Pub Date : 2018-07-01DOI: 10.1109/NANO.2018.8626330
Yiguo Chen, Jiahao Zhao, Yongfeng Gao
A new approach is developed for environment energy harvesting based on an electrostatic MEMS switch due to its hysteresis property. A hysteresis model of the electrostatic MEMS switch is established, and theoretical and experimental results show that the hysteresis window is designable. A demo for piezoelectric energy harvesting based on the MEMS switch is designed and finished. The approach is compacted, passive and efficient, which facilitates the development of energy harvesting.
{"title":"An approach with electrostatic MEMS switch for environment energy harvesting","authors":"Yiguo Chen, Jiahao Zhao, Yongfeng Gao","doi":"10.1109/NANO.2018.8626330","DOIUrl":"https://doi.org/10.1109/NANO.2018.8626330","url":null,"abstract":"A new approach is developed for environment energy harvesting based on an electrostatic MEMS switch due to its hysteresis property. A hysteresis model of the electrostatic MEMS switch is established, and theoretical and experimental results show that the hysteresis window is designable. A demo for piezoelectric energy harvesting based on the MEMS switch is designed and finished. The approach is compacted, passive and efficient, which facilitates the development of energy harvesting.","PeriodicalId":425521,"journal":{"name":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","volume":"67 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122258019","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/NANO.2018.8626273
B. Bertrand, L. Hutin, L. Bourdet, A. Corna, B. Jadot, H. Bohuslavskvi, A. Crippa, R. Maurand, S. Barraud, M. Urdampilleta, C. Bäuerle, T. Meunier, M. Sanquer, X. Jehl, S. De Francerschi, Y. Niquet, M. Vinet
Abst ract We pres ent the rece nt adva nces mad e tow ards the reali zati on of elect ron and hole qua ntu m bit devi ces on a Silicon-On-Insulator (SOI) technology. Such devices are obtained by slightly modifying our standard process flow for nanowire transistor fabrication. Recent developments on electrical control of the qubits are reviewed.
{"title":"Development of spin quantum bits in SOI CMOS technology","authors":"B. Bertrand, L. Hutin, L. Bourdet, A. Corna, B. Jadot, H. Bohuslavskvi, A. Crippa, R. Maurand, S. Barraud, M. Urdampilleta, C. Bäuerle, T. Meunier, M. Sanquer, X. Jehl, S. De Francerschi, Y. Niquet, M. Vinet","doi":"10.1109/NANO.2018.8626273","DOIUrl":"https://doi.org/10.1109/NANO.2018.8626273","url":null,"abstract":"Abst ract We pres ent the rece nt adva nces mad e tow ards the reali zati on of elect ron and hole qua ntu m bit devi ces on a Silicon-On-Insulator (SOI) technology. Such devices are obtained by slightly modifying our standard process flow for nanowire transistor fabrication. Recent developments on electrical control of the qubits are reviewed.","PeriodicalId":425521,"journal":{"name":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124892112","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/NANO.2018.8626253
A. Brady-Boyd, R. O'Connor, S. Armini, S. Selvaraju, G. Hughes, J. Bogan
Electroless deposited (ELD) cobalt with palladium as a catalyst, and an underlying self-assembled monolayer (SAM) was investigated for potential use in advanced complementary metal oxide semiconductor (CMOS) applications using both hard (HAXPES) and soft (XPS) x-ray photoelectron spectroscopy. HAXPES spectra established the uniformity of the deposited Co film and the nature of the buried Co-Si interface ~20nm below the surface. The Pd is seen to diffuse through the Co following thermal annealing. While the deposited Co film is predominantly metallic, Co-silicide forms at the Co-Si interface upon deposition and decomposes with thermal anneal up to 500°C.
