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2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)最新文献

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Thermal analysis of cantilever MEMS based Low power microheater array for the selective detection of explosive and toxic gases 悬臂式微机电系统小功率微加热器阵列的热分析,用于选择性检测爆炸性和有毒气体
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260949
Sugato Ghosh, S. Chatterjee, A. Kundu, S. Maity, H. Saha
A cantilever type microheater array consisting of four individual isolated microheaters on single die has been designed here for MEMS based gas sensor platform using metal oxide semiconductor for different gas detection through a single sensor die for explosive and toxic gas analysis in the underground manhole. A thin SiO2/Si3N4 cantilever of 250µn X 100µn has been designed here for low power consumption and uniform temperature distribution throughout the entire active area. As the microheaters are isolated from each other, different temperatures may be achieved by applying different voltages in different heaters.
针对基于金属氧化物半导体的MEMS气体传感器平台,设计了一种由4个独立微加热器组成的悬臂式微加热器阵列,通过单个传感器模块对井下爆炸和有毒气体进行检测。在这里设计了250µn X 100µn的薄SiO2/Si3N4悬臂梁,在整个活动区域内具有低功耗和均匀的温度分布。由于微加热器彼此隔离,在不同的加热器上施加不同的电压可以达到不同的温度。
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引用次数: 10
Overview and innovations in LTCC manufacturing for 3D, sensors and MEMS applications LTCC制造在3D,传感器和MEMS应用中的概述和创新
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260966
Roderik Hoppener, Ronald van Olmen, Martin De Moya, Joze Stupar
An overview of the state of the art LTCC process, technology and its applications will be presented. LTCC integrated electronic circuit technology is currently developing rapidly into new areas. Well known for its robustness and suitability for high frequency circuits, LTCC is now developing into new applications such as MEMS sensors and actuators. New possibilities are created by 3D fluidic integration for sensors and micro reactors. With ever increasing requirements for miniaturisation, optimized processing methods have been developed. The new LTCC processing methods enable higher accuracies of the produced parts while facilitating the incorporation of 3D channels in production environments. The higher accuracy methods however also put constraints on the properties of the materials used making it necessary to choose the correct process and material for its application.
本文将概述目前最先进的LTCC工艺、技术及其应用。LTCC集成电子电路技术正在迅速向新的领域发展。LTCC以其对高频电路的鲁棒性和适用性而闻名,现在正在开发新的应用,如MEMS传感器和执行器。传感器和微反应器的3D流体集成创造了新的可能性。随着小型化要求的不断提高,优化的加工方法得到了发展。新的LTCC加工方法可以提高生产零件的精度,同时促进在生产环境中结合3D通道。然而,更高精度的方法也对所用材料的性能施加了限制,因此有必要为其应用选择正确的工艺和材料。
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引用次数: 3
Investigation of acoustic structure interaction for flawed structure 缺陷结构声结构相互作用研究
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260877
P.S Soumya, K. Surabhi, V. Krishnappa, G. Miranda, N. D. Dushyantha
This paper is an attempt to establish a procedure for 2D quantization of a flaw. In this study, Tin (Sn) a regularly occurring flaw in structural Steel is considered. Using COMSOL 4.2, a 2D transient pressure acoustic model is created, which consists of a 70mm×70mm structural Steel plate with four acoustic transceivers 90 degree apart (each providing 5cycles of 1Mhz sequential sinusoidal excitation) placed along its perfectly reflecting boundary. The signals obtained from the transceivers are post processed using FFT techniques and are further processed for image reconstruction. From the statistical analysis the position of the flaw is determined. The mean deviation from the actual central location of the flaw to the predicted location is (1.136mm, 0.979mm).
