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Study of photoresist pregrooved structures 光刻胶预刻槽结构的研究
Pub Date : 1993-08-13 DOI: 10.1117/12.150656
C. Jiang, Weidong Yang, Lijuan Wang, Dawen Wang, C. Bai
Theoretical and experimental profiles of pregrooved cross-section in coated photoresist layers with a thickness of 470 nm and 150 nm on glass substrates are given. The experiment has been performed on the photoresist cutting machine using focused argon laser beam and AZ-1350 photoresist. The results from scanning tunneling microscope (STM) and scanning electron microscope (SEM) images are also discussed.
给出了玻璃基板上470 nm和150 nm厚度的涂覆光刻胶层的预开槽截面的理论和实验概况。利用聚焦氩激光束和AZ-1350光刻胶在光刻胶切割机上进行了实验。讨论了扫描隧道显微镜(STM)和扫描电子显微镜(SEM)成像的结果。
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引用次数: 0
Investigation of critical-angle focus-error detection 临界角对焦误差检测的研究
Pub Date : 1993-08-13 DOI: 10.1117/12.150662
Song Shen, D. Cui, Xiong Qian, Yongming Shu
A simple and precise mathematical model of critical-angle focus error detection method is proposed in this paper. Factors which affect the focus error signals are analyzed and the curve of focus error signals with different parameters are given. The improvement of optical gain is also discussed.
提出了一种简单、精确的临界角对焦误差检测方法的数学模型。分析了影响调焦误差信号的因素,给出了不同参数下调焦误差信号的曲线。本文还讨论了光增益的提高。
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引用次数: 1
Theoretical models and comparison of three focus-error detection methods 三种聚焦误差检测方法的理论模型及比较
Pub Date : 1993-08-13 DOI: 10.1117/12.150660
Song Shen, D. Cui, Xiong Qian, Yongming Shu
Comparison of three common focus error detection methods is made on a unified theoretical background. New mathematical models are built up on physical optics. The compared items are theoretical optical gain, adjustment factors, etc., and the theoretical and experimental results are given.
在统一的理论背景下,对常用的三种调焦误差检测方法进行了比较。在物理光学上建立了新的数学模型。比较了理论光增益、调整系数等项目,并给出了理论和实验结果。
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引用次数: 1
Controller for magneto-optical disk drives 磁光盘驱动器的控制器
Pub Date : 1993-08-13 DOI: 10.1117/12.150668
Chunyi Wu, Maotai Hu
A fast software algorithm is used to compute the remainder of interleaved Reed-Solomon ECC in order to get the error location of read data. By using the erasable-programmable-logic- device (EPLD) together with Winchester controller chips, we built a so-called optical/buffer controller. An algorithm may be introduced to solve the write-after-erase problem of MO disk drives.
为了得到读取数据的错误位置,采用了一种快速的软件算法来计算交错Reed-Solomon ECC的余数。通过使用可擦可编程逻辑器件(EPLD)和温彻斯特控制器芯片,我们构建了一个所谓的光/缓冲控制器。可以引入一种算法来解决MO磁盘驱动器的擦除后写入问题。
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引用次数: 0
Testing of optical disk axial run-out and tilt 光盘轴向跳动和倾斜测试
Pub Date : 1993-08-13 DOI: 10.1117/12.150664
Longfa Pan, Duanyi Xu, Mali Gong, Hao Yuan, Jing Pei
A real time non-contact dynamic testing method for an optical disk is proposed in this paper. The axial run-out and the tilt of the optical disk are measured by two quadrant detectors when the disk is turning at high speed in the drive. The analysis of the results is given with a brief discussion on the error in measurement.
提出了一种光盘实时非接触动态测试方法。当磁盘在驱动器中高速旋转时,用两个象限检测器测量磁盘的轴向跳动和倾斜。对测量结果进行了分析,并对测量误差进行了简要讨论。
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引用次数: 0
Microstructure of erasable optic disk thin film investigated by STM/AFM 用STM/AFM研究可擦光盘薄膜的微观结构
Pub Date : 1993-08-13 DOI: 10.1117/12.150649
Zhanghua Wu, F. Gan
The microstructure of sputtered amorphous magneto-optic media TbFeCo is observed by self- designed scanning tunneling microscopy (STM), and tracks in phase-change media are recorded. GeSbTe is also investigated by atomic force microscopy.
