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2020 IEEE International Reliability Physics Symposium (IRPS)最新文献

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Full Understanding of Hot Electrons and Hot/Cold Holes in the Degradation of p-channel Power LDMOS Transistors 热电子和热/冷空穴在p沟道功率LDMOS晶体管退化中的充分理解
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9129112
A. Tallarico, S. Reggiani, R. Depetro, G. Croce, E. Sangiorgi, C. Fiegna
Degradation induced by hot-carrier stress is a crucial issue for the reliability of power LDMOS transistors. This is even more true for the p-channel LDMOS in which, unlike the n-channel counterpart, both the majority and minority carriers play a fundamental role on the device reliability. An in-depth study of the microscopic mechanisms induced by hot-carrier stress in new generation BCD integrated p-channel LDMOS is presented in this paper. The effect of the competing electron and hole trapping mechanisms on the on-resistance drift has been thoroughly analyzed. To this purpose, TCAD simulations including the deterministic solution of Boltzmann transport equation and the microscopic degradation mechanisms have been used, to the best of our knowledge, for the first time. The insight gained into the degradation sources and dynamics will provide a relevant basis for future device optimization.
热载流子应力引起的退化是影响大功率LDMOS晶体管可靠性的关键问题。对于p通道LDMOS来说更是如此,与n通道LDMOS不同,p通道LDMOS的多数载波和少数载波对器件可靠性都起着至关重要的作用。本文对新一代BCD集成p沟道LDMOS中热载子应力诱发的微观机制进行了深入的研究。深入分析了电子和空穴捕获机制对导阻漂移的影响。为此,据我们所知,首次使用了包括玻尔兹曼输运方程的确定性解和微观降解机制在内的TCAD模拟。对退化源和动力学的深入了解将为未来的设备优化提供相关基础。
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引用次数: 3
Comprehensive Quality and Reliability Management for Automotive Product 汽车产品综合质量与可靠性管理
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128795
M. Hsieh, W. S. Chiang, Harry I. A. Chen, M. Z. Lin, M. J. Lin
In this paper, we demonstrated a robust design, test and screen methodology to achieve the high quality and reliability demand for automotive products. In design phase, a comprehensive aging signoff flow is proposed. By thorough consideration of device aging behavior, thermal distribution and process variation, design for reliability can be implemented through the well control of aging margin. The product with aging signoff has 75mV improvement in end-of-life guard band. To meet automotive product DPPM expectation, two approaches are exercised for DPPM reduction. 1) System-level test (SLT) is introduced for improving test coverage. By exercising the IC of a system as an integrated whole for its intended end-use application, the marginal defects which escapes from function test (FT) can be detected. Result shows over 100 DPPM could be screened out. 2) An early failure rate (EFR) estimation strategy by 3 steps dynamic voltage stress (DVS) is proposed. It enables screen condition determination for achieving DPPM target.
在本文中,我们展示了一种稳健的设计、测试和筛选方法,以实现汽车产品的高质量和可靠性需求。在设计阶段,提出了一种综合的老化标识流程。通过充分考虑器件的老化行为、热分布和工艺变化,可以通过老化裕度的良好控制来实现可靠性设计。有老化标志的产品,其终寿命保护带提高75mV。为了满足汽车产品DPPM的期望,采用了两种方法来降低DPPM。1)系统级测试(SLT)的引入是为了提高测试覆盖率。通过将系统的集成电路作为其预期的最终用途应用的集成整体,可以检测出从功能测试(FT)中逃脱的边缘缺陷。结果表明,可筛选出100 ppm以上的DPPM。2)提出了一种基于3步动态电压应力的早期故障率(EFR)估计策略。它可以确定筛检条件,以实现DPPM目标。
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引用次数: 3
A New Implementation Approach for Reliability Design Rules against Plasma Induced Charging Damage from Well Configurations of Complex ICs 复杂集成电路井位等离子体诱导充电损伤可靠性设计规则的新实现方法
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128866
Andreas Martin, A. Kamp
Plasma induced charging damage of MOS transistors originating from well charging (triple well or deep n-well configuration) is investigated for two different technologies. It is shown that the degradation on MOS transistors can impact the reliability of a product in comparison to earlier published data where a yield loss characteristic was reported on the basis of initially high MOS gate oxide leakage currents. For the first time a drift in MOS threshold voltage was recorded associated with well charging. Experimental data from this work and earlier published well charging results describe the same failure mechanism, but degradation characteristics are different, hence indicating the relevance of appropriate reliability investigations to ensure a robust product design according to the design for reliability strategy. It is demonstrated that a reliability stress on adequate product-relevant test structures is required for a necessary well charging assessment.A suitable protection method against well charging is described and implemented into a newly formulated well charging design rule which is practicable enough for implementation in electronic design automation tools. However a design rule checker for well charging requires a different concept than one for commonly known plasma induced charging on MOS gate electrodes.
