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[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials最新文献

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Long wavelength quantum well lasers: synopsis of the RACE AQUA project on high speed MQW-DFB lasers 长波长量子阱激光器:RACE AQUA项目对高速MQW-DFB激光器的概述
P. Speier
Work being done within the RACE program, a major European Community action aimed at integrated broadband telecommunications, under the Advanced Quantum Well Lasers for Multigigabit Transmission Systems (AQUA) project, is discussed. Two main objectives of the AQUA project are outlined: the realization of ultra-high-speed lasers and ultra-high-speed optoelectronic devices, and the realization of advanced devices based on quantum well (QW) materials. Results are presented concerning: the epitaxial growth of QW materials in the InGaAsP and InGaAlAs system lattice matched to InP: the development of high speed laser structures with reduced parasitics; the realization of QW distributed feedback (DFB) lasers, demonstrating the expected performance enhancement due to QW effects: and the system related tests of such devices.<>
讨论了RACE计划中正在进行的工作,RACE计划是欧共体针对综合宽带电信的一项主要行动,是用于多千兆传输系统的先进量子阱激光器(AQUA)项目。概述了AQUA项目的两个主要目标:实现超高速激光器和超高速光电器件,以及实现基于量子阱(QW)材料的先进器件。在与InP相匹配的InGaAsP和InGaAlAs体系晶格中,QW材料的外延生长;低寄生的高速激光结构的发展;QW分布式反馈(DFB)激光器的实现,展示了由于QW效应而预期的性能增强,以及该器件的系统相关测试。
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引用次数: 1
High quality thermally diffused p/sup +/-n InP structures 高品质的热扩散p/sup +/-n InP结构
M. Faur, C. Goradia, M. Goradia, I. Weinberg
Cd diffusion and Zn diffusion into n-InP:S (N/sub D/ =3.5*10/sup 16/ and 4.5*10/sup 17/ cm/sup -3/) were performed by a closed ampoule technique at diffusion temperatures from 500 to 600 degrees C by using either high-purity Cd and Zn or Cd/sub 3/P/sub 2/ and Zn/sub 3/P/sub 2/. The Czochralski LEC grown substrates with etch pit densities (EPDs) from 3*10/sup 4/ to 7*10/sup 4/ cm/sup -2/ were used. Diffusions were performed through either bare surfaces or using SiO/sub 2/ (50-100 AA thick) and phosphorus-rich anodic and chemical oxides (25-50 AA thick) as cap layers. Specular surfaces have been obtained after Cd diffusion from Cd/sub 3/P/sub 2/ through P-rich oxide cap layers with a very low surface dislocation density which goes through a minimum of 400-800 cm/sup -2/ at the diffusion temperature of 560 degrees C. AM0 250 degrees C V/sub oc/ values as high as 860 mV from solar cells made on these structures are reported.<>
在500 ~ 600℃的扩散温度下,用高纯度Cd和Zn或Cd/sub 3/P/sub 2/和Zn/sub 3/P/sub 2/进行了Cd和Zn向N - inp:S (N/sub D/ =3.5*10/sup 16/和4.5*10/sup 17/ cm/sup -3/)的扩散。采用蚀刻坑密度(EPDs)为3*10/sup 4/ ~ 7*10/sup 4/ cm/sup -2/的Czochralski LEC生长基质。通过裸露表面或使用SiO/sub / (50-100 AA厚)和富磷阳极氧化物和化学氧化物(25-50 AA厚)作为帽层进行扩散。Cd/sub 3/P/sub 2/通过富P氧化物层扩散后获得了镜面表面,其表面位错密度非常低,在560℃的扩散温度下,至少通过400-800 cm/sup -2/,在250℃的扩散温度下,由这些结构制成的太阳能电池的V/sub /值高达860 mV。
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引用次数: 3
Characterization of Si- delta doped InP grown by low pressure chemical vapor deposition 低压化学气相沉积法生长Si δ掺杂InP的表征
M. di Forte-Poisson, C. Brylinski, J. Favre, J. Portal, D. Lavielle
