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2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)最新文献

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Simulation and Verification or Cu@Ag Core-shell Sintered Paste for Power Semiconductor Die-attach Applications 模拟与验证Cu@Ag用于功率半导体贴片的核壳烧结浆料
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00086
Xinyue Wang, Z. Zeng, Jing Zhang, Guoqi Zhang, Pan Liu
With the increasing application of wide bandgap materials such as silicon carbide and gallium nitride in power devices, the working temperature of power devices has been pushed further. Therefore, it brings higher requirements for packaging materials. Sintered silver is a widely accepted chip connection material. However, silver suffers from high prices and electromigration. Therefore, a novel sintered material based on silver-copper core-shell structured particles raises the attention of researchers to solve this deficiency. To accelerate the development of new materials and their related processes, a four-sphere model of the silver-coated copper structure is established in this paper. The mathematical relationship between the porosity and thermal conductivity of sintered body and the actual sintering process was preliminarily established through the calculation based on a series of FEM simulations. The model was further validated through experiments. The modeling method and conclusion are utilized for future process adjustment, which is of great significance to accelerate the development, application, and reliability of new packaging materials.
随着碳化硅、氮化镓等宽禁带材料在功率器件中的应用越来越广泛,功率器件的工作温度得到了进一步的提高。因此,对包装材料提出了更高的要求。烧结银是一种被广泛接受的芯片连接材料。然而,银受到高价格和电迁移的影响。因此,一种基于银-铜核-壳结构粒子的新型烧结材料引起了研究人员的关注,以解决这一不足。为了加快新材料及其相关工艺的开发,本文建立了镀银铜结构的四球模型。通过一系列有限元模拟计算,初步建立了烧结体孔隙率、导热系数与实际烧结过程之间的数学关系。通过实验进一步验证了模型的正确性。该建模方法和结论可为今后的工艺调整提供参考,对加快新型包装材料的开发、应用和可靠性具有重要意义。
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引用次数: 0
Two-Step Ar/N2 Plasma-Activated Al Surface for Al-Al Direct Bonding 两步Ar/N2等离子体活化铝表面的Al-Al直接键合
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00060
Liangxing Hu, Y. Lim, P. Zhao, Michael Joo Zhong Lim, Chuan Seng Tan
In this study, two-step argon/nitrogen plasma-activated aluminum surface for aluminum-aluminum direct bonding is reported. Surfaces from the as-deposited and the argon/nitrogen plasma-activated aluminum are characterized for hydrophilicity and surface chemical states. The results demonstrate that the plasma-activated aluminum surface has smaller water contact angle at 8° (i.e. more hydrophilic) and a thin layer of aluminum nitride. Moreover, the bonded plasma-activated dies, annealed at 300°C under 2000 mBar, have an impressive mechanical bonding strength of ~32 MPa with superior bonding quality. This plasma-activated bonding process is fast (10 s), requires low bonding force (50 N) and can be carried out in cleanroom environment, indicating its full promise for high-throughput heterogeneous integration and advanced packaging.
本研究报道了两步氩/氮等离子体活化铝表面用于铝-铝直接粘合。对沉积态和氩/氮等离子体活化铝的表面亲水性和表面化学状态进行了表征。结果表明,等离子体活化铝表面在8°处具有较小的水接触角(即更亲水)和较薄的氮化铝层。此外,在300°C和2000 mBar下退火的等离子体活化模具具有令人印象印象的~32 MPa的机械结合强度和优异的结合质量。这种等离子体激活的粘合过程速度快(10秒),结合力低(50 N),可以在洁净室环境中进行,表明其在高通量异构集成和先进封装方面的潜力。
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引用次数: 4
Flexible metamaterial lens for magnetic field and signal-to-noise ratio improvements in 1.5 T and 3 T magnetic resonance imaging 柔性超材料透镜用于1.5 T和3t磁共振成像的磁场和信噪比改善
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00247
Woosol Lee, Josh Lane, M. Febo, Y. Yoon
This work presents a thin printed circuit board (PCB) based flexible metamaterial (MTM) lens that can operate for both 1.5 T (63.8 MHz) and 3 T (127.7 MHz) magnetic resonance imaging (MRI) systems. The flexible MTM lens is embedded between a scanning object and receiver coil to focus the magnetic field toward the receiver coil, thereby enhancing the signal-to-noise (SNR) ratio greatly. A flexible MTM lens is designed, fabricated, and characterized. The measurement results show that the demonstrated MTM lens is highly effective for magnifying the magnetic fields generated by the Tx coil, thereby increasing the RF power captured by the Rx coil for both frequency bands which leads to the SNR improvement in 1.5 T and 3 T MRI.
