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Interconnected Mesh Power System, (IMPS) A Packaging and Interconnection Application 互联网状电力系统(IMPS)的封装与互联应用
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753549
C. V. Reynolds, L. Schaper
High volume applications of complex MCMs are slow to enter commercial production. There are two major interrelated technological barriers, namely the availability of reliable and cost and performance effective known good interconnection substrates and the commercial availability of known good die (KGD). This paper reports on an application of the, Interconnected Mesh Power System (IMPS) *[1] interconnect topology in an MCM-L based design to achieve the same interconnect and electrical functionality as that accomplished with four layers. This was accomplished using the two layer topology with a third layer dedicated to mounting the caps.
复杂mcm的大批量应用进入商业生产的速度很慢。有两个主要的相互关联的技术障碍,即可靠和成本和性能有效的已知良好互连基板的可用性和已知良好模具(KGD)的商业可用性。本文报道了互连网状电力系统(IMPS) *[1]互连拓扑在基于MCM-L的设计中的应用,以实现与四层完成的相同的互连和电气功能。这是使用两层拓扑结构完成的,第三层专门用于安装盖子。
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引用次数: 1
An ATM Switching Module using MCM-C Technology 基于MCM-C技术的ATM交换模块
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753539
M. Yamada, Y. Otsuki, T. Kikuchi, H. Shibuya
Multichip module (MCM) technology has been expected for high speed and high density packaging. Authors have developed an 8 x 8 ATM switching module with clock speed of 622 Mb/s and power consumption of 60 watts by using MCM-C technology with low temperature co-fired ceramic (LTCC) substrate. This paper will discuss MCM packaging technologies for an ATM switching module.
多芯片模块(MCM)技术已被寄予高速和高密度封装的期望。作者利用MCM-C技术和低温共烧陶瓷(LTCC)衬底,开发了时钟速度为622 Mb/s、功耗为60瓦的8 × 8 ATM交换模块。本文将讨论ATM交换模块的MCM封装技术。
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引用次数: 1
Accurate I/O Models for High Speed Digital Design Using Spice Controlled Sources 使用香料控制源的高速数字设计的精确I/O模型
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753605
R. Goyal
For useful signal integrity analysis, availability of timely and accurate silicon models is extremely important. Nonlinear voltage controlled current sources (vccs), current controlled voltage sources (ccvs), voltage controlled voltage sources (vcvs) and current controlled current sources (cccs), available in Spice can be used in describing these device models. With this approach, one can represent the macro- models of driver, receiver, load and termination using basic controlled sources as Spice primitives, without revealing process related proprietary information.
对于有用的信号完整性分析,及时和准确的硅模型是非常重要的。Spice中提供的非线性电压控制电流源(vccs)、电流控制电压源(ccvs)、电压控制电压源(vcvs)和电流控制电流源(cccs)可用于描述这些器件模型。通过这种方法,可以使用基本的受控源作为Spice原语来表示驱动程序、接收器、加载和终止的宏模型,而无需透露与过程相关的专有信息。
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引用次数: 0
Demonstration of a High Heat Removal Cvd Diamond Substrate Edge-Cooled Multichip Module 高散热Cvd金刚石基板边缘冷却多芯片模块的演示
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753618
D. Peterson, J. Sweet, D.D. Andaleon, R. F. Renzi, D. Johnson
A single substrate intended for a 3-dimensional (3D) edge-cooled multichip module (MCM) has been built and thermally tested. The substrate, with dimensions 1.9 in. by 2 in., is mounted in a fluid cooled block at one end. To test this cooling architecture and verify the accuracy of thermal models, we constructed thermal test modules using alumina (Al/sub 2/O/sub 3/), aluminum nitride (AIN), and CVD diamond substrate materials. Each module was populated with an array of 16 Sandia ATC03 test chips with resistive heaters and temperature sensing diode thermometers. Comparative measurements of the 3 substrates were made in which the top row of 4 die were heated at 5 W each for a total of 20 W. The maximum temperature differences between the heated die and the interface with the cold chuck, /spl Delta/T/sub JS/, were 24, 126, and 265/spl deg/C for diamond, AIN and Al/sub 2/O/sub 3/, respectively. Measurements on the diamond thermal test module, uniformly heated at a total power of 45 W, gave a measured substrate-to-sink temperature of /spl Delta/T /spl AP/ 20/spl deg/C. An extrapolation of our experimental data indicates that the diamond edge-cooled substrate could dissipate a total power /spl AP/ 192 W for a maximum junction-to-ambient temperature of /spl Delta/T/sub JA/ /spl AP/ 124/spl deg/C. If multiple substrates were 3 mounted in the fluid cooled block, spaced 0.075 in. apart, the volumetric power density would be about 850 W/in/sup 3/.
