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1993 (5th) International Conference on Indium Phosphide and Related Materials最新文献

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High gain low reflectivity travelling wave semiconductor optical amplifiers integrated with passive waveguides operating at 1.3 /spl mu/m wavelength 高增益低反射率行波半导体光放大器集成无源波导工作在1.3 /spl μ m波长
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380703
T. Brenner, R. Dall' Ara, C. Holtmann, P. Besse, H. Melchior
The authors report here the realization of InGaAsP/InP traveling wave optical amplifiers operating at /spl lambda/ = 1.3 /spl mu/m integrated with passive waveguides. The fabrication is based on two stage low-pressure metalorganic vapor phase epitaxy (LP-MOVPE) using thin etch-stop layers for easy fabrication and high reproducibility. The optical amplifiers are butt-jointed to the passive waveguides leading to high amplifier interface coupling efficiencies of over 90% and interface reflectivities below 5 /spl times/ 10/sup -6/. Single pass fiber-fiber gains of +17 dB (TE) and +6 dB (TM) with high saturation output power of -3.8 dBm were achieved.<>
本文报道了集成无源波导的工作频率为/spl λ / = 1.3 /spl mu/m的InGaAsP/InP行波光放大器的实现。该制造基于两级低压金属有机气相外延(LP-MOVPE),使用薄蚀刻停止层,易于制造和高再现性。光放大器与无源波导对接,使得放大器接口耦合效率高达90%以上,接口反射率低于5 /spl倍/ 10/sup -6/。单通光纤增益分别为+17 dB (TE)和+6 dB (TM),饱和输出功率为-3.8 dBm。
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引用次数: 2
MOCVD growth of InP by phosphine modulation 磷化氢调制InP的MOCVD生长
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380682
M.K. Lee, C. Hu, M. Lin
A new epitaxial growth process was developed using phosphine modulation using conventional metal-organic chemical vapor deposition (MOCVD). With this method, phosphine was switched off a short time in each cycle and provided a metal-rich growth surface. With higher surface mobility of indium atoms than that of InP molecules, crystal quality was improved significantly. Photoluminescence full width at half maximum of 5.6 meV at 77 K was achieved under optimum growth conditions.<>
利用传统的金属-有机化学气相沉积(MOCVD)技术,开发了一种新的磷化氢调制外延生长工艺。通过这种方法,磷化氢在每个循环中被关闭很短的时间,并提供了一个富金属的生长表面。由于铟原子的表面迁移率高于InP分子,晶体质量得到了显著改善。在最佳生长条件下,在77 K下获得了5.6 meV的光致发光全宽。
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引用次数: 0
Multichannel MSM-HEMT receiver OEICs for WDM networks 用于WDM网络的多信道MSM-HEMT接收机oeic
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380657
W. Hong, G. Chang, R. Bhat, J. Hayes
The authors have demonstrated a monolithically integrated multichannel receiver optoelectronic integrated circuit (OEIC) for wavelength-division-multiplexing (WDM) applications. The OEIC is based on a InAlAs/InGaAs metal-semiconductor-metal (MSM) detector and high-electron-mobility-transistor (HEMT) device technologies. The response characteristics of the OEIC were measured by sweeping all four channels using a 1.3 /spl mu/m laser diode of known frequency response. A uniform frequency response was measured with each channel having a -3 dB bandwidth of 1.3 GHz. The sensitivity was -25.2 dBm at 1.2 Gb/s for a bit-error-rate of 10/sup -9/. The high sensitivity and high-speed operation is attributed to the low-capacitance MSM detector and the high-performance HEMT devices.<>