这项工作提出了一种基于薄印刷电路板(PCB)的柔性超材料(MTM)透镜,可以在1.5 T (63.8 MHz)和3 T (127.7 MHz)磁共振成像(MRI)系统中工作。柔性MTM透镜嵌入扫描物体和接收线圈之间,使磁场向接收线圈方向聚焦,从而大大提高了信噪比。设计、制造了一种柔性MTM透镜,并对其进行了表征。测量结果表明,MTM透镜能够有效放大Tx线圈产生的磁场,从而增加了Rx线圈在两个频段捕获的射频功率,从而提高了1.5 T和3 T MRI的信噪比。
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引用次数: 1
Die to Wafer Hybrid Bonding for Chiplet and Heterogeneous Integration: Die Size Effects Evaluation-Small Die Applications 晶片与异质集成的晶圆间杂化键合:晶圆尺寸效应评估-小晶圆应用
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00310
Guilian Gao, L. Mirkarimi, G. Fountain, D. Suwito, J. Theil, Thomas Workman, C. Uzoh, Bongsub Lee, K.M. Bang, Gabe Guevara
The Direct Bond Interconnect (DBI®) Ultra technology, a die-to-wafer (D2W) and die-to-die (D2D) hybrid bonding, is a platform technology that offers a hermetically sealed solid Cu-Cu interconnect through room temperature bonding and low temperature anneal. DBI wafer to wafer (W2W) bonding has been in high volume production since 2015. Advancement in D2W hybrid bonding technology in recent years has enabled recent adoption the technology by Sony [1]. AMD [2] and Intel [3]. The DBI Ultra D2W technology offers die-on-tape processing with bonding speeds comparable to mass reflow flip chip assembly. The bonding takes place at room temperature in an ambient environment in a class 1000 cleanroom. A low temperature batch anneal following bonding creates a solid Cu-Cu connection with no solder and no underfill.The value of the DBI Ultra technology can be realized in diverse products ranging from very small die to reticle-size large die. Applications such as RF, sensors and microcontrollers are in the small die domain, while GPUs and FPGAs require bonding of very large die. Ultimate SoC disaggregation implementations may include D2W bonding of mid-large sized memory die (e.g. SRAM in V-Cache) as well as ultra-small die for analog functionalities. In this paper, we present the results of D2W bonding development in die size ranging from 0.4x0.4mm to 3.2x3.0mm. The module build process includes dicing, die preparation on tape, and direct pick & place from a tape frame. The bonding quality is characterized with C-mode scanning acoustic microscopy (CSAM) and cross-section microscopy analysis.
直接键合互连(DBI®)超技术是一种模对晶圆(D2W)和模对模(D2D)混合键合技术,是一种平台技术,通过室温键合和低温退火提供密封的固体Cu-Cu互连。自2015年以来,DBI晶对晶(W2W)键合一直处于大批量生产状态。近年来D2W混合键合技术的进步使索尼最近采用了该技术[1]。AMD[2]和Intel[3]。DBI Ultra D2W技术提供带上模处理,键合速度可与大规模回流倒装芯片组装相媲美。粘接在1000级洁净室的室温环境中进行。低温批量退火后的键合创建一个坚实的Cu-Cu连接,没有焊料,没有底填充。DBI Ultra技术的价值可以在各种产品中实现,从非常小的模具到网线大小的大模具。RF、传感器和微控制器等应用属于小芯片领域,而gpu和fpga则需要绑定非常大的芯片。最终的SoC分解实现可能包括大中型内存芯片(例如V-Cache中的SRAM)的D2W键合以及用于模拟功能的超小型芯片。在本文中,我们展示了D2W键合在模具尺寸范围从0.4 × 0.4mm到3.2 × 3.0mm的结果。模块构建过程包括切割,在磁带上准备模具,以及从磁带框架直接拾取和放置。用c型扫描声学显微镜(CSAM)和截面显微镜分析表征了键合质量。
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引用次数: 6
77GHz Cavity-Backed AiP Array in FOWLP Technology FOWLP技术中的77GHz空腔支持AiP阵列
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00022
S. Mei, Lim Teck Guan, Chai Tai Chong
This paper presents a 4×8 AiP array implemented in Fan-Out Wafer-Level-Packaging (FOWLP) technology for 77GHz high resolution compact multi-functional MIMO radar applications. It features a cavity-backed 3D stacked structure to achieve stable patterns and wide bandwidth. The fabricated sample with a size of 16mm×16mm×0.402mm shows a measured |S11| <-12.2dB, Gain >14dBi and stable patterns with boresight radiations over 77-81GHz.
