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Universal Membrane Probe for Known Good Die 通用膜探头已知好的模具
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753558
Y. Kondoh, T. Ueno
We propose a new type of membrane probe, which might be called a Universal Membrane Probe (UMP), as a standard Known-Good Die (KGD) solution for Multi Chip Module (MCM) manufacture. In this paper we will give an outline of this new probe, describe the newly developed manufacturing process for it, and evaluate the performance of a prototype probe. The features of this probe are firstly that it is disposable and based on low-cost materials such as Tape Automated Bonding (TAB) tape; secondly, it is non-customized and so applicable to a wide variety of die sizes and pad configurations; and finally it potentially offers a new standard for wafer probing.
我们提出了一种新型的膜探针,可称为通用膜探针(UMP),作为多芯片模块(MCM)制造的标准已知好模(KGD)解决方案。在本文中,我们将给出这种新型探头的概述,描述其新开发的制造工艺,并评估原型探头的性能。该探头的特点是,首先,它是一次性的,基于低成本的材料,如胶带自动粘合(TAB)胶带;其次,它是非定制的,因此适用于各种模具尺寸和垫配置;最后,为晶圆探测提供了新的标准。
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引用次数: 1
AT&T spl mu/Surface Mount Assembly: A New Technology for the Large Volume Fabrication of Cost Effective Flip-Chip MCMs 美国电话电报公司(AT&T) spl μ /表面贴装组装:一种大规模制造低成本倒装微处理器的新技术
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753561
T. Dudderar, Y. Degani, J. G. Spadafora, K. Tai, R. Frye
The realization of a high speed, high-yield flip-chip assembly capability is essential to the development of a practical, cost effective MCM technology because it supports large volume, relatively inexpensive product applications in which equipment costs per unit can be minimized. This paper describes a novel assembly technique for flip-chip silicon-on-silicon Multi-Chip Module (MCM-D) tiles which readily meets the above criteria. This new hybrid technique, which is called AT&T /spl mu/SMT, involves stencil printing a custom AT&T ultra-fine pitch solder paste directly onto a silicon fabric wafer which is then populated with bare die and reflowed, much as surface mount packaged components would be assembled onto a circuit board. This approach is capable of achieving higher component and interconnection densities than can be achieved with any fine-pitch SMT design - and at a lower unit cost at large production volumes than can be achieved with any other MCM assembly technology.
实现高速、高产量的倒装芯片组装能力对于开发实用、低成本的MCM技术至关重要,因为它支持大批量、相对廉价的产品应用,可以将每单位设备成本降至最低。本文介绍了一种新的倒装硅片多芯片模块(MCM-D)组装技术,该技术很容易满足上述标准。这种新的混合技术被称为AT&T /spl mu/SMT,它涉及将定制的AT&T超细间距锡膏直接印刷到硅织物晶圆上,然后填充裸模并回流,就像表面贴装封装组件将组装到电路板上一样。与任何细间距SMT设计相比,这种方法能够实现更高的组件和互连密度,并且在大批量生产时的单位成本低于任何其他MCM组装技术。
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引用次数: 23
Thin Film Programmable Interconnect Arrays 薄膜可编程互连阵列
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753565
A. B. Frazier, R. Powers, M. Allen
A new low cost material is presented for the realization of thin film programmable interconnect arrays for selective switching of chip to substrate interconnects from a high impedance state to a low impedance state. The programmable interconnect arrays are realized using a tri-level graphite-filled polyimide system as an interlayer material between metallic electrodes. The interconnects are switched from a high impedance to a low impedance state using an activation current to heat the material between the electrodes. This current causes an irreversible change of material resistivity which persists even after the current is removed. The graphite loading of the individual layers is varied in order to obtain the optimal interconnect characteristics. The characteristics of interest at this time are the dc levels of the interconnect initial resistance and the final resistance as well as the magnitude of the change in resistance between the initial and final states. Results of various layer combinations including 5/30/30, 0/18/0 and 3/3/3 wt% graphite are presented.
