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2012 IEEE 62nd Electronic Components and Technology Conference最新文献

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In-situ strain measurement with metallic thin film sensors 金属薄膜传感器原位应变测量
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248899
C. Taylor, S. Sitaraman
With increasing importance of 3D packaging systems, more and more dies will be stacked on top of each other and connected using through silicon vias (TSVs) and solder bumps. In-situ stress measurements near these bump pads are important to help understand the evolution of die stresses associated with the packaging process. Unlike piezoresistive doped Si sensors that require high-temperature processing, metal-based sensors use low-temperature fabrication processes. The sensor fabrication uses standard cleanroom processes such as UV lithography and physical vapor deposition. In this paper, thin-film micro-scale metallic (Ni/Cr) resistors have been studied with different design dimensions including gauge width, film thickness, and spacing between the lines in the serpentine pattern. Silicon test strips with sensors have been subjected to four-point bend testing, and finite-element simulations have been carried out to mimic the four-point bend testing as well as to determine stress contours where the sensors are placed.
随着3D封装系统的重要性日益提高,越来越多的芯片将堆叠在一起,并通过硅通孔(tsv)和焊点连接。这些凹凸垫附近的地应力测量对于帮助了解与封装过程相关的模具应力的演变非常重要。与需要高温加工的压阻式掺杂Si传感器不同,金属基传感器使用低温制造工艺。传感器制造采用标准的洁净室工艺,如UV光刻和物理气相沉积。本文研究了不同设计尺寸的薄膜金属(Ni/Cr)电阻器,包括规宽、膜厚和蛇形图案线间距。带有传感器的硅测试条进行了四点弯曲测试,并进行了有限元模拟来模拟四点弯曲测试以及确定传感器放置位置的应力轮廓。
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引用次数: 3
Cu wire and Pd-Cu wire package reliability and molding compounds 铜丝和钯铜丝封装可靠性和成型化合物
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248975
H. Abe, Dong Kang, T. Yamamoto, T. Yagihashi, Y. Endo, H. Saito, T. Horie, H. Tamate, Y. Ejiri, N. Watanabe, T. Iwasaki
Cu wire is drastically replacing Au wire due to surge of Au price. However, Cu wire package has poorer humidity reliability than Au wire package. Although Pd coated Cu wire package could show better humidity reliability than Cu wire, it is still worse than Au. Enough information regarding failure mechanism was not available. For failure analysis, x-section has been widely used to identify the Cu/Al IMC after failure. However, the x-section is the results of corrosion reaction and doesn't show the IMC status before corrosion. Therefore, the failure mechanism could not be estimated precisely. We used chemical model simulation to predict what kinds of IMC could be created after wire bonding, then which IMC could be corroded more easily during HAST. The Desorption energy was used to estimate reactivity between specified Cu/Al IMC and chlorine ion. The simulation suggested that the formation of Cu rich and Cu poor Cu/Al IMC and the Cu rich IMC was estimated to be corroded by chlorine ion. These chemical model simulations are the effective way to have fundamental understanding of the mechanism of Cu/Al IMC corrosion. Furthermore, chemical model simulation for Pd coated Cu wire was done to explore the effect of Pd existence and distribution of Pd in Cu/Al IMC. Dispersed Pd contributed to create new IMC of Cu/Al/Pd instead of easily corroded Cu rich Cu/Al IMC. Cu and Al diffusion and also Cl ion diffusion were inhibited by Pd at surface. Even Cl ion catching effect by Pd is also discussed. To improve humidity reliability performance with Cu wire, we developed new ion trapper using chemical model simulation technique. Developed molding compounds with the ion trapper showed significant improvement at bias HAST with Cu wire, which was even better than conventional Cu wire compatible molding compounds.