本文提出了一种采用扇出晶圆级封装(FOWLP)技术实现的4×8 AiP阵列,用于77GHz高分辨率紧凑型多功能MIMO雷达应用。它具有腔背3D堆叠结构,可实现稳定的图案和宽带宽。制备的尺寸为16mm×16mm×0.402mm的样品显示出测量值|S11| 14dBi和稳定的模式,轴向辐射在77-81GHz之间。
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引用次数: 6
Development of Two-Tier FO-WLP AiPs for Automotive Radar Application 用于汽车雷达的两层FO-WLP AiPs的开发
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00221
S. W. Ho, Hsiao Hsiang-Yao, Lau Boon Long, Sharon Lim Pei Siang, Lim Teck Guan, C. T. Chong
A Fan-out wafer level package (FO-WLP), Antenna in Package (AiP) test vehicle built for 77 GHz automotive radar was demonstrated in this paper. The AiP test vehicle is made up of three layers of Cu redistribution lines in a two-tier mold construction. The antenna arrays are manufactured on the top tier mold compound layer, while the MMIC device chips are implanted in the bottom tier mold compound layer. This two-tier mold structure was created to reduce the form factor of the AiP. A series of material evaluation was performed to select suitable material candidates for the FO-WLP AiP test vehicle fabrication. Mold compound and photo-dielectric were evaluated for their process-ability, reliability and electrical performance. Temporary bonding adhesive and carrier types were also evaluated for their bonding/de-bonding performance and warpage. AiP test vehicles were fabricated with the selected materials using the "mold-first" process flow and reliability test was performed on the fabricated samples.
介绍了一种用于77 GHz汽车雷达的扇出晶圆级封装(FO-WLP)、封装天线(AiP)测试车。AiP测试车辆由三层Cu再分配线组成,采用双层模具结构。天线阵列在顶层模具复合层上制造,MMIC器件芯片在底层模具复合层中植入。这种双层模具结构的创建是为了减少AiP的外形因素。为了选择适合FO-WLP AiP测试车辆制造的候选材料,进行了一系列的材料评估。对模具复合材料和光介电材料的加工性能、可靠性和电性能进行了评价。临时粘接胶粘剂和载体类型也评估了它们的粘接/脱粘性能和翘曲。采用“模具优先”的工艺流程,用选定的材料制备AiP试验车辆,并对制备的样品进行可靠性试验。
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引用次数: 0
Epoxy Resin with Metal Complex Additives for Improved Reliability of Epoxy-Copper Joint 金属复合添加剂环氧树脂对提高环氧铜接头可靠性的影响
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00318
Jiaxiong Li, John Wilson, D. Cheung, Zhijian Sun, K. Moon, Madhavan Swaminathan, C. Wong
Delamination and cracking of the many epoxy-copper interfaces under stress is one major failure mechanism in power packaging. It has therefore become a critical issue in the upcoming wide-bandgap semiconductor era that is expecting increased power density and device miniaturization. The higher operation temperature and voltage, as well as the harsh operation environments considering humidity factors, have posed great challenges on the robustness of these joints. Under moisture attack, the covalent bond or hydrogen bond formation based mechanism, which can be assisted by coupling agents, are intrinsically susceptible to hydrolysis degradation. Coordination bonds between copper and ligands with O or N doners, on the other hand, are a notably more stable mechanism. Furthermore, the costly and limited-access substrate pre-treatments are deemed less favorable in the fast-paced assembly process. The introduction of coordination compounds in epoxy resin that can function at interfaces without being consumed by the polymer backbone remains an obstacle. To address these issues, in this work an in-formulation metal complex-based modifier for epoxy resin is reported to enhance the adhesion performance of epoxy to copper under temperature-humidity aging. The curing, thermomechanical and chemical assessments are used to provide mechanistic insights into the adhesion and moisture resistance improvement.
环氧铜界面在应力作用下的分层和开裂是电源封装的主要失效机制之一。因此,在即将到来的宽禁带半导体时代,它已成为一个关键问题,期望提高功率密度和器件小型化。较高的工作温度和电压,以及考虑湿度因素的恶劣工作环境,对这些接头的坚固性提出了很大的挑战。在水分侵蚀下,以共价键或氢键形成为基础的机制,可以通过偶联剂辅助,本质上容易被水解降解。另一方面,铜与O或N给体配体之间的配位键是一种明显更稳定的机制。此外,在快节奏的组装过程中,昂贵和有限的基板预处理被认为不太有利。在环氧树脂中引入能在界面上起作用而不被聚合物主链消耗的配位化合物仍然是一个障碍。为了解决这些问题,本文报道了一种配方内金属配合物基环氧树脂改性剂,以提高环氧树脂在温度-湿度老化下对铜的粘附性能。固化,热机械和化学评估用于提供附着力和抗湿性改善的机理见解。
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引用次数: 0
Hybrid Stacked-Die Package Solution for Extremely Small-Form-Factor Package 用于极小尺寸封装的混合叠层封装解决方案
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00096
Heeseok Lee, Kyoung-Min Lee, Daehan Youn, Kyojin Hwang, Junghwa Kim
Hybrid configuration including face-up and face-down with redistribution layer (RDL) based fan-out package (FoPKG) is presented to stack multiple dies with satisfying small form-factor requirement. In this work, authors will address that hybrid stacked die package (HSDP) solution with through silicon via (TSV) for 3D-IC as well as TSV-less configuration will be a promising solution to achieve extremely small form-factor package.