本文试图建立一种缺陷二维量化的方法。在本研究中,锡(Sn)是结构钢中常见的缺陷。使用COMSOL 4.2,创建了一个二维瞬态压力声学模型,该模型由70mm×70mm结构钢板组成,其沿其完美反射边界放置四个相距90度的声学收发器(每个提供5个周期的1Mhz顺序正弦激励)。从收发器获得的信号使用FFT技术进行后处理,并进一步处理以进行图像重建。通过统计分析,确定了缺陷的位置。缺陷实际中心位置与预测位置的平均偏差为(1.136mm, 0.979mm)。
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引用次数: 1
Distributed multi-sensor network for real time monitoring of illumination states for a reconfigurable solar photovoltaic array 用于可重构太阳能光伏阵列照明状态实时监测的分布式多传感器网络
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260892
B. Patnaik, J. Mohod, S. Duttagupta
In a solar photovoltaic (SPV) array [mxn] the solar modules are connected in series and parallel to achieve desired power output. The SPV array performance depends on different parameters such as incident insolation, temperature, array layout, shading etc. Shading due to cloud cover results in Non-Uniform Illumination (NUI STATES- BRIGHT, GREY and DARK). Mismatch in currents and voltages of the modules due to change in one or more parameters leads to loss in output power. Hence real time monitoring of current (I, di/dt) for each solar module and bypass diode in the SPV array is necessary. In addition temperature sensors are required to monitor open-circuit voltage (Voc) fluctuations. Previously, we have demonstrated optimization of an SPV array in BRIGHT and DARK state [1]. However in field testing we have observed an intermediate GREY state as well. The power output can be depressed in a string having multiple state modules in series. In this paper we have proposed a reconfiguration strategy whereby modules are categorized into BRIGHT, GREY, and DARK illumination states. Based on this strategy it has been demonstrated that a reconfigured SPV array will yield maximum power at the highest operating voltage.
在太阳能光伏(SPV)阵列[mxn]中,太阳能组件以串联和并联的方式连接以获得所需的功率输出。SPV阵列的性能取决于不同的参数,如入射日照、温度、阵列布局、遮阳等。由于云层覆盖造成的阴影导致非均匀照明(NUI状态-亮,灰和暗)。由于一个或多个参数的变化导致模块的电流和电压不匹配,导致输出功率损失。因此,实时监测电流(I, di/dt)的每个太阳能组件和旁路二极管在SPV阵列是必要的。此外,还需要温度传感器来监测开路电压(Voc)波动。先前,我们已经演示了在BRIGHT和DARK状态下SPV阵列的优化[1]。然而,在现场测试中,我们也观察到中间灰色状态。功率输出可以在具有多个状态模块串联的字符串中被压抑。在本文中,我们提出了一种重新配置策略,该策略将模块分类为BRIGHT, GREY和DARK照明状态。基于该策略,已证明重新配置的SPV阵列将在最高工作电压下产生最大功率。
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引用次数: 17
Characterization of PZT multi-layer actuator PZT多层致动器的特性研究
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260881
S. Premkumar, S. Shinde, H. H. Kumar, D. K. Kharat
Many actuator applications require high resolution, accuracy and fast response time. Piezoelectric multi-layer actuators are used for such applications to manage displacements from nanometer to micrometer range and the response time in microseconds at comparatively low drive voltages. This paper deals with the characterization of lead zirconate titanate (PZT) ceramic multilayer actuators fabricated by tape casting method utilizing impedance analysis and strain measurements. Width mode resonance frequency is predicted using finite element analysis. The electrical impedance spectrums in the frequency range 100 kHz to 250 kHz of PZT multilayers show a small change in resonant behavior. Possible reasons for this change are discussed. Presence of defect in the multi-layer actuator is validated by optical microscopy. The results also show the displacement response at 75V of defect free PZT multilayer actuator.
许多执行器应用需要高分辨率,精度和快速响应时间。压电多层致动器用于此类应用,可以在相对较低的驱动电压下管理从纳米到微米范围的位移和以微秒为单位的响应时间。本文利用阻抗分析和应变测量等方法研究了锆钛酸铅(PZT)陶瓷多层致动器的性能。采用有限元方法预测了宽模共振频率。PZT多层膜在100khz ~ 250khz范围内的电阻抗谱谐振特性变化不大。讨论了这一变化的可能原因。通过光学显微镜验证了多层驱动器存在缺陷。结果还显示了无缺陷PZT多层致动器在75V时的位移响应。
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引用次数: 3
Electroceramics for sensors and actuators 传感器和执行器用电陶瓷
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260919
C. Prakash
Electroceramics is a class of very important and versatile ceramic materials whose electrical properties are exploited to make devices for a number of advanced applications for civil and military use. These materials include: ferrites, ferroelectrics, piezoelectrics, pyroelectrics, microwave dielectrics etc. Their physical and chemical properties are sensitive to a change in the environment such as temperature, pressure, electric field, magnetic field etc. They form essential component of any smart system. Most of the practical applications are based on bulk ceramics. A material can be tailored by suitable substitutions to get desired characteristics to meet specific requirements. Though the material properties are predominantly governed by composition, processing methodology plays an important role to control material performance and thus optimization of processing parameters become very crucial. Here development of microwave ferrites and dielectrics for phase shifters, prizoelectrics for actuator applications and pyroelectrics for IR detectors are described. Some of the novel material processing techniques shall also be presented.
