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2023 IEEE International Reliability Physics Symposium (IRPS)最新文献

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Customized wafer level verification methodology: quality risk pre-diagnosis with enhanced screen-ability of stand-by stress-related deteriorations 定制晶圆级验证方法:质量风险预诊断与待机应力相关的恶化增强筛选能力
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117800
Jiyoung Yoon, Bumgi Lee, Jaehee Song, Bokyoung Kang, Sangho Lee, Doh-Soon Kwak, Heonsang Lim, Ilsang Park, Jonghoon Kim, S. Pae
This paper presents an accelerated stress of product at the wafer level for quality evaluations by performing pre-assessment of stand-by stress-related deteriorations. It is a customized defect-inducing evaluation methodology designed to have consistency with longer term package level test. The test was conducted on 18-nm 8Gb DDR4 DRAM wafers under various time and voltage stress conditions at elevated temperature to find the optimal condition for quality monitoring purpose. Then, the screen-ability was empirically verified through physical failure analysis and statistically verified through Fisher's Exact Test.
本文通过对待机应力相关的退化进行预评估,提出了晶圆级产品的加速应力以进行质量评估。它是一种定制的缺陷诱导评估方法,旨在与长期的包级测试保持一致。在18nm 8Gb DDR4 DRAM晶圆上进行了不同时间和电压应力条件下的高温测试,以寻找质量监测的最佳条件。然后,通过物理失效分析对筛分能力进行实证验证,并通过Fisher精确检验进行统计验证。
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引用次数: 0
Experimental Study of Self-Heating Effect in InGaAs HEMTs for Quantum Technologies Down to 10K 低至10K量子技术InGaAs hemt自热效应的实验研究
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118294
F. Maria, F. Balestra, C. Theodorou, G. Ghibaudo, C. Zota, E. Cha
This work studies self-heating effects in InGaAs cryogenic HEMT devices, which aim at the enhancement of control/readout electronics performance in quantum computers. Starting from the well-known method of gate resistance thermometry, documented in literature for its reliable results, we characterized these devices down to deep cryogenic temperatures, namely 10 K, typical of signal-processing electronics for qubits, such as low-noise amplifiers (LNA). We furthermore compared the results with those belonging to far more industrialized silicon technologies (Si FDSOI and bulk), showing exceptional performance of the InGaAs HEMTs thanks to their lack of buried oxide and quantum well structure, which combined with their high electron-mobility, makes them a great study case for the technologies of the future.
本文研究了InGaAs低温HEMT器件的自热效应,旨在提高量子计算机的控制/读出电子性能。从众所周知的门电阻测温方法开始,在文献中记录了其可靠的结果,我们将这些器件表征为深低温,即10 K,典型的量子比特信号处理电子器件,如低噪声放大器(LNA)。我们进一步将结果与那些属于更工业化的硅技术(Si FDSOI和bulk)的结果进行了比较,显示出InGaAs hemt的卓越性能,这得益于它们缺乏埋藏氧化物和量子阱结构,再加上它们的高电子迁移率,使它们成为未来技术的一个很好的研究案例。
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引用次数: 0
Unveiling Field Driven Performance Unreliabilities Governed by Channel Dynamics in MoSe2 FETs MoSe2场效应管中由通道动力学控制的场驱动性能不可靠性
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117743
Utpreksh Patbhaje, Rupali Verma, J. Kumar, Ansh, M. Shrivastava
MoSe2 is a wonderful ambipolar 2D material that provides a great platform for future electronics but lacks analysis for operation under electrical stress. This work focuses on parameter drifts observed in MoSe2 FETs due to evolution of channel as function of time and applied field during which captured stress current shows increment trends that does not saturate even after 1000 seconds of operation. ID(max) improvement of 42%, VT shifts by 380%, SS improvement by 30% and mobility increment by 33% presents unreliable scenarios in operation. This has been attributed to persistent strain in channel that manifests as improved ordering in channel that points to contact region being susceptible to performance degradation in MoSe2 FETs.