由于金的价格暴涨,铜线正在迅速取代金线。但是,铜线包的湿度可靠性比金线包差。镀钯铜线包的湿度可靠性虽然优于镀铜线包,但仍不如镀金线包。没有足够的关于失效机制的信息。在失效分析中,x-section被广泛用于Cu/Al IMC失效后的识别。但是,x剖面是腐蚀反应的结果,并没有显示腐蚀前的IMC状态。因此,无法准确估计其破坏机制。我们利用化学模型模拟预测了在金属丝键合后会产生哪些类型的IMC,以及哪种类型的IMC在HAST过程中更容易被腐蚀。用解吸能来估计特定Cu/Al IMC与氯离子之间的反应活性。模拟结果表明,富Cu和贫Cu的Cu/Al IMC的形成,富Cu IMC是由氯离子腐蚀形成的。这些化学模型模拟是了解Cu/Al IMC腐蚀机理的有效途径。此外,对镀钯铜丝进行了化学模型模拟,探讨了钯在Cu/Al IMC中存在和分布的影响。分散Pd有助于形成新的Cu/Al/Pd内嵌层膜,取代易腐蚀的富Cu/Al内嵌层膜。Pd抑制了Cu、Al和Cl离子在表面的扩散。还讨论了Pd对Cl离子的均匀捕获效应。为了提高铜丝的湿度可靠性,采用化学模型模拟技术研制了新型离子捕集器。使用离子捕集剂开发的模塑化合物对铜丝的偏置HAST有显著改善,甚至优于传统的铜丝兼容模塑化合物。
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引用次数: 50
A surface micromachined high directivity GPS patch antenna with a four-leaf clover shape metamaterial slab 一种采用四叶草形状的超材料板的表面微加工高指向性GPS贴片天线
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248949
Cheolbok Kim, Kyung-Hoon Lee, Sangrok Lee, Kyoung-Tae Kim, Y. Yoon
A high gain patch antenna with a four-leaf clover shape metamaterial slab on top is implemented using the combination of multiple ceramic and organic layers for global positioning system (GPS) applications. The four-leaf clover shape metamaterial slab showing a refractive index of zero or close to zero is designed for high gain antenna applications. An effective refractive index of 0.5 is obtained for a designed architecture. As a source antenna, a circularly polarized rectangular patch antenna is implemented with two diagonal corners truncated. The demonstrated architecture not only increases the antenna gain, but also maintains the circular polarization. The antenna size is reduced by using a high dielectric constant ceramic substrate, where the overall antenna size is as small as 25 × 25 × 4 mm3. It is surface mountable and has circular polarization with a center frequency of 1.58 GHz, and a gain of 4.48 dB.
利用多层陶瓷和有机层的组合,实现了一种用于全球定位系统(GPS)应用的高增益贴片天线,其顶部是四叶草形状的超材料板。折射率为零或接近零的四叶三叶草型超材料板是为高增益天线应用而设计的。所设计的结构的有效折射率为0.5。采用截断两个对角角的圆极化矩形贴片天线作为源天线。所演示的结构不仅提高了天线增益,而且保持了圆极化。天线尺寸通过使用高介电常数陶瓷衬底减小,其中天线的整体尺寸小至25 × 25 × 4 mm3。它是表面安装的,中心频率为1.58 GHz,圆极化,增益为4.48 dB。
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引用次数: 8
Low-cost and fine-pitch micro-ball mounting technology for WLCSP WLCSP低成本、小间距微球安装技术
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248951
Y. H. Lin, F. Kuo, Y. F. Chen, C. Ho, J. Y. Lai, S. Chen, F. Chien, R. Lee, J. Lau
Ball mount technology uses performed solder spheres dropping through a metal template onto wafer at once. This technology is directly producing bumps on wafer with high throughput and consistent bump results. Ball mounting process without using electroplating decreases cost and chemical pollution. This technique is applicable for many applications but several issues associated with this technology that limits its widespread use in high volume and high yield applications. These limitations include: (1) a practical lower limit to the size of sphere that can be dropped, and (2) the stencil between the performed solder spheres and the wafer can fail, causing a release of all the spheres into the tool (often referred to as bursts or escapes), and the yields are statistically low. To meet high I/O density IC request, the trend of wafer level chip scale package (WLCSP) I/O pad distributed design is toward to reduce the I/O pitch and increase the I/O density, and therefore impact solder ball size application of ball mount process, WLCSP micro-ball mount technology is requested. In this study, a low-cost and fine-pitch micro-ball mounting technology is developed. Emphasis is placed on determining the most important factors such as accurate dropping parameters, stencil quality and reflow conditions for microball mounting design, materials, and process. Three different ball sizes are considered: 70μm, 100μm, and 250μm. Their corresponding pitches are 130μm, 180μm, and 400μm. WLCSP micro balls with diameter = 70μm and pitch = 130μm on 300mm wafers (with ~2KK I/Os) have been successful produced. The yield is more than 99.99% without any missing micro ball and bridging.
