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Proceedings of 1994 IEEE GaAs IC Symposium最新文献

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An 800 MSps track and hold using a 0.3 /spl mu/m AlGaAs-HEMT-technology 采用0.3 /spl mu/m algaas - hemt技术的800 MSps跟踪和保持
Pub Date : 1994-10-16 DOI: 10.1109/GAAS.1994.636975
G. Rohmer, J. Sauerer, D. Seitzer, U. Nowotny, B. Raynor, J. Schneider
A feedforward T/H was developed as past of a 200 MSps/10 bit successive approximation ADC using a 0.3 /spl mu/m AlGaAs-HEMT process. This T/H is able to operate up to a clock frequency of 3 GHz and reaches a THD/spl ges/60 dB up to the Nyquist frequency of the ADC at the nominal clock frequency of 800 MHz. This was realized using a special circuit structure with a signal path and a reference path and a new diode bridge switch with an additional auxiliary bridge.
采用0.3 /spl mu/m AlGaAs-HEMT工艺,开发了200 MSps/10位逐次逼近ADC的前馈T/H。该T/H能够工作到3 GHz的时钟频率,并在800 MHz的标称时钟频率下达到ADC的奈奎斯特频率的THD/spl ges/60 dB。这是通过一种特殊的电路结构实现的,该电路结构具有信号路径和参考路径以及带有附加辅助桥的新型二极管桥开关。
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引用次数: 5
Thermal modeling, measurements and design considerations of GaAs microwave devices GaAs微波器件的热建模、测量和设计考虑
Pub Date : 1994-10-16 DOI: 10.1109/GAAS.1994.636985
D. Dawson
This paper addresses the thermal management issues associated with fabricating microwave power devices. Thermal management of microwave devices includes: modeling thermal resistance with techniques such as Green's function/method of images, conformal map, finite element, spectral domain, and Fourier series; measurement techniques such as improved IR, self heating, laser probing, and direct thermocouple measurement; and layout and fabrication alternatives such as silicon substrates, shunt metal paths, and selective thinning that allow smaller form factors while maintaining or reducing thermal resistance. Examples of several device layout and fabrication approaches (MESFET, HBT, PHEMT) show how high frequency performance and low thermal resistance can be part of the unit cell design.
本文讨论了微波功率器件制造过程中的热管理问题。微波器件的热管理包括:用格林函数/图像法、保角映射、有限元、谱域和傅立叶级数等技术建模热阻;测量技术,如改进的红外、自加热、激光探测和直接热电偶测量;布局和制造替代方案,如硅衬底,分流金属路径和选择性减薄,允许更小的形状因素,同时保持或降低热阻。几种器件布局和制造方法(MESFET, HBT, PHEMT)的示例显示了高频性能和低热阻如何成为单元电池设计的一部分。
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引用次数: 19
Wafer fab line yield improvement at TriQuint semiconductor TriQuint半导体晶圆生产线良率改善
Pub Date : 1994-10-16 DOI: 10.1109/GAAS.1994.636943
T.M. Smith
This paper describes TriQuint's yield improvement efforts and results for our ion implanted, recessed-gate, MESFET IC processes. It discusses how we approached fab line yield improvement, the techniques that were utilized, some of the lessons learned, and the results achieved from 1989 to present.
本文介绍了TriQuint在离子注入、嵌入式栅极、MESFET IC工艺方面的良率改进努力和成果。它讨论了我们是如何提高晶圆生产线良率的,所使用的技术,一些经验教训,以及从1989年到现在取得的成果。
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引用次数: 1
1.5 V ultrawide-band GaAs monolithic amplifier for portable wireless LAN and satellite communication applications 用于便携式无线局域网和卫星通信应用的1.5 V超宽带GaAs单片放大器
Pub Date : 1994-10-16 DOI: 10.1109/GAAS.1994.636958
Kwang-Jun Youn, Jeon-Wook Yang, Chang-Seok Lee, Min-Kun Kim, S. Kang, Seong-Su Park, Dong-Goo Kim, Chul Soon Park, I. Hwang, Hyung‐Moo Park, S. Park
A 1.5 V operating GaAs 2/spl sim/9 GHz ultrawide-band MMIC amplifier for portable wireless LAN, microwave link and satellite communication applications has been developed. This amplifier has 16/spl plusmn/1 dB gain and more than 10 dB input and output return loss in the 2/spl sim/9 GHz frequency range with 118 mA operating current. Measured 1-dB compression power is 13 dBm at 0 dBm input power and minimum noise figure is 4.8 dB. When operated at 3 V and 128 mA, this amplifier has up to 18/spl plusmn/1 dB gain, 18 dBm 1-dB compression power, more than 10 dB return loss and 4.9 dB minimum noise figure.
