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[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials最新文献

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16-element grown-junction InGaAs/InP PIN photodetector arrays on 2" diameter InP substrates 16元生长结InGaAs/InP PIN光电探测器阵列在2”直径的InP衬底
D. Spear, W. Lee, A. Smith, P. Dawe, M. Geear, S. Bland
The fabrication and performance characteristics of a linear 16-element InGaAs/InP PIN photodetector array suitable for 1.3-1.6 mu m wavelength applications are described. The detector design relies on a grown pn junction for the diode and avoids producing exposed InGaAs junctions, which are difficult to passivate. The array fabrication procedure is fully compatible with future monolithic integration with InP-based electronics. A satisfactory yield of good arrays has been obtained. Optical crosstalk measurements were performed at DC and RF with the array mounted in a grating demultiplexer.<>
介绍了一种适用于1.3 ~ 1.6 μ m波长应用的16元InGaAs/InP PIN线性光电探测器阵列的制作和性能特点。探测器的设计依赖于二极管的生长pn结,并避免产生难以钝化的暴露InGaAs结。阵列制造过程完全兼容未来基于inp的电子器件的单片集成。获得了令人满意的好阵列产率。光学串扰测量在直流和射频下进行,阵列安装在光栅解复用器中。
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引用次数: 0
Monolithic integrated laser DHBT OEICs for optical fibre communication 用于光纤通信的单片集成激光DHBT OEICs
E. Kuhn, C. Hache, D. Kaiser, G. Laube, P. Speier, F. Tegude, K. Wunstel
The monolithic integration of a double heterostructure bipolar transistor (DHBT) with a 1.3- mu m semi-insulating buried heterostructure (SI-BH) laser realized with InP/InGaAs(P) is discussed. The integration is based on a SI-BH laser with laterally grown SI-InP current blocking layers and an invertible DHBT with underlying SI-InP. For the growth process of the SI-InP as well as the DHBT-layers, a selective, planarizing metalorganic vapor-phase epitaxy (MOVPE) process is used. For nonoptimized devices, large signal operation up to 600 Mb/s and 5 mW optical power per facet has been demonstrated. The DC and RF characteristics of the transmitter are presented.<>
讨论了用InP/InGaAs(P)实现1.3 μ m半绝缘埋置异质结构(SI-BH)激光器与双异质结构双极晶体管(DHBT)的单片集成。该集成基于具有横向生长SI-InP电流阻断层的SI-BH激光器和具有底层SI-InP的可逆DHBT。对于SI-InP和dhbt层的生长过程,采用了选择性的、平面化的金属有机气相外延(MOVPE)工艺。对于非优化的器件,已经证明了高达600 Mb/s的大信号操作和每个面5 mW的光功率。给出了发射机的直流和射频特性
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引用次数: 3
Impurity induced disordering of GaInAs quantum wells with barriers of AlGaInAs or of GaInAsP (MQW waveguides) 杂质诱导的AlGaInAs或GaInAsP (MQW波导)势垒GaInAs量子阱的无序性
J. Marsh, S. Bradshaw, A. Bryce, R. Gwilliam, R. Glew
The use of fluorine and boron to disorder two material systems for use at 1.5 mu m, GaInAs/AlGaInAs and GaInAs/GaInAsP, both lattice-matched to InP, is discussed. Three structures are investigated: two GaInAsP multiple quantum well (MQW) structures, a separate confinement heterostructure (SCH) and a graded index structure (GRIN), and an AlGaInAs MQW structure. It is shown that the P-quaternary disorders without any implants at annealing temperatures above 500 degrees C, and the Al-quaternary is stable up to annealing temperatures of 650 degrees C. At annealing temperatures of 600 degrees C for the P and 650 degrees C for the Al quaternary. boron causes some intermixing, probably due to the damage caused by implantation. A significant blue shift was achieved in material implanted with fluorine while, under the same annealing conditions, the control samples remained unchanged.<>
