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Mcm-D Technology for a Communication Application 通信应用中的Mcm-D技术
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753582
W. Radlik, K. Plehnert, M. Zellner, A. Achen, R. Heistand, D. Castillo, R. Urscheler
Taking advantage of the inherent capabilities of thin film technology, a cost competitive MCM-D has been built providing for a data communication assembly. For the dielectric layers, the novel photodefinable benzocyclobutene (BCB) has been employed. Thus, the material performance has been investigated and new processing steps have been developed to achieve a highly reliable formation of 10 /spl m/m vias at least.
利用薄膜技术的固有能力,已经构建了具有成本竞争力的MCM-D,提供数据通信组件。对于介电层,采用了新型光可定义苯并环丁烯(BCB)。因此,已经研究了材料性能并开发了新的加工步骤,以实现至少10 /spl m/m的高度可靠的过孔形成。
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引用次数: 7
Advanced Mcm-d With Embedded Resistors 带有嵌入式电阻的先进Mcm-d
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753562
D. Scheid
This paper describes a thin film process that was developed for fabricating a high performance Cu/PI MCM-D with embedded TiW thin film resistors using standard IC equipment, modified to handle square substrates. Several thousand MCM's have been produced with exceptional AC and DC characteristics. These MCM's were attached to a larger MCM-L substrate that functioned as a logic module tester, capable of greater than 600 MHz operation. Each MCM provided for interconnection of 4 large ECL gate arrays, 9 decoupling capacitors and 18 resistor networks. By integrating the resistors into the thin film stack better performance and cost savings could be achieved. This was a result of the reduced parasitics, increased routability and component reduction. The MCM thin film consisted of 8 metal layers (4 routing, 3 power-ground and I for resistor formation) deposited on a glass ceramic substrate. The MGM measures 4.6 cm/sup 2/ and has more than 15 meters of thin film routing available with 2,000 vias/cm/sup 2/.
本文描述了一种薄膜工艺,该工艺用于使用标准IC设备制造高性能Cu/PI MCM-D,该设备采用嵌入式TiW薄膜电阻器,经过修改以处理方形衬底。已经生产了数千个具有卓越交流和直流特性的MCM。这些MCM连接到一个更大的MCM- l基板上,作为逻辑模块测试仪,能够超过600 MHz的工作。每个MCM提供4个大型ECL门阵列,9个去耦电容器和18个电阻网络的互连。通过将电阻器集成到薄膜堆中,可以实现更好的性能和成本节约。这是由于寄生减少,可达性增加和组件减少的结果。MCM薄膜由沉积在玻璃陶瓷基板上的8层金属层(4层布线,3层电源接地和1层电阻形成)组成。米高梅的尺寸为4.6 cm/sup 2/,有超过15米的薄膜路由,有2000个孔/cm/sup 2/。
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引用次数: 5
Fabrication, Assembly, and Characterization of Stacked Multichip Modules Using Hot Pressed, Co-Fired Aluminum Nitride 热压共烧氮化铝堆叠多晶片模组之制造、组装与表征
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753575
W. T. Minehan, W. Weidner, R. Jensen, R. Spielberger, W. F. Jacobsen, C. Speerschneider
A three-dimensional interconnect structure utilizing MCM-C technology is currently being developed by Honeywell Solid State Electronics Center (SSEQ and Coors Electronic Package Company. This concept involves the stacking of double sided co-fired aluminum nitride (AIN) MCMs. The double sided MCMs are stacked vertically using solder attached co-fired AIN spacer bars that have been manufactured with metallized through vias and have been designed to incorporate all electrical interconnection within the ceramic. The spacer bar acts as a thermal and electrical interconnect between substrates. Prototypes are currently being produced and evaluated for thermal, electrical, and mechanical integrity. Two technology characterization vehicles (TCVs) have been designed and constructed; the first TCV contains 6 metal layers and sites for wirebond, tape automated bonding (TAB), and flip chip mounting. A second characterization vehicle contains 15 metal planes and additional electrical characterization features. This paper will discuss the fabrication and assembly of the two TCVs. This Three-Dimensional Interconnect Structures Program is being funded by Naval Command, Control and Ocean Surveillance Center (NCCOSC).