电陶瓷是一类非常重要且用途广泛的陶瓷材料,其电性能可用于制造用于民用和军用的许多先进应用的器件。这些材料包括:铁氧体、铁电体、压电体、热释电体、微波介电体等。它们的物理和化学性质对温度、压力、电场、磁场等环境的变化很敏感。它们构成了任何智能系统的基本组成部分。大多数实际应用都是基于块状陶瓷。材料可以通过适当的替代来定制,以获得所需的特性,以满足特定的要求。虽然材料的性能主要由成分决定,但加工方法对材料的性能起着重要的控制作用,因此加工参数的优化变得至关重要。本文介绍了用于移相器的微波铁氧体和介电体、用于执行器的压电体和用于红外探测器的热释电体的发展。一些新的材料加工技术也将被提出。
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引用次数: 0
Gas sensing properties of the fluorine-doped tin oxide thin films Prepared by advanced spray pyrolysis 先进喷雾热解法制备含氟氧化锡薄膜的气敏性能
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260861
P. S. Shewale, M. Uplane
Transparent conducting fluorine-doped tin oxide (FTO) thin films were prepared onto glass at low substrate temperature by an advanced spray pyrolysis technique, with stannic chloride and ammonium fluoride as precursors. The films were grown at different substrate temperatures varied in the range of 250–340°C. The effect of the substrate temperature on the structural, morphological, and hydrogen sulphide (H2S) gas sensing properties of the films has been investigated. XRD studies confirm tetragonal crystal structure of the films and all the films are found to be polycrystalline in nature. The FTO film prepared at 250°C exhibits the maximum sensitivity (∼ 10 %) at 250°C operating temperature. Further, the effect of palladium sensitization on the H2S sensing properties of the 250°C sample has been studied and an enhanced sensing response was obtained.
采用先进的喷雾热解技术,以氯化锡和氟化铵为前驱体,在低温下在玻璃表面制备了透明的氟掺杂氧化锡导电薄膜。在衬底温度250 ~ 340℃范围内生长薄膜。研究了衬底温度对薄膜结构、形态和硫化氢气敏性能的影响。XRD研究证实了薄膜的四方晶体结构,并且发现所有薄膜本质上都是多晶。在250°C下制备的FTO薄膜在250°C工作温度下表现出最大的灵敏度(~ 10%)。进一步研究了钯敏化对250°C样品H2S传感性能的影响,获得了增强的传感响应。
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引用次数: 1
Structural, magnetic and dielectric properties in Cu substituted Ni-Zn ferrite for sensors applications 传感器用Cu取代Ni-Zn铁氧体的结构、磁性和介电性能
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260868
P. Das, G. Singh
Copper substituted NiZn ferrite powder of a chemical formula Ni0.5−xCuxZn0.5Fe2O4 (0≤ × ≤0.3) is synthesized by auto combustion process at 350°C followed by the calcination at 600, 900 and 1000°C for 2h. The derived powder shows well distinct total seven peaks of cubic spinel structure with space group Fdℨ̅m. The considerable increments in the lattice constant and the reduction in an average crystallite sizes are observed with increasing the Cu content. At the optimal condition of x = 0.1, the crystallite size as small as 26 nm and the coercivity as high as 158 Oe is obtained in samples calcined at 600°C. The dielectric (έ, ε″, and tanδ) analyses show the frequency sensitive behavior in the low frequency region and the frequency independent characteristics at high frequency side due to the Maxwell-Wagner type of interfacial polarization and also due to hopping of charges between Fe2+ ↔Fe3+. The highest dielectric constant ∼ 48 at 1 kHz and the lowest dielectric loss ∼ 0.06 at 4 MHz are obtained in the studied frequency range, whereas the maximum frequency sensing response ∼ 92% is observed at 4 MHz in same sample.