研究了三井和深n井两种不同充电方式下MOS晶体管的等离子体诱导充电损伤。研究表明,与早期发表的数据相比,MOS晶体管的退化会影响产品的可靠性,在早期发表的数据中,基于初始高MOS栅极氧化物泄漏电流报告了良率损失特性。首次记录到MOS阈值电压的漂移与井充电有关。这项工作的实验数据和早期发表的油井充电结果描述了相同的失效机制,但退化特征不同,因此表明了适当的可靠性研究的相关性,以确保根据可靠性设计策略进行稳健的产品设计。研究表明,在必要的充注井评估中,需要对适当的产品相关测试结构进行可靠性应力。描述了一种合适的防井装药保护方法,并将其实现到新制定的井装药设计规则中,该规则在电子设计自动化工具中具有足够的实用性。然而,井充电的设计规则检查器与MOS栅电极上的等离子体感应充电的设计规则检查器需要不同的概念。
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引用次数: 6
Investigating of SER in 28 nm FDSOI-Planar and Comparing with SER in Bulk-FinFET 28nm FDSOI-Planar中SER的研究及与块体finet中SER的比较
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9129644
T. Uemura, Byungjin Chung, J. Jo, Hai Jiang, Yongsung Ji, T. Jeong, R. Ranjan, Youngin Park, K. Hong, Seungbae Lee, H. Rhee, S. Pae, Euncheol Lee, Jaehee Choi, Shotaro Ohnishi, Ken Machida
This paper investigates soft error in memories and logic circuits in 28 nm planar-FDSOI technology by neutron, alpha, proton, and gamma-ray irradiation tests, and compares with SER in bulk-FinFET. The comparison elucidates the different SER trends between planar-FDSOI and bulk-FinFET.
本文通过中子、α、质子和γ射线辐照测试,研究了28nm平面fdsoi技术中存储器和逻辑电路的软误差,并与块状finfet中的SER进行了比较。比较说明了平面fdsoi和块体finfet之间不同的SER趋势。
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引用次数: 7
Influence of the magnetic field on dielectric breakdown in memristors based on h-BN stacks 磁场对h-BN堆叠型忆阻器介质击穿的影响
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128325
D. Maldonado, J. Roldán, A. Roldán, F. Jiménez-Molinos, F. Hui, Y. Shi, X. Jing, Chao Wen, M. Lanza
Here we present a characterization study of Au/hBN/Au/Ti memristors when exposed to controlled magnetic field (MF) perpendicular to the device main vertical axis. The main switching parameters, i.e. set and reset voltages and currents, have been extracted and the influence of the MF on them (and on the resistive switching operation) has been analyzed. We observed that the set voltage values decrease with the MF, also the variability linked to the reset voltage is reduced. A similar effect is seen on the reset current, which shows a decrease due to the MF presence. These effects are linked to the reduction of the effective conductive filament section due to the influence of Lorentz force on the current lines.
本文研究了Au/hBN/Au/Ti忆阻器暴露在垂直于器件主垂直轴的受控磁场(MF)下的特性。提取了主要开关参数,即定值电压和复位电压和电流,并分析了中频对它们(以及对电阻开关操作)的影响。我们观察到,设定电压值随着MF的减小而减小,与重置电压相关的可变性也减小了。在复位电流上可以看到类似的效果,由于中频存在,复位电流减小。这些效应与由于洛伦兹力对电流线的影响而导致的有效导电丝截面的减小有关。
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引用次数: 0
Fast & Accurate Methodology for Aging Incorporation in Circuits using Adaptive Waveform Splitting (AWS) 使用自适应波形分裂(AWS)快速准确地将老化纳入电路的方法
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9129351
Subrat Mishra, P. Weckx, Ji-Yung Lin, B. Kaczer, D. Linten, A. Spessot, F. Catthoor
A common approach to incorporate workload dependent aging in circuits is to use an effective stress time or so-called signal probability (SP) to calculate degradation under realistic workload scenarios. However, this approach is not fully physics-based and incurs erroneous estimation of degradation. Moreover, cycle-accurate (CA) simulations are computationally expensive. In this paper, a relatively fast yet accurate, adaptive waveform splitting (AWS) algorithm is proposed to enable fast calculation of workload-dependent device aging. The proposed algorithm has been adopted to perform aging estimation of large circuits under specific workload scenarios.