目前,霍尼韦尔固态电子中心(SSEQ)和Coors电子封装公司正在开发一种利用MCM-C技术的三维互连结构。该概念涉及双面共烧氮化铝(AIN) mcm的堆叠。双面mcm采用焊料连接的共烧AIN间隔条垂直堆叠,该间隔条由金属化通孔制造,并被设计为在陶瓷中包含所有电气互连。间隔条作为衬底之间的热和电互连。目前正在生产原型,并对热、电和机械完整性进行评估。设计并建造了两辆技术表征车(tcv);第一个TCV包含6个金属层和用于线键、胶带自动键合(TAB)和倒装芯片安装的位置。第二个表征车辆包含15个金属平面和额外的电气表征特征。本文将讨论两种tcv的制造和组装。该三维互联结构项目由海军指挥、控制和海洋监视中心(NCCOSC)资助。
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引用次数: 5
The Promise of Known-good-die Technologies 众所周知的好模具技术的承诺
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753521
B. Vasquez, S. Lindsey
The yield and reliability requirements for multichip packaging (MCP) applications have provided the major impetus for the development of known-good-die (KGD) technology solutions. KGD technology includes components of electrical contact, mechanical fixturing, IC design, test and automation. This paper will provide an overview of the KGD market and KGD technologies currently available in the industry. Die-Level-Burn-In (DLBI) approaches based on temporary bare die carriers are emerging in the industry. The goal for carrier development for test and burn-in is a cost-effective, bare die contact and fixturing approach that accommodates both peripheral and array contacts as well as wire bond and bumped die. For semiconductor manufacturers, possibility of conducting burn-in in wafer form is more attractive and holds the promise of reducing the total cost to manufacture die, regardless of the packaging destination. This paper will provide a review of KGD technology solutions which span a range of maturity from conceptual to qualified for production.
多芯片封装(MCP)应用的良率和可靠性要求为已知优良芯片(KGD)技术解决方案的发展提供了主要动力。KGD技术包括电接触元件、机械夹具、集成电路设计、测试和自动化。本文将概述KGD市场和KGD技术目前在行业中可用。基于临时裸模载体的模级烧蚀(DLBI)方法正在工业中兴起。用于测试和老化的载体开发的目标是一种具有成本效益的裸模接触和固定方法,可容纳外设和阵列接触以及线键和凸模。对于半导体制造商来说,在晶圆形式中进行老化的可能性更有吸引力,并且无论封装目的地如何,都有望降低制造模具的总成本。本文将对KGD技术解决方案进行回顾,这些技术解决方案从概念到生产合格的成熟度范围。
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引用次数: 13
Heat-Pipe Cooling Technology for High-Speed Atm Switching Mcms 高速Atm开关微机热管冷却技术
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753543
T. Kishimoto, S. Sasaki, K. Genda, K. Endo, K. Kaizu
This paper describes an innovative heat-pipe cooling technology for high-speed ATM switching MCMs operating with a throughput of 40 Gb/s. Although high-speed ATM link wires are interconnected on the top surface of the MCMs, there is no room to coot the MCM by forced air convection, because the power and the system clock signal are supplied by the connector on the back side and peripheral of the MCM. We therefore attach a cold-plate to the back of each MCM. The condenser parts of the heat pipe, which is mounted behind the power supply printed circuit board, are cooled by low-velocity forced air. Total power dissipation including the power dissipation of the termination resistors is about 30 watts per MCM. With a 2 m/s forced air flow, this sub-switching element module operates at a throughput of 80 Gb/s (including 4 MCMs) with maximum junction temperature of less than 85 /spl deg/C. Measured thermal resistance between the switch LSI junction and air is about 6 /spl deg/C/W at an air flow of 2 m/s. This heat-pipe cooling system has small system footprint, compact hardware, and good cooling capability. We, demonstrate its effectiveness in cooling high-speed ATM switching MCMS operating with a throughput of 40 Gb/s.
本文介绍了一种用于40gb /s吞吐量的高速ATM交换mcm的创新热管冷却技术。虽然高速ATM链路在MCM的上表面相互连接,但由于电源和系统时钟信号是由MCM背面的连接器和外设提供的,因此没有空间通过强制空气对流为MCM降温。因此,我们在每个MCM的后面附加一个冷板。热管的冷凝器部分安装在电源印刷电路板的后面,通过低速强制空气冷却。包括终端电阻的功耗在内的总功耗约为每MCM 30瓦。在2m /s的强制气流下,该子开关元件模块的吞吐量为80gb /s(包括4个mcm),最高结温低于85 /spl℃。在2米/秒的气流下,测量到开关LSI结与空气之间的热阻约为6 /spl度/C/W。该热管冷却系统占地面积小,硬件紧凑,冷却性能好。我们证明了它在冷却吞吐量为40 Gb/s的高速ATM交换MCMS方面的有效性。
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引用次数: 4
Advanced Mcm-L in Apachip a European Cooperative Program 先进的Mcm-L在Apachip一个欧洲合作计划
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753583
K. Kurzweil, H. Wessely
The European Economic Community is sponsoring technical projects carried out in cooperation by European Companies and academic institutions. APACHIP -Advanced Packaging for High Performance has significantly contributed to the advancement of packaging technology in Europe, covering various aspects of high performance packaging. This paper illustrates one of the specific project tasks aimed at building a complex large size water cooled MCM-L module populated with up to 100 TAB bonded complex semiconductor chips.
