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2018 IEEE International Electron Devices Meeting (IEDM)最新文献

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Demonstration of Generative Adversarial Network by Intrinsic Random Noises of Analog RRAM Devices 基于模拟RRAM器件固有随机噪声的生成对抗网络论证
Pub Date : 2018-12-01 DOI: 10.1109/IEDM.2018.8614483
Yudeng Lin, Huaqiang Wu, B. Gao, Peng Yao, Wei Wu, Qingtian Zhang, Xiaodong Zhang, Xinyi Li, Fuhai Li, Jiwu Lu, Gezi Li, Shimeng Yu, H. Qian
For the first time, Generative Adversarial Network (GAN) is experimentally demonstrated on 1kb analog RRAM array. After online training, the network can generate different patterns of digital numbers. The intrinsic random noises of analog RRAM device are utilized as the input of the neural network to improve the diversity of the generated numbers. The impacts of read and write noises on the performance of GAN are analyzed. Optimized methodology is developed to mitigate the excessive noise effect on RRAM based GAN. This work proves that RRAM is suitable for the application of GAN. It also paves a new way to take advantage of the non-ideal effects of RRAM devices.
首次在1kb模拟随机存储器阵列上对生成对抗网络(GAN)进行了实验验证。经过在线训练,网络可以生成不同模式的数字数字。利用模拟随机存储器器件的固有随机噪声作为神经网络的输入,提高了所生成数字的多样性。分析了读写噪声对GAN性能的影响。提出了一种优化方法,以减轻基于RRAM的GAN的过度噪声影响。这一工作证明了RRAM适合GAN的应用。这也为利用RRAM器件的非理想效应开辟了一条新的途径。
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引用次数: 22
Half pitch 14 nm direct pattering with Nanoimprint lithography 半间距14nm直接图案与纳米压印光刻
Pub Date : 2018-12-01 DOI: 10.1109/IEDM.2018.8614578
T. Nakasugi, T. Kono, K. Fukuhara, M. Hatano, H. Tokue, M. Komori, H. Tsuda, T. Komukai, K. Takahata, H. Kato, K. Kobayashi, A. Mitra, S. Kobayashi, S. Inoue, T. Higashiki, T. Motokawa, M. Saito, S. Kanamitsu, M. Itoh, T. Imamura, K. Matasunaga, K. Hashimoto, Y. Kim, J. Cho, W. Jung
We developed a nanoimprint lithography (NIL) technology including NIL system, template and resist process for half pitch (hp) 14 nm direct pattering. The latest NIL system NZ2C shows the mix and match overlay (MMO) of 3.4 nm ($3sigma$) and the template life around 125 lots. Throughput of 80 wafers per hour (wph) was demonstrated using throughput enhancement solutions, such as gas permeable spin-on-carbon (GP-SOC) and multi field dispense (MFD). The hp 14 nm template was fabricated by a self-aligned double patterning (SADP) on a template. Using this template, we fabricated hp 14 nm dense Si lines with a depth of 50 nm on a 300 mm wafer.
我们开发了一种用于半间距(hp) 14nm直接图案的纳米压印技术(NIL),包括NIL系统、模板和抗蚀剂工艺。最新的NIL系统NZ2C显示混合匹配覆盖层(MMO)为3.4 nm ($3sigma$),模板寿命约为125批次。通过采用气渗透碳自旋(GP-SOC)和多场分配(MFD)等通量增强解决方案,证明了每小时80片晶圆的吞吐量。采用自对准双图案(SADP)在模板上制备了hp14nm模板。利用该模板,我们在300mm晶圆上制备了深度为50nm的14nm高密度硅线。
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引用次数: 11
A simulation based study of NC-FETs design: off-state versus on-state perspective 基于仿真的nc - fet设计研究:开与关的角度
Pub Date : 2018-12-01 DOI: 10.1109/IEDM.2018.8614514
T. Rollo, H. Wang, G. Han, D. Esseni
This paper presents new analytical and numerical models aiming at a better insight about the physics and design of ferroelectric NC-FETs. We argue that a design focused on the off-state and targeting steep slope with negligible hysteresis is unlikely to be successful. A design targeting an enhanced on-state capacitance is instead more feasible, and can improve both sub-threshold swing and on-current. Also, NC-FETs can reduce the temperature sensitivity compared to baseline FETs, but the sensitivity to dielectrics thickness is critical.
