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Advanced Mcm-d With Embedded Resistors 带有嵌入式电阻的先进Mcm-d
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753562
D. Scheid
This paper describes a thin film process that was developed for fabricating a high performance Cu/PI MCM-D with embedded TiW thin film resistors using standard IC equipment, modified to handle square substrates. Several thousand MCM's have been produced with exceptional AC and DC characteristics. These MCM's were attached to a larger MCM-L substrate that functioned as a logic module tester, capable of greater than 600 MHz operation. Each MCM provided for interconnection of 4 large ECL gate arrays, 9 decoupling capacitors and 18 resistor networks. By integrating the resistors into the thin film stack better performance and cost savings could be achieved. This was a result of the reduced parasitics, increased routability and component reduction. The MCM thin film consisted of 8 metal layers (4 routing, 3 power-ground and I for resistor formation) deposited on a glass ceramic substrate. The MGM measures 4.6 cm/sup 2/ and has more than 15 meters of thin film routing available with 2,000 vias/cm/sup 2/.
本文描述了一种薄膜工艺,该工艺用于使用标准IC设备制造高性能Cu/PI MCM-D,该设备采用嵌入式TiW薄膜电阻器,经过修改以处理方形衬底。已经生产了数千个具有卓越交流和直流特性的MCM。这些MCM连接到一个更大的MCM- l基板上,作为逻辑模块测试仪,能够超过600 MHz的工作。每个MCM提供4个大型ECL门阵列,9个去耦电容器和18个电阻网络的互连。通过将电阻器集成到薄膜堆中,可以实现更好的性能和成本节约。这是由于寄生减少,可达性增加和组件减少的结果。MCM薄膜由沉积在玻璃陶瓷基板上的8层金属层(4层布线,3层电源接地和1层电阻形成)组成。米高梅的尺寸为4.6 cm/sup 2/,有超过15米的薄膜路由,有2000个孔/cm/sup 2/。
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引用次数: 5
Heat-Pipe Cooling Technology for High-Speed Atm Switching Mcms 高速Atm开关微机热管冷却技术
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753543
T. Kishimoto, S. Sasaki, K. Genda, K. Endo, K. Kaizu
This paper describes an innovative heat-pipe cooling technology for high-speed ATM switching MCMs operating with a throughput of 40 Gb/s. Although high-speed ATM link wires are interconnected on the top surface of the MCMs, there is no room to coot the MCM by forced air convection, because the power and the system clock signal are supplied by the connector on the back side and peripheral of the MCM. We therefore attach a cold-plate to the back of each MCM. The condenser parts of the heat pipe, which is mounted behind the power supply printed circuit board, are cooled by low-velocity forced air. Total power dissipation including the power dissipation of the termination resistors is about 30 watts per MCM. With a 2 m/s forced air flow, this sub-switching element module operates at a throughput of 80 Gb/s (including 4 MCMs) with maximum junction temperature of less than 85 /spl deg/C. Measured thermal resistance between the switch LSI junction and air is about 6 /spl deg/C/W at an air flow of 2 m/s. This heat-pipe cooling system has small system footprint, compact hardware, and good cooling capability. We, demonstrate its effectiveness in cooling high-speed ATM switching MCMS operating with a throughput of 40 Gb/s.
本文介绍了一种用于40gb /s吞吐量的高速ATM交换mcm的创新热管冷却技术。虽然高速ATM链路在MCM的上表面相互连接,但由于电源和系统时钟信号是由MCM背面的连接器和外设提供的,因此没有空间通过强制空气对流为MCM降温。因此,我们在每个MCM的后面附加一个冷板。热管的冷凝器部分安装在电源印刷电路板的后面,通过低速强制空气冷却。包括终端电阻的功耗在内的总功耗约为每MCM 30瓦。在2m /s的强制气流下,该子开关元件模块的吞吐量为80gb /s(包括4个mcm),最高结温低于85 /spl℃。在2米/秒的气流下,测量到开关LSI结与空气之间的热阻约为6 /spl度/C/W。该热管冷却系统占地面积小,硬件紧凑,冷却性能好。我们证明了它在冷却吞吐量为40 Gb/s的高速ATM交换MCMS方面的有效性。
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引用次数: 4
The Promise of Known-good-die Technologies 众所周知的好模具技术的承诺
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753521
B. Vasquez, S. Lindsey
The yield and reliability requirements for multichip packaging (MCP) applications have provided the major impetus for the development of known-good-die (KGD) technology solutions. KGD technology includes components of electrical contact, mechanical fixturing, IC design, test and automation. This paper will provide an overview of the KGD market and KGD technologies currently available in the industry. Die-Level-Burn-In (DLBI) approaches based on temporary bare die carriers are emerging in the industry. The goal for carrier development for test and burn-in is a cost-effective, bare die contact and fixturing approach that accommodates both peripheral and array contacts as well as wire bond and bumped die. For semiconductor manufacturers, possibility of conducting burn-in in wafer form is more attractive and holds the promise of reducing the total cost to manufacture die, regardless of the packaging destination. This paper will provide a review of KGD technology solutions which span a range of maturity from conceptual to qualified for production.