研制了一种适用于便携式无线局域网、微波链路和卫星通信的1.5 V工作GaAs 2/spl sim/9 GHz超宽带MMIC放大器。该放大器在2/spl sim/9 GHz频率范围内具有16/spl plusmn/1 dB增益和超过10 dB的输入和输出回波损耗,工作电流为118 mA。在0 dBm输入功率下,实测1 dB压缩功率为13 dBm,最小噪声系数为4.8 dB。当工作电压为3v和128ma时,该放大器具有高达18/spl plusmn/ 1db增益,18dbm 1db压缩功率,10db以上回波损耗和4.9 dB最小噪声系数。
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引用次数: 5
2.5 Gb/s 8/spl times/8 self-routing switch GaAs LSIs for ATM switching systems 用于ATM交换系统的2.5 Gb/s 8/spl times/8自路由交换机GaAs lsi
Pub Date : 1994-10-16 DOI: 10.1109/GAAS.1994.636922
H. Yamada, M. Tunotani, F. Kaneyama, S. Seki
2.5 Gb/s 8/spl times/8 self-routing switch LSIs have been developed for the asynchronous transfer mode (ATM) switching systems. The basic architecture of this switch is a Batcher-Banyan network. This switching system consists of three LSIs using a 0.5 /spl mu/m gate GaAs MESFET technology. These LSIs are a switching network LSI for exchanging packet cells, a "NEMAWASHI" network LSI for previously detecting the cells with the same output port address, and a demultiplexer LSI for converting the cells from the switching network into the eight streams per a channel. These LSIs are mounted in a 520 pin multi-chip module package. The number of total logic gates is 13.3 k, and the power dissipation is 24 W. The switching system fully operates at a data rate of 2.6 Gb/s, and the throughput is 20.8 Gb/s.
为异步传输模式(ATM)交换系统开发了2.5 Gb/s 8/spl times/8自路由交换机lsi。该交换机的基本架构是Batcher-Banyan网络。该开关系统由三个使用0.5 /spl mu/m栅极GaAs MESFET技术的lsi组成。这些LSI是用于交换分组单元的交换网络LSI,用于预先检测具有相同输出端口地址的单元的“NEMAWASHI”网络LSI,以及用于将来自交换网络的单元转换为每个通道8个流的解复用LSI。这些lsi安装在520引脚多芯片模块封装中。总逻辑门数为13.3 k,功耗为24w。交换系统以2.6 Gb/s的数据速率完全运行,吞吐量为20.8 Gb/s。
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引用次数: 1
A monolithic broadband 10-50 GHz distributed HEMT mixer including active LO-RF combiner 一个单片宽带10-50 GHz分布式HEMT混频器,包括有源低射频合成器
Pub Date : 1994-10-16 DOI: 10.1109/GAAS.1994.636938
D. Hollmann, R. Heilig, G. Baumann
A millimeter-wave GaAs HEMT MMIC distributed mixer covering the RF frequency range from 10 to 50 GHz with IF frequencies from several MHz to 5 GHz was developed. The active devices are AlGaAs-GaAs HEMTs with a gatelength of 0.2 /spl mu/m and a gatewidth of 2/spl times/25 /spl mu/m. The conversion gain of the mixer is better than -3 dB over the frequency range at an LO power of less than 5 dBm without IF amplification. The RF and the LO signals are fed through an active distributed combiner with 2 dB gain and LO to RF port isolation of 20 dB. The size of the single mixer is 1.5/spl times/1 mm/sup 2/ and of the combiner including bias networks is 2/spl times/1 mm/sup 2/. An integrated broadband mixer chip including the LO and RF combiner was fabricated with a size of 4/spl times/1 mm/sup 2/.
