAC305 solder joints experiencing high- and ultra-high-cycle fatigue usually found in the emerging automotive robo-taxi industry. Some partial results that were obtained during this study allow for an investigation of the effects of a printed circuit board geometry on possible failure modes of Pb-free solder joints. These results seem to confirm the findings that have been reported previously by some researchers on the migration of a failure mode from the ductile fracture in the bulk solder to the brittle fracture of the intermetallic compound (IMC) layer due to the positive correlation between the tensile strength of the solder joint and the strain rate which may have occurred from high level of vibration and shock during the test. The generated data points were then compared to the existing S-N (stress-life) fatigue curves for the SAC305 solder joints in order to assess whether these curves can provide adequate results for the test vehicles fatigue life calculations. These preliminary results show that more work is needed in both verifying the effect of a failure mode migration in the solder joints as well as developing additional data points for S-N curve generation. This research is a continuation of the study initiated by the JEDEC JESD22 working group.
本文提出了一种简化的方法,用于评估从测试到失效的板级随机振动,该方法结合了实验和有限元建模技术,用于计算SAC305焊点经历高周疲劳和超高周疲劳的等效应力,这种情况通常出现在新兴的汽车机器人出租车行业中。在这项研究中获得的一些部分结果允许调查印刷电路板几何形状对无铅焊点可能失效模式的影响。这些结果似乎证实了之前一些研究人员的发现,即由于焊点的抗拉强度和应变率之间的正相关关系,失效模式从大块焊料的韧性断裂转移到金属间化合物(IMC)层的脆性断裂,这可能是在测试过程中由高水平的振动和冲击引起的。然后将生成的数据点与SAC305焊点的现有S-N(应力寿命)疲劳曲线进行比较,以评估这些曲线是否可以为测试车辆的疲劳寿命计算提供足够的结果。这些初步结果表明,在验证焊点失效模式迁移的影响以及为S-N曲线生成开发额外的数据点方面,还需要做更多的工作。这项研究是JEDEC JESD22工作组发起的研究的延续。
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引用次数: 1
A Novel Packaging Platform for High-Performance Optical Engines in Hyperscale Data Center Applications 超大规模数据中心应用中高性能光引擎的新型封装平台
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00074
Sajay Bhuvanendran Nair Gourikutty, M. C. Jong, Chockanathan Vinoth Kanna, D. Ho, Seit Wen Wei, Sharon Lim Pei Siang, Jiaqi Wu, T. Lim, Rathin Mandal, J. Liow, S. Bhattacharya
Due to the increase in the amount of data handled and evolving data center architectures, there is a growing demand to use high-performance optical transceivers within and between the data centers. We propose a new heterogeneous packaging platform for optical transceivers that can handle higher data rates addressing cost, performance, and form-factor requirements. In this paper, the proof of concept is demonstrated by developing a passive optical engine package with a size of 11mmx11mm integrating electronic and photonic chips. To realize this, a fan-out wafer-level packaging method is employed that can provide high-speed electrical interconnects and integrated photonic chip with suspended optical couplers. By employing this platform, discrete chiplets can be optimized independently and integrated into small-form-factor packages that are otherwise not possible with monolithic integration and provide a clear differentiation compared to other approaches currently in the industry.
由于处理的数据量的增加和数据中心体系结构的发展,在数据中心内部和数据中心之间使用高性能光收发器的需求不断增长。我们提出了一种新的光收发器异构封装平台,可以处理更高的数据速率,解决成本,性能和外形因素要求。在本文中,通过开发一个集成电子和光子芯片的尺寸为11mmx11mm的无源光引擎封装来证明概念验证。为了实现这一目标,采用了一种扇形出的晶圆级封装方法,该方法可以提供高速电互连和集成光子芯片与悬挂式光耦合器。通过采用该平台,离散芯片可以独立优化并集成到小尺寸封装中,这是单片集成所无法实现的,并且与目前行业中的其他方法相比,具有明显的差异化。
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引用次数: 4
Co-design and Signal-Power Integrity/EMI Co-analysis of a Switchable High-speed Inter-Chiplet Serial Link on an Active Interposer 主动式中介器上可切换高速芯片间串行链路的协同设计和信号功率完整性/EMI协同分析
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00214
M. Miao, Xiaolong Duan, Liang Sun, Tao Li, Shiliang Zhu, Zhuanzhuan Zhang, Jin Li, Danya Zhang, Hao Wen, Xuena Liu, Zhensong Li
This paper proposes a chiplet-based domain specific architecture (DSA) module on active interposer for convolutions in various scenarios. By constructing an integral development frame, the I/O and inter-chiplet links behaviors together with signal integrity (SI), power integrity (PI) and electromagnetic interference (EMI) issues can be co-considered and co-analyzed in the early phases, facilitating efficient implementation of heterogeneous integration. Additionally, the proposed solution takes advantage of the flexibility of a novel network-on-chip (NoC) switching fabric for inter-chiplet data exchange and versatile auxiliary circuitry enabled by an active interposer, to enhance its performance and extend the scope of application. The design and analysis results are shown, as well as associated options and potentials of the development frame. Up to now, the prototype chip samples for the switching fabric has been delivered by foundry; detailed physical design and assembly of the DSA module with off-the-shell dies and cost- effective Si interposer solution are under way.