讨论了在1.5 μ m下使用氟和硼对晶格与InP匹配的GaInAs/AlGaInAs和GaInAs/GaInAsP两种材料体系进行无序化。研究了三种结构:两个GaInAsP多量子阱(MQW)结构,一个独立约束异质结构(SCH)和一个梯度指数结构(GRIN),以及一个AlGaInAs MQW结构。结果表明,在500℃以上的退火温度下,P-四元结构没有掺杂,Al-四元结构在650℃退火温度下稳定,P为600℃,Al为650℃。硼引起一些混合,可能是由于植入造成的损害。在注入氟的材料中实现了显著的蓝移,而在相同的退火条件下,对照样品保持不变。
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引用次数: 2
Laser properties of 1.35 mu m InGaAs/InGaAsP-separate-confinement-multi-quantum-well-structures 1.35 μ m InGaAs/ ingaasp -分离约束-多量子阱结构的激光特性
M. Mohrle, D. Grutzmacher, M. Rosenzweig, H. Duser
Measurements of the threshold current densities of 1.35 mu m InGaAs/InGaAsP MQW separate-confinement laser structures are presented. It is shown that the lowest values for the threshold current density can be obtained with barrier thicknesses between 10 and 15 nm. The extrapolated threshold current densities of the investigated structures varied between 780 and 1120 A-cm/sup -2/. depending on the number of wells. The characteristic temperature T/sub 0/ of the laser structures was about 60 K.<>
给出了1.35 μ m InGaAs/InGaAsP MQW分离约束激光结构的阈值电流密度测量结果。结果表明,障壁厚度在10 ~ 15 nm之间时,阈值电流密度最小。所研究结构的外推阈值电流密度在780和1120 A-cm/sup -2/之间变化。取决于井的数量。激光结构的特征温度T/sub /约为60 k。
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引用次数: 0
Silicon nitride deposited by direct photolysis of NH/sub 3/ and SiH/sub 4/ at 185 nm and its application to InP MISFETs NH/ sub3 /和SiH/ sub4 /在185 nm直接光解沉积氮化硅及其在InP misfet中的应用
N. Proust, M. Petitjean, J. Perrin
The preparation of high quality silicon nitride films by direct photolysis of NH/sub 3/-SiH/sub 4/ at low temperature and their deposition onto InP substrates are discussed. The atomic composition of the films is determined by nuclear analysis. In order to optimise bulk and interface properties quasi-static I(V) and C(V) characteristics measurements were performed on MIS diodes at 1 MHz. At 250 degrees C, a critical field of 4 MV/cm and a resistivity of 6*10/sup 15/ Omega -cm are observed. For annealed samples. a density of states of 4*10/sup 11/ cm/sup -2/ eV/sup -1/ is determined by Terman analysis. The fabrication of a preliminary InP depletion mode MISFET without a recess and N/sup +/ contact layer is described.<>
讨论了低温直接光解NH/sub 3/-SiH/sub 4/制备高质量氮化硅薄膜及其在InP衬底上的沉积。薄膜的原子组成由核分析确定。为了优化体积和界面特性,在1 MHz下对MIS二极管进行了准静态I(V)和C(V)特性测量。在250℃时,观察到临界场为4 MV/cm,电阻率为6*10/sup 15/ Omega -cm。退火样品。态密度为4*10/sup 11/ cm/sup -2/ eV/sup -1/,由特曼分析确定。本文描述了无凹槽和N/sup +/接触层的InP耗尽型MISFET的初步制备。
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引用次数: 0
High speed InGaAs HBT devices and circuits 高速InGaAs HBT器件和电路
B. Jalali, R. Nottenburg, M. Banu, R. Montgomery, A. Levi, M. Panish, A. Cho