欧洲经济共同体正在赞助由欧洲公司和学术机构合作执行的技术项目。APACHIP -高性能先进包装为欧洲包装技术的进步做出了重大贡献,涵盖了高性能包装的各个方面。本文阐述了一个具体的项目任务,旨在建立一个复杂的大尺寸水冷MCM-L模块,其中包含多达100个TAB键合的复杂半导体芯片。
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引用次数: 0
Electrical Design of an Mcm for a Multiprocessor System 多处理器系统中Mcm的电气设计
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753593
M. Swaminathan, A. Sarfaraz, J. Crocker, H. Bhatia
This paper details the electrical design of a multichip module ( MCM ) which represents a single node of a multiprocessor digital system. After a brief overview on the architecture, the paper discusses the key performance related ingredients of the MCM such as optimum chip placement, waveform degradation, delay and noise budgets. It is the conclusion of the paper that the physical and electrical design of an MCM be conducted in parallel so as to ensure the electrical performance of the module with minimum redesign.
本文详细介绍了代表多处理器数字系统中单个节点的多芯片模块(MCM)的电气设计。在对架构进行简要概述之后,本文讨论了MCM的关键性能相关成分,如最佳芯片放置,波形退化,延迟和噪声预算。本文的结论是,为了保证模块的电气性能,最少的重新设计,MCM的物理和电气设计应该并行进行。
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引用次数: 0
Capacitively Coupled Multichip Modules 电容耦合多芯片模块
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753594
D. Salzman, T. Knight
This paper introduces a radically new method for interconnecting electronic packages electrically and mechanically. It applies to Levels 0-3 inclusive, including die-to-die (Level 0 - Level 0), die-to- substrate (0-1), substrate-to-substrate (1-1), module-to- module (2-2), and substrate to cable or backplane (1-3). Pulse signals are used to signal among semiconductor wafers, dies, modules, or other ensembles of components Capacitive coupling makes possible extremely dense, low-cost, high-performance interconnections. Uniform electrical interfaces make an integrated package possible, collapsing the traditional packaging hierarchy into a single uniform level. Inherently much lower cost is entailed in the design, test, assembly, and rework of capacitively coupled multichip modules than for conductive modules. Savings accrue from eliminating mechanical connectors, backplane structures, processing equipment & steps, materials, and failure modes of all of these. The requisite equipment already exists in foundries, not just in dedicated MCM houses. Substrates may be thin or thick film, so long as smoothness and planarity match the density and decoupling requirements. For these reasons, any system comprising two or more die where pulse drivers and receivers can be designed in may be a candidate for capacitive coupling.