Experimental results obtained from secondary ion mass spectroscopy (SIMS) and low temperature Hall and Shubnikov de Haas measurements (SdH) of in situ planar doped low pressure metalorganic chemical vapor deposition (LP-MOCVD) grown InP epilayers with various Si doses (from 3*10/sup 11/ cm/sup -2/ to 7*10/sup 13/ cm/sup -2/) are presented. Transport measurements give evidence of quantum confinement of the electronic gas in the layers. The electronic density of the delta -doped layers is shown to saturate at n/sub s/=6*10/sup 12/ cm/sup -2/, depending on silicon doses. A comparison of design parameters (silicon doses) with both measured and calculated electronic subband properties is made for each epilayer. The transport properties of lightly Si delta -doped InP layers, under optical excitation at 4.2 K, are described.<>
本文介绍了不同Si剂量(3*10/sup 11/ cm/sup -2/到7*10/sup 13/ cm/sup -2/)的原位平面掺杂低压金属有机化学气相沉积(LP-MOCVD)生长的InP脱膜的二次离子质谱(SIMS)和低温霍尔和舒布尼可夫·德·哈斯测量(SdH)的实验结果。输运测量提供了层中电子气体的量子限制的证据。δ掺杂层的电子密度在n/sub s/=6*10/sup 12/ cm/sup -2/时达到饱和,这取决于硅的剂量。设计参数(硅剂量)与测量和计算的电子子带性质进行了比较。描述了在4.2 K光激发下轻Si δ掺杂InP层的输运性质。
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引用次数: 0
Very low threshold current density (Al)GaInAs/Al(Ga)InAs laser structures grown by atmospheric pressure MOVPE 常压MOVPE生长极低阈值电流密度GaInAs/Al(Ga)InAs激光结构
R. Gessner, M. Beschorner, M. Druminski
The growth of (Al)GaInAs/Al(Ga)InAs structures of high quality for laser devices using metalorganic vapor-phase epitaxy (MOVPE) at atmospheric pressure is described. SeH/sub 2/ and DEZn have been used as the dopant precursors. Se is an appropriate dopant for the n-type confinement layers of lasers, showing a distinctly higher electrical activation in AlInAs than Si. Zn is superior to Mg as a dopant for the p-type confinement layers of lasers as its apparent diffusion coefficient is about one order of magnitude lower than that of Mg in AlInAs. Broad-area double-heterostructure (DH) lasers (device length=800 mu m) operating at 1.66 mu m and 1.55 mu m are shown to have I/sub th/ values as low as 2.3 kA cm/sup 2/ and 1.5 kA/cm/sup 2/, respectively. With broad-area separate-confinement-heterostructure multiple-quantum-well (SCH-MQW) lasers (device length=800 mu m) emitting at 1.524 mu m, threshold current densities as low is 0.92 kA/cm/sup 2/ can be achieved.<>
介绍了利用金属有机气相外延(MOVPE)在常压下生长高质量激光器件用(Al)GaInAs/Al(Ga)InAs结构的方法。采用SeH/ sub2 /和DEZn作为掺杂前驱体。Se是n型激光器约束层的合适掺杂剂,在AlInAs中表现出明显高于Si的电激活。作为p型激光器约束层的掺杂剂,Zn的表观扩散系数比AlInAs中的Mg低一个数量级,因此优于Mg。在1.66 μ m和1.55 μ m波段工作的广域双异质结构(DH)激光器(器件长度=800 μ m)的I/sub /值分别低至2.3 kA/cm/sup 2/和1.5 kA/cm/sup 2/。采用器件长度为800 μ m的广域分离束缚异质结构多量子阱(SCH-MQW)激光器,发射波长为1.524 μ m,可实现低至0.92 kA/cm/sup 2/的阈值电流密度。
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引用次数: 1
High speed InGaAs HBT devices and circuits 高速InGaAs HBT器件和电路
B. Jalali, R. Nottenburg, M. Banu, R. Montgomery, A. Levi, M. Panish, A. Cho
An overview of the InGaAs heterostructure bipolar transistor (HBT) technology for applications in high speed electronics is presented. Properties of both Al/sub 0.48/In/sub 0.52/As-In/sub 0.53/Ga/sub 0.47/As and InP-In/sub 0.53/Ga/sub 0.47/As heterostructure systems, important for integrated circuit applications are discussed. Examples of high speed and low power integrated circuits that are relevant for lightwave communication technology are described.<>