本文提出了新的分析和数值模型,旨在更好地了解铁电nc - fet的物理和设计。我们认为,一个设计集中在非状态和目标陡坡与可忽略的迟滞是不可能成功的。以增强导通状态电容为目标的设计更可行,并且可以改善亚阈值摆幅和导通电流。此外,与基准fet相比,nc - fet可以降低温度灵敏度,但对介电体厚度的灵敏度至关重要。
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引用次数: 11
GaN devices for automotive application and their challenges in adoption 汽车用GaN器件及其应用中的挑战
Pub Date : 2018-12-01 DOI: 10.1109/IEDM.2018.8614563
T. Kachi
Currently, electrification of automobiles is an urgent task, and high-performance power devices are indispensable items for their electrification. Wide bandgap semiconductors are powerful candidates for power devices used in electric vehicles (EV) and fuel cell vehicles (FCV) in the near future, and recent advances in GaN power devices are prominent in particular. Lateral GaN power devices on Si substrates beGaN to be commercialized, and they are moving to system development. Research and development of vertical GaN power devices are also accelerating. Such high-performance devices are expected to greatly contribute to the electrification of automobiles, and interest in GaN power devices is increasing.
当前,汽车电气化是一项紧迫的任务,高性能动力器件是汽车电气化不可缺少的物品。在不久的将来,宽带隙半导体是用于电动汽车(EV)和燃料电池汽车(FCV)的功率器件的有力候选者,GaN功率器件的最新进展尤其突出。硅衬底上的横向GaN功率器件开始商业化,并向系统开发方向发展。垂直GaN功率器件的研究和开发也在加速。这种高性能器件有望为汽车电气化做出巨大贡献,对GaN功率器件的兴趣正在增加。
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引用次数: 2
Parasitic Surface Reactions in High-Aspect Ratio Via Filling using ALD: A Stochastic Kinetic Model 利用ALD填充高纵横比的寄生表面反应:一个随机动力学模型
Pub Date : 2018-12-01 DOI: 10.1109/IEDM.2018.8614584
T. Muneshwar, G. Shoute, D. Barlage, K. Cadien
A scalable kinetic Monte-Carlo model (sKMC) of molecular transport for atomic layer deposition (ALD) for high aspect-ratio (AR) features is developed. Surface coverage is a critical parameter studied here in detail. The capabilities of the stochastic model provide insight into challenges in growing ALD films in high-AR via structures faced by the industry, including the effects of parasitic surface reactions resulting in poor coverage. Furthermore, we provide experimental results verifying the model's prediction by growing ALD SiNx, on high-AR via structures. By compensating for the processing errors corroborated by the model, we experimentally improved sidewall coverage from 70% to 92%.
建立了高纵横比(AR)特征原子层沉积(ALD)分子传输的可扩展动力学蒙特卡罗模型(sKMC)。表面覆盖率是本文详细研究的一个关键参数。随机模型的功能可以让我们深入了解在高ar通孔结构中生长ALD薄膜所面临的挑战,包括寄生表面反应导致覆盖率低的影响。此外,我们提供了通过在高ar通孔结构上生长ALD SiNx来验证模型预测的实验结果。通过补偿模型证实的处理误差,我们在实验中将侧壁覆盖率从70%提高到92%。
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引用次数: 2
Multi-domain process modeling for advanced logic and memory devices: from equimpments to materials 高级逻辑和存储设备的多域过程建模:从设备到材料
Pub Date : 2018-12-01 DOI: 10.1109/IEDM.2018.8614630
I. Jang, Hyoungsoo Ko, Alexander Schmidt, Sae-jin Kim, Moonhyun Cha, H. Ahn, Honglae Park, Dae Sin Kim, Hokyu Kang
For modern semiconductor devices, the level of details which we should investigate for predictive simulation is going extreme. Not only the atomistic simulation is required but equipment and transistor scale simulation is also needed to understand the formation of atomic scale feature. In this paper, practical applications of multi-domain simulations are introduced for advanced S/D process in logic, interface engineering in DRAM cell and cell stack ALD process of flash memory devices.
对于现代半导体器件,我们应该研究的预测模拟的细节水平是极端的。为了了解原子尺度特征的形成,不仅需要原子尺度的模拟,还需要设备和晶体管尺度的模拟。本文介绍了多域仿真在逻辑高级S/D过程、DRAM单元的接口工程和闪存器件的单元堆栈ALD过程中的实际应用。
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引用次数: 0
Environmentally Friendly Quantum Dots for Display Applications 用于显示应用的环保量子点
Pub Date : 2018-12-01 DOI: 10.1109/IEDM.2018.8614647
E. Jang
Ever since the physics of quantum dot (QD) was discovered, much research effort has been carried out for more than 30 years, and lots of applications adopting QDs have been proposed. Especially, wide color gamut displays using QDs as active light emitting materials have drawn much attention. And, the QD-based consumer displays such as LED TVs, tablets, and special monitors are now on the market. They provide best color gamut, reasonable power efficiency, and affordable price showing superior competitive edge to OLED technology. However, still there are issues and argues using Cadmium containing materials in practical consumer devices. In spite of the European RoHS Exemptions, we need to be aware the environmental risk of producing large quantity of Cd-containing materials and using them in the consumer electronics. And, this growing apprehension for environmental issues formed great limitation for QD's applications. Therefore, we have dedicated to develop more environmentally friendly InP based QDs that showed considerably high efficiency and saturated color spectrum compared to the Cd-containing materials. The structure of Cd-free QD was specially tailored for display applications and the synthetic process was optimized to produce reliable materials in commercial scales. In order to improve the efficiency and stability of the QDs in the devices operating under severe atmosphere, specific composite materials were designed and the fabrication process was optimized. From 2015, Samsung has released Cd-free QD adopted UHD TV for major product line-up which show the best color gamut among the current displays. Now we are trying to make additional breakthroughs in displays by using established QD material platform and broaden the technology to wider optoelectronic applications.