本文介绍了一种全新的电气和机械连接电子封装的方法。适用于0-3级,包括模对模(0- 0级)、模对基板(0-1级)、基板对基板(1-1级)、模块对模块(2-2级)、基板对电缆或背板(1-3级)。脉冲信号用于在半导体晶圆、芯片、模块或其他组件集成之间发出信号。电容耦合使极密集、低成本、高性能的互连成为可能。统一的电气接口使集成封装成为可能,将传统的封装层次结构瓦解为一个统一的层次。电容耦合多芯片模块的设计、测试、组装和返工成本要比导电模块低得多。通过消除机械连接器、背板结构、加工设备和步骤、材料以及所有这些的失效模式,节省了成本。所需的设备已经存在于铸造厂,而不仅仅是在专用的MCM房屋中。基材可以是薄膜或厚膜,只要平滑度和平面度符合密度和去耦要求即可。由于这些原因,任何包含两个或多个芯片的系统,其中可以设计脉冲驱动器和接收器,都可能是电容耦合的候选者。
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引用次数: 13
Global Optimization of MCMs with ASICs Using Concurrent Engineering 基于并行工程的集成集成电路mcm全局优化
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753581
J. Cazenave, G. Dupenloup
This paper describes a large MCM developed for space applications. Design constraints were extremely severe: low volume, low weight, high signal speed, minimum power consumption, high pressure, exposition to space vacuum. The MCM includes 1.2 million of transistors. It required the design of 8 different types of ASICs in 3 different technologies: CMOS, ECL, mixed-signal bipolar. The substrate has been fabricated using Dassault Electronique's high-density photo-imageable thick-film process (PCM technology), that is briefly described in this paper. An Aluminium package was used to save weight and improve thermal conduction. Stand-offs sustaining the lid were used to handle high pressure. The MCM and the ASICs were concurrently designed to simplify the layout of the MCM as much as possible. Despite high routing density, only 4 layers were used. Heavy traffic was "pushed" into ASICs where there is no significant extra cost associated with connections. The ASIC pads were arranged to match MCM wires. A global Design-For-Test strategy has been implemented. The ASICs include internal and external Built-In Self Test (BIST) resources, that allow to test the ASICs and the MCM connections at full speed and with no external test vectors. Test modes can be controlled and defaults can be located through a single test bus based on the IEEE 1149.1 (JTAG) standard. The MCM can be fully tested with no other test equipment than a standard PC connected to its test bus.
本文介绍了一种用于空间应用的大型MCM。设计限制非常严格:小体积,轻重量,高信号速度,最小功耗,高压,暴露于空间真空。MCM包含120万个晶体管。它需要设计8种不同类型的asic,采用3种不同的技术:CMOS、ECL、混合信号双极。采用达索电子公司的高密度光可成像厚膜工艺(PCM)制备了衬底,本文对其进行了简要介绍。铝制包装用于减轻重量和改善热传导。支撑盖子的支架被用来处理高压。MCM和asic同时设计,以尽可能简化MCM的布局。尽管路由密度很高,但只使用了4层。大量的流量被“推”到asic中,在那里没有与连接相关的显著额外成本。ASIC衬垫与MCM导线相匹配。实施了全球性的“为测试而设计”战略。asic包括内部和外部内置自我测试(BIST)资源,允许在全速测试asic和MCM连接,而无需外部测试向量。通过基于IEEE 1149.1 (JTAG)标准的单个测试总线,可以控制测试模式并确定默认值。MCM可以完全测试,没有其他测试设备,只有一个标准的PC连接到它的测试总线。
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引用次数: 0
Development of a Dsp Function Using a Mcm Technology 基于Mcm技术的Dsp功能开发
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753578
M. Michaud, J. Rameš
INTRODUCTION The main electronic activity of MATRA DEFENSE is the development and production of pilot and guidance equipments for air to air missiles. In the mid 80's MATRA DEFENSE qualified a double sided Surface Mount Technology in order to reduce the size and cost of the electronic equipments. This technology is based on polyimide multilayer ( 10 to 14 layers) printed circuit with 2 sheets of Copper / Invar/ Copper. Components are packaged in Leadless Ceramic Chip Carriers and vapor phase is used for the soldering process. In 1990 MATRA DEFENSE started an R&D programme on MCM. We decided not to build the substrate in house, but to concentrate our efforts on the design and the assembly technology for MCM. The two first modules developed were memory modules ( SRAM and EEPROM ) but these modules were nevers build in series because they didn't fit our needs in terms of size and production cost in comparison with the monolithic components. Our first real application was a complex MCM standard module for using in different applications to be produced in "large" series.
MATRA DEFENSE的主要电子活动是空对空导弹的飞行员和制导设备的开发和生产。在80年代中期,MATRA DEFENSE合格的双面表面贴装技术,以减少电子设备的尺寸和成本。该技术是基于聚酰亚胺多层(10至14层)印刷电路与2片铜/ Invar/铜。组件封装在无铅陶瓷芯片载体中,气相用于焊接过程。1990年,MATRA DEFENSE开始了MCM的研发计划。我们决定不自行制造基板,而是将精力集中在MCM的设计和组装技术上。最初开发的两个模块是内存模块(SRAM和EEPROM),但这些模块从未串联构建,因为与单片组件相比,它们在尺寸和生产成本方面不适合我们的需求。我们的第一个真正的应用程序是一个复杂的MCM标准模块,用于在“大型”系列中生产的不同应用程序。
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引用次数: 0
期刊
Proceedings of the International Conference on Multichip Modules
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