综述了InGaAs异质结构双极晶体管(HBT)技术在高速电子器件中的应用。本文讨论了Al/sub 0.48/In/sub 0.52/As-In/sub 0.53/Ga/sub 0.47/As和InP-In/sub 0.53/Ga/sub 0.47/As异质结构系统的性能。描述了与光波通信技术相关的高速低功耗集成电路的实例。
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引用次数: 4
Impurity induced disordering of GaInAs quantum wells with barriers of AlGaInAs or of GaInAsP (MQW waveguides) 杂质诱导的AlGaInAs或GaInAsP (MQW波导)势垒GaInAs量子阱的无序性
J. Marsh, S. Bradshaw, A. Bryce, R. Gwilliam, R. Glew
The use of fluorine and boron to disorder two material systems for use at 1.5 mu m, GaInAs/AlGaInAs and GaInAs/GaInAsP, both lattice-matched to InP, is discussed. Three structures are investigated: two GaInAsP multiple quantum well (MQW) structures, a separate confinement heterostructure (SCH) and a graded index structure (GRIN), and an AlGaInAs MQW structure. It is shown that the P-quaternary disorders without any implants at annealing temperatures above 500 degrees C, and the Al-quaternary is stable up to annealing temperatures of 650 degrees C. At annealing temperatures of 600 degrees C for the P and 650 degrees C for the Al quaternary. boron causes some intermixing, probably due to the damage caused by implantation. A significant blue shift was achieved in material implanted with fluorine while, under the same annealing conditions, the control samples remained unchanged.<>
讨论了在1.5 μ m下使用氟和硼对晶格与InP匹配的GaInAs/AlGaInAs和GaInAs/GaInAsP两种材料体系进行无序化。研究了三种结构:两个GaInAsP多量子阱(MQW)结构,一个独立约束异质结构(SCH)和一个梯度指数结构(GRIN),以及一个AlGaInAs MQW结构。结果表明,在500℃以上的退火温度下,P-四元结构没有掺杂,Al-四元结构在650℃退火温度下稳定,P为600℃,Al为650℃。硼引起一些混合,可能是由于植入造成的损害。在注入氟的材料中实现了显著的蓝移,而在相同的退火条件下,对照样品保持不变。
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引用次数: 2
Uniform MBE growth of N-AlInAs/InGaAs heterostructures on 3-inch InP substrates and HEMT fabrication 3英寸InP衬底上N-AlInAs/InGaAs异质结构的均匀MBE生长和HEMT制备
K. Imanishi, T. Ishikawa, M. Higuchi, K. Kondo, T. Katakami, S. Kuroda
It is shown that extremely uniform epitaxial growth of AlInAs/InGaAs selectively doped heterostructures can be achieved on 3-in InP substrates using an In-solder-free holder. The variation in the electron mobility and sheet electron density over a 3-in wafer is within +or-1%. The standard deviation of threshold voltage for HEMTs fabricated on the epitaxial wafer is 26 mV for a threshold voltage of -0.80 V. The uniformity obtained is acceptable for LSI fabrication.<>
结果表明,在3-in InP衬底上,使用无in焊料支架可以实现AlInAs/InGaAs选择性掺杂异质结构的均匀外延生长。在3英寸晶圆上,电子迁移率和薄片电子密度的变化在±1%以内。当阈值电压为-0.80 V时,在外延片上制备的hemt的阈值电压标准差为26 mV。所获得的均匀性对于大规模集成电路制造是可以接受的
{"title":"Uniform MBE growth of N-AlInAs/InGaAs heterostructures on 3-inch InP substrates and HEMT fabrication","authors":"K. Imanishi, T. Ishikawa, M. Higuchi, K. Kondo, T. Katakami, S. Kuroda","doi":"10.1109/ICIPRM.1991.147459","DOIUrl":"https://doi.org/10.1109/ICIPRM.1991.147459","url":null,"abstract":"It is shown that extremely uniform epitaxial growth of AlInAs/InGaAs selectively doped heterostructures can be achieved on 3-in InP substrates using an In-solder-free holder. The variation in the electron mobility and sheet electron density over a 3-in wafer is within +or-1%. The standard deviation of threshold voltage for HEMTs fabricated on the epitaxial wafer is 26 mV for a threshold voltage of -0.80 V. The uniformity obtained is acceptable for LSI fabrication.<<ETX>>","PeriodicalId":6444,"journal":{"name":"[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials","volume":"18 1","pages":"652-655"},"PeriodicalIF":0.0,"publicationDate":"1991-04-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88830518","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