采用350℃自燃烧法,在600、900、1000℃煅烧2h,合成了化学式为Ni0.5−xCuxZn0.5Fe2O4(0≤×≤0.3)的铜取代NiZn铁氧体粉末。所得粉体具有明显的七峰立方尖晶石结构,其空间群为Fd ~ ();随着Cu含量的增加,晶格常数显著增加,平均晶粒尺寸减小。在x = 0.1的最优条件下,在600℃下煅烧得到的样品晶粒尺寸小至26 nm,矫顽力高达158 Oe。电介质(έ, ε″和tanδ)分析表明,由于界面极化的麦克斯韦-瓦格纳型和Fe2+↔Fe3+之间的电荷跳变,电介质在低频区具有频率敏感特性,而在高频侧具有频率无关特性。在所研究的频率范围内,在1 kHz时获得最高介电常数~ 48,在4 MHz时获得最低介电损耗~ 0.06,而在同一样品中,在4 MHz时观察到最大频率传感响应~ 92%。
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引用次数: 2
Advances and challenges in NDE sensors 无损检测传感器的进展与挑战
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260939
M. Shyamsunder
The industrial world continues to demand greater efficiency and effectiveness from the inspection processes using Nondestructive Evaluation (NDE) techniques. NDE sensors form the heart of any inspection system and could be one of the most important contributor to effective and reliable inspections in the industrial world. One important and frequently adopted approach by researchers in the NDE community is to innovate in the NDE sensors area. The industrial world of engineering structures and components is reasonably complex and extremely broad in terms of materials used, shapes, designs, defects to be detected, operating conditions, etc. The reasons for focusing on the sensors side is multifold; most important being the fact that in the entire system, it is the closest in proximity to the object being inspected and thus can contribute significantly. In addition many of the advances taking place in a host of enabling technologies such as electronics, communication, signal processing, computers, manufacturing, modeling/simulation tools, etc, have accelerated and motivated the design and development of new NDE sensors which can meet today's tough demands.
工业世界继续要求使用无损评估(NDE)技术的检测过程更高的效率和有效性。无损检测传感器构成了任何检测系统的核心,并且可能是工业世界中有效可靠检测的最重要贡献者之一。在濒死体验领域,研究人员经常采用的一种重要方法是在濒死体验传感器领域进行创新。工程结构和部件的工业世界在使用的材料,形状,设计,要检测的缺陷,操作条件等方面是相当复杂和极其广泛的。专注于传感器方面的原因是多方面的;最重要的是,在整个系统中,它是最接近被检查对象的,因此可以做出重大贡献。此外,在电子、通信、信号处理、计算机、制造、建模/仿真工具等一系列使能技术中发生的许多进步,加速并推动了新的无损检测传感器的设计和开发,这些传感器可以满足当今的苛刻要求。
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引用次数: 0
Effect of RE3+ (RE = Eu, Sm) ion doping on dielectric properties of nano-wollastonite synthesized by combustion method RE3+ (RE = Eu, Sm)离子掺杂对燃烧法制备纳米硅灰石介电性能的影响
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260954
Sandhya Kulkarni, R. Damle, B. Nagabhushana, Narsimha Parvatikar
The nano-ceramic perovskite oxide Wollastonite (β-CaSiO3) doped with rare earth (RE) ions Eu3+and Sm3+ were synthesized by Low temperature solution combustion method, characterized by Powder XRD (X-ray Diffraction), FTIR(Fourier Transform Infrared Spectroscopy). The XRD studies revealed that there is a phase transition from β- to α-phase on doping with rare earth ions. The FTIR results showed that there is a dramatic stress on the Si-O bonds due to the effect produced by means of A-site vacancies resulted, on substitution of Eu3+ and Sm3+ in Ca2+ site. The particle size was estimated by TEM (Transmission Electron Microscopy), it was compared with the size determined by Scherrer's formula. The SEM (Scanning Electron Microscopy) of β-CaSiO3 shows that it is a porous material containing agglomerated nanoparticles. The dielectric measurements for lower frequencies (102 Hz–106 Hz) were performed for the undoped as well as doped with Eu3+ (3 mole %) and Sm3+(4 mole %). The measurements revealed that the undoped β-CaSiO3 shows high dielectric constant (54) and low dielectric loss (0.03) and low value of dielectric conductivity (of the order of 10–7mho cm) at 1MHz.frequency. However the dielectric constant (66) increased and dielectric loss (0.008) decreased by doping with the rare earth elements of atomic radii smaller than that of Calcium and an unusual observation is that the dielectric constant, dielectric loss and dielectric conductivity become equalized when β-CaSiO3 was doped with 3 mole% Eu3+ and 4 mole% Sm3+.
