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Time and Voltage Dependence of Failure in MNOS Capacitors Containing Point Defects 含点缺陷MNOS电容器失效的时间和电压依赖性
Pub Date : 1980-04-01 DOI: 10.1109/IRPS.1980.362910
W. H. Becker
Time-dependent dielectric breakdown is an important failure mode for silicon integrated circuits. This paper presents a study of such failures in a MNOS capacitor used on a bipolar operational amplifier IC. It is shown that the cause of these failures is point defects in the Si3N4 film. The number of defective capacitors in a given population can be estimated by a silicon "pinhole etch" decoration technique. The failure of these defects is very dependent on voltage and each has a definite threshold for failure. This threshold varies from defect to defect. Aging at a fixed voltage stress causes rapid failure of all those defects with thresholds below the stress. The defects with higher thresholds do not fail. Voltage step-stress data is. presented to show that the defects have a definite distribution of failure thresholds. This distribution is approximately normal with a median of 40 volts. Thus most defects fail well below the 120 volt dielectric breakdown of the MNOS structure. For defects aged above their failure threshold, the time-to-failure distribution is a strong function of the overvoltage (VOV); i.e., the amount the aging voltage exceeds the defect threshold. For VOV of a few volts, the time-to-failure distribution is log-normal with a median of about 10 hours and sigma of about 2. For higher overvoltages, the median life decreases rapidly - approximately as 1/VOV4. Examples of long-term failure rate. calculations are given and compared with experimental data.
时变介质击穿是硅集成电路中一种重要的失效模式。本文研究了用于双极运算放大器集成电路的MNOS电容器的这种失效。结果表明,这些失效的原因是Si3N4薄膜中的点缺陷。在给定的群体中有缺陷的电容器的数量可以通过硅“针孔蚀刻”装饰技术来估计。这些缺陷的失效非常依赖于电压,每个缺陷都有一个明确的失效阈值。这个阈值因缺陷而异。在固定电压应力下的老化导致阈值低于应力的缺陷迅速失效。具有较高阈值的缺陷不会失败。电压阶跃应力数据为。结果表明,缺陷具有确定的失效阈值分布。这种分布近似正态分布,中值为40伏。因此,大多数缺陷在MNOS结构的120伏电介质击穿下失效。对于老化超过失效阈值的缺陷,失效时间分布是过电压(VOV)的强函数;即老化电压超过缺陷阈值的量。对于几伏特的VOV,失效时间分布为对数正态分布,中位数约为10小时,sigma约为2。对于较高的过电压,中位寿命迅速下降-大约为1/VOV4。长期失败率的例子。给出了计算结果,并与实验数据进行了比较。
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引用次数: 3
Perspectives in Component Failure Analysis 部件失效分析的观点
Pub Date : 1980-04-01 DOI: 10.1109/IRPS.1980.362921
C. Sie
Charles H. Sie Xerox Corp. 701 S. Aviation Blvd. El Segundo, Ca. 90245 With the development of radio, television, computers and microelectronics, electronic technology has rapidly evolved into a catalytic force in *sustaining industrial growth. As the electronic industry matures, product manufacturing cost and product quality are becoming determining factors for the product's competitiveness. The relationship between manufacturing cost and quality can either be a direct one (increased cost for higher quality) or an inverse one (decreased cost for. *higher quality) very much dependent upon the strategy chosen-to improve the product's quality. By increasing the stringency of the screening process,and therefore the cost, in the manufacturing flow, the product quality can be enhanced. However, the same result can be achieved in a.cost-. effective manner. if corrective action i's developed .based on the analysis of components failing in the screening process, shown schematically in Figure 1. The inverse cost-quality relationship comes about when i.mplementing corrective action, the screening rejection in the manufacturing flow and failure i-n the fie.ld will be reduced; therefore, correspondingly the manufacturing cost will be lowered and the quality improved. Usuallythe burden of component failure analysis and cor-rective action'development can be leveraged by the product volume or generically amortized across product lines. Component failure can truly be caused by an intermittent or. degraded component, or it can' be the symptom of a problem-which relates to circuit compatibility, to test coverage, or to manufacturing process. It is absolutely essential to uncover the real cause of the failure as evidenced by the responsiveness of the implemented corrective action; therefore, failure analysis should always be 'a closed loop activity. The effectiveness of the-failure analysis group can be greatly enhanced when its staff is multi-disciplinary including device physics, circuit des-ign and testing. Lastly, a highly focused component failure analysis activity will serve as a focal point for accountability, specially in a large organization. FIGURE 1. ROIL OF FAI URE ANALYSIS IN CLOSED LOOP ENGINFERING