多芯片封装(MCP)应用的良率和可靠性要求为已知优良芯片(KGD)技术解决方案的发展提供了主要动力。KGD技术包括电接触元件、机械夹具、集成电路设计、测试和自动化。本文将概述KGD市场和KGD技术目前在行业中可用。基于临时裸模载体的模级烧蚀(DLBI)方法正在工业中兴起。用于测试和老化的载体开发的目标是一种具有成本效益的裸模接触和固定方法,可容纳外设和阵列接触以及线键和凸模。对于半导体制造商来说,在晶圆形式中进行老化的可能性更有吸引力,并且无论封装目的地如何,都有望降低制造模具的总成本。本文将对KGD技术解决方案进行回顾,这些技术解决方案从概念到生产合格的成熟度范围。
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引用次数: 13
Advanced Mcm-L in Apachip a European Cooperative Program 先进的Mcm-L在Apachip一个欧洲合作计划
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753583
K. Kurzweil, H. Wessely
The European Economic Community is sponsoring technical projects carried out in cooperation by European Companies and academic institutions. APACHIP -Advanced Packaging for High Performance has significantly contributed to the advancement of packaging technology in Europe, covering various aspects of high performance packaging. This paper illustrates one of the specific project tasks aimed at building a complex large size water cooled MCM-L module populated with up to 100 TAB bonded complex semiconductor chips.
欧洲经济共同体正在赞助由欧洲公司和学术机构合作执行的技术项目。APACHIP -高性能先进包装为欧洲包装技术的进步做出了重大贡献,涵盖了高性能包装的各个方面。本文阐述了一个具体的项目任务,旨在建立一个复杂的大尺寸水冷MCM-L模块,其中包含多达100个TAB键合的复杂半导体芯片。
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引用次数: 0
Fabrication, Assembly, and Characterization of Stacked Multichip Modules Using Hot Pressed, Co-Fired Aluminum Nitride 热压共烧氮化铝堆叠多晶片模组之制造、组装与表征
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753575
W. T. Minehan, W. Weidner, R. Jensen, R. Spielberger, W. F. Jacobsen, C. Speerschneider
A three-dimensional interconnect structure utilizing MCM-C technology is currently being developed by Honeywell Solid State Electronics Center (SSEQ and Coors Electronic Package Company. This concept involves the stacking of double sided co-fired aluminum nitride (AIN) MCMs. The double sided MCMs are stacked vertically using solder attached co-fired AIN spacer bars that have been manufactured with metallized through vias and have been designed to incorporate all electrical interconnection within the ceramic. The spacer bar acts as a thermal and electrical interconnect between substrates. Prototypes are currently being produced and evaluated for thermal, electrical, and mechanical integrity. Two technology characterization vehicles (TCVs) have been designed and constructed; the first TCV contains 6 metal layers and sites for wirebond, tape automated bonding (TAB), and flip chip mounting. A second characterization vehicle contains 15 metal planes and additional electrical characterization features. This paper will discuss the fabrication and assembly of the two TCVs. This Three-Dimensional Interconnect Structures Program is being funded by Naval Command, Control and Ocean Surveillance Center (NCCOSC).
目前,霍尼韦尔固态电子中心(SSEQ)和Coors电子封装公司正在开发一种利用MCM-C技术的三维互连结构。该概念涉及双面共烧氮化铝(AIN) mcm的堆叠。双面mcm采用焊料连接的共烧AIN间隔条垂直堆叠,该间隔条由金属化通孔制造,并被设计为在陶瓷中包含所有电气互连。间隔条作为衬底之间的热和电互连。目前正在生产原型,并对热、电和机械完整性进行评估。设计并建造了两辆技术表征车(tcv);第一个TCV包含6个金属层和用于线键、胶带自动键合(TAB)和倒装芯片安装的位置。第二个表征车辆包含15个金属平面和额外的电气表征特征。本文将讨论两种tcv的制造和组装。该三维互联结构项目由海军指挥、控制和海洋监视中心(NCCOSC)资助。
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引用次数: 5
Mcm-D Technology for a Communication Application 通信应用中的Mcm-D技术
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753582
W. Radlik, K. Plehnert, M. Zellner, A. Achen, R. Heistand, D. Castillo, R. Urscheler
Taking advantage of the inherent capabilities of thin film technology, a cost competitive MCM-D has been built providing for a data communication assembly. For the dielectric layers, the novel photodefinable benzocyclobutene (BCB) has been employed. Thus, the material performance has been investigated and new processing steps have been developed to achieve a highly reliable formation of 10 /spl m/m vias at least.