在电路中纳入工作负载相关老化的一种常用方法是使用有效应力时间或所谓的信号概率(SP)来计算实际工作负载场景下的退化。然而,这种方法不是完全基于物理的,并且会导致对退化的错误估计。此外,周期精确(CA)模拟在计算上是昂贵的。本文提出了一种相对快速而准确的自适应波形分割(AWS)算法,以实现与工作负载相关的设备老化的快速计算。该算法已被用于大型电路在特定工作负载下的老化估计。
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引用次数: 1
Reliability Characteristics of a High Density Metal- Insulator-Metal Capacitor on Intel’s 10+ Process Intel 10+制程上高密度金属-绝缘体-金属电容器的可靠性特性
Pub Date : 2020-04-01 DOI: 10.1109/irps45951.2020.9128312
Cheyun Lin, U. Avci, M. Blount, R. Grover, Jeffery Hicks, R. Kasim, A. Kundu, C. Pelto, C. Ryder, A. Schmitz, K. Sethi, D. Seghete, D. Towner, A. Welsh, J. Weber, C. Auth
We present a high density MIM decoupling capacitor that enables improved microprocessor performance by providing robust on-chip power supply droop reduction. The MIM dielectric is fabricated using ALD-deposited HfO2-Al2O3 and HfO2-ZrO2 high-k dielectrics with PVD TiN electrodes. We achieve single MIM-cap densities of 37 fF/μm2 and 52 fF/μm2 that meet reliability requirement for both 1.98 V and 1.26 V use conditions. The reliability of the HfO2-ZrO2 capacitor shows minimal voltage polarity dependence, which enables the use of multi-plate MIM-caps to increase capacitance density. We achieved a capacitance density of 141 fF/μm2 with a four-plate configuration, representing a 3.5× improvement over the reported capacitance density on Intel’s 14 nm process. In addition, the stack meets environmental stress tests. This MIM- cap improves the on-chip power delivery network, leading to an increase in maximum frequency of microprocessors and is now shipping in volume.
我们提出了一种高密度MIM去耦电容器,通过提供强大的片上电源降低,可以提高微处理器的性能。采用ald沉积HfO2-Al2O3和HfO2-ZrO2高k介电体和PVD TiN电极制备了MIM介电体。我们实现了37 fF/μm2和52 fF/μm2的单MIM-cap密度,满足1.98 V和1.26 V使用条件下的可靠性要求。HfO2-ZrO2电容器的可靠性显示出最小的电压极性依赖性,这使得使用多板mim帽可以增加电容密度。我们在四板结构下实现了141 fF/μm2的电容密度,比英特尔14nm工艺的电容密度提高了3.5倍。此外,该堆栈还满足环境压力测试。这种MIM- cap改善了片上功率传输网络,导致微处理器的最大频率增加,现在正在批量出货。
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引用次数: 6
Analysis of BTI, SHE Induced BTI and HCD Under Full VG/VD Space in GAA Nano-Sheet N and P FETs 全VG/VD空间下GAA纳米片N和P场效应管中BTI、SHE诱导BTI和HCD的分析
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128310
N. Choudhury, Uma Sharma, Huimei Zhou, R. Southwick, Miaomiao Wang, S. Mahapatra
An ultrafast (10ps delay) characterization method is used to measure threshold voltage shift (ΔVT) owing to Bias Temperature Instability (BTI) and Hot Carrier Degradation (HCD) stress in N and P channel Gate All Around (GAA) NSFETs. ΔVT time kinetics at various gate bias (VG) and temperature (T) for BTI and at various VG and drain bias (VD) for HCD is analyzed. Contribution from Self Heat Effect (SHE) induced BTI to overall HCD is estimated under full VG/VD space and pure HCD contribution is determined.