用于三维(3D)边缘冷却多芯片模块(MCM)的单一基板已经构建并进行了热测试。衬底,尺寸1.9英寸。2英寸。,安装在一端的液冷块中。为了测试这种冷却架构并验证热模型的准确性,我们使用氧化铝(Al/sub 2/O/sub 3/)、氮化铝(AIN)和CVD金刚石衬底材料构建了热测试模块。每个模块都配备了16个Sandia ATC03测试芯片阵列,这些芯片带有电阻加热器和温度传感二极管温度计。对3种基片进行了比较测量,其中4个模具的顶排分别以5w加热,共20w。对于金刚石、AIN和Al/sub 2/O/sub 3/,加热模与冷夹头界面/spl Delta/T/sub JS/的最大温差分别为24、126和265/spl℃。金刚石热测试模块在总功率为45 W的情况下均匀加热,测量得到的基片到熔池的温度为/spl Delta/T /spl AP/ 20/spl℃。我们的实验数据外推表明,金刚石边缘冷却衬底可以消耗总功率/spl AP/ 192 W,最大结环境温度为/spl Delta/T/sub JA/ /spl AP/ 124/spl℃。如果在液冷块中安装多个基板,间距为0.075英寸。除此之外,体积功率密度约为850 W/in/sup /。
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引用次数: 8
A Cost-Effective Wafer-Level Burn-In Technology 具有成本效益的晶圆级老化技术
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753526
D. Tuckerman, B. Jarvis, Chang-Ming Lin, P. Patel, M. Hunt
A new wafer-level bum-in method is presented. The method incorporates a silicon "bum-in substrate" fabricated using MCM-D substrate technology, and includes integral isolation resistors. The novel, Si wafer-to Si wafer pressure contact technology is based on deformable solder bumps and is functional in a high temperature burn-in environment, immune to thermal expansion mismatch problems, reusable, and does not damage or contaminate bond pads. The method is suitable for high-volume production and can reduce bum-in costs, even for chips that are ultimately destined for single-chip packages.
提出了一种新的晶圆级烧进方法。该方法采用采用MCM-D衬底技术制造的硅“内置衬底”,并包括集成隔离电阻。这种新颖的硅片对硅片压力接触技术基于可变形的焊料凸起,可在高温烧坏环境中发挥作用,不受热膨胀不匹配问题的影响,可重复使用,并且不会损坏或污染焊盘。该方法适用于大批量生产,可以降低损耗成本,甚至对于最终用于单芯片封装的芯片也是如此。
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引用次数: 6
A Large Format Modified TEA CO/sub 2/ Laser Based Process for Cost Effective Small Via Generation 一种大幅面改进TEA CO/sub 2/激光工艺,具有成本效益的小通孔生成
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753577
J. Morrison, T. Tessier, B. Gu
Recently, a Transverse Excited Atmospheric (TEA) CO/sub 2/ laser technology has been developed-for the micro-machining of Was in non-reinforced glass laminates. This system has been designed to accommodate the large panel sizes associated with PW8 processing. The salient features of this modified CO/sub 2/ laser technology are summarized. A joint Lumonics / Motorola study was carried out to assess the applicability of this laser processing technology for use in higher density PWB and MCM-L substrate processing and its compatibility with currently available classes of dielectrics currently used in high density interconnect applications. A lox improvement in cycle time / throughput over our existing raster scanning laser ablation process has been demonstrated.