本文提出了一种基于芯片的域特定结构(DSA)模块,用于各种场景下的卷积。通过构建集成开发框架,I/O和芯片间链路行为以及信号完整性(SI)、功率完整性(PI)和电磁干扰(EMI)问题可以在早期阶段共同考虑和共同分析,从而促进异构集成的有效实现。此外,提出的解决方案利用了用于芯片间数据交换的新型片上网络(NoC)交换结构的灵活性和由有源中间层启用的多功能辅助电路,以提高其性能并扩展应用范围。最后给出了设计和分析结果,以及开发框架的相关选项和潜力。截止目前,开关面料的原型芯片样品已经代工交付;DSA模块的详细物理设计和装配与现成的模具和具有成本效益的硅中间层解决方案正在进行中。
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引用次数: 1
Mechanical simulation and modeling for reliability of 6-in-1 power module 6合1电源模块可靠性力学仿真与建模
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00258
Rathin Mandal, Kazunori Yamamoto, G. Tang
numerical modeling and simulation of temperature cycling test (TCT) and power cycling test (PCT) are applied to the design reliability analysis for a proposed 6-in-1 power module (PM) package. The fatigue life for both 95Sn5Sb solder interconnect and sintered Ag die attach (DA) joints under TCT and PCT conditions are calculated and compared with a reference power module package which has already passed the reliability test. The Coffin-mansion life model ductility factor is calculated from the test data for the reference power module and applied to the analysis of the fatigue life for the PM. The reliability of solder interconnect is in the same level as the reference module which passed the 1000 cycles of TCT and 50000 cycles of PCT. Sintered Ag DA joint has a very high reliability life. The structural reliability of interconnect for the proposed PM could be further enhanced by using sintered Ag as both DA and interconnect materials. Effect of package parameters such as DA and copper clip thickness are also investigated in this study. The results provided important guidelines for the PM package design.
将温度循环试验(TCT)和功率循环试验(PCT)的数值模拟和仿真应用于一种6合1功率模块(PM)封装的设计可靠性分析。计算了95Sn5Sb焊料互连和烧结银片连接(DA)接头在TCT和PCT条件下的疲劳寿命,并与已通过可靠性试验的参考功率模块封装进行了比较。根据参考电源模块的试验数据,计算出棺材-豪宅寿命模型的延性系数,并将其应用于PM的疲劳寿命分析。焊料互连的可靠性与通过TCT 1000次循环和PCT 50000次循环的参考模块处于同一水平,烧结Ag - DA接头具有很高的可靠性寿命。采用烧结银作为DA材料和互连材料,可以进一步提高所提出的PM互连结构的可靠性。同时考察了封装参数(DA)、铜夹厚度等参数的影响。研究结果为PM包设计提供了重要的指导。
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引用次数: 0
A comparative study of the thermomechanical reliability of fully-filled and conformal through-glass via 满填充与保形玻璃通孔热机械可靠性的比较研究
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00194
K. Pan, C. Okoro, Yangyang Lai, Dhananjay Joshi, Seungbae Park, S. Pollard
This study investigates the thermomechanical response of the copper TGV during thermal cycling. Two different geometries of copper TGV, the fully-filled TGV and conformal TGV, are compared concerning their in-plane and out-of-plane deformation. The TGV samples were heated from room temperature (RT) 23 °C to 400 °C and then cooled to RT. The protrusion height of the copper TGV was recorded as a function of temperature, and unrecoverable copper protrusions were observed because of the creep of the copper at high temperatures. Two-dimensional digital image correlation (2D DIC) measurements were employed to obtain the in-plane deformation of the glass substrate near the copper TGV. It was found the copper protrusion height and the in-plane deformation of the glass substrate were significantly reduced in the conformal TGVs compared to the fully-filled TGVs.
