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2011 IEEE International Conference of Electron Devices and Solid-State Circuits最新文献

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A delta-sigma fractional-N frequency divider for a Phase Lock Loop in 60GHz transceiver 用于60GHz收发器锁相环的δ - σ分数n分频器
Pub Date : 2011-12-29 DOI: 10.1109/EDSSC.2011.6117645
Yisheng Wang, Kaixue Ma, N. Mahalingam, K. Yeo
A design and optimization flow for digital delta-sigma fractional-N frequency divider of Phase Lock Loop (PLL) is introduced in this paper. The low power design is used for the 60 GHz RF transceiver using 0.18um SiGe BiCMOS technology. With full consideration of the low complexity and unconditional stability, MASH111 delta-sigma modulator is chosen as control module for the PLL. The input frequency is 6.48Ghz, and the integer division rate is from 36 to 64 with step of 2.
介绍了锁相环数字δ - σ分数n分频器的设计与优化流程。低功耗设计用于采用0.18um SiGe BiCMOS技术的60 GHz射频收发器。充分考虑到锁相环的低复杂度和无条件稳定性,选择MASH111 δ - σ调制器作为锁相环的控制模块。输入频率为6.48Ghz,整数分割率为36 ~ 64,步长为2。
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引用次数: 3
Design and implementation of a NAND Flash controller in SoC SoC中NAND闪存控制器的设计与实现
Pub Date : 2011-12-29 DOI: 10.1109/EDSSC.2011.6117658
Gong Xin, D. Zibin, Li Wei, Feng Lulu
NAND Flash is widely used in modern digital products and it has become a trend to integrate NAND Flash controller into SoC. This paper discussed the implementation scheme of the NAND Flash controller in detial, including the design of state machine, ECC module and so on. In order to improve the data access speed of NAND Flash Controller, this paper proposed two technologies which increase little area but improve the performance of the controller effectively. The test results based on FPGA showed that this design had high practical value. Based on SMIC 0.18µm standard CMOS technology, this design can work at the frequency of 121MHz.
NAND闪存在现代数码产品中得到了广泛的应用,将NAND闪存控制器集成到SoC中已成为一种趋势。本文详细讨论了NAND闪存控制器的实现方案,包括状态机、ECC模块的设计等。为了提高NAND闪存控制器的数据访问速度,本文提出了两种增加面积小但有效提高控制器性能的技术。基于FPGA的测试结果表明,该设计具有较高的实用价值。本设计基于中芯国际0.18µm标准CMOS技术,工作频率为121MHz。
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引用次数: 5
A high speed wide band low phase noise multi-mode frequency divider for DRM/DAB/AM/FM frequency synthesizer 用于DRM/DAB/AM/FM频率合成器的高速宽带低相位噪声多模分频器
Pub Date : 2011-12-29 DOI: 10.1109/EDSSC.2011.6117667
L. Xuemei, Wang Zhigong, Wang Keping
The implementation of a high-speed wide band low phase noise multi-mode frequency divider (MMFD) for a DRM/DAB frequency synthesizer is described. According to the characteristics of each part, novel SCL and CMOS static flip-flop DFF are applied. Realized in a 0.18-µm RF CMOS technology, the core area of the MMFD is 745 µm×705 µm, including buffer and pads. Post simulated results show that its operation frequency ranging is from 2.2GHz to 3.1 GHz, and phase noise of the MMFD is •134dBc/Hz at 10 kHz offset. The maximum core power consumption is 24.6 mA at a 1.8V power supply.