采用超快(10ps延迟)表征方法测量N和P通道栅极环(GAA) nsfet中由偏置温度不稳定性(BTI)和热载流子退化(HCD)应力引起的阈值电压漂移(ΔVT)。ΔVT分析了BTI在不同栅偏置(VG)和温度(T)下和HCD在不同栅偏置(VG)和漏偏置(VD)下的时间动力学。在完全VG/VD空间下,估计了自热效应(SHE)诱导的BTI对总HCD的贡献,并确定了纯HCD的贡献。
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引用次数: 11
Study of the Walk-Out Effect of Junction Breakdown Instability of the High-Voltage Depletion-Mode N-Channel MOSFET for NAND Flash Peripheral Device and an Efficient Layout Solution NAND闪存外围器件用高压耗尽型n沟道MOSFET结击穿不稳定性的走出效应研究及高效布局解决方案
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9129216
C. Lo, T. Yeh, Wei-Chen Chen, H. Lue, Keh-Chung Wang, Chih-Yuan Lu, Yao-Wen Chang, Yung-Hsiang Chen, Chu-Yung Liu
In this paper, we report the junction breakdown instability of a depletion-mode high-voltage NMOSFET (DN) used in the NAND Flash peripheral circuit. Such DN device needs to sustain the highest voltage (>30V) during NAND Flash programming [1]-[2]. We observed instability of the junction breakdown in the product chip. Electrical measurement shows that the first measured breakdown voltage (BVDSS) from virgin state is usually lower than that after stress, which is called the "walk-out" effect [3]-[4]. The walk-out effect can be recovered by a high-temperature baking, indicating it’s not a permanent damage. TCAD simulation suggests that gate edge hole trapping by the band-to-band tunneling injection is the root cause of such walk-out effect [5]-[6]. The conventional layout structure of the DN has a large overlap of the buried-channel N-type doping with the light-doped drain (LDD), leading to the worse walk-out effect than normal HV NMOS. To suppress this effect, we propose an optimal layout design method of DN to avoid the overlap of N-type buried-channel doping with the LDD. Experimental results show very good improvements of BVDSS with acceptable transistor performances.
本文报道了用于NAND闪存外围电路的耗尽型高压NMOSFET (DN)的结击穿不稳定性。这种DN器件在NAND Flash编程过程中需要维持最高电压(>30V)[1]-[2]。我们观察到产品芯片中结击穿的不稳定性。电学测量结果表明,初始状态下测得的第一次击穿电压(BVDSS)通常低于应力后的击穿电压,称为“走出”效应[3]-[4]。通过高温烘烤可以恢复“走出来”的效果,这表明它不是永久性的损伤。TCAD模拟表明,带对带隧道注入的栅极边缘空穴捕获是产生这种走出效应[5]-[6]的根源。由于DN的传统布局结构存在埋沟道n型掺杂和光掺杂漏极(LDD)的大量重叠,导致其走出效果比普通HV NMOS差。为了抑制这种影响,我们提出了一种DN的优化布局设计方法,以避免n型埋道掺杂与LDD重叠。实验结果表明,BVDSS得到了很好的改进,晶体管性能还可以接受。
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引用次数: 2
Circuit Reliability Analysis of RRAM-based Logic-in-Memory Crossbar Architectures Including Line Parasitic Effects, Variability, and Random Telegraph Noise 包括线路寄生效应、可变性和随机电报噪声在内的基于随机存贮器的逻辑横杆结构电路可靠性分析
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128343
T. Zanotti, F. Puglisi, P. Pavan
The Logic-in-Memory paradigm is considered a promising solution for improving the energy efficiency and computing power of architectures aimed at low power and/or data-intensive applications. Among in-memory computing enabling technologies, emerging non-volatile memories (e.g., RRAMs) are promising as they offer BEOL integration and small feature size. Several studies have shown that IMPLY architectures based on RRAM devices and the material implication logic enable the efficient computation of logic operations using the RRAM device both as storing and computing element. However, RRAM devices non-idealities introduce important circuit reliability issues, that are frequently neglected, thus undermining the circuit functionality. In this work, we use a physics-based compact model calibrated on experimental data to simulate the IMPLY operation performed on a crossbar array including line parasitic effects and RRAM devices non-idealities. We then introduce a novel smart scheme, SIMPLY, and show the circuit reliability improvement.
内存中的逻辑范式被认为是一个很有前途的解决方案,可以提高针对低功耗和/或数据密集型应用程序的架构的能源效率和计算能力。在内存计算支持技术中,新兴的非易失性存储器(例如rram)因其提供BEOL集成和小尺寸特性而前景广阔。一些研究表明,基于RRAM器件和物质蕴涵逻辑的隐含体系结构可以有效地利用RRAM器件作为存储和计算元件进行逻辑运算。然而,RRAM器件的非理想性引入了重要的电路可靠性问题,这些问题经常被忽视,从而破坏了电路的功能。在这项工作中,我们使用基于物理的紧凑模型来校准实验数据,以模拟在包括线寄生效应和RRAM器件非理想性的交叉棒阵列上执行的IMPLY操作。然后,我们介绍了一种新的智能方案simple,并展示了电路可靠性的改进。
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引用次数: 6
期刊
2020 IEEE International Reliability Physics Symposium (IRPS)
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