Single crystal diamonds and diamond films are attractive materials for a broad variety of applications due to the intriguing properties of diamond and the ability to tailor the electrical conductivity and surface functionalization. Many applications require a specific roughness, high surface area, a specific 3-dimensional shape, a specific pattern, or a mixture thereof. However, machining, sculpting, and patterning of diamond is challenging due to diamond's growth mechanism, high hardness, wear resistance, and brittleness, rendering machining of diamond arduous. In the last decades, a variety of bottom-up and top-down methods to synthesize diamond with controlled roughness and structures has been established. This review summarizes methods to obtain diamond patterns and diamond films with controlled roughness, microstructures, nanostructures, and porous diamond. Indeed, controlled diamond structures synthesis via both bottom-up and top-down approaches have advanced considerably. The methods themselves are introduced in combination with their merits, detriments, and their capabilities, hinting towards applications of such structures. The discussion is supplemented by recent developments and advances of the controlled synthesis methods. The review is divided into methods for obtaining patterns and structures as well as methods to control the micro- and nanostructure, to control roughness of diamond films, or to obtain ultra-smooth diamond films. This review serves as a timely summary of experimental techniques and recent developments for researchers planning to generate structured or patterned diamond.
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