介绍了一种用于DRM/DAB频率合成器的高速宽带低相位噪声多模分频器的实现方法。根据各部分的特点,采用了新型的SCL和CMOS静态触发器DFF。MMFD采用0.18µm RF CMOS技术实现,核心面积为745µm×705µm,包括缓冲器和焊盘。后置仿真结果表明,MMFD工作频率范围为2.2GHz ~ 3.1 GHz,在10 kHz偏置时相位噪声为134dBc/Hz。在1.8V电源下,最大芯线功耗为24.6 mA。
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引用次数: 0
A digital dither controlled step-up/step-down DC-DC converter with smooth transition 数字抖动控制的平滑过渡的升压/降压DC-DC变换器
Pub Date : 2011-12-29 DOI: 10.1109/EDSSC.2011.6117631
Yanzhao Ma, Hongyi Wang, Guican Chen
A step-up/step-down DC-DC converter with high efficiency and small output voltage ripple is proposed in this paper. To reduce the switching loss and improve the efficiency, the converter operates in buck or boost mode when the input voltage is much higher or lower than the output voltage. However, a large output voltage ripple appears at the boundary of buck mode and boost mode due to the speed limitation of standard analog circuit. A transition mode using a digital dither technique is adopted and the output voltage ripple is reduced when the input voltage is close to the output voltage. Furthermore, the average inductor current is also reduced in the proposed transition mode. The converter has been designed with a standard a 0.5 µm CMOS process. The peak efficiency is 96% and the output voltage ripple is reduced to less than 10 mV in the transition mode.
本文提出了一种高效率、输出电压纹波小的升压/降压DC-DC变换器。为了减少开关损耗和提高效率,当输入电压高于或低于输出电压时,变换器工作在降压或升压模式。然而,由于标准模拟电路的速度限制,在降压模式和升压模式的边界处会出现较大的输出电压纹波。采用数字抖动技术的过渡模式,当输入电压接近输出电压时,输出电压纹波减小。此外,在所提出的转换模式下,平均电感电流也减小了。转换器采用标准的0.5µm CMOS工艺设计。在转换模式下,峰值效率达到96%,输出电压纹波降低到10 mV以下。
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引用次数: 0
Design and fabrication of TaN bottom electrode thermal sensing resistor for MEMs based bolometer application 微机电热计用TaN底电极热敏电阻的设计与制作
Pub Date : 2011-12-29 DOI: 10.1142/S0218126613400215
Xiaoxu Kang, Jiaqing Li, Chao Yuan, Shoumian Chen, Yuhang Zhao
In this work, TaN bottom electrode thermal sensing resistor for MEMs based bolometer was fabricated by 200mm Cu-BEOL compatible process. Thermal sensing material was B-doped alpha-Si deposited by PECVD in-situ doping process. PVD TaN film was used as bottom electrode. Dedicated process on modified tool was introduced to achieve a good contact between TaN and sensing material. There are both CVD and ETCH chamber installed on this modified tool. Wafer with bottom electrode pattern was pre-cleaned firstly by low-power Ar/CF4 gas to remove oxide and possible surface residue on TaN in etch chamber. Then the wafer was transferred to CVD chamber through transfer chamber in vacuum condition. With vacuum transfer condition and tightly Q-time control, ohmic contact can be achieved for the TaN bottom electrode and B-doped alpha-Si. Through the IV curve and TCR data it can be seen that bottom electrode device can well meet the MEMs-based bolometer requirements.
本文采用200mm Cu-BEOL兼容工艺制备了用于MEMs热计的TaN底电极热敏电阻。采用PECVD原位掺杂工艺制备了b掺杂α -si热敏材料。采用PVD TaN薄膜作为底电极。介绍了在改性工具上的专用工艺,以实现TaN与传感材料的良好接触。在这个改进的工具上安装了CVD和ETCH腔。首先用低功率Ar/CF4气体对具有底部电极图案的硅片进行预清洗,去除氧化和可能残留在TaN表面的残留物。然后在真空条件下通过转移室将晶圆转移到CVD室。在真空传递条件和严格的Q-time控制下,TaN底电极与掺杂b的α - si可以实现欧姆接触。通过IV曲线和TCR数据可以看出,底电极装置可以很好地满足基于mems的测热仪的要求。
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引用次数: 3
Analysis of noise of current accumulator in Time-Delay-Integration CMOS image sensor 延时集成CMOS图像传感器中电流蓄能器的噪声分析
Pub Date : 2011-12-29 DOI: 10.1109/EDSSC.2011.6117724
Cen Gao, S. Yao, Jiangtao Xu, Jing Gao, Kaiming Nie
The noise of the current accumulator is analyzed. And a model of Time-Delay-Integration (TDI) CMOS image sensor is presented, which is used to analyze the noise performance. In this model, input signals are accumulated 4 times by the type of current and then converted to digital signals to accomplish the other accumulation by 32 times, i.e., 4×32 accumulation mode. The noise, which includes switch charge injection, sample noise and KT/C noise, is considered in this model. The major source of the noise and the relationship between noise and sample capacitance are evaluated through the model simulation. The results indicate that the total noise can be restrained by increasing sample capacitance. When the input signal is arranging from 0µA to 100µA, the accuracy of the current accumulator can be 11bits by using 1pF sample capacitor. And the SNR of the output signal can be increased by 20.38dB which is close to the ideal result.