{"title":"Characterisation of Electroless Deposited Cobalt by Hard and Soft X-ray Photoemission Spectroscopy","authors":"A. Brady-Boyd, R. O'Connor, S. Armini, S. Selvaraju, G. Hughes, J. Bogan","doi":"10.1109/NANO.2018.8626253","DOIUrl":"https://doi.org/10.1109/NANO.2018.8626253","url":null,"abstract":"Electroless deposited (ELD) cobalt with palladium as a catalyst, and an underlying self-assembled monolayer (SAM) was investigated for potential use in advanced complementary metal oxide semiconductor (CMOS) applications using both hard (HAXPES) and soft (XPS) x-ray photoelectron spectroscopy. HAXPES spectra established the uniformity of the deposited Co film and the nature of the buried Co-Si interface ~20nm below the surface. The Pd is seen to diffuse through the Co following thermal annealing. While the deposited Co film is predominantly metallic, Co-silicide forms at the Co-Si interface upon deposition and decomposes with thermal anneal up to 500°C.","PeriodicalId":425521,"journal":{"name":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","volume":"57 9","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114000310","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/NANO.2018.8626280
C. Persson
Emerging Cu-based materials are explored to benefit from the energetically high-lying Cu d-state in combination with low effective mass of the minority carriers. Materials with higher functionality open for ultrathin devices (<50 nm) and thereby less raw material usage.
{"title":"Copper-based $(mathrm{S},text{Se})_{3}$ chalcogenides for ultrathin inorganic solar cells $text{Cu}_{3}$","authors":"C. Persson","doi":"10.1109/NANO.2018.8626280","DOIUrl":"https://doi.org/10.1109/NANO.2018.8626280","url":null,"abstract":"Emerging Cu-based materials are explored to benefit from the energetically high-lying Cu d-state in combination with low effective mass of the minority carriers. Materials with higher functionality open for ultrathin devices (<50 nm) and thereby less raw material usage.","PeriodicalId":425521,"journal":{"name":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","volume":"71 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122824127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/NANO.2018.8626323
P. Guenery, E. A. L. León Pérez, K. Ayadi, J. Moeyaert, S. Labau, N. Baboux, D. Deleruyelle, L. Militaru, S. Blonkowski, T. Baron, A. Souifi
this work report on the integration of indium oxide (In2O3) nanocrystals (NCs) for Resistive Random Access Memory (RRAM) applications. The RRAM integration based on MOCVD and ALD depositions is fully compatible fabrication process with CMOS of back-end-off-line. A bipolar switching behavior is clearly linked to In2O3 NC. First RRAM prototypes with HRS/LRS ratios higher than 104 are measured. Device parameter dispersion is observed mainly for Vreset. The NC density has been increased from 3. 108 cm-2 to 2. 10 10 cm-2 with an average NC diameter reduced from 12 nm to 4 nm. The optimization of NC's size dispersion and density is finally expected to reduce the observed parameter dispersion.
{"title":"Indium Oxide Nanostructure Optimization for RRAM Integration on CMOS BEOL","authors":"P. Guenery, E. A. L. León Pérez, K. Ayadi, J. Moeyaert, S. Labau, N. Baboux, D. Deleruyelle, L. Militaru, S. Blonkowski, T. Baron, A. Souifi","doi":"10.1109/NANO.2018.8626323","DOIUrl":"https://doi.org/10.1109/NANO.2018.8626323","url":null,"abstract":"this work report on the integration of indium oxide (In2O3) nanocrystals (NCs) for Resistive Random Access Memory (RRAM) applications. The RRAM integration based on MOCVD and ALD depositions is fully compatible fabrication process with CMOS of back-end-off-line. A bipolar switching behavior is clearly linked to In2O3 NC. First RRAM prototypes with HRS/LRS ratios higher than 104 are measured. Device parameter dispersion is observed mainly for Vreset. The NC density has been increased from 3. 108 cm-2 to 2. 10 10 cm-2 with an average NC diameter reduced from 12 nm to 4 nm. The optimization of NC's size dispersion and density is finally expected to reduce the observed parameter dispersion.","PeriodicalId":425521,"journal":{"name":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127599020","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/NANO.2018.8626345
J. D. Gordon, D. Zemlla
Traditionally we seal our devices and insulate our houses with static materials that possess no ability to change their insulation value. This inevitably leads to increased energy consumption due to thermal management needs: a device may be required to be cooler or warmer, and an insulating material, of static thermal conductivity, doesn't help in this regard. Here we examine the real-time tuneable thermal conductivity properties of a low-voltage device, consisting of a Carbon Nanotube Network embedded in a gel matrix and sandwiched between custom made electrodes. The operating principle is that the thermal conductivities of disordered networks tend to be insulating, while highly aligned networks become metallic. The thermal conductivity, durability, power consumption and extensibility properties of the device are examined.