利用薄膜技术的固有能力,已经构建了具有成本竞争力的MCM-D,提供数据通信组件。对于介电层,采用了新型光可定义苯并环丁烯(BCB)。因此,已经研究了材料性能并开发了新的加工步骤,以实现至少10 /spl m/m的高度可靠的过孔形成。
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引用次数: 7
Electrical Design of an Mcm for a Multiprocessor System 多处理器系统中Mcm的电气设计
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753593
M. Swaminathan, A. Sarfaraz, J. Crocker, H. Bhatia
This paper details the electrical design of a multichip module ( MCM ) which represents a single node of a multiprocessor digital system. After a brief overview on the architecture, the paper discusses the key performance related ingredients of the MCM such as optimum chip placement, waveform degradation, delay and noise budgets. It is the conclusion of the paper that the physical and electrical design of an MCM be conducted in parallel so as to ensure the electrical performance of the module with minimum redesign.
本文详细介绍了代表多处理器数字系统中单个节点的多芯片模块(MCM)的电气设计。在对架构进行简要概述之后,本文讨论了MCM的关键性能相关成分,如最佳芯片放置,波形退化,延迟和噪声预算。本文的结论是,为了保证模块的电气性能,最少的重新设计,MCM的物理和电气设计应该并行进行。
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引用次数: 0
Capacitively Coupled Multichip Modules 电容耦合多芯片模块
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753594
D. Salzman, T. Knight
This paper introduces a radically new method for interconnecting electronic packages electrically and mechanically. It applies to Levels 0-3 inclusive, including die-to-die (Level 0 - Level 0), die-to- substrate (0-1), substrate-to-substrate (1-1), module-to- module (2-2), and substrate to cable or backplane (1-3). Pulse signals are used to signal among semiconductor wafers, dies, modules, or other ensembles of components Capacitive coupling makes possible extremely dense, low-cost, high-performance interconnections. Uniform electrical interfaces make an integrated package possible, collapsing the traditional packaging hierarchy into a single uniform level. Inherently much lower cost is entailed in the design, test, assembly, and rework of capacitively coupled multichip modules than for conductive modules. Savings accrue from eliminating mechanical connectors, backplane structures, processing equipment & steps, materials, and failure modes of all of these. The requisite equipment already exists in foundries, not just in dedicated MCM houses. Substrates may be thin or thick film, so long as smoothness and planarity match the density and decoupling requirements. For these reasons, any system comprising two or more die where pulse drivers and receivers can be designed in may be a candidate for capacitive coupling.
本文介绍了一种全新的电气和机械连接电子封装的方法。适用于0-3级,包括模对模(0- 0级)、模对基板(0-1级)、基板对基板(1-1级)、模块对模块(2-2级)、基板对电缆或背板(1-3级)。脉冲信号用于在半导体晶圆、芯片、模块或其他组件集成之间发出信号。电容耦合使极密集、低成本、高性能的互连成为可能。统一的电气接口使集成封装成为可能,将传统的封装层次结构瓦解为一个统一的层次。电容耦合多芯片模块的设计、测试、组装和返工成本要比导电模块低得多。通过消除机械连接器、背板结构、加工设备和步骤、材料以及所有这些的失效模式,节省了成本。所需的设备已经存在于铸造厂,而不仅仅是在专用的MCM房屋中。基材可以是薄膜或厚膜,只要平滑度和平面度符合密度和去耦要求即可。由于这些原因,任何包含两个或多个芯片的系统,其中可以设计脉冲驱动器和接收器,都可能是电容耦合的候选者。
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引用次数: 13
Evaluation of Ionic Salt Photodefinable Polyimides As Mcm-D Dielectrics with Copper Metallization 离子盐光定聚酰亚胺作为铜金属化Mcm-D介电材料的评价
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753576
C. N. Lazaridis, D. K. Flattery, W. J. Lautenberger, Y. Yamamoto, K. Imai
The excellent film properties given by BPDA/PPD make it a prime candidate for the dielectric material in MCM-D fabrications, and photodefinable versions offer the additional advantages of reduced labor and material costs. However, less than adequate adhesion to the preferred copper metallurgy coupled with prolonged development times may limit widespread adoption of this chemistry. Modifications to the BPDA/PPD backbone were made in a series of photodefinable polyimides prepared as the ionic salt precursors, and key performance and processing parameters were determined. Significant adhesion of the highly rigid BPDA/PPD backbone to copper metal was only achieved after substantial incorporation of either more flexible co-monomers, especially those containing fluorine substituents, or by incorporation of an assumed surface reactive, hydroxyl-substituted co-monomer. These modifications generally also resulted in reduced development times. Self-adhesion of polyimide to polyimide layers was optimized by using a partial cure process for the bottom polyimide layer, and appropriate cure temperatures were determined for each structure to prevent solvent-induced cracking of the bottom layer upon application of the top layer while retaining self-adhesion. Operable processing windows were found for several candidates which maximized adhesion and minimized cracking.