本文研究了铜TGV在热循环过程中的热力学响应。比较了两种不同几何形状的铜质TGV,即满填充TGV和保形TGV的面内和面外变形。将TGV试样从室温(23℃)加热至400℃,然后冷却至室温。记录了铜TGV的突出高度与温度的关系,并且由于铜在高温下的蠕变,观察到铜的不可恢复的突出。采用二维数字图像相关(2D DIC)测量方法,获得了玻璃基板在铜TGV附近的面内变形。结果表明,在共形tgv中,铜的突出高度和玻璃基板的面内变形均明显小于完全填充的tgv。
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引用次数: 6
Slot Bow-Tie Antenna Integration in Flip-Chip and Embedded Die Enhanced QFN Package for WR8 and WR5 Frequency Bands WR8和WR5频段倒装芯片和嵌入式芯片增强QFN封装槽领结天线集成
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00068
Aditya N. Jogalekar, Oscar F. Medina, A. Blanchard, R. Henderson, M. Iyer, Tony Tang, R. Murugan, Hassan Ali
Antenna-in-Package (AiP) has emerged as a mainstream technology for millimeter-wave (mmWave) front-end modules driving it to meet future requirements. This paper discusses, for the first time, the design, modeling, and characterization of a slot bow-tie antenna (SBT) integrated into an embedded die enhanced quad flat no-lead (EDeQFN) package along with a comparison of a flip-chip version of the eQFN in WR8 (90GHz-140GHz) and WR5 (140GHz-220GHz) frequency bands. Further, a brief description of the design, modeling, and simulation results of mmWave chip-to-package transitions, transmission line structures, and antenna feed elements are provided. The insertion and return losses of these structures are less than 1.07dB and greater than 17dB, respectively for FCeQFN, less than 0.87dB, and greater than 22dB, respectively for EDeQFN package. The bandwidth and gain of the integrated SBT antenna in the above packages are 40GHz and 80GHz, with a peak gain of 7dBi and 7.7dBi in the WR8 and WR5 band, respectively. A brief description of the designed test vehicles, probing and measurement methodology for antenna bandwidth, and radiation pattern characterization in the WR5 frequency band is also presented.
封装天线(Antenna-in-Package, AiP)已成为毫米波(mmWave)前端模块的主流技术,以满足未来的需求。本文首次讨论了集成在嵌入式芯片增强型四平面无引线(EDeQFN)封装中的槽形领结天线(SBT)的设计、建模和特性,并比较了WR8 (90GHz-140GHz)和WR5 (140GHz-220GHz)频段的倒装版eQFN。此外,还提供了毫米波芯片到封装转换、传输线结构和天线馈电元件的设计、建模和仿真结果的简要描述。这些结构的插入损耗和回波损耗,FCeQFN封装分别小于1.07dB和大于17dB, EDeQFN封装分别小于0.87dB和大于22dB。上述封装的集成SBT天线带宽和增益分别为40GHz和80GHz, WR8和WR5频段的峰值增益分别为7dBi和7.7dBi。简要介绍了设计的测试车辆、天线带宽的探测和测量方法以及WR5频段的辐射方向图特性。
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引用次数: 2
The Integration of Grounding Plane into TSV Integrated Ion Trap for Efficient Thermal Management in Large Scale Quantum Computing Device 大规模量子计算设备中TSV集成离子阱的高效热管理
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00032
P. Zhao, Hong Yu Li, Yu Dian Lim, W. Seit, L. Guidoni, C. S. Tan
In this work, we demonstrate the addition of grounding plane into the through silicon via (TSV) integrated ion trap to minimize the ion trap heating by effectively shielding the lossy silicon substrate from RF penetration. Windows are made onto this grounding plane to allow the passing through of the TSV. CMOS back-end-of-line process on 12-inch wafer platform is used for the trap fabrication. Upon the integration of grounding plane, the on-chip insertion loss is reduced to 0.06 dB (at RF frequency of 50 MHz). Based on the finite element modelling results, for trap with additional grounding plane, the Joule heating-induced temperature rise is reduced from >15 K to 2 K. This work demonstrates the compatibility of grounding plane and TSV in the application of scalable ion trap, enriching the integration toolbox for large scale ion trapping devices.