提出了一种新的低成本材料,用于实现薄膜可编程互连阵列,实现芯片与衬底互连从高阻抗状态到低阻抗状态的选择性切换。可编程互连阵列采用三能级石墨填充聚酰亚胺系统作为金属电极之间的中间层材料实现。使用激活电流加热电极之间的材料,将互连从高阻抗状态切换到低阻抗状态。这种电流引起材料电阻率的不可逆变化,即使在电流被移除后这种变化仍然存在。为了获得最佳的互连特性,需要改变各层的石墨负载。此时感兴趣的特性是互连初始电阻和最终电阻的直流电平,以及初始和最终状态之间电阻变化的幅度。给出了5/30/30、0/18/0和3/3 wt%石墨的不同层组合的结果。
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引用次数: 0
Multichip module technologies for high-speed ATM switching systems 高速ATM交换系统的多芯片模块技术
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753541
S. Sasaki, T. Kishimoto, K. Genda, K. Endo, K. Kaizu
High-performance, compact multichip modules (MCMs) using a copper polyimide multi-layer substrate are used to make a 40-Gb/s-throughput ATM switching module. The MCM substrate has 392 high-speed signal I/0 channels, thin-film termination resistors, and 50 /spl mu/m laminated capacitance layers. We made a sub switching element module using these MCMs, new high-speed FPC cables, and heat pipes fins. This sub-switching element module can operate at 80 Gb/s throughput.
采用聚酰亚胺铜多层基板的高性能、紧凑型多芯片模块(mcm)用于制造吞吐量为40 gb /s的ATM交换模块。MCM衬底具有392个高速信号I/0通道,薄膜终端电阻和50 /spl mu/m的层压电容层。我们使用这些mcm,新型高速FPC电缆和热管翅片制作了子开关元件模块。该子交换元件模块的吞吐量为80gb /s。
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引用次数: 16
Development and Realization of a Doubleface Populated Multichip Module in Thin Film Technology for High Frequency Application 高频应用薄膜技术中双面填充多芯片模块的开发与实现
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753563
M. Oppermannm, E. Feurer, B. Holl
A doubleface populated transmit/receive (TR) multichip module for radar applications has been implemented with multilayer integration technology. The multilayer is designed and fabricated in thin film technology on A1203 ceramic substrates and offers a high order of complexity for high frequency (hf/rf) circuits up to 20 GHz. 100 /spl mu/m striplines with integrated thin film resistors in combination with the dielectric spaced ground layer on the opposite side define the hf layer on top of the substrate. The multilayer logic control unit on the backside consists of three metal layers (ground-, x-, y conductor plane), each seperated by patterned polymeric dielectrics (Polyimide, Benzocyclobutene). This paper describes the necessary technological steps for high performance in thin film technology. Metallization is done in semi-additive technology and the structured dielectric layers are realized with spin coated materials. Through-holes metallization in the substrate allows communication between the two sides and very short interconnections between the GaAs-MMIC's and the logic control unit.
采用多层集成技术实现了一种用于雷达应用的双面填充收发(TR)多芯片模块。该多层电路采用薄膜技术在A1203陶瓷衬底上设计和制造,为高达20 GHz的高频(hf/rf)电路提供了高复杂度。带有集成薄膜电阻的100 /spl mu/m带状线与对面的介电间隔接地层相结合,确定了衬底顶部的高频层。背面的多层逻辑控制单元由三个金属层(接地、x线、y线导体平面)组成,每层由图案聚合电介质(聚酰亚胺、苯并环丁烯)隔开。本文介绍了薄膜技术实现高性能的必要工艺步骤。金属化采用半增材技术,结构介质层采用自旋涂层材料实现。基板中的通孔金属化允许双方之间的通信以及GaAs-MMIC和逻辑控制单元之间的非常短的互连。
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引用次数: 1
Global Optimization of MCMs with ASICs Using Concurrent Engineering 基于并行工程的集成集成电路mcm全局优化
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753581
J. Cazenave, G. Dupenloup
This paper describes a large MCM developed for space applications. Design constraints were extremely severe: low volume, low weight, high signal speed, minimum power consumption, high pressure, exposition to space vacuum. The MCM includes 1.2 million of transistors. It required the design of 8 different types of ASICs in 3 different technologies: CMOS, ECL, mixed-signal bipolar. The substrate has been fabricated using Dassault Electronique's high-density photo-imageable thick-film process (PCM technology), that is briefly described in this paper. An Aluminium package was used to save weight and improve thermal conduction. Stand-offs sustaining the lid were used to handle high pressure. The MCM and the ASICs were concurrently designed to simplify the layout of the MCM as much as possible. Despite high routing density, only 4 layers were used. Heavy traffic was "pushed" into ASICs where there is no significant extra cost associated with connections. The ASIC pads were arranged to match MCM wires. A global Design-For-Test strategy has been implemented. The ASICs include internal and external Built-In Self Test (BIST) resources, that allow to test the ASICs and the MCM connections at full speed and with no external test vectors. Test modes can be controlled and defaults can be located through a single test bus based on the IEEE 1149.1 (JTAG) standard. The MCM can be fully tested with no other test equipment than a standard PC connected to its test bus.