MoSe2是一种极好的双极性二维材料,为未来的电子产品提供了一个很好的平台,但缺乏对电应力下操作的分析。这项工作的重点是在MoSe2 fet中观察到的参数漂移,这是由于通道随时间和施加场的演变而引起的,在此期间,捕获的应力电流显示出增量趋势,即使在1000秒后也不会饱和。ID(max)提高42%,VT位移提高380%,SS提高30%,机动性增加33%,这些都是运行中不可靠的场景。这归因于沟道中持续的应变,表现为沟道中有序的改善,这表明在MoSe2 fet中接触区域容易受到性能下降的影响。
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引用次数: 0
Impact of Thin-oxide Gate on the On-Resistance of HV-PNP Under ESD Stress 静电放电下薄氧化栅对HV-PNP导通电阻的影响
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117638
M. Monishmurali, N. K. Kranthi, G. Boselli, M. Shrivastava
Physical insights into the impact of the thin-oxide polysilicon gate on the on-resistance of DeMOS-based HV-PNP are developed using detailed TCAD simulation. Turn-on and eventual failure mechanisms in HV-PNP are discussed. The impact of thin-oxide polysilicon placed over the N-Well and P-Well regions is investigated separately. The physics of regenerative bipolar degradation and its effect of dynamic on-resistance is understood as a function of thin-oxide placement. Furthermore, floating the thin-oxide gate mitigated regenerative bipolar degradation while having a faster lateral PNP trigger, resulting in the best case of on-resistance at all current levels. The insights developed in this work help to design compact high-voltage PNPs.
利用详细的TCAD模拟,深入研究了薄氧化多晶硅栅极对基于demos的HV-PNP导通电阻的影响。讨论了HV-PNP的导通和最终失效机制。分别研究了放置在n阱和p阱上的薄氧化物多晶硅的影响。再生双极退化的物理性质及其动态导通电阻的影响被理解为薄氧化物放置的函数。此外,浮动的薄氧化栅极减轻了再生双极退化,同时具有更快的横向PNP触发,从而在所有电流水平上产生最佳导通电阻。在这项工作中发展的见解有助于设计紧凑型高压pnp。
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引用次数: 0
Thermal and statistical analysis of various AlN/GaN HEMT geometries for millimeter Wave applications 用于毫米波应用的各种AlN/GaN HEMT几何形状的热学和统计分析
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117807
N. Said, K. Harrouche, F. Medjdoub, N. Labat, J. Tartarin, N. Malbert
Downscaling HEMT devices is nowadays substantial to allow their operation in the millimeter wave frequency domain. In this work, the electrical parameters of three different AlN/GaN structures featuring various GaN channel thicknesses were compared. After a DC electrical stabilization procedure, 96 HEMT devices under test exhibit a minor dispersion in DIBL and lag rates, which reflects an undeniable technological mastering and maturity. Evaluation of the sensitivity of devices with different geometries at temperatures of up to 200°C revealed that the gate-drain distance impacts Ron variation and not Idss variation with temperature. We also showed that DIBL at moderate electrical field and the drain lags exhibit athermal behavior; unlike gate lag delays which can be thermally activated and exhibit a linear temperature dependence regardless of the size of the gate length and gate-to-drain distance.