在这项工作中,我们展示了在通硅孔(TSV)集成离子阱中添加接地面,通过有效屏蔽有损耗的硅衬底免受射频穿透,从而最大限度地减少离子阱加热。在这个接地面上做了窗户,以允许TSV通过。在12英寸晶圆平台上采用CMOS后端工艺制造陷阱。集成接地平面后,片上插入损耗降低到0.06 dB(射频频率为50 MHz)。基于有限元模拟结果,对于附加接地面的陷阱,焦耳加热引起的温升从15k降低到2k。这项工作证明了接地平面和TSV在可扩展离子阱应用中的兼容性,丰富了大型离子阱器件的集成工具箱。
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引用次数: 1
Machine Learning Assisted Counterfeit IC Detection through Non-destructive Infrared (IR) Spectroscopy Material Characterization 通过非破坏性红外(IR)光谱材料表征,机器学习辅助伪造IC检测
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00355
Chengjie Xi, Nathan Jessurun, John True, Aslam A. Khan, M. Tehranipoor, N. Asadizanjani
Nowadays, counterfeit integrated circuits (IC) are increasingly common due to the continuous growth of supply chain globalization. This supply chain vulnerability results in unreliable and insecure counterfeit ICs integrated into the end-user devices in many applications, including consumer, corporate, and military domains. Various methods such as aging detection sensors, Physical Unclonable Functions (PUFs), and hardware metering have been developed to detect such counterfeits before they become integrated into critical systems. However, several complicated aspects of detection and prevention limit their use as a stopgap to the counterfeit problem. Hence, there is a critical need for novel inspection and assurance techniques that require minimal or no additional changes/modifications to the device circuit or material while remaining low-cost per sample. In this paper, the possibility of using IC packaging material characterization for counterfeit detection is proved by a preliminary material survey between the counterfeit and authentic ICs. Diffuse Reflectance Infrared Fourier Transform Spectroscopy (DRIFT) is used as the material characterization in this research, and the material spectrums will be utilized for training machine learning classification models. Several machine learning classification methods will be tested, such as Linear discriminant analysis (LDA), Support Vector Machine (SVM), random forest(RF), and multi-layer perceptron (MLP). With the help of the Standard Normal Variate (SNV) data preprocessing and MPL model, over 92 percent accuracy of counterfeit versus genuine sample discrimination has been achieved. This proves the existence of packaging material differences between counterfeit and authentic IC samples.
如今,由于供应链全球化的不断发展,假冒集成电路(IC)越来越普遍。这种供应链漏洞导致不可靠和不安全的假冒ic集成到许多应用程序的最终用户设备中,包括消费者,企业和军事领域。各种方法,如老化检测传感器、物理不可克隆功能(puf)和硬件计量已经开发出来,以便在这些假冒产品集成到关键系统之前检测到它们。然而,检测和预防的几个复杂方面限制了它们作为假冒问题的权宜之计的使用。因此,迫切需要新的检查和保证技术,这些技术需要对设备电路或材料进行最小或不需要额外的更改/修改,同时保持每个样品的低成本。本文通过对仿冒和正品IC之间的初步材料调查,证明了利用IC封装材料特性进行防伪检测的可能性。本研究使用漫反射红外傅里叶变换光谱(DRIFT)作为材料表征,材料光谱将用于训练机器学习分类模型。将测试几种机器学习分类方法,如线性判别分析(LDA),支持向量机(SVM),随机森林(RF)和多层感知器(MLP)。在标准正态变量(SNV)数据预处理和MPL模型的帮助下,假品与正品样本鉴别的准确率达到92%以上。这证明了假冒和正品IC样品之间存在包装材料差异。
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引用次数: 1
System Level Power Supply Induced Jitter Suppression for multi-lane high speed serial links 多通道高速串行链路的系统级电源诱发抖动抑制
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00293
Goeun Kim, Doohee Lim, Tamal Das, Eunjung Lee, S. You
This paper presents a system-level co-optimization approach with Chip Power Model based power integrity simulation of the power delivery network and jitter sensitivity transfer function (JTF). Due to the need to merge multiple power domains and to locate adjacent power domains close to each other for enhancing cost effectiveness and space efficiency, the coupling resonance severely affects the whole system. To meet the rigorous performance requirements, a system-level co-design is mandatory. An approach which analyzes the V-by-One IP circuit blocks and finds the critical path based on the JTF is suggested within the case studies. An on-chip level optimization to bring higher voltage controlled oscillator output frequency and to add sufficient On-die-cap was analyzed. In the off-chip design stage, various design modifications to split the power domain, reinforce the ground path, and add package decoupling capacitors were attempted to decrease total jitter by the JTF. Finally, a co-optimization design process workflow which controls the total jitter budgeting is presented. The total jitter is decreased by 68.49% compared to the worst design case.
本文提出了一种基于芯片功率模型的输电网络功率完整性仿真和抖动灵敏度传递函数(JTF)的系统级协同优化方法。由于需要合并多个功率域,并且为了提高成本效益和空间效率,需要对相邻功率域进行较近的定位,因此耦合共振严重影响了整个系统。为了满足严格的性能需求,系统级协同设计是必需的。在案例研究中,提出了一种基于JTF分析v by one IP电路块并找到关键路径的方法。分析了一种片上级优化方法,以提高压控振荡器的输出频率,并增加足够的片上电容。在片外设计阶段,为了减少JTF的总抖动,尝试了各种设计修改,以分割功率域、加强接地路径和添加封装去耦电容器。最后,提出了一种控制总抖动预算的协同优化设计流程。与最坏设计情况相比,总抖动减小了68.49%。
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引用次数: 4
期刊
2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)
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