本文介绍了一种用于空间应用的大型MCM。设计限制非常严格:小体积,轻重量,高信号速度,最小功耗,高压,暴露于空间真空。MCM包含120万个晶体管。它需要设计8种不同类型的asic,采用3种不同的技术:CMOS、ECL、混合信号双极。采用达索电子公司的高密度光可成像厚膜工艺(PCM)制备了衬底,本文对其进行了简要介绍。铝制包装用于减轻重量和改善热传导。支撑盖子的支架被用来处理高压。MCM和asic同时设计,以尽可能简化MCM的布局。尽管路由密度很高,但只使用了4层。大量的流量被“推”到asic中,在那里没有与连接相关的显著额外成本。ASIC衬垫与MCM导线相匹配。实施了全球性的“为测试而设计”战略。asic包括内部和外部内置自我测试(BIST)资源,允许在全速测试asic和MCM连接,而无需外部测试向量。通过基于IEEE 1149.1 (JTAG)标准的单个测试总线,可以控制测试模式并确定默认值。MCM可以完全测试,没有其他测试设备,只有一个标准的PC连接到它的测试总线。
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引用次数: 0
Implementing a Tab Tape-based Known Good Die Method 基于标签带的已知好模方法的实现
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753523
M. Salatino, R. Nolan, T. Bishop, C. Bieber
The success of nearly every multichip electronic system depends on the availability of functional, reliable chips. As chip counts in a multichip system increase, this dependency is critical. In most cases, "known good" die (KGD) are not readily available in an unpackaged form. This was a prime consideration in MCC's. Flip Chip Development Project. As part of this project, MCC was chartered with developing a method for high speed test and dynamic burn-in of single, bare IC chips. The method developed can be implemented by bare die users using "off-the-shelf" technology. It can also be implemented by bare chip suppliers without modification to the existing fabrication processes. The heart of this process is a TAB tape-based carrier. TAB tape is used to contact the chip bond pads (without actual metallurgical bonding) at about 10 grams per lead contact force. The chip is clamped to the TAB leads, and held in place so that the tape site (in its JEDEC-standard slide carrier) can be transported, tested, and burned-in just like TAB chip-on-tape. Upon test completion, the chip is removed, and is ready for wire bonding, flip chip attach, etc. The carrier has been characterized with aluminum, gold, and solder-bumped chip bond pads, and is compatible with these pad metallizations. Four re-uses of the carrier through 168 hours/150"C of burn-in have been demonstrated. In this paper, the results of MCC's initial prototype testing are discussed. Data includes contact resistance vs. pressure, chip metallurgy, and time. The cost of this approach is presented for a wide range of production volumes. In addition, preliminary results from beta-site testing (by a bare chip supplier) of this method are presented.