BPDA/PPD优异的薄膜性能使其成为MCM-D制造中介电材料的首选材料,光定义版本提供了减少劳动力和材料成本的额外优势。然而,对首选铜冶金的附着力不够,再加上开发时间延长,可能会限制这种化学物质的广泛采用。以离子盐为前驱体制备了一系列光可定义聚酰亚胺,对BPDA/PPD骨架进行了改性,确定了关键性能和工艺参数。高度刚性的BPDA/PPD骨架与铜金属的显著粘附只有在大量加入更灵活的共聚单体(特别是含有氟取代基的共聚单体)或加入假设的表面反应性羟基取代共聚单体后才能实现。这些修改通常也会减少开发时间。通过对底层聚酰亚胺层采用局部固化工艺,优化了聚酰亚胺层与聚酰亚胺层的自粘附性,并确定了每种结构的适当固化温度,以防止在应用顶层时底层发生溶剂性开裂,同时保持自粘附性。为几个候选材料找到了可操作的加工窗口,使附着力最大化,开裂最小化。
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引用次数: 0
An Application Strategy for Scm-L and Mcm-L Using High Density Laminate Technologies 高密度层压板技术在Scm-L和Mcm-L中的应用策略
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753546
T. Houston, H. Heck, J. Knight
As the electronics packaging industry turns toward MCM-L technology to provide higher performance, lower cost packaging solutions the demands on laminate technology increase. Increasing chip I/O places more challenging requirements on the laminate wiring density. The design considerations that drive circuit density are I/O escape and global interconnect. This paper discusses IBM Endicott's approach to addressing the escape requirements using a set of hi density laminate technologies. IBM's laminate carriers were designed to target a spectrum of chip I/O requirements. Of particular interest is the ability to escape multiple rows of flip chip I/O. Access to multiple wiring layers is necessary when the I/O are arranged in an array or perimeter array configuration. The key to accessing internal laminate layers is the capability to provide fine pitch vias with small capture lands. This paper discusses the approaches that IBM Microelectronics takes to provide the appropriate laminate solution for a given chip I/O configuration. Specific examples are presented to show how chip I/O density affects the physical characteristics of the laminate technology. Additional factors that must be carefully weighed include material properties, processing requirements, electrical and thermal performance, and connection to the next level of packaging. IBM's laminate carriers were designed to target a spectrum of chip I/O requirements. Of particular interest is the ability to escape multiple rows of flip chip I/O. Access to multiple wiring layers is necessary when the I/O are arranged in an array or perimeter array configuration. The key to accessing internal laminate layers is the capability to provide fine pitch vias with small capture lands. This paper discusses the approaches that IBM Microelectronics takes to provide the appropriate laminate solution for a given chip I/O configuration. Specific examples are presented to show how chip I/O density affects the physical characteristics of the laminate technology. Additional factors that must be carefully weighed include material properties, processing requirements, electrical and thermal performance, and connection to the next level of packaging.
随着电子封装行业转向MCM-L技术以提供更高性能,更低成本的封装解决方案,对层压板技术的需求增加。增加芯片I/O对层压板布线密度提出了更具挑战性的要求。驱动电路密度的设计考虑因素是I/O逃逸和全局互连。本文讨论了IBM Endicott使用一组高密度层压技术来解决逃逸需求的方法。IBM的层压板载波是为满足芯片I/O需求而设计的。特别令人感兴趣的是逃避多行倒装芯片I/O的能力。当I/O排列在阵列或外围阵列配置中时,需要访问多个布线层。进入内部层压板层的关键是能够提供具有小捕获面积的细间距通孔。本文讨论了IBM Microelectronics为给定的芯片I/O配置提供适当的层压板解决方案所采用的方法。具体的例子显示了芯片I/O密度如何影响层压技术的物理特性。必须仔细权衡的其他因素包括材料特性,加工要求,电气和热性能以及与下一级包装的连接。IBM的层压板载波是为满足芯片I/O需求而设计的。特别令人感兴趣的是逃避多行倒装芯片I/O的能力。当I/O排列在阵列或外围阵列配置中时,需要访问多个布线层。进入内部层压板层的关键是能够提供具有小捕获面积的细间距通孔。本文讨论了IBM Microelectronics为给定的芯片I/O配置提供适当的层压板解决方案所采用的方法。具体的例子显示了芯片I/O密度如何影响层压技术的物理特性。必须仔细权衡的其他因素包括材料特性,加工要求,电气和热性能以及与下一级包装的连接。
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引用次数: 0
期刊
Proceedings of the International Conference on Multichip Modules
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