采用低温溶液燃烧法合成了掺杂稀土(RE)离子Eu3+和Sm3+的纳米钙钛矿硅灰石(β-CaSiO3),并用粉末XRD (x射线衍射)、FTIR(傅里叶变换红外光谱)对其进行了表征。XRD研究表明,稀土离子掺杂后存在由β-相向α-相转变的现象。FTIR结果表明,由于a位空位对Ca2+位置上的Eu3+和Sm3+的取代所产生的影响,Si-O键受到了巨大的应力。用透射电镜(TEM)测定了颗粒大小,并与Scherrer公式测定的颗粒大小进行了比较。对β-CaSiO3的SEM(扫描电子显微镜)分析表明,它是一种含有团聚纳米颗粒的多孔材料。对未掺杂和掺杂Eu3+ (3mol %)和Sm3+(4mol %)的材料进行了较低频率(102 Hz - 106 Hz)的介电测量。结果表明,未掺杂的β-CaSiO3在1mhz频率下具有高介电常数(54)、低介电损耗(0.03)和低介电导电性(10-7mho cm)。然而,原子半径小于钙元素的稀土元素掺入β-CaSiO3后,其介电常数(66)增加,介电损耗(0.008)降低,并且当掺入3mol % Eu3+和4mol % Sm3+时,其介电常数、介电损耗和介电导电性趋于平衡。
{"title":"Effect of RE3+ (RE = Eu, Sm) ion doping on dielectric properties of nano-wollastonite synthesized by combustion method","authors":"Sandhya Kulkarni, R. Damle, B. Nagabhushana, Narsimha Parvatikar","doi":"10.1109/ISPTS.2012.6260954","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260954","url":null,"abstract":"The nano-ceramic perovskite oxide Wollastonite (β-CaSiO<inf>3</inf>) doped with rare earth (RE) ions Eu<sup>3+</sup>and Sm<sup>3+</sup> were synthesized by Low temperature solution combustion method, characterized by Powder XRD (X-ray Diffraction), FTIR(Fourier Transform Infrared Spectroscopy). The XRD studies revealed that there is a phase transition from β- to α-phase on doping with rare earth ions. The FTIR results showed that there is a dramatic stress on the Si-O bonds due to the effect produced by means of A-site vacancies resulted, on substitution of Eu<sup>3+</sup> and Sm<sup>3+</sup> in Ca2+ site. The particle size was estimated by TEM (Transmission Electron Microscopy), it was compared with the size determined by Scherrer's formula. The SEM (Scanning Electron Microscopy) of β-CaSiO<inf>3</inf> shows that it is a porous material containing agglomerated nanoparticles. The dielectric measurements for lower frequencies (10<sup>2</sup> Hz–10<sup>6</sup> Hz) were performed for the undoped as well as doped with Eu<sup>3+</sup> (3 mole %) and Sm<sup>3+</sup>(4 mole %). The measurements revealed that the undoped β-CaSiO<inf>3</inf> shows high dielectric constant (54) and low dielectric loss (0.03) and low value of dielectric conductivity (of the order of 10–7mho cm) at 1MHz.frequency. However the dielectric constant (66) increased and dielectric loss (0.008) decreased by doping with the rare earth elements of atomic radii smaller than that of Calcium and an unusual observation is that the dielectric constant, dielectric loss and dielectric conductivity become equalized when β-CaSiO<inf>3</inf> was doped with 3 mole% Eu<sup>3+</sup> and 4 mole% Sm<sup>3+</sup>.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"109 1","pages":"305-310"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73679445","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)
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