提出了基于再分布层(RDL)的扇出封装(FoPKG)的正面朝上和正面朝下混合结构,实现了满足小尺寸要求的多模堆叠。在这项工作中,作者将讨论用于3D-IC的具有通硅通孔(TSV)的混合堆叠封装(HSDP)解决方案以及无TSV配置将是实现极小尺寸封装的有前途的解决方案。
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引用次数: 1
Fine Copper Lines with High Adhesion on High Rigidity Dielectrics 高硬度电介质上高附着力的细铜线
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00142
M. Nishida, H. Noma, Tetsuro Iwakura, Masaki Yamaguchi, Kazuyuki Mitsukura
Fine line and space of 10 micrometer widths were demonstrated on a smooth surface prepreg by semi-additive process (SAP) assisted by ultraviolet (UV) irradiation. The flipchip ball grid array (FC-BGA) packages were fabricated using substrates made of prepreg with glass cloth or insulation film without glass cloth. The warpage of the package at 260 degree Celsius using prepreg was 45% of that using insulation film. The reason would be the high rigidity of prepreg. Highly Accelerated Stress Test (HAST) reliability of the comb copper pattern for the 10 micrometer line and space was also confirmed for 200 h. The SAP technology assisted by UV irradiation would be a solution not only for high-frequency application due to the smooth surface but for warpage reduction of FC-BGA package and for fine-pitch solder joint of flip-chip chip scale package (FC-CSP).
在紫外光的辅助下,采用半添加剂工艺(SAP)制备了表面光滑的预浸料,并在表面上形成了10微米宽的细线和空间。采用含玻璃布的预浸料或不含玻璃布的绝缘膜制备了倒装球栅阵列(FC-BGA)封装。使用预浸料的包装在260摄氏度下的翘曲度是使用绝缘膜的45%。原因可能是预浸料的高刚性。高加速应力测试(HAST)对10微米线和空间的梳状铜图案的可靠性也进行了200小时的验证。由于表面光滑,SAP技术不仅可以用于高频应用,还可以用于减少FC-BGA封装的翘曲和倒装芯片规模封装(FC-CSP)的细间距焊点。
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引用次数: 2
"Smart" Packaging of Self-Identifying and Localizable mmID for Digital Twinning and Metaverse Temperature Sensing Applications 用于数字孪生和超宇宙温度传感应用的自识别和可定位mmID的“智能”封装
Pub Date : 2022-05-01 DOI: 10.1109/ectc51906.2022.00023
Charles A. Lynch, Ajibayo O. Adeyeye, M. Tentzeris
With the increasing demand for scalable and high performing wireless devices for Digital Twinning applications in industrial systems and in the Metaverse, there is likewise increasing demand to explore means of "Smart" packaging enabled devices. In this effort, the authors report a minimalistic, ultra-lowcost mmID module operating in the 60 GHz with a resistive-based temperature sensor for localized sensing applications. The presented system is capable of simultaneously sensing the local temperature of the self-identifying mmID while maintaining a ranging accuracy of 5.35 mm. In addition, simultaneous multi-tag interrogation capability is demonstrated through the "Smart" packaging of the mmID enabled through Frequency Division Multiplexing. Thus, the system features a framework for future Digital Twinning and Metaverse applications that utilize multiple self-identifying mmID's for localized sensing.
随着工业系统和虚拟世界中数字孪生应用对可扩展和高性能无线设备的需求不断增加,探索“智能”封装设备的需求也在不断增加。在这项工作中,作者报告了一种简约的,超低成本的mmID模块,工作在60 GHz,带有基于电阻的温度传感器,用于局部传感应用。该系统能够在保持5.35 mm的测距精度的同时,感知自识别mmiid的局部温度。此外,通过频分复用实现的mmID的“智能”封装,演示了同时多标签询问能力。因此,该系统为未来的数字孪生和元宇宙应用提供了一个框架,利用多个自我识别的mmID进行局部传感。
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引用次数: 3
期刊
2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)
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