球贴装技术使用焊料球体通过金属模板一次性滴到晶圆上。该技术直接在晶圆上产生凸点,具有高通量和一致的凸点结果。不使用电镀的滚珠安装工艺降低了成本和化学污染。该技术适用于许多应用,但与该技术相关的几个问题限制了其在大批量和高产量应用中的广泛应用。这些限制包括:(1)可以掉落的球体尺寸的实际下限,(2)所执行的焊接球体和晶圆之间的模板可能失效,导致所有球体释放到工具中(通常称为爆裂或逃逸),并且产量在统计上很低。为了满足高I/O密度集成电路的要求,晶圆级芯片规模封装(WLCSP) I/O焊盘分布式设计的趋势是减小I/O间距和增加I/O密度,因此影响滚珠安装工艺中焊球尺寸的应用,要求采用WLCSP微滚珠安装技术。本研究开发了一种低成本、小间距的微球安装技术。重点放在确定最重要的因素,如准确的下降参数,模板质量和回流条件的微球安装设计,材料和工艺。滚珠尺寸分为70μm、100μm和250μm。分别为130μm、180μm和400μm。在300mm晶圆(I/ o ~2KK)上成功制备了直径为70μm、节距为130μm的WLCSP微球。产率大于99.99%,无微球丢失和桥接现象。
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引用次数: 4
Silver alloy wire bonding 银合金线焊
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248983
L. Kai, L. Hung, L. Wu, Chiang Yeh Men, D. Jiang, Chun-An Huang, Yu Po Wang
In semiconductor packaging, wire bonding is the main technology for electrical connections between chip and leadframe or substrate. Gold wire bonding has the advantages of a fast bonding process, excellent electrical property and stable chemical property. It has been widely used in various electronic packages. Gold prices have been raised significantly over the last few years. Many manufactures have been investigating ways to replace the conventional gold wire with various new materials. Copper wire bonding is an alternative interconnection technology. Cu wire has superior electrical and thermal conductivities as well as higher tensile strength, elongation and better “ball neck” strength. On the other hand, the higher hardness of Cu wire requires higher ultrasonic power and bonding force, which lead to high risk of cratering for ball bonding and tearing for wedge bonding. These will cause some package limitation and wire bonder machine downtime or low units per hour (UPH). Ag alloy wire has low Young's modulus and hardness property. It is a low cost wire bonding solution other than gold wire. In this study, Ag alloy wire is proposed as an alternative to Au bonding wire. Emphasis is placed on the wire bonding workability and reliability of using Ag-Au-Pd alloy wire for TSOP package. Also, wire bonding parameter such as electronic flame off (EFO), bond force, ultrasonic power, heat block temperature and time for ball and wedge bonding are optimized. Furthermore, the response for parameter optimization is determined by the Dage bond tester. Package reliability is determined through environmental tests that include pressure cooker test (PCT), temperature cycle test (TCT) and high temperature storage life test (HTSL). The tested samples were studied by focused ion beam (FIB), scanning electron microscopy (SEM) and energy dispersive spectrometer analyses (EDS). Intermetallic compound growth behavior during reliability test is characterized and compared to Al-Au and Al-Cu systems. Ag-Al didn't have excessive volume variation and void occurrence to get better bonding performance during various reliability tests.
在半导体封装中,线键合是芯片与引线框架或基板之间电气连接的主要技术。金线键合具有键合速度快、电性能优异、化学性能稳定等优点。已广泛应用于各种电子封装中。黄金价格在过去几年里大幅上涨。许多制造商一直在研究用各种新材料取代传统金线的方法。铜线键合是另一种互连技术。铜丝具有优良的导电性和导热性,以及较高的抗拉强度、伸长率和较好的“球颈”强度。另一方面,铜丝硬度越高,对超声功率和结合力的要求也越高,这就导致了球键合产生弹孔和楔键合产生撕裂的风险越大。这将导致一些包装限制和线粘合机停机时间或低单位每小时(UPH)。银合金线材具有较低的杨氏模量和硬度。它是一种低成本的金属丝粘接解决方案。在本研究中,提出了银合金丝作为金合金丝的替代品。重点研究了银金钯合金焊丝在TSOP封装中的焊接可加工性和可靠性。并对电子火焰关闭(EFO)、键合力、超声功率、热阻温度和球、楔键合时间等焊线参数进行了优化。此外,参数优化的响应由Dage粘结试验机确定。包装可靠性是通过环境测试来确定的,包括压力锅测试(PCT)、温度循环测试(TCT)和高温储存寿命测试(HTSL)。采用聚焦离子束(FIB)、扫描电镜(SEM)和能谱仪(EDS)对样品进行了研究。研究了金属间化合物在可靠性试验中的生长行为,并与Al-Au和Al-Cu体系进行了比较。在各种可靠性试验中,Ag-Al没有出现过大的体积变化和空隙,获得了较好的粘结性能。
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引用次数: 49
High-efficient optics for different LED packaging types in forward-lighting application 用于前向照明应用的不同LED封装类型的高效光学器件
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6249116
Fei Chen, Kai Wang, Sheng Liu
In this paper, we analyze the optical features of different LED packaging types in forward-lighting application. There are generally two packaging types: point source and line source. For the two different packaging types, we introduce several high-efficient supporting opticses in forward-lighting application.