分析了电流蓄能器的噪声。提出了一种延时积分(TDI) CMOS图像传感器模型,并对其噪声性能进行了分析。在该模型中,输入信号按电流类型累计4次,再转换为数字信号,完成32次累计,即4×32累计方式。该模型考虑了开关电荷注入噪声、样品噪声和KT/C噪声。通过模型仿真,分析了噪声的主要来源以及噪声与样品电容的关系。结果表明,增大样品电容可以抑制总噪声。当输入信号从0µA排列到100µA时,采用1pF采样电容,电流累加器的精度可达11位。输出信号的信噪比可提高20.38dB,接近理想结果。
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引用次数: 4
Effect of ICP etching on InP-based multiple quantum wells microring lasers ICP刻蚀对基于inp的多量子阱微环激光器的影响
Pub Date : 2011-12-29 DOI: 10.1109/EDSSC.2011.6117681
Xie Sheng, C. Zhiming, Yu Xin, Zhang Shilin, Li Xianjie, Chen Yan, Guo Weilian, Qi Lifang, Mao Luhong, Yu Jinlong
Dry etching of InP-based epitaxial structure was performed by using inductively coupled plasma (ICP) system with different chemistries. The surface topographies shown that the waveguide profiles etched using the Cl2/CH4/Ar recipe have better surface and sidewall quality than that of the Cl2/BCl3 chemistry. To verify the practical influence of ICP etching, InP/AlGaInAs multiple quantum wells microring lasers were fabricated, and the electrical and optical properties were compared. The experimental results revealed that the Cl2/CH4/Ar recipe is preferable to the fabrication of InP-based optoelectronic devices in our experimental system.
采用不同化学性质的电感耦合等离子体(ICP)体系对inp基外延结构进行了干刻蚀。表面形貌表明,使用Cl2/CH4/Ar配方刻蚀的波导轮廓比使用Cl2/BCl3化学方法刻蚀的波导轮廓具有更好的表面和侧壁质量。为了验证ICP刻蚀的实际影响,制作了InP/AlGaInAs多量子阱微环激光器,并对其电学和光学性能进行了比较。实验结果表明,在我们的实验系统中,Cl2/CH4/Ar配方更适合制作基于inp的光电器件。
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引用次数: 1
Measurement of the anisotropy fields for AMR sensors AMR传感器各向异性场的测量
Pub Date : 2011-12-29 DOI: 10.1109/EDSSC.2011.6117748
J. Ouyang, S. Chen, Y. Zhang, F. Jin, X. Yang
Crossfield effect of anisotropic magnetoresistive (AMR) sensors is an unwanted response to magnetic fields perpendicular to the sensitive axis. For example, the crossfield error of Honeywell HMC1002 sensors could reach 1100 nT in geomagnetic environment [1]. The cause of the effect is that crossfields could change the direction of magnetization in AMR film, which results in variation of magnetoresistance.