自量子点物理学被发现以来,三十多年来,人们进行了大量的研究工作,提出了许多采用量子点的应用。特别是利用量子点作为有源发光材料的宽色域显示器引起了人们的广泛关注。而且,基于量子点的消费显示器,如LED电视、平板电脑和特殊显示器,现在已经上市。它们具有最佳色域,合理的功率效率和实惠的价格,显示出OLED技术的优越竞争优势。然而,在实际消费设备中使用含镉材料仍然存在问题和争议。尽管欧洲RoHS豁免,我们需要意识到生产大量含有cd的材料并在消费电子产品中使用它们所带来的环境风险。同时,对环境问题的日益担忧对量子点的应用形成了很大的限制。因此,我们致力于开发更环保的基于InP的量子点,与含有cd的材料相比,它具有相当高的效率和饱和的光谱。无cd量子点的结构是专门为显示应用量身定制的,并且优化了合成工艺,可以在商业规模上生产可靠的材料。为了提高在恶劣大气环境下器件中量子点的效率和稳定性,设计了特定的复合材料并优化了制备工艺。从2015年开始,三星在主要产品阵容中推出了采用超高清电视的无cd QD,在目前的显示器中显示出最好的色域。现在,我们正试图利用已建立的量子点材料平台,在显示方面取得更多突破,并将该技术扩展到更广泛的光电应用领域。
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引用次数: 4
Suppressed Hole-Induced Degradation in E-mode GaN MIS-FETs with Crystalline $text{GaO}_{mathrm{x}}mathrm{N}_{1-mathrm{x}}$ Channel $text{GaO}_{mathrm{x}}mathrm{N}_{1-mathrm{x}}$通道抑制e模GaN miss - fet空穴诱导退化
Pub Date : 2018-12-01 DOI: 10.1109/IEDM.2018.8614687
M. Hua, Xiangbin Cai, Song Yang, Zhaofu Zhang, Zheyang Zheng, Jin Wei, Ning Wang, K. J. Chen
Under reverse-bias stress with a high drain voltage, hole-induced gate dielectric degradation in the E-mode GaN MIS-FETs could lead to non-recoverable $V_{text{TH}}$ shifts and devastating time-dependent breakdown. Such a degradation can be effectively suppressed by converting the GaN channel into a crystalline $text{GaO}_{mathrm{x}}mathrm{N}_{1-mathrm{x}}$ channel in the gated region. The valence band offset between $text{GaO}_{mathrm{x}}mathrm{N}_{1-mathrm{x}}$ and the surrounding GaN creates a hole-blocking ring around the gate dielectric, preventing holes from flowing to the gate dielectric and therefore mitigating the hole-induced degradation.