本文分析了不同LED封装类型在正向照明应用中的光学特性。一般有两种包装类型:点源和线源。针对这两种不同的封装类型,我们介绍了几种在正向照明应用中的高效支持光学器件。
{"title":"High-efficient optics for different LED packaging types in forward-lighting application","authors":"Fei Chen, Kai Wang, Sheng Liu","doi":"10.1109/ECTC.2012.6249116","DOIUrl":"https://doi.org/10.1109/ECTC.2012.6249116","url":null,"abstract":"In this paper, we analyze the optical features of different LED packaging types in forward-lighting application. There are generally two packaging types: point source and line source. For the two different packaging types, we introduce several high-efficient supporting opticses in forward-lighting application.","PeriodicalId":6384,"journal":{"name":"2012 IEEE 62nd Electronic Components and Technology Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86071560","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Assembly process and reliability assessment of TSV/RDL/IPD interposer with multi-chip-stacking for 3D IC integration SiP 3D集成电路多芯片堆叠TSV/RDL/IPD介面器组装工艺及可靠性评估
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248883
C. Zhan, P. Tzeng, J. Lau, M. Dai, H. Chien, Ching-Kuan Lee, Shang-Tsai Wu, K. Kao, Shin-Yi Huang, Chia-Wen Fan, Su-Ching Chung, Yu-wei Huang, Yu-Min Lin, Jing-Yao Chang, Tsung-Fu Yang, Tai-Hung Chen, R. Lo, M. Kao
In this study, a 3D IC integration system-in-package (SiP) with TSV/RDL/IPD interposer is designed and developed. Emphasis is placed on the Cu revealing, embedded stress sensors, non-destructive inspection, thermal modeling and measurement, and final assembly and reliability assessments.
本研究设计并开发了一种具有TSV/RDL/IPD介面的3D集成电路系统级封装(SiP)。重点是Cu暴露,嵌入式应力传感器,非破坏性检测,热建模和测量,以及最终组装和可靠性评估。
{"title":"Assembly process and reliability assessment of TSV/RDL/IPD interposer with multi-chip-stacking for 3D IC integration SiP","authors":"C. Zhan, P. Tzeng, J. Lau, M. Dai, H. Chien, Ching-Kuan Lee, Shang-Tsai Wu, K. Kao, Shin-Yi Huang, Chia-Wen Fan, Su-Ching Chung, Yu-wei Huang, Yu-Min Lin, Jing-Yao Chang, Tsung-Fu Yang, Tai-Hung Chen, R. Lo, M. Kao","doi":"10.1109/ECTC.2012.6248883","DOIUrl":"https://doi.org/10.1109/ECTC.2012.6248883","url":null,"abstract":"In this study, a 3D IC integration system-in-package (SiP) with TSV/RDL/IPD interposer is designed and developed. Emphasis is placed on the Cu revealing, embedded stress sensors, non-destructive inspection, thermal modeling and measurement, and final assembly and reliability assessments.","PeriodicalId":6384,"journal":{"name":"2012 IEEE 62nd Electronic Components and Technology Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88670568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 17
Low slow-wave effect and crosstalk for low-cost ABF-coated TSVs in 3-D IC interposer 低成本abf涂层tsv的低慢波效应和串扰
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6249103
Yu-Jen Chang, Tai-Yu Zheng, Hao-Hsiang Chuang, Chuen-De Wang, P. Chen, T. Kuo, C. Zhan, Shih-Hsien Wu, W. Lo, Yi-Chang Lu, Y. Chiou, Tzong-Lin Wu
A solution for reducing the signal distortion in SiO2-coated through silicon vias (TSVs) is proposed. The mechanism can be explained by using a verified equivalent circuit model of a four-TSV system. Based on this circuit model, the phenomena that larger thickness of dielectric layer causes lower slow-wave factor (SWF), smaller insertion loss and smaller crosstalk level can be observed. With the aid of ajinomoto-build-up-film-coated (ABF-coated) TSVs, the solution can be implemented. The insertion loss is 3 dB better, the near-end crosstalk is 5 dB better, and the far-end crosstalk is 25dB better than conventional SiO2-coated TSVs at 2 GHz. Measurement results are also given. Good consistency can be seen, and can support the conclusion of the simulation results.