{"title":"Towards a Tuneable Thermal Conductivity Material via Low Voltage Ordering ofCNT Networks","authors":"J. D. Gordon, D. Zemlla","doi":"10.1109/NANO.2018.8626345","DOIUrl":"https://doi.org/10.1109/NANO.2018.8626345","url":null,"abstract":"Traditionally we seal our devices and insulate our houses with static materials that possess no ability to change their insulation value. This inevitably leads to increased energy consumption due to thermal management needs: a device may be required to be cooler or warmer, and an insulating material, of static thermal conductivity, doesn't help in this regard. Here we examine the real-time tuneable thermal conductivity properties of a low-voltage device, consisting of a Carbon Nanotube Network embedded in a gel matrix and sandwiched between custom made electrodes. The operating principle is that the thermal conductivities of disordered networks tend to be insulating, while highly aligned networks become metallic. The thermal conductivity, durability, power consumption and extensibility properties of the device are examined.","PeriodicalId":425521,"journal":{"name":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","volume":"96 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133123018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/NANO.2018.8626365
D. Mallick, K. Paul, S. Roy
One of the key requirements for magnetic MEMS transducers is the CMOS compatible, rare-earth free batch fabrication of permanent magnets with large energy product. Micro-patterns of nano-structured, CoPtP permanent magnetic material with large coercivity are developed at room temperature using low cost, pulse reverse electro-deposition techniques. The demagnetization fields of the magnetic elements are minimized through optimized micro-patterned structures which enable the full integration of high performance fully integrated MEMS electromagnetic energy harvesting devices.
{"title":"Design Optimization of Fully Integrated, MEMS Electromagnetic Energy Harvesting Devices using Patterned Micro-magnet Arrays","authors":"D. Mallick, K. Paul, S. Roy","doi":"10.1109/NANO.2018.8626365","DOIUrl":"https://doi.org/10.1109/NANO.2018.8626365","url":null,"abstract":"One of the key requirements for magnetic MEMS transducers is the CMOS compatible, rare-earth free batch fabrication of permanent magnets with large energy product. Micro-patterns of nano-structured, CoPtP permanent magnetic material with large coercivity are developed at room temperature using low cost, pulse reverse electro-deposition techniques. The demagnetization fields of the magnetic elements are minimized through optimized micro-patterned structures which enable the full integration of high performance fully integrated MEMS electromagnetic energy harvesting devices.","PeriodicalId":425521,"journal":{"name":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133432615","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/NANO.2018.8626247
Wei-Chuan Shih, Jingting Li, F. Zhao
We report holographic microbubble actuators for micro fluidic manipulation and particle assembly. Taking advantage of the high photothermal conversion efficiency of nanoporous gold disk arrays, we characterize the microbubble size vs. laser power and show that this platform is highly efficient. By forming multiple microbubble at arbitrary locations using holography, sophisticated microfluidic functions such as valving has been achieved. The microbubble also enables high-efficiency assembly of micro/nanoparticles.
{"title":"Holographic Microbubble Actuators for Microfluidic Manipulation and Particle Assembly","authors":"Wei-Chuan Shih, Jingting Li, F. Zhao","doi":"10.1109/NANO.2018.8626247","DOIUrl":"https://doi.org/10.1109/NANO.2018.8626247","url":null,"abstract":"We report holographic microbubble actuators for micro fluidic manipulation and particle assembly. Taking advantage of the high photothermal conversion efficiency of nanoporous gold disk arrays, we characterize the microbubble size vs. laser power and show that this platform is highly efficient. By forming multiple microbubble at arbitrary locations using holography, sophisticated microfluidic functions such as valving has been achieved. The microbubble also enables high-efficiency assembly of micro/nanoparticles.","PeriodicalId":425521,"journal":{"name":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","volume":"71 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133714232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/NANO.2018.8626408
V. Dragoi, S. Cowell, Valeriu Beiu
In this article we analyze the reliability of networks constructed as repetitive compositions of simple identical structures (building blocks). More precisely, we limit our analyses to two-terminal networks composed of only two motifs (two basic building blocks): two devices in series, and two devices in parallel. Therefore, for a given number of devices (which is a power of two) we build all the possible compositions of series and parallel networks of two devices. For all the resulting two-terminal networks, we compute exactly their associated reliability polynomials. These two-terminal networks are ranked according to partial orders over the set of all compositions. These partial orders have reasonably simple algebraic descriptions and can reveal interesting properties, and in particular they allow us to order the resulting two-terminal networks with respect to reliability.