在高漏极电压的反向偏置应力下,e模GaN misfet中的空穴诱导栅极介电退化可能导致不可恢复的$V_{text{TH}}$移位和破坏性的时间相关击穿。通过将GaN通道转换为门控区域的晶体$text{GaO}_{ mathm {x}} mathm {N}_{1- mathm {x}}$通道,可以有效地抑制这种退化。$text{GaO}_{mathrm{x}}mathrm{N}_{1-mathrm{x}}$与周围的GaN之间的价带偏移在栅极电介质周围形成了一个空穴阻塞环,防止空穴流向栅极电介质,从而减轻了空穴引起的退化。
{"title":"Suppressed Hole-Induced Degradation in E-mode GaN MIS-FETs with Crystalline $text{GaO}_{mathrm{x}}mathrm{N}_{1-mathrm{x}}$ Channel","authors":"M. Hua, Xiangbin Cai, Song Yang, Zhaofu Zhang, Zheyang Zheng, Jin Wei, Ning Wang, K. J. Chen","doi":"10.1109/IEDM.2018.8614687","DOIUrl":"https://doi.org/10.1109/IEDM.2018.8614687","url":null,"abstract":"Under reverse-bias stress with a high drain voltage, hole-induced gate dielectric degradation in the E-mode GaN MIS-FETs could lead to non-recoverable $V_{text{TH}}$ shifts and devastating time-dependent breakdown. Such a degradation can be effectively suppressed by converting the GaN channel into a crystalline $text{GaO}_{mathrm{x}}mathrm{N}_{1-mathrm{x}}$ channel in the gated region. The valence band offset between $text{GaO}_{mathrm{x}}mathrm{N}_{1-mathrm{x}}$ and the surrounding GaN creates a hole-blocking ring around the gate dielectric, preventing holes from flowing to the gate dielectric and therefore mitigating the hole-induced degradation.","PeriodicalId":152963,"journal":{"name":"2018 IEEE International Electron Devices Meeting (IEDM)","volume":"137 5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125820542","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Experimentally Validated, Predictive Monte Carlo Modeling of Ferroelectric Dynamics and Variability 实验验证,预测蒙特卡罗建模的铁电动力学和变异性
Pub Date : 2018-12-01 DOI: 10.1109/IEDM.2018.8614607
C. Alessandri, P. Pandey, A. Seabaugh
A physics-based, circuit-compatible Monte Carlo simulation framework, capable of predicting the dynamic response of a ferroelectric (FE) under any arbitrary input waveform, is developed by extending the nucleation-limited switching model. Measured polarization reversal data from fabricated FE W/Hf0.5Zr0.5O2 (HZO)/W capacitors is used to extract the statistical distribution of FE grains, which show negligible variation with film thickness. After parameter extraction, the model is able to predict the dynamics of HZO and bilayer HZO/HfO2 (FE-DE) thin films without further calibration. Unlike prior models, the proposed model is able to predict device-to-device variability, and quantify the resultant reduction in the memory window for highly scaled devices, revealing a significant reduction for FE capacitors having < 20 grains ($sim 40times 40 text{nm}^{2}$). The memory window is further reduced in FE-DE stacks for the same programming voltage and pulse duration due to the dielectric depolarizing field.
通过扩展限核开关模型,开发了一个基于物理的、电路兼容的蒙特卡罗仿真框架,能够预测铁电(FE)在任意输入波形下的动态响应。利用制备的FE W/Hf0.5Zr0.5O2 (HZO)/W电容器的极化反转测量数据提取FE晶粒的统计分布,FE晶粒随薄膜厚度的变化可以忽略不计。经过参数提取后,该模型无需进一步校准即可预测HZO和双层HZO/HfO2 (FE-DE)薄膜的动力学。与先前的模型不同,所提出的模型能够预测器件之间的可变性,并量化高尺寸器件的内存窗口的减少,揭示了< 20晶粒($sim 40 × 40 text{nm}^{2}$)的FE电容器的显着减少。在相同的编程电压和脉冲持续时间下,由于介质去极化场的作用,FE-DE堆栈中的存储窗口进一步减小。
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引用次数: 8
Error-Resilient Analog Image Storage and Compression with Analog-Valued RRAM Arrays: An Adaptive Joint Source-Channel Coding Approach 模拟值RRAM阵列的容错模拟图像存储和压缩:一种自适应联合源信道编码方法
Pub Date : 2018-12-01 DOI: 10.1109/IEDM.2018.8614612
Xin Zheng, Ryan Zarcone, Dylan M. Paiton, Joon Sohn, W. Wan, B. Olshausen, H. P. Wong
We demonstrate by experiment an image storage and compression task by directly storing analog image data onto an analog-valued RRAM array. A joint source-channel coding algorithm is developed with a neural network to encode and retrieve natural images. The encoder and decoder adapt jointly to the statistics of the images and the statistics of the RRAM array in order to minimize distortion. This adaptive joint source-channel coding method is resilient to RRAM array non-idealities such as cycle-to-cycle and device-to-device variations, time-dependent variability, and non-functional storage cells, while achieving a reasonable reconstruction performance of ∼ 20 dB using only 0.1 devices/pixel for the analog image.
我们通过实验演示了将模拟图像数据直接存储到模拟值RRAM阵列中的图像存储和压缩任务。提出了一种结合神经网络的源信道联合编码算法,对自然图像进行编码和检索。编码器和解码器共同适应图像的统计和RRAM阵列的统计,以尽量减少失真。这种自适应联合源信道编码方法可以适应RRAM阵列的非理想性,如周期到周期和设备到设备的变化、时间相关的可变性和非功能性存储单元,同时仅使用0.1个设备/像素的模拟图像实现合理的重建性能~ 20 dB。
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引用次数: 18
期刊
2018 IEEE International Electron Devices Meeting (IEDM)
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