施乐公司航空大道701号。随着无线电、电视、计算机和微电子技术的发展,电子技术已迅速发展成为维持工业增长的催化力量。随着电子行业的日趋成熟,产品制造成本和产品质量逐渐成为决定产品竞争力的因素。制造成本和质量之间的关系可以是直接关系(质量越高成本越高),也可以是反向关系(质量越高成本越低)。(提高质量)很大程度上取决于所选择的策略——提高产品的质量。通过增加筛选过程的严格性,从而降低制造流程中的成本,可以提高产品质量。然而,同样的结果可以在一个成本-。有效的方式。如果纠正措施是基于对筛选过程中不合格部件的分析而制定的,如图1所示。在实施纠正措施、生产流程中的筛选拒收和生产流程中的失效时,成本-质量关系是逆向的。Ld会减少;相应地降低了制造成本,提高了产品质量。通常,组件故障分析和纠正措施开发的负担可以通过产品量来杠杆化,或者在产品线之间一般摊销。组件故障确实可以由间歇性或。退化的组件,或者它可能不是问题的症状-与电路兼容性,测试覆盖率或制造过程有关。发现失败的真正原因是绝对必要的,这可以通过所实施的纠正措施的响应性来证明;因此,失效分析应该始终是一个闭环活动。当失效分析小组的工作人员是多学科的,包括器件物理、电路设计和测试,可以大大提高失效分析小组的效率。最后,高度集中的组件故障分析活动将作为责任的焦点,特别是在大型组织中。图1所示。闭环工程中的失效分析
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引用次数: 0
Electrical Inspection of PROM Memory Links PROM存储器链路的电气检查
Pub Date : 1980-04-01 DOI: 10.1109/IRPS.1980.362939
A. Marques
Field programmable ROMs provide the electronics industry with a more versatile memory function by postponing final processing until after the seal operation. This report will focus on (1) a failure mechanism, unreported until now, which concerns the self-programming of an unprogrammed nichrome link during operation of the PROM under normal "read" conditions, and (2) an electrical screen for culling out links with a high probability for self-programming. The occurrence of these failures after many days of burn-in will be discussed along with the link programming set-up, failure analysis data, and documented history of high reliability screening procedures. It is important to note that these PROMs were programmed to the vendor's specifications, except that a single pulse fusing criterion was used. Additionally, an elaborate verification scheme followed each fusing attempt as a check for errors. Based on the results of the failure analysis study, the failures which are considered to be escapes from the die visual inspection screen will be shown to be due to a wafer process-related fault. A new electrical test procedure will be proposed which can be used to augment or partially supplant the visual screen now in practice. A general test scheme will be presented so that the prerequisite conditions of applicability to other manufacturers' PROMs can be defined. The general scheme will be then applied to the specific circuit implementation used by the manufacturer of the aforementioned failures.
现场可编程rom通过将最终处理推迟到密封操作之后,为电子工业提供了更通用的存储功能。本报告将重点讨论(1)迄今为止尚未报道的故障机制,它涉及在正常“读取”条件下PROM操作期间未编程的镍铬合金链路的自编程,以及(2)用于剔除具有高自编程概率的链路的电子屏幕。在许多天的老化后,这些故障的发生将与链接编程设置、故障分析数据和高可靠性筛选程序的记录历史一起讨论。重要的是要注意,这些prom是按照供应商的规范编程的,除了使用了单脉冲熔合标准。此外,每个融合尝试之后都有一个详细的验证方案,以检查错误。根据失效分析研究的结果,被认为是脱离模具视觉检查屏幕的失效将显示为由于晶圆工艺相关的故障。本文将提出一种新的电气测试程序,可用于补充或部分取代目前在实践中使用的视觉屏幕。本文将提出一个通用的测试方案,以便确定适用于其他制造商的prom的先决条件。然后将一般方案应用于上述故障的制造商使用的特定电路实现。
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引用次数: 0
Reliability Influences from Electrical Overstress on LSI Devices 电气过应力对LSI器件可靠性的影响
Pub Date : 1980-04-01 DOI: 10.1109/IRPS.1980.362938
A. Hart, Tsuo-Tong Teng, A. McKenna
Reliability prediction of MOS LSI devices by testing at elevated temperature can be influenced by electrostatic discharge and electrical overstress conditions during the test period. MOS devices that used junction diodes in the input protection structure were found to be more susceptible to failure from electrostatic discharge in 125°C ambient temperature than at 25°C. Failure analysis and modeling indicate that this effect is more severe for MOS LSI devices than for bipolar devices due to the doping levels used in the MOS technology. These effects will impact accelerated life testing, simulation testing of electronic systems to be operated at elevated temperatures and failure analysis techniques performed at elevated temperatures.