An overview of the InGaAs heterostructure bipolar transistor (HBT) technology for applications in high speed electronics is presented. Properties of both Al/sub 0.48/In/sub 0.52/As-In/sub 0.53/Ga/sub 0.47/As and InP-In/sub 0.53/Ga/sub 0.47/As heterostructure systems, important for integrated circuit applications are discussed. Examples of high speed and low power integrated circuits that are relevant for lightwave communication technology are described.<>
综述了InGaAs异质结构双极晶体管(HBT)技术在高速电子器件中的应用。本文讨论了Al/sub 0.48/In/sub 0.52/As-In/sub 0.53/Ga/sub 0.47/As和InP-In/sub 0.53/Ga/sub 0.47/As异质结构系统的性能。描述了与光波通信技术相关的高速低功耗集成电路的实例。
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引用次数: 4
Very low threshold current density (Al)GaInAs/Al(Ga)InAs laser structures grown by atmospheric pressure MOVPE 常压MOVPE生长极低阈值电流密度GaInAs/Al(Ga)InAs激光结构
R. Gessner, M. Beschorner, M. Druminski
The growth of (Al)GaInAs/Al(Ga)InAs structures of high quality for laser devices using metalorganic vapor-phase epitaxy (MOVPE) at atmospheric pressure is described. SeH/sub 2/ and DEZn have been used as the dopant precursors. Se is an appropriate dopant for the n-type confinement layers of lasers, showing a distinctly higher electrical activation in AlInAs than Si. Zn is superior to Mg as a dopant for the p-type confinement layers of lasers as its apparent diffusion coefficient is about one order of magnitude lower than that of Mg in AlInAs. Broad-area double-heterostructure (DH) lasers (device length=800 mu m) operating at 1.66 mu m and 1.55 mu m are shown to have I/sub th/ values as low as 2.3 kA cm/sup 2/ and 1.5 kA/cm/sup 2/, respectively. With broad-area separate-confinement-heterostructure multiple-quantum-well (SCH-MQW) lasers (device length=800 mu m) emitting at 1.524 mu m, threshold current densities as low is 0.92 kA/cm/sup 2/ can be achieved.<>
介绍了利用金属有机气相外延(MOVPE)在常压下生长高质量激光器件用(Al)GaInAs/Al(Ga)InAs结构的方法。采用SeH/ sub2 /和DEZn作为掺杂前驱体。Se是n型激光器约束层的合适掺杂剂,在AlInAs中表现出明显高于Si的电激活。作为p型激光器约束层的掺杂剂,Zn的表观扩散系数比AlInAs中的Mg低一个数量级,因此优于Mg。在1.66 μ m和1.55 μ m波段工作的广域双异质结构(DH)激光器(器件长度=800 μ m)的I/sub /值分别低至2.3 kA/cm/sup 2/和1.5 kA/cm/sup 2/。采用器件长度为800 μ m的广域分离束缚异质结构多量子阱(SCH-MQW)激光器,发射波长为1.524 μ m,可实现低至0.92 kA/cm/sup 2/的阈值电流密度。
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引用次数: 1
High-speed monolithic coherent optical receiver with a waveguide coupler and lateral PIN photodiodes integrated on a InP substrate 高速单片相干光接收机,具有波导耦合器和集成在InP衬底上的横向PIN光电二极管
N. Yasuoka, T. Sanada, H. Hamaguchi, M. Makiuchi, T. Mikawa, A. Kuramata, O. Wada, R. Deri
The structure and characteristics of a monolithic coherent receiver with an integrated waveguide coupler and a balanced pair of lateral PIN photodiodes are described. The lateral PIN photodiode is shown to have an improved structure and exhibits a 3-dB bandwidth of 2 GHz. Heterodyne detection at 1.8 GHz with this monolithic receiver is discussed.<>
介绍了一种具有集成波导耦合器和平衡双侧PIN光电二极管的单片相干接收机的结构和特性。横向PIN光电二极管具有改进的结构,并具有2ghz的3db带宽。讨论了该单片接收机在1.8 GHz频率下的外差检测。