缩小HEMT设备的尺寸,使其能够在毫米波频率域内工作。在这项工作中,比较了具有不同GaN通道厚度的三种不同AlN/GaN结构的电参数。经过直流电稳定化处理后,96个HEMT设备在DIBL和滞后率上的分散较小,这反映了不可否认的技术掌握和成熟。在高达200°C的温度下,对不同几何形状器件的灵敏度评估表明,栅极-漏极距离影响Ron变化,而不是Idss随温度的变化。在中等电场和漏极滞后条件下,DIBL表现出非热特性;与栅极延迟不同,栅极延迟可以被热激活,并且与栅极长度和栅极到漏极距离的大小无关,都表现出线性的温度依赖性。
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引用次数: 0
Reliability assessment of hafnia-based ferroelectric devices and arrays for memory and AI applications (Invited) 存储和人工智能应用中基于铪的铁电器件和阵列的可靠性评估(应邀)
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118099
L. Grenouillet, J. Barbot, J. Laguerre, S. Martin, C. Carabasse, M. Louro, M. Bedjaoui, S. Minoret, S. Kerdilès, C. Boixaderas, T. Magis, C. Jahan, F. Andrieu, J. Coignus
Ferroelectricity in doped HfO2 thin films was reported for the first time 12 years ago, generating strong interest in the non-volatile memory and logic community. Thanks to their CMOS compatibility and potential for scaling, hafnia-based Ferroelectric Random Access Memories (FeRAMs), Ferroelectric Tunnel Junctions (FTJ s) and Ferroelectric Field Effect Transistors (FeFETs) are not only a breakthrough with respect to conventional perovskite-based ferroelectric (FE) devices but also potentially a revolution from an application prospective, in particular considering the non-volatility and intrinsic energy efficiency of these devices. However, their maturity is currently too low to consider practical applications. In this paper, we therefore focus on the reliability assessment of Metal/FE/Metal (MFM) and Metal/FE/Dielectric/Metal (MFDM) stacks, either in the form of large area ferroelectric capacitors, or in the form of kbit arrays integrated in CMOS Back-End of Line.
12年前,掺杂HfO2薄膜中的铁电性首次被报道,引起了非易失性存储器和逻辑界的强烈兴趣。由于其CMOS兼容性和缩放潜力,基于铪的铁电随机存取存储器(FeRAMs),铁电隧道结(FTJ)和铁电场效应晶体管(fefet)不仅是传统钙钛矿基铁电(FE)器件的突破,而且从应用前景来看也可能是一场革命,特别是考虑到这些器件的非易失性和内在能量效率。然而,目前它们的成熟度太低,无法考虑实际应用。因此,在本文中,我们将重点研究金属/FE/金属(MFM)和金属/FE/介电/金属(MFDM)堆叠的可靠性评估,无论是以大面积铁电电容器的形式,还是以集成在CMOS后端线中的kbit阵列的形式。
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引用次数: 0
ReRAM CiM Fluctuation Pattern Classification by CNN Trained on Artificially Created Dataset 基于人工数据集训练的CNN波动模式分类
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118305
Ayumu Yamada, Naoko Misawa, C. Matsui, Ken Takeuchi
A CNN-based Fluctuation Pattern Classifier (FPC) is proposed. FPC is fully trained on the artificially created dataset with assumed fluctuation patterns such as random telegraph noise (RTN) and Oxygen Vacancy movement. FPC is applied to the measured ReRAM signals under different write conditions before read cycles and physical models are established based on the classification results. Proposed fluctuation reduction write (FRW) reduces ReRAM fluctuation rate by 35.1% to improve the inference accuracy of neural network.
提出了一种基于cnn的波动模式分类器。FPC在人工创建的数据集上进行了充分的训练,这些数据集具有假设的波动模式,如随机电报噪声(RTN)和氧空位运动。在读取周期之前,将FPC应用于不同写入条件下的实测ReRAM信号,并根据分类结果建立物理模型。提出的FRW (fluctuation reduction write)算法可将ReRAM波动率降低35.1%,提高神经网络的推理精度。
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引用次数: 0
Analysis of SSD Acoustic Noise Generation Mechanism depending on NAND operation 基于NAND操作的SSD噪声产生机制分析
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118247
Yusuf Cinar, Junghoon Kim, Eunho Oh, Sun-Gu Lee, Changsik Kwon, Jonggyu Park
This paper investigates the acoustic noise generation mechanism of solid-state drives (SSD) by analyzing NAND operation and measures variation of voltage, vibration, and acoustic pressure depending on the NAND operation. NAND operation is measured with respect to number of overlapped banks during its operation. It is observed that frequency components of bank interleaving process during the NAND operation affect voltage, vibration, and acoustic pressure variation. It was shown that acoustic noise of SSDs greatly depends on NAND operation.