MOS LSI器件在高温下的可靠性预测会受到静电放电和电气过应力条件的影响。在输入保护结构中使用结二极管的MOS器件在125°C环境温度下比在25°C环境温度下更容易受到静电放电的影响。失效分析和建模表明,由于MOS技术中使用的掺杂水平,这种影响对MOS LSI器件比双极器件更为严重。这些影响将影响在高温下运行的电子系统的加速寿命测试、模拟测试以及在高温下进行的失效分析技术。
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引用次数: 7
Voltage Contrast SEM Observations with Microprocessor Controlled Device Timing 用微处理器控制器件定时的电压对比扫描电镜观察
Pub Date : 1980-04-01 DOI: 10.1109/IRPS.1980.362912
J. Bindell, J. McGinn
A voltage contrast technique which generates a video display of data movement within an active integrated circuit has been developed. The technique utilizes a microprocessor to exercise and control the flow of data within an integrated circuit so that SEM images of sequential logic states can be generated without the use of electron beam blanking.
提出了一种电压对比技术,可在有源集成电路中产生数据移动的视频显示。该技术利用微处理器来执行和控制集成电路中的数据流,从而可以在不使用电子束消隐的情况下生成顺序逻辑状态的扫描电镜图像。
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引用次数: 2
CAF in Composite Printed-Circuit Substrates: Characterization, Modeling and a Resistant Material 复合印刷电路基板中的CAF:表征、建模和电阻材料
Pub Date : 1980-04-01 DOI: 10.1109/IRPS.1980.362946
T. Welsher, J. Mitchell, D. J. Lando
In papers presented at the 1979 IRPS it was reported that failure of printed-circuit boards due to conductive anodic filaments (CAF) posed a potential reliability problem for applications involving high circuit density, hostile environments and/or low power dissipation. In this paper, the results of a study to characterize the CAF phenomenon with respect to temperature, humidity, applied voltage, and other factors are reported. Further aspects of the mechanism of failure are explored. The results of extensive testing of a CAF-resistant material, triazine/glass, are presented.
在1979年IRPS上发表的论文中,据报道,由于导电阳极细丝(CAF)导致的印刷电路板失效对涉及高电路密度,恶劣环境和/或低功耗的应用提出了潜在的可靠性问题。本文报道了一项关于温度、湿度、外加电压和其他因素表征CAF现象的研究结果。进一步探讨了失效机制。本文介绍了一种抗氟氯化碳材料三嗪/玻璃的广泛测试结果。
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引用次数: 50
The Detection of Cracks in Ceramic Packages by Vapor Condensation 蒸汽冷凝法检测陶瓷封装裂纹
Pub Date : 1980-04-01 DOI: 10.1109/IRPS.1980.362913
A. Dermarderosian
This paper details a novel approach to the detection of cracks in ceramic semiconductor packages. The technique is extremely fast and has been designed to be a cost effective method of performing crack detection for high volume production applications as well as for traditional failure analysis. The test does not require any special lighting nor any optical magnification. It is capable of detecting cracks as fine as one-tenth of a micron in width. Although developed for a specific situation, the test may be useful for a wide variety of other applications.
本文详细介绍了一种检测陶瓷半导体封装裂纹的新方法。该技术速度极快,被设计为一种经济有效的方法,适用于大批量生产应用和传统的失效分析。该测试不需要任何特殊照明,也不需要任何光学放大。它能够探测到宽度仅为十分之一微米的裂缝。虽然是针对特定情况开发的,但该测试可能对各种其他应用程序都很有用。
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引用次数: 1
Evaluation of the Pulse Ohmic Non-Linearity Technique as a Reliability Tool for Predicting Susceptibility to Electromigration Damage 脉冲欧姆非线性技术作为预测电迁移损伤敏感性的可靠性工具的评价
Pub Date : 1980-04-01 DOI: 10.1109/IRPS.1980.362919
J. Lloyd, G. Prokop, M.E. Molchen
The degree of correlation between time to failure by electromigration stressing and pulse ohmic - non-linearity was found to depend markedly on the stress conditions. Only the highest stress and highest joule heating resulted in good correlation. Also, a simple resistance measurement was found to correlate as well with time to failure as pulse non-linearity. It was concluded that pulse non-linearity techniques are of limited usefulness as a reliability tool for all but those applications where severe joule heating is present.