作者展示了一种用于波分复用(WDM)应用的单片集成多通道接收机光电集成电路(OEIC)。OEIC基于InAlAs/InGaAs金属-半导体-金属(MSM)探测器和高电子迁移率晶体管(HEMT)器件技术。通过使用已知频率响应的1.3 /spl μ m激光二极管扫描所有四个通道来测量OEIC的响应特性。测量了均匀的频率响应,每个通道具有1.3 GHz的-3 dB带宽。灵敏度为-25.2 dBm,速率为1.2 Gb/s,误码率为10/sup -9/。高灵敏度和高速运行归功于低电容MSM检测器和高性能HEMT器件。
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引用次数: 0
Comprehensive Zn doping investigation for GaInP/AlGaInP quantum well structures for high power visible lasers grown by MOCVD MOCVD制备高功率可见激光器中GaInP/AlGaInP量子阱结构的锌掺杂研究
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380548
K. Kadoiwa, M. Kato, T. Motoda, K. Mori, N. Fujii, S. Ochi, M. Yasuda, T. Sonoda, T. Murotani
The authors found that the inactive Zn in GaInP/(Al/sub 0.7/Ga/sub 0.3/)InP quantum well structures peculiarly degraded the carrier life time which strongly affected the laser's performance and reliability. The novel cap layer of n-(Al/sub 0.7/Ga/sub 0.3/)InP realized almost 100% activation of Zn in the p-(Al/sub 0.7/Ga/sub 0.3/)InP layer. The same temperature dependence on the threshold current density of visible lasers was obtained by introducing the novel n-cap layer. The kink level of 160 mW and the maximum light output power of 204 mW at 25/spl deg/C were realized by introducing the novel cap layer of the n-(Al/sub 0.7/Ga/sub 0.3/)InP for the window structured visible laser. This visible laser could achieve the finest reliability under stable continuous wave operation over 2600 hrs under 50 mW at 50/spl deg/C.<>
作者发现,GaInP/(Al/sub 0.7/Ga/sub 0.3/)InP量子阱结构中的非活性Zn会显著降低载流子寿命,严重影响激光器的性能和可靠性。新型n-(Al/sub 0.7/Ga/sub 0.3/)InP帽层实现了Zn在p-(Al/sub 0.7/Ga/sub 0.3/)InP层中几乎100%的活化。通过引入新的n-cap层,获得了相同的温度对可见激光器阈值电流密度的依赖关系。通过引入新型的n-(Al/sub 0.7/Ga/sub 0.3/)InP帽层,实现了窗口结构可见激光器在25/spl度/C条件下的160 mW的扭结电平和204 mW的最大光输出功率。这种可见激光器在50毫瓦、50/spl度/ c的条件下,在2600小时的稳定连续波工作下,可以达到最好的可靠性。
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引用次数: 1
Microanalysis of inhomogeneous reaction and Schottky-barrier change of Al/n-InP contacts upon rapid thermal annealing Al/n-InP触点快速热退火后不均匀反应和肖特基势垒变化的微观分析
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380550
T. Lin, H. Kaibe, C. Kaneshiro, S. Miyazaki, T. Okumura
Although metal contacts to oxidized n-InP show relatively high Schottky-barrier height, they will not be stable upon thermal annealing since the interfacial reaction might dissociate the oxides. The authors present the change in electrical properties of Al/n-InP contacts upon the rapid thermal annealing in relation to the interfacial reaction. In a certain range of the annealing temperature, a rectifying contact was obtained with a high Schottky-barrier height close to 0.7 eV, for which compositional and electrical microanalysis were carried out by means of the electron-probe microanalysis and the scanning internal-photoemission microscopy. The results are discussed.<>
虽然金属与氧化n-InP的接触表现出相对较高的肖特基势垒高度,但由于界面反应可能使氧化物解离,它们在热退火后不稳定。作者介绍了Al/n-InP触点在快速热退火后电学性能的变化与界面反应的关系。在一定的退火温度范围内,获得了具有接近0.7 eV的高肖特基势垒高度的整流触点,通过电子探针微分析和扫描内光电显微镜对其进行了成分和电性微分析。对结果进行了讨论。
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引用次数: 1
Monte Carlo study of a self-aligned dual 50nm-gate InAlAs/InGaAs HEMT exhibiting high performances without short-channel effects 自对准双50nm栅极InAlAs/InGaAs HEMT的蒙特卡罗研究,该HEMT具有高性能且无短通道效应
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380582
P. Dollfus, C. Brisset, S. Galdin, P. Hesto