本文通过对固态硬盘NAND运行的分析,探讨了固态硬盘的噪声产生机理,并测量了NAND运行过程中电压、振动和声压的变化。NAND操作是根据其运行过程中重叠银行的数量来衡量的。观察到NAND运行过程中银行交错过程的频率分量影响电压、振动和声压的变化。结果表明,固态硬盘的噪声很大程度上取决于NAND操作。
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引用次数: 0
Investigation of resistance fluctuations in ReRAM: physical origin, temporal dependence and impact on memory reliability ReRAM电阻波动的研究:物理来源、时间依赖性和记忆可靠性的影响
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117882
L. Reganaz, D. Deleruyelle, Q. Rafhay, Joel Minguet Lopez, N. Castellani, J. Nodin, A. Bricalli, G. Piccolboni, G. Molas, F. Andrieu
We investigate the impact of ReRAM resistance fluctuations in a 16kb memory array. ReRAM retention and read current fluctuations are the main factors limiting the reliability of the array. A KMC-based 3D simulation framework is introduced for a complete physical description of the observed mechanisms. After individual cell relaxation (up to one second at room temperature) and resistance distribution stabilization, single cell level fluctuations still occur, especially in HRS. Oxygen vacancy migration and recombination, RTN and 1/f noise components contribute to the dynamic evolution. In a first phase, higher and faster current fluctuations are measured due to RTN and Vo low energy migration (1-10min at 25°C). In a second phase, the contribution of Vo migration tends to decrease as they neutralize in clusters or diffuse (> 10min at 25°C). Finally, the impact of individual cell fluctuations on the variability and reliability of memory array is analyzed.
我们研究了16kb存储器阵列中ReRAM电阻波动的影响。ReRAM保留和读取电流波动是限制阵列可靠性的主要因素。介绍了一种基于kmc的三维仿真框架,用于对所观察到的机构进行完整的物理描述。在单个细胞松弛(室温下长达一秒)和电阻分布稳定后,单个细胞水平的波动仍然发生,特别是在HRS中。氧空位迁移和复合、RTN和1/f噪声分量对动态演化有贡献。在第一阶段,由于RTN和Vo低能量迁移(在25°C下1-10min),测量到更高更快的电流波动。在第二阶段,Vo迁移的贡献趋于减少,因为它们在团簇中中和或扩散(在25°C下bbb10min)。最后,分析了单个单元波动对存储阵列可变性和可靠性的影响。
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引用次数: 1
TCAD study of the Holding-Voltage Modulation in Irradiated SCR-LDMOS for HV ESD Protection 辐照SCR-LDMOS保压调制的TCAD研究
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118271
Laura Zunarelli, L. Balestra, S. Reggiani, R. Sankaralingam, M. Dissegna, G. Boselli
This paper investigates a method to increase the holding voltage in a conventional Silicon Controlled Rectifier (SCR) for ESD power clamping. Specifically, a SCR-LDMOS device with 150 V trigger voltage and 9 V holding voltage is investigated assuming the application of high-energy electron irradiation. Based on previous experimental and TCAD investigations, the most relevant kind of defects is accounted for at different irradiation levels clearly showing an increase of the holding voltage up to 16 V without any other significant change in the TLP characteristics. The role of trapped charges in the holding regime has been addressed up to the thermal runaway through extensive numerical investigations.
本文研究了一种提高传统可控硅(SCR)保持电压的方法,用于ESD电源箝位。具体来说,研究了一种触发电压为150 V、保持电压为9 V的SCR-LDMOS器件。根据之前的实验和TCAD研究,在不同的辐照水平下,最相关的缺陷类型清楚地表明,保持电压增加到16 V,而TLP特性没有任何其他显着变化。通过广泛的数值研究,捕获电荷在保温状态下的作用一直到热失控。
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引用次数: 0
期刊
2023 IEEE International Reliability Physics Symposium (IRPS)
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