开发了一种毫米波GaAs HEMT MMIC分布式混频器,其射频频率范围为10 ~ 50 GHz,中频频率为几MHz ~ 5 GHz。有源器件为AlGaAs-GaAs hemt,门长为0.2 /spl mu/m,门宽为2/spl × /25 /spl mu/m。在无中频放大的情况下,当本端功率小于5 dBm时,混频器的转换增益在频率范围内优于-3 dB。RF和LO信号通过具有2db增益的有源分布式组合器馈送,LO到RF端口隔离为20db。单个混频器的尺寸为1.5/spl倍/ 1mm /sup 2/,包括偏置网络的组合器的尺寸为2/spl倍/ 1mm /sup 2/。制作了包含LO和RF合成器的集成宽带混频器芯片,其尺寸为4/ sp1 × 1 mm/sup / 2。
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引用次数: 13
A 94 GHz monolithic switch with a vertical PIN diode structure 具有垂直PIN二极管结构的94ghz单片开关
Pub Date : 1994-10-16 DOI: 10.1109/GAAS.1994.636996
J. Putnam, M. Fukuda, P. Staecker, Y. Yun
This paper presents the design, fabrication, and performance of a 94 GHz monolithic PIN diode SPDT switch. The switch uses a vertical PIN diode structure to achieve insertion loss of 1.0 dB and isolation greater than 30 dB at 94 GHz, The circuits were fabricated on semi-insulating GaAs wafers with MOCVD grown p+, i, and n+ layers. An AlGaAs layer was used as an etch stop in the fabrication of the backside via hole. Measurements were made in a fixture containing transitions from WR-10 waveguide to quartz microstrip and from the quartz microstrip to the MMIC chip.
本文介绍了一种94 GHz单片PIN二极管SPDT开关的设计、制造和性能。该开关采用垂直PIN二极管结构,在94 GHz时实现了1.0 dB的插入损耗和大于30 dB的隔离,电路在半绝缘GaAs晶片上制作,采用MOCVD生长p+, i和n+层。在后部通孔的制作中,采用了AlGaAs层作为蚀刻止点。测量是在包含从WR-10波导到石英微带和从石英微带到MMIC芯片的转换的夹具中进行的。
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引用次数: 28
Double heterostructure InP HBT technology for high resolution A/D converters 高分辨率A/D转换器的双异质结构InP HBT技术
Pub Date : 1994-10-16 DOI: 10.1109/GAAS.1994.636972
J. Jensen, A. Cosand, W. Stanchina, R. Walden, T. Lui, Y. Brown, M. Montes, K. Elliott, C. Kirkpatrick
For high resolution analog circuits we have developed a double heterostructure bipolar transistor (DHBT) technology using InP as the collector material. Our baseline DHBTs have demonstrated current gain /spl beta/, early voltage V/sub A/, f/sub T/, and f/sub max/ of 55, 100 V, 70 GHz, and 60 GHz, respectively. We have implemented an analog cell library to build high resolution /spl Delta//spl Sigma/ modulator circuits in this technology. We have used the cell library to demonstrate a first order modulator and to verify the design of these analog cells. At a sample rate of 4 GSPS and an OSR equal to 32 (i.e., input bandwidth of 62.5 MHz) the first order modulator demonstrated an SNR of 40.3 dB. This first order modulator operates using /spl plusmn/5 V power supplies and dissipates 572 mW.
对于高分辨率模拟电路,我们开发了一种双异质结构双极晶体管(DHBT)技术,采用InP作为集电极材料。我们的基准dhbt分别在55、100 V、70 GHz和60 GHz下显示了电流增益/spl beta/、早期电压V/sub A/、f/sub T/和f/sub max/。我们已经实现了一个模拟单元库,用于构建高分辨率/spl Delta//spl Sigma/调制器电路。我们使用单元库来演示一阶调制器并验证这些模拟单元的设计。当采样率为4 GSPS, OSR为32(即输入带宽为62.5 MHz)时,一阶调制器的信噪比为40.3 dB。该一阶调制器使用/spl plusmn/5 V电源运行,功耗为572 mW。
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引用次数: 7
Advanced III-V materials processing in the vacuum of space 先进的空间真空III-V材料加工
Pub Date : 1994-10-16 DOI: 10.1109/GAAS.1994.636907
A. Ignatiev, C. Horton, M. Sterling, R. Sega, A. Bensaoula, A. Freundlich, S. Pei
GaAs films, both silicon doped and undoped, have been deposited by Molecular Beam Epitaxy (MBE) in Low Earth Orbit (LEO) in an ultra vacuum environment created by the Wake Shield Facility (WSF). The WSF is a 12 foot diameter stainless steel disk that sweeps out a volume of space thus creating an ultra vacuum in its wake. It was developed specifically to take advantage of the ultra vacuum for the deposition of thin film materials. The WSF was flown for the first time on STS-60 in February, 1994. The mission objectives were to measure the unique wake vacuum environment formed by the Wake Shield, and to epitaxially deposit GaAs thin films. In this paper we describe the films deposited and report on the characterization performed to date. Films were deposited in two basic structures. The first structure consisted of undoped GaAs films of thicknesses ranging from 2 to 4 /spl mu/m with a thin (/spl ap/200 mn) highly silicon doped layer (n/spl ap/5/spl times/10/sup 17//cc) on top. This is basically a metal-semiconductor field effect transistor (MESFET) structure. The second structure was a lightly silicon doped GaAs film (n/spl ap/5/spl times/10/sup 15//cc). We have obtained Photoluminescence (PL), Secondary Ion Mass Spectrometry (SIMS) and X-Ray diffraction data on selected films. The data indicate nominal quality single crystal films with oxygen and carbon contamination. The source of the contamination and further characterization are discussed.