几乎每个多芯片电子系统的成功都依赖于功能可靠的芯片的可用性。随着多芯片系统中芯片数量的增加,这种依赖性是至关重要的。在大多数情况下,“已知好的”模具(KGD)不容易以未包装的形式提供。这是世纪挑战集团的首要考虑因素。倒装芯片开发项目。作为该项目的一部分,中冶集团被授权开发一种高速测试和单个裸IC芯片动态老化的方法。所开发的方法可以由裸模用户使用“现成”技术实现。它也可以由裸片供应商实施,而无需修改现有的制造工艺。这个过程的核心是一个基于TAB磁带的载体。TAB胶带用于接触芯片粘合垫(没有实际的冶金粘合),每铅接触力约为10克。芯片夹在标签引线上,并固定在适当的位置,以便胶带部位(在其jedec标准滑动载体中)可以运输,测试和刻录,就像标签芯片在胶带上一样。测试完成后,芯片被移除,并准备进行导线键合,倒装芯片连接等。载体的特点是具有铝、金和焊接碰撞芯片键合垫,并且与这些垫金属化相兼容。通过168小时/150”C的老化,已经证明了载体的四次重复使用。本文讨论了MCC初始样机试验的结果。数据包括接触电阻与压力、切屑冶金和时间。这种方法的成本适用于各种产量。此外,本文还介绍了该方法(由一家裸片供应商)的beta-site测试的初步结果。
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引用次数: 0
Integrated Brazed Ltcc Packages 集成钎焊Ltcc封装
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753613
A. L. Kovacs, D. Elwell
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引用次数: 4
Mcm-L Product Development Process for Low-Cost Mcms 低成本Mcm-L产品开发过程
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753588
P. Thompson
In Motorola's experience with commercial MCM customers, system size and cost reduction are the largest factors for interest in MCMs. Performance improvement is generally of secondary interest. Development and qualification can add significantly to the total cost of an MCM, so in addition to the normal desire to provide reliable products, the cost of doing so has gained increased importance. A new product introduction (NPI) process for low-cost MCMs has been implemented to rapidly provide cost-effective, reliable MCM solutions for cost-sensitive MCM users. The NPI process is based on three attributes: leverage single chip package (SCP) experience and technology, perform product family qualifications and use only previously qualified silicon in MCMs. Application of the NPI process to the development and qualification of the 28mm MCML/sup TM/ Series package is presented in this paper.
在摩托罗拉与商业MCM客户的经验中,系统尺寸和成本降低是MCM的最大兴趣因素。性能改进通常是次要的。开发和认证会大大增加MCM的总成本,因此除了提供可靠产品的正常愿望之外,这样做的成本变得越来越重要。低成本MCM的新产品引入(NPI)流程已经实施,为成本敏感的MCM用户快速提供具有成本效益,可靠的MCM解决方案。NPI流程基于三个属性:利用单芯片封装(SCP)经验和技术,执行产品系列认证,并在mcm中仅使用先前合格的硅。本文介绍了新产品导入工艺在28mm MCML/sup TM/系列封装开发与鉴定中的应用。
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引用次数: 3
Development of a Dsp Function Using a Mcm Technology 基于Mcm技术的Dsp功能开发
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753578
M. Michaud, J. Rameš
INTRODUCTION The main electronic activity of MATRA DEFENSE is the development and production of pilot and guidance equipments for air to air missiles. In the mid 80's MATRA DEFENSE qualified a double sided Surface Mount Technology in order to reduce the size and cost of the electronic equipments. This technology is based on polyimide multilayer ( 10 to 14 layers) printed circuit with 2 sheets of Copper / Invar/ Copper. Components are packaged in Leadless Ceramic Chip Carriers and vapor phase is used for the soldering process. In 1990 MATRA DEFENSE started an R&D programme on MCM. We decided not to build the substrate in house, but to concentrate our efforts on the design and the assembly technology for MCM. The two first modules developed were memory modules ( SRAM and EEPROM ) but these modules were nevers build in series because they didn't fit our needs in terms of size and production cost in comparison with the monolithic components. Our first real application was a complex MCM standard module for using in different applications to be produced in "large" series.
MATRA DEFENSE的主要电子活动是空对空导弹的飞行员和制导设备的开发和生产。在80年代中期,MATRA DEFENSE合格的双面表面贴装技术,以减少电子设备的尺寸和成本。该技术是基于聚酰亚胺多层(10至14层)印刷电路与2片铜/ Invar/铜。组件封装在无铅陶瓷芯片载体中,气相用于焊接过程。1990年,MATRA DEFENSE开始了MCM的研发计划。我们决定不自行制造基板,而是将精力集中在MCM的设计和组装技术上。最初开发的两个模块是内存模块(SRAM和EEPROM),但这些模块从未串联构建,因为与单片组件相比,它们在尺寸和生产成本方面不适合我们的需求。我们的第一个真正的应用程序是一个复杂的MCM标准模块,用于在“大型”系列中生产的不同应用程序。
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引用次数: 0
期刊
Proceedings of the International Conference on Multichip Modules
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