近年来,发展了一种横向激励大气(TEA) CO/sub - 2/激光技术,用于非增强玻璃层压板的微加工。该系统的设计是为了适应与PW8加工相关的大面板尺寸。总结了这种改性CO/sub /激光技术的显著特点。Lumonics和Motorola联合进行了一项研究,以评估这种激光加工技术在高密度PWB和MCM-L基板加工中的适用性,以及它与目前用于高密度互连应用的现有介电材料的兼容性。与我们现有的光栅扫描激光烧蚀工艺相比,在周期时间/吞吐量方面有了很大的改善。
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引用次数: 2
A Large Area, 3-D Stackable, Mcm-D on C Signal Processor C信号处理器上的大面积三维可堆叠Mcm-D
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753615
L. Arndt
Military applications for MCMs often require non-standard form factors tailored to fit the unique configurations of military systems. Size and weight requirements may further restrict the use of standard packaging and interconnect methods such as the typical SMT packages mounted on PWBs and backplanes. Cost and design cycle time considerations however argue in favor of standard configurations which can be used in multiple applications without incurring significant NRE costs or risks for each new application. An MCM approach will be presented which uses polymer thin film HDI deposited onto an LTCC substrate to provide a flexible form factor and a very high functional density, while maintaining the advantages of a standard, proven architecture and a fixed HDI layout. The HDI provides all internal chip-to-chip interconnect, while the LTCC acts as the package floor, redistributes primary I/O, and provides physical conformance to each target system. Hermetic sealing of the chips and HDI is accomplished by routinely brazing a Kovar seal ring onto the LTCC and subsequently seam welding a Kovar lid into place. This configuration also provides an I/O pad array interface which tends itself well to direct 3-D stacking of multiple MCMs in a "building block" fashion using only connectors but no PWB or backplane. MCMs have been successfully fabricated at two different HDI foundries, using Alumina substrates, while LTCC / HDI materials and processing techniques were matured. Testing of these MCMs has been successful with demonstrated performance superior to the PWB version of the circuit.
mcm的军事应用通常需要非标准的外形因素,以适应军事系统的独特配置。尺寸和重量要求可能会进一步限制标准封装和互连方法的使用,例如安装在pwb和背板上的典型SMT封装。然而,考虑到成本和设计周期时间,人们倾向于采用标准配置,这种配置可以在多个应用中使用,而不会对每个新应用产生重大的NRE成本或风险。MCM方法将使用沉积在LTCC基板上的聚合物薄膜HDI,提供灵活的外形因素和非常高的功能密度,同时保持标准,成熟的架构和固定HDI布局的优势。HDI提供所有内部芯片到芯片的互连,而LTCC充当封装层,重新分配主I/O,并为每个目标系统提供物理一致性。芯片和HDI的密封是通过常规钎焊在LTCC上的Kovar密封圈完成的,随后将Kovar盖缝焊到位。这种配置还提供了一个I/O垫阵列接口,它可以很好地指导多个mcm以“构建块”的方式进行3-D堆叠,只使用连接器,而不使用PWB或背板。随着LTCC / HDI材料和加工技术的成熟,mcm已在两个不同的HDI铸造厂成功制造,使用氧化铝衬底。这些mcm的测试已经成功,证明性能优于pcb版本的电路。
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引用次数: 0
Ball Grid Array Ceramic Packages 球栅阵列陶瓷封装
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753598
P. Danner
With the advent of greater density assembly, increased i/o connections and higher power dissipation requirements, a new method of producing cost effective high pin count packages is being demonstrated. Ball grid array packages have been around for several years, both in ceramic and laminate technologies and are now being accepted as a viable packaging alternative. This discussion will describe a low cost method to combine ceramic multichip module technology with ball grid array assembly. The methods are unique in the placement of the solder spheres, the almost spherical dimensions of the connections and the extreme ruggedness of the resulting package. The improved thermal characteristics, ease of assembly and low cost will make this packaging technique a practical solution for todays demands.