各向异性磁阻(AMR)传感器的交叉场效应是对垂直于敏感轴的磁场的不良响应。例如,霍尼韦尔HMC1002传感器在地磁环境[1]下的交叉场误差可达1100 nT。产生这种效应的原因是交叉场会改变AMR膜的磁化方向,从而导致磁电阻的变化。
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引用次数: 1
A low-noise HV interface circuit for MEMS vibratory gyroscope 用于MEMS振动陀螺仪的低噪声高压接口电路
Pub Date : 2011-12-29 DOI: 10.1109/EDSSC.2011.6117616
Tingting Tao, Wengao Lu, Ran Fang, Yacong Zhang, Zhongjian Chen
The paper presents a low-noise high voltage (HV) CMOS Interface ASIC designed for MEMS vibratory gyroscopes. A closed-loop control is realized in the driving mode. An in-chip level shifter is designed in the loop to achieve a high DC voltage level of 5V which can excite the gyroscope. A DC biasing method is adopted in the interface circuit to convert the amplitude-modulated capacitive signal into voltage. The chip occupies 2.5 × 2.0mm2 in a 0.35 µm 2P3M BCD HV process, which offers buried layer and high voltage N-well isolation to block out the potential coupling noise. Simulation results show that the drive axis can accomplish a closed-loop self-oscillation of the MEMS gyroscope.
介绍了一种用于MEMS振动陀螺仪的低噪声高压CMOS接口ASIC。在驱动模式下实现闭环控制。在环路中设计了片内电平移位器,实现了5V的高直流电平,可以对陀螺仪进行激励。在接口电路中采用直流偏置方法将调幅电容信号转换为电压。该芯片占地2.5 × 2.0mm2,采用0.35µm 2P3M BCD HV工艺,提供埋地层和高压n阱隔离,以阻挡潜在的耦合噪声。仿真结果表明,该驱动轴能够实现MEMS陀螺仪的闭环自振荡。
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引用次数: 2
Nd-doped Bismuth Titanate based ferroelectric field effect transistor: Design, fabrication, and optimization 掺钕钛酸铋基铁电场效应晶体管:设计、制造与优化
Pub Date : 2011-12-29 DOI: 10.1109/EDSSC.2011.6117648
T. Feng, D. Xie, Yongyuan Zang, Xaio Wu, Yafeng Luo, T. Ren, M. Bosund, Shuo Li, V. Airaksinen, H. Lipsanen, S. Honkanen
Ferroelectric field effect transistor (FeFET) is a promising candidate in nonvolatile memory application due to its fast read/write speed, nondestructive readout, and low power consumption. Since the poor retention characteristic can be improved by introducing insulator buffer layers between gate layer and FET channel region, more and more attentions are devoted to the realization and optimization of this novel memory device [1]. Traditional ferroelectric materials, such as PZT [2, 3] and SBT [4] based FeFETs are extensively studied and reported in the past decades. Recently, Nd-doped Bismuth Titanate B3.15Nd0.85Ti3O12 (BNdT) with a large remnant polarization (2Pr=103µC/cm2) and outstanding fatigue endurance was reported by Chon et al. [5], and many ferroelectric applications are being processed based on this brand new ferroelectric material [6, 7]. In this letter, we fabricated a BNdT based FeFET for the first time. The fundamental structural and electrical properties are investigated correspondingly.
铁电场效应晶体管(FeFET)具有快速的读写速度、无损读出和低功耗等优点,在非易失性存储器领域具有广阔的应用前景。由于可以通过在栅极层和场效应管沟道区域之间引入绝缘子缓冲层来改善其不良的保持特性,因此这种新型存储器件的实现和优化越来越受到关注[1]。传统的铁电材料,如PZT[2,3]和SBT[4]基fefet在过去的几十年里得到了广泛的研究和报道。最近,Chon等人报道了nd掺杂钛酸铋B3.15Nd0.85Ti3O12 (BNdT),该材料具有较大的残余极化(2Pr=103µC/cm2)和出色的疲劳耐久性[5],并且基于这种全新的铁电材料正在进行许多铁电应用[6,7]。在这封信中,我们首次制作了一个基于BNdT的ffet。对其基本结构和电学性能进行了相应的研究。
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引用次数: 1
期刊
2011 IEEE International Conference of Electron Devices and Solid-State Circuits
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