{"title":"Ordering series and parallel compositions","authors":"V. Dragoi, S. Cowell, Valeriu Beiu","doi":"10.1109/NANO.2018.8626408","DOIUrl":"https://doi.org/10.1109/NANO.2018.8626408","url":null,"abstract":"In this article we analyze the reliability of networks constructed as repetitive compositions of simple identical structures (building blocks). More precisely, we limit our analyses to two-terminal networks composed of only two motifs (two basic building blocks): two devices in series, and two devices in parallel. Therefore, for a given number of devices (which is a power of two) we build all the possible compositions of series and parallel networks of two devices. For all the resulting two-terminal networks, we compute exactly their associated reliability polynomials. These two-terminal networks are ranked according to partial orders over the set of all compositions. These partial orders have reasonably simple algebraic descriptions and can reveal interesting properties, and in particular they allow us to order the resulting two-terminal networks with respect to reliability.","PeriodicalId":425521,"journal":{"name":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134313478","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/NANO.2018.8626412
A. Kale, Nan Li, A. Stevenson
Acoustic concentration of target species inside fluidic media has gained attention as a pre-concentration step for improving the performance of several downstream applications. Majority of the existing literature on simulations of this phenomenon focuses upon a point particle assumption which states that the acoustic field responsible for concentration is unaffected by the particles treated as points in a liquid continuum. In reality, a non-zero volume occupied by the concentrating particles increasingly perturbs the local acoustic fields. This modifies the subsequent concentration process, thereby indicating a dynamic bi-directional coupling between the same and the driving acoustic fields. This paper demonstrates a novel finite element model that considers such a coupling for the first time. Acoustic concentration of latex beads inside a radially polarised piezoceramic tube filled with water is analysed as a proof of concept. By modelling the solid-liquid system as a mixture characterised by a particle volume fraction, and correlating the effective mixture properties with the acoustic fields, we show that the model is a substantial improvement over the point-particle approach. We conclude by discussing the further improvements possible in this model and potential applications where it can be implemented.
{"title":"An Improved Model for Acoustic Particle Concentration - A Case Study in Piezo-Tubes","authors":"A. Kale, Nan Li, A. Stevenson","doi":"10.1109/NANO.2018.8626412","DOIUrl":"https://doi.org/10.1109/NANO.2018.8626412","url":null,"abstract":"Acoustic concentration of target species inside fluidic media has gained attention as a pre-concentration step for improving the performance of several downstream applications. Majority of the existing literature on simulations of this phenomenon focuses upon a point particle assumption which states that the acoustic field responsible for concentration is unaffected by the particles treated as points in a liquid continuum. In reality, a non-zero volume occupied by the concentrating particles increasingly perturbs the local acoustic fields. This modifies the subsequent concentration process, thereby indicating a dynamic bi-directional coupling between the same and the driving acoustic fields. This paper demonstrates a novel finite element model that considers such a coupling for the first time. Acoustic concentration of latex beads inside a radially polarised piezoceramic tube filled with water is analysed as a proof of concept. By modelling the solid-liquid system as a mixture characterised by a particle volume fraction, and correlating the effective mixture properties with the acoustic fields, we show that the model is a substantial improvement over the point-particle approach. We conclude by discussing the further improvements possible in this model and potential applications where it can be implemented.","PeriodicalId":425521,"journal":{"name":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115607424","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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