High quality pseudomorphic InAs/InP quantum wells grown by molecular beam epitaxy 用分子束外延生长高质量假晶InAs/InP量子阱
M. Hopkinson, P. Claxton, J. David, G. Hill, M. Reddy, M. Pate
The growth of InAs/InP strained quantum well structures with well thicknesses of 5 to 70 AA by solid source molecular beam epitaxy (MBE) is discussed. Photoluminescence has been observed from these structures over the wavelength range 1.0 to approximately=2.1 mu m, at 10 K. Multiquantum-well p-i-n diodes are characterized for optoelectronic applications from 1.0 to 2.0 mu m. Preliminary studies of InAs-channel MODFET devices are presented.<>
讨论了用固体源分子束外延(MBE)生长井厚为5 ~ 70 AA的InAs/InP应变量子阱结构。在10 K下,这些结构在波长范围为1.0至约=2.1 μ m的范围内观察到光致发光。多量子阱p-i-n二极管的光电应用范围为1.0 ~ 2.0 μ m。本文介绍了inas通道MODFET器件的初步研究。
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引用次数: 0
Nearly ideal Schottky contacts of n-InP n-InP的近理想肖特基接触
Z. Shi, W. Anderson
Nearly ideal Schottky contacts were realized on n-InP by oxide-free surface cleaning techniques. Current-voltage (I-V) and capacitance-voltage (C-V) characteristics of the metal-semiconductor (MS) diodes are presented for the temperature range of 100 to 300 K. The current transport mechanism is found to be dominated by thermionic emission (TE) rather than thermionic field emission (TFE) theory. The ideality factor, n, is nearly constant in the temperature range of 150 to 300 K. The superior behavior of the diodes, such as ideal electrical characteristics, n values of around 1.01, and linear 1/C/sup 2/-V plots, is attributed to the preservation of the surface integrity and the reduction of the interface states.<>
通过无氧化表面清洗技术,在n-InP表面实现了接近理想的肖特基接触。研究了金属半导体(MS)二极管在100 ~ 300 K温度范围内的电流电压(I-V)和电容电压(C-V)特性。目前的输运机制主要是热离子发射(TE)理论,而不是热离子场发射(TFE)理论。理想因子n在150 ~ 300 K的温度范围内几乎是恒定的。二极管的优异性能,如理想的电特性,约1.01的n值,线性1/C/sup 2/-V图,归因于保持表面完整性和减少界面状态。
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引用次数: 0
1.55 mu m laser on [110] InP by GSMBE GSMBE对[110]InP的1.55 μ m激光
F. Zamkotsian, F. Poingt, L. Le Gouezigou, F. Gaborit, J. Provost, C. Artigue, J. Benoit
The realization of standard heterojunction and multiple quantum well (MQW) 1.55- mu m lasers in the GaInAsP system grown by gas source molecular beam epitaxy (GSMBE) on [110] InP is discussed. It is shown that high-performance transmitters suitable for the polarization scrambling scheme can be achieved by integrating, on the same substrate, lasers and efficient polarization modulators.<>
讨论了在[110]InP上气源分子束外延(GSMBE)生长的GaInAsP系统中标准异质结和多量子阱(MQW) 1.55 μ m激光器的实现。结果表明,在同一衬底上集成激光器和高效偏振调制器可以实现适合偏振置乱方案的高性能发射机。
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引用次数: 0
期刊
[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials
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