随着更高密度组装、i/o连接和更高功耗要求的出现,一种生产具有成本效益的高引脚数封装的新方法正在被证明。球栅阵列封装已经存在了好几年,无论是陶瓷还是层压板技术,现在都被接受为一种可行的封装替代方案。本文将介绍一种将陶瓷多芯片模组技术与球栅阵列组装相结合的低成本方法。该方法在焊料球体的放置,几乎球形的连接尺寸和最终封装的极端坚固性方面是独一无二的。改进的热特性,易于组装和低成本将使这种封装技术成为当今需求的实用解决方案。
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引用次数: 1
Development of a Burn-in and Test Process for Producing Known-Good-Die 一种生产已知质量模具的磨损和测试工艺的开发
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753524
L. Prokopchak, J. Wrenn
Multichip modules(MCMs) are a major growth market in the IC industry. However, a problem hindering the widespread use of MCM technology is the inability of the MCM manufacturer to obtain bare die with the same level of reliability as those die in packaged devices. If the MCM is determined to be faulty after burn-in and test, it is difficult and expensive to repair. In fact, it can be difficult to isolate the individual chips during bum-in at the module level, making the task of determining the failing chip more laborious. One contributing factor to these failures is the lack of burn-in of the die before the MCM is assembled. If every chip on an 8-chip module has a 4% probability of failing(common for state-of-the-art devices), the module has a 28% chance of failing. This calculation is derived from the equation Pp = (l-P(f))" where; P = probability, p = passing, f = failing, and n = number of die per module. The goal is to deliver to the user known-good-die (KGD) with the same level of electrical test and burn-in reliability as currently available at the package level.
多芯片模块(mcm)是集成电路行业的一个主要增长市场。然而,阻碍MCM技术广泛应用的一个问题是,MCM制造商无法获得与封装器件中那些芯片具有相同可靠性水平的裸晶片。如果MCM经过老化和测试后被确定为故障,则维修困难且费用昂贵。事实上,在模块级别上,在热插拔期间隔离单个芯片可能很困难,这使得确定故障芯片的任务更加费力。造成这些失败的一个因素是在MCM组装之前模具缺乏老化。如果一个8芯片模块上的每个芯片都有4%的故障概率(对于最先进的设备来说很常见),那么该模块有28%的故障概率。该计算由等式Pp = (l-P(f))”推导而来,其中;P =概率,P =通过,f =失败,n =每个模块的骰子数量。其目标是向用户提供具有与当前封装级别相同水平的电气测试和老化可靠性的已知好模具(KGD)。
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引用次数: 1
A New Approach to Produce Cost-effective Known Good Die 一种生产具有成本效益的已知优良模具的新方法
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753522
W. Kim, S. Lee, I. Hyun, K. Lee, J.M. Park
Known good die is an enabling technology for the application on the wide range of electronic industry especially for multichip module application. Wafer level burn-in is an ideal methodology to produce KGD's, but there needs a considerable amount of time until it emerges to a viable process which should be practical and economical. In the mean time, die level burn-in becomes a common method to produce KGD for its practical application as several different types of burn-in carriers are commercially available. In this paper, a new cost effective process to produce KGD is proposed. Conventional wire bonding method was applied for electrical interconnection from chip to printed circuit board, designed for testing several chip together with a multichip holder. A proprietary tool was applied to cut gold wire from bond pad. Mass production of KGD was possible with the new process. Engineering samples, I Meg slow static RAM, produced by the new process showed excellent reliability and provided a significant amount of engineering data. It is believed that the new process can produce known good bare die most economically among existing die level burn-in methods. Because it used well established wire bonding technology rather than burn-in carrier to provide temporary contact between chip to test equipment which quite often proved unreliable in terms of contact resistance and can be used only limited number of times.
已知好的模具是一种广泛应用于电子工业特别是多芯片模块应用的使能技术。晶圆级烧蚀是生产KGD的理想方法,但需要相当长的时间,直到它出现一个可行的过程,应该是实用和经济的。同时,由于市面上有几种不同类型的烧蚀载体,因此模具级烧蚀已成为生产KGD的常用方法。本文提出了一种经济有效的生产KGD的新工艺。芯片与印刷电路板的电气互连采用传统的线接方法,设计了一个多芯片支架,用于测试多个芯片。采用专有工具从焊盘上切割金丝。新工艺使KGD的批量生产成为可能。新工艺生产的1 Meg慢速静态RAM工程样品显示出出色的可靠性,并提供了大量的工程数据。认为在现有的模具级烧旧方法中,新工艺能最经济地生产出已知质量好的裸模。因为它使用了成熟的线键合技术,而不是烧坏载体来提供芯片之间的临时接触,以测试设备,这往往被证明在接触电阻方面不可靠,只能使用有限的次数。
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引用次数: 0
期刊
Proceedings of the International Conference on Multichip Modules
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