利用自行设计的扫描隧道显微镜(STM)观察了溅射非晶磁光介质TbFeCo的微观结构,并记录了相变介质中的磁迹。用原子力显微镜对GeSbTe进行了研究。
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引用次数: 0
Application of exchange-coupled magnetic thin films to magneto-optical recording 交换耦合磁薄膜在磁光记录中的应用
Pub Date : 1993-08-13 DOI: 10.1117/12.150672
H. Sugahara, K. Tsutsumi
The exchange-coupled magnetic films of amorphous rare earth-transition metal alloys have large potentiality for improvement in the characteristics and the function of magneto-optical disks. The studies of the exchange-coupled magnetic films are reviewed and the recent progress in its technology are reported.
非晶稀土过渡金属合金交换耦合磁膜在改善磁光盘的特性和功能方面具有很大的潜力。综述了交换耦合磁膜的研究进展,并对其技术进展进行了综述。
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引用次数: 0
Optical-storage properties of SrS:Eu, Sm in PMMA film SrS:Eu, Sm在PMMA薄膜中的光存储性能
Pub Date : 1993-08-13 DOI: 10.1117/12.150654
Shuchun Chen, Changhong Qi, Fengmei Dai, F. Gan
An erasable and rewritable electron-trapping optical-storage material SrS:Eu, Sm was synthesized. Using the SrS:Eu, Sm-PMMA film, the image-recording experiment was performed. After the picture information is written on the film by the frequency doubled (532 nm) output of a Nd:YAG laser, a clearly discernible red image can be created by using 1.064 nm laser output of proper intensity (0.1 mJ/cm2) to irradiate the film. The written information can be maintained for tens of days in darkness, and one can write, read, and erase the information almost innumerable times.
合成了一种可擦除可重写的电子捕获光存储材料SrS:Eu, Sm。采用SrS:Eu, Sm-PMMA薄膜进行了图像记录实验。Nd:YAG激光器以倍频(532 nm)输出将图像信息写入薄膜后,用适当强度(0.1 mJ/cm2)输出的1.064 nm激光照射薄膜,可形成清晰可辨的红色图像。书写的信息可以在黑暗中保存数十天,并且可以无数次地写入、读取和删除信息。
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引用次数: 1
Doping effect on optical recording film with Ge2Sb2Te5 composition Ge2Sb2Te5掺杂对光学记录膜的影响
Pub Date : 1993-08-13 DOI: 10.1117/12.150646
T. Matsushita, A. Suzuki, T. Kamitani, M. Okuda
In stoichiometric GeTe-Sb2Te3 films, reversible phase change optical recording materials, Sb addition is used widely to improve the data retention time and the repetition cycles, but its mechanism is not clear. To clarify the effect of excess Sb, the effects of Te and Ge addition were also investigated in the compositions from the stoichiometry Ge2Sb2Te5 toward the vertices in the Ge-Te-Sb triangle. By DSC measurements, it was found that a retention ability for amorphous (`write') states related to the increase of repetition cycles is larger in the Sb addition than in the Te and Ge addition. By XRD measurements, it was understood that an optimum ratio of (Sb,Te)(beta) /GeTe(111), about 0.5 was necessary to static repetition cycles approximately 106 in the laser annealed film of 1000 angstroms thick.
在可逆相变光学记录材料GeTe-Sb2Te3化学计量膜中,Sb的加入被广泛用于改善数据保留时间和重复周期,但其作用机制尚不清楚。为了阐明过量Sb的影响,我们还研究了Te和Ge在化学计量Ge2Sb2Te5中对Ge-Te-Sb三角形顶点的影响。通过DSC测量,发现Sb的加入比Te和Ge的加入对非晶(“写”)态的保留能力更大,与重复周期的增加有关。通过XRD测量可知,在1000埃厚的激光退火膜中,(Sb,Te)(beta) /GeTe(111)的最佳配比约为0.5,可使静态重复周期约为106。
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引用次数: 1
Optical properties and recording characteristics of phthalocyanine-derivative LB films 酞菁衍生物LB薄膜的光学性质和记录特性
Pub Date : 1993-08-13 DOI: 10.1117/12.150651
F. Gan, T. Luo
Langmuir-Blodgett (LB) films of tetra-neopentoxy phthalocyanine zinc and tetra-nonyl phthalocyanine copper are prepared. Their structures, optical properties, and temperature dependencies are investigated. Static optical recording tests by He-Ne laser are done in these LB films and the experimental results demonstrate that phthalocyanine derivates are useful for phase change type erasable data storage media.
制备了四新氧基酞菁锌和四壬基酞菁铜Langmuir-Blodgett (LB)膜。研究了它们的结构、光学性质和温度依赖性。用He-Ne激光在LB薄膜上进行了静态光记录实验,实验结果表明酞菁衍生物可用于相变型可擦除数据存储介质。
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引用次数: 3
期刊
Optical Storage and Information Data Storage
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