发现电迁移应力失效时间与脉冲欧姆非线性之间的相关程度明显取决于应力条件。只有最高的应力和最高的焦耳加热产生了良好的相关性。此外,一个简单的电阻测量被发现,以及相关的时间失效作为脉冲非线性。得出的结论是,脉冲非线性技术作为一种可靠性工具的用途有限,除了那些存在严重焦耳加热的应用。
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引用次数: 0
Accelerated Active Life Test of GaAs FET and a New Failure Mode GaAs场效应管加速有效寿命试验及一种新的失效模式
Pub Date : 1980-04-01 DOI: 10.1109/IRPS.1980.362929
M. Omori, J. Wholey, J. Gibbons
An initial study at Avantek has established that static accelerated life tests on GaAs FET devices predict about an order of magnitude longer life than active accelerated life tests (tests at elevated temperatures with normal operating bias applied). In order to obtain reliable data, it is necessary to ensure that the devices do not oscillate while under test. To avoid oscillations the drain and source of the FET must be terminated in impedances which are controlled from DC to Fmax. For many of the devices tested Fmas was as high as 80 GHz. A test fixture with 50-ohm ceramic microstrip lines connected to the source and drain proved successful. The packaged GaAs FET and one end of each ceramic microstrip line was attached to a temperature-controlled heated stage. The GaAs FETs used in these tests were fabricated with AuGe/Ni/Au ohmic contacts and TiW/Au overlay metal. An identical layer of TiW/Au was also used for the Schottky barrier gate. They were then her-metically sealed in metal ceramic packages. The failure criterion used to define end of life was a 1-dB degradation of S21 (insertion gain in 50-ohm system) measured at 6 GHz. Insertion gain, S21 was measured with bias conditions which were typically optimum for low noise so long as this current was below Idss. If after stress, Idss was below the current which was previously optimum for noise figure, then measurements would be made at Idss. The average activation energy of the Arrhenius curve of this failure mode was 1.
Avantek的一项初步研究表明,GaAs FET器件的静态加速寿命测试预测的寿命比主动加速寿命测试(施加正常工作偏置的高温测试)长一个数量级。为了获得可靠的数据,有必要确保设备在测试时不振荡。为了避免振荡,FET的漏极和源极的端接阻抗必须控制在DC到Fmax之间。对于许多被测试的设备,fma高达80 GHz。用50欧姆陶瓷微带线连接源极和漏极的测试夹具证明是成功的。封装的GaAs场效应管和每条陶瓷微带线的一端连接在温控加热台上。在这些测试中使用的GaAs fet是由AuGe/Ni/Au欧姆触点和TiW/Au覆盖金属制成的。一层相同的TiW/Au也被用于肖特基垒闸。然后将它们密封在金属陶瓷包装中。用于定义寿命终止的失效准则是在6 GHz下测量的S21(50欧姆系统中的插入增益)的1 db退化。插入增益S21是在偏置条件下测量的,只要该电流低于Idss,该偏置条件通常是低噪声的最佳条件。如果经过应力处理后,导通度低于先前噪声系数的最佳电流,则在导通度处进行测量。该失效模式的Arrhenius曲线的平均活化能为1。
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引用次数: 19
Reliability Degradation Indicators being Observed on Terrestrial Silicon Solar Cells 陆地硅太阳能电池可靠性退化指标的观察
Pub Date : 1980-04-01 DOI: 10.1109/IRPS.1980.362908
J. Prince, J. Lathrop, R. A. Hartman
Results of a program to investigate the reliability characteristics of unencapsulated low-cost terrestrial solar cells using accelerated stress testing are presented. A total of seven types of cells were investigated. Results of extended (~ 1 year) bias-temperature stress testing of four cell types were obtained. An additional three cell types, including cells fabricated using the advanced technologies of ribbon-grown silicon and polycrystalline silicon, were subjected to various combinations of bias, temperature cycling stress tests. The spectrum of tests used was based on previous years' work, but differs from that used earlier. An electrical measurement procedure capable of distinguishing small changes in cell electrical parameters was used. Significant degradation was shown by some cell types in some stress tests. Other combinations of cell types and stress tests resulted in no detectable cell degradation. Analysis of the origins of the differences in degradation is continuing. Second quadrant characteristics of some cell types were also investigated in order to establish the electrical behavior of cells which may be exposed to this stress condition in modules deployed in the field.
介绍了一种利用加速应力试验研究无封装低成本地面太阳能电池可靠性特性的程序的结果。共研究了7种类型的细胞。对四种类型的细胞进行了延长(~ 1年)偏温应力测试。另外三种类型的电池,包括使用先进的带状生长硅和多晶硅技术制造的电池,进行了不同组合的偏压、温度循环应力测试。所使用的测试范围是基于前几年的工作,但与之前使用的不同。使用了一种能够区分电池电参数微小变化的电测量程序。在一些压力测试中,某些细胞类型显示出明显的退化。细胞类型和压力测试的其他组合没有导致可检测到的细胞降解。目前正在继续分析退化差异的根源。还研究了某些细胞类型的第二象限特征,以确定在野外部署的模块中可能暴露在这种应力条件下的细胞的电行为。
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引用次数: 1
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18th International Reliability Physics Symposium
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