{"title":"High-speed monolithic coherent optical receiver with a waveguide coupler and lateral PIN photodiodes integrated on a InP substrate","authors":"N. Yasuoka, T. Sanada, H. Hamaguchi, M. Makiuchi, T. Mikawa, A. Kuramata, O. Wada, R. Deri","doi":"10.1109/ICIPRM.1991.147443","DOIUrl":"https://doi.org/10.1109/ICIPRM.1991.147443","url":null,"abstract":"The structure and characteristics of a monolithic coherent receiver with an integrated waveguide coupler and a balanced pair of lateral PIN photodiodes are described. The lateral PIN photodiode is shown to have an improved structure and exhibits a 3-dB bandwidth of 2 GHz. Heterodyne detection at 1.8 GHz with this monolithic receiver is discussed.<<ETX>>","PeriodicalId":6444,"journal":{"name":"[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials","volume":"20 1","pages":"580-583"},"PeriodicalIF":0.0,"publicationDate":"1991-04-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90614054","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
InGaAs/InP double-heterojunction bipolar transistors with graded-InGaAsP between InGaAs base and InP collector grown by metal organic chemical vapor deposition 采用金属有机化学气相沉积法生长InGaAs/InP双异质结双极晶体管
M. Ohkubo, A. Iketani, T. Ijichi, T. Kikuta
The fabrication of InGaAs/InP double-heterojunction bipolar transistors (D-HBTs) grown by metal organic chemical vapor deposition (MOCVD) is described. With graded-InGaAsP layers inserted between the p/sup +/ InGaAs base and n/sup -/ InP collector, the current gain of D-HBTs with graded layers was found to be about twice as large as that of D-HBTs without graded layers, and the dependence of collector current on collector/emitter voltage was smaller than without graded layers. The current gain was measured up to 2300 with 25*25 mu m/sup 2/ emitter area at a collector current density of 1*10/sup 4/ A/cm/sup 2/.<>
介绍了用金属有机化学气相沉积法(MOCVD)制备InGaAs/InP双异质结双极晶体管(D-HBTs)的方法。在p/sup +/ InGaAs基极和n/sup -/ InP集电极之间插入梯度- ingaasp层,发现有梯度层的D-HBTs的电流增益约为没有梯度层的D-HBTs的两倍,集电极电流对集电极/发射极电压的依赖性小于没有梯度层的D-HBTs。在集电极电流密度为1*10/sup 4/ a /cm/sup 2/时,在发射极面积为25*25 μ m/sup 2/时,测量到电流增益可达2300。
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引用次数: 0
Characteristics of Schottky junctions on H/sub 2-/ and PH/sub 3-/plasma treated InP H/sub - 2-/和PH/sub - 3-/等离子体处理InP的肖特基结特性
T. Sugino, H. Yamamoto, T. Yamada, H. Ninomiya, Y. Sakamoto, K. Matsuda, J. Shirafuji
Effects of H/sub 2/ and PH/sub 3/ plasma treatment of the InP surface on the Schottky barrier junction characteristics are discussed. Au/n-InP Schottky junctions with barrier heights as high as 0.7 eV were achieved by surface treatment with H/sub 2/ and PH/sub 3/ plasma. It is shown that this enhancement of the barrier height is partly due to weakening of the surface Fermi level pinning and partly due to the forming of a thin oxide film or a thin P layer. Deep levels at 0.21 and 0.51 eV below the conduction band are generated at and near the surface of InP during H/sub 2/ plasma treatment. These traps are not observed in the case of PH/sub 3/ plasma treatment.<>
讨论了H/sub 2/和PH/sub 3/等离子体处理对InP表面肖特基势垒结特性的影响。通过H/sub /和PH/sub /等离子体表面处理,获得了势垒高度高达0.7 eV的Au/n-InP肖特基结。结果表明,这种势垒高度的增强部分是由于表面费米能级钉钉的减弱,部分是由于形成了薄氧化膜或薄P层。在H/sub - 2/等离子体处理过程中,在InP表面和表面附近产生了低于传导带0.21和0.51 eV的深能级。在PH/亚3/等离子体处理的情况下没有观察到这些陷阱。
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引用次数: 0
期刊
[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials
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