提出了一种减小sio2包覆硅孔(tsv)信号失真的解决方案。该机制可以用一个经过验证的四tsv系统等效电路模型来解释。基于该电路模型,可以观察到介电层厚度越大,慢波因子(SWF)越小,插入损耗越小,串扰电平越小。借助味之素积聚膜涂层(abf涂层)tsv,可以实现该解决方案。在2ghz时,与传统的二氧化硅涂层tsv相比,插入损耗提高了3db,近端串扰提高了5db,远端串扰提高了25dB。并给出了测量结果。可以看出较好的一致性,可以支持仿真结果的结论。
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引用次数: 10
Design and assembly of a double-sided 3D package with a controller and a DRAM stack 设计并组装带有控制器和DRAM堆栈的双面3D封装
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248989
Xi Liu, Ming Li, D. Mullen, J. Cline, S. Sitaraman
The microelectronic packaging field is moving into the third dimension for miniaturization, low power consumption, and better performance. In this paper, we present a double-sided flip-chip organic substrate with a memory controller on one side of the package, and 3D stacked disaggregated memory chips on the other side of the package. This design allows the controller to interface with the DRAM stack directly through the substrate providing the shortest possible interconnect path, and thus achieving the fastest signaling speed. However, this double-sided flip chip on organic substrate also causes yield, assembly, test, and reliability challenges. In order to optimize the assembly process, a sequential 3D finite-element model was developed to simulate the package assembly process. In these simulations, various assembly process sequences were simulated with different conditions and materials. In addition, a probing test model was also built to study the connectivity of the Land Grid Array (LGA) pin array with the PCB sockets. Results show that the careful selection of assembly steps and package materials are crucial for the successful package assembly and also important for the probing test.
微电子封装领域正向着小型化、低功耗、高性能的第三维度迈进。在本文中,我们提出了一种双面倒装晶片有机基板,在封装的一侧有记忆控制器,在封装的另一侧有3D堆叠的分解记忆晶片。该设计允许控制器直接通过衬底与DRAM堆栈接口,从而提供最短的互连路径,从而实现最快的信号传输速度。然而,这种在有机基板上的双面倒装芯片也会带来良率、组装、测试和可靠性方面的挑战。为了优化装配过程,建立了连续三维有限元模型来模拟装配过程。在这些模拟中,模拟了不同条件和材料下的各种装配工艺序列。此外,还建立了探测测试模型,研究了LGA引脚阵列与PCB插座的连通性。结果表明,精心选择装配步骤和封装材料对封装的成功组装至关重要,对探测测试也至关重要。
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引用次数: 10
A compact 100 MHz to 7 GHz frequency equalizer based on distributed passive circuits 一种基于分布式无源电路的100mhz至7ghz频率均衡器
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6249130
Xiaoyu Cheng, E. David, Y. Yoon
A compact frequency equalizer based on distributed passive circuits is designed, analyzed and implemented for the front end circuit of a portable spectrum analyzer working between 100MHz to 7 GHz. The equalizer is based on a T-shape passive attenuator consisting of multiple distributed inductive and capacitive elements. As a test vehicle, a 3-stage broadband amplifier has been implemented, connected to the designed equalizer, and characterized in the targeted frequency range. Without the equalizer, the measured gain of the implemented amplifier varies from 34.7 dB to 46.97 dB showing a 12.27 dB roll off in the frequency range. After connecting the equalizer, overall gain variation is reduced to ± 1.1dB. Compared with other preexisting frequency equalizers, the implemented one features a small footprint of 6×8 mm2 and a wide frequency bandwidth of 100MHz to 7GHz. Detail description on the equivalent circuit model and general design guidelines are given, and parametric analysis is performed. The implemented equalizer is suitable for the front end circuits of compact broadband test and measurement instruments, such as a portable spectrum analyzer and vector network analyzer.
针对100MHz ~ 7ghz频段的便携式频谱分析仪前端电路,设计、分析并实现了一种基于分布式无源电路的紧凑型频率均衡器。均衡器是基于一个t形无源衰减器,由多个分布的电感和电容元件组成。作为测试载体,实现了一个3级宽带放大器,连接到设计的均衡器,并在目标频率范围内进行了表征。在没有均衡器的情况下,实现放大器的测量增益在34.7 dB到46.97 dB之间变化,在频率范围内显示12.27 dB的滚降。连接均衡器后,总增益变化减小到±1.1dB。与已有的频率均衡器相比,实现的频率均衡器占地面积小,为6×8 mm2,频率带宽为100MHz至7GHz。详细介绍了等效电路模型和一般设计准则,并进行了参数化分析。实现的均衡器适用于便携式频谱分析仪、矢量网络分析仪等紧凑型宽带测试测量仪器的前端电路。
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引用次数: 0
期刊
2012 IEEE 62nd Electronic Components and Technology Conference
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