采用分子束外延(MBE)技术,在低地球轨道(LEO)的超真空环境中制备了掺杂和未掺杂的砷化镓薄膜。WSF是一个直径12英尺的不锈钢圆盘,可以扫出一定体积的空间,从而在其尾迹中产生超真空。它是专门为利用超真空沉积薄膜材料而开发的。WSF于1994年2月首次在STS-60上飞行。任务目标是测量尾流屏蔽形成的独特的尾流真空环境,并外延沉积GaAs薄膜。在本文中,我们描述了沉积的薄膜,并报告了迄今为止所进行的表征。薄膜沉积成两种基本结构。第一种结构由厚度为2 ~ 4 /spl μ m的未掺杂GaAs薄膜组成,薄膜上有薄层(/spl μ m /200 mn)高硅掺杂层(n/spl μ m /5/spl倍/10/sup 17//cc)。这基本上是一个金属半导体场效应晶体管(MESFET)结构。第二种结构是轻硅掺杂的GaAs膜(n/spl /5/spl × /10/sup / 15//cc)。我们获得了所选薄膜的光致发光(PL)、二次离子质谱(SIMS)和x射线衍射数据。数据表明,标称质量单晶膜与氧和碳污染。讨论了污染的来源和进一步的表征。
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引用次数: 2
60-GHz HEMT-based MMIC receiver with on-chip LO 带有片上LO的60 ghz hemt MMIC接收器
Pub Date : 1994-10-16 DOI: 10.1109/GAAS.1994.636932
T. Saito, N. Hidaka, Y. Ohashi, Y. Aoki
Using InGaP-InGaAs-GaAs technology, we designed, fabricated, and evaluated a 60-GHz fully integrated HEMT-based MMIC receiver. The receiver consists of a four-stage low-noise amplifier (LNA) and a single-balanced active-gate mixer, a 60 GHz local oscillator (LO), and a buffer amplifier for the LO. The HEMTs in the receiver have gates 0.1 /spl mu/m long and 100 /spl mu/m wide. The receiver had a conversion gain of greater than 17 dB from 60.2 GHz to 62.3 GHz, and the maximum conversion gain was 20 dB at 62.2 GHz. The noise figure of the receiver was less than 6 db for IF frequencies between 100 MHz and 1 GHz for a 61.536 GHz LO, and the minimum noise figure was 49 dB at 1 GHz IF.
利用InGaP-InGaAs-GaAs技术,我们设计、制造并评估了一个60ghz的全集成基于hemt的MMIC接收器。接收机由一个四级低噪声放大器(LNA)和一个单平衡有源门混频器、一个60 GHz本振(LO)和一个用于本振的缓冲放大器组成。接收器中的hemt具有长0.1 /spl μ m和宽100 /spl μ m的栅极。在60.2 GHz至62.3 GHz范围内,接收机的转换增益均大于17 dB,在62.2 GHz范围内最大转换增益为20 dB。对于61.536 GHz的LO,在100 MHz ~ 1 GHz的中频范围内,接收机的噪声系数小于6 db,在1 GHz的中频范围内,接收机的最小噪声系数为49 db。
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引用次数: 5
期刊
Proceedings of 1994 IEEE GaAs IC Symposium
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