The authors present a theoretical study of a self-aligned dual-gate InAlAs/InGaAs/InAlAs high electron mobility transistor (HEMT) using two-dimensional Monte Carlo simulation. The gate closer to the source (G1) is used to modulate the electron injection. The second gate (G2) is biased to a constant voltage V/sub G2S/ greater than all possible values of the control-gate voltage V/sub G1S/. Its role is to favor the occurrence of a screening effect between the drain contact and the first gated region of the channel. As soon as the domain of k-space transferred electrons grows between the two gates, the second gated-region becomes so resistive as to absorb the additional drain voltage. The potential barrier that controls the electron injection is then screened from drain potential variations. This screening effect allows restoration of an excellent saturation behavior while retaining high transconductance and cutoff frequency. Its role is to favor the occurrence of a screening effect between the drain contact and the first gated-region becomes so resistive as to absorb the additional drain voltage. The potential barrier that controls the electron injection is then screened from drain potential variations. This screening effect allows restoration of an excellent saturation behavior while retaining high transconductance and cutoff frequency.<>
作者利用二维蒙特卡罗模拟对自对准双栅InAlAs/InGaAs/InAlAs高电子迁移率晶体管(HEMT)进行了理论研究。靠近源的栅极(G1)用于调制电子注入。第二个栅极(G2)偏置于一个恒定电压V/sub G2S/,大于控制栅极电压V/sub G1S/的所有可能值。它的作用是有利于在漏极接触和通道的第一门控区域之间产生屏蔽效应。一旦k空间转移电子的畴在两个栅极之间增长,第二个栅极区域就会变得如此电阻,以至于吸收了额外的漏极电压。然后将控制电子注入的势垒从漏极势变化中屏蔽。这种筛选效果可以恢复优异的饱和性能,同时保持高跨导和截止频率。它的作用是在漏极触点和第一个栅极区之间形成屏蔽效应,使栅极区具有足够的电阻以吸收额外的漏极电压。然后将控制电子注入的势垒从漏极势变化中屏蔽。这种筛选效果可以恢复优异的饱和性能,同时保持高跨导和截止频率。
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引用次数: 1
Thermal stability of pseudomorphic In/sub x/Ga/sub 1-x/As/In/sub y/Al/sub 1-y/As/InP heterostructures 伪晶In/sub x/Ga/sub 1-x/As/In/sub y/Al/sub 1-y/As/InP异质结构的热稳定性
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380585
B. R. Bennett, J. D. del Alamo
The authors investigated the thermal stability of strained layers of InGaAs and InAlAs on InP. Epilayer and interface quality was assessed by high-resolution X-ray diffraction and electron mobility measurement as a function of the annealing cycle. Both techniques show that high-quality, pseudomorphic heterostructures are thermally stable at annealing temperatures of up to 700-800/spl deg/C, despite exceeding the Matthews-Blakeslee critical layer thickness. These findings suggest that layers exceeding the predicted critical thickness may be successfully used in device heterostructures.<>
研究了InGaAs和InAlAs应变层在InP上的热稳定性。通过高分辨率x射线衍射和电子迁移率测量作为退火周期的函数来评估脱毛层和界面质量。这两种技术都表明,尽管超过了Matthews-Blakeslee临界层厚度,但高质量的伪晶异质结构在高达700-800/spl℃的退火温度下是热稳定的。这些发现表明,超过预测临界厚度的层可以成功地用于器件异质结构。
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引用次数: 0
InP/GaAs/GaP/GaAs short period superlattices grown by chemical beam epitaxy 化学束外延生长的InP/GaAs/GaP/GaAs短周期超晶格
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380577
A. Freundlich, A. Bensaoula, A. Bensaoula, V. Rossignol
The growth of a new type of pseudomorphically strained layer superlattice is investigated. InP(n)/GaAs(m)/GaP(n)/GaAs(m) superlattices with n=1 to 4 monolayers and m=4 to 40 monolayers were grown using chemical beam epitaxy on GaAs substrates. Perfectly strain balanced InP(n)/GaAs(m)/GaP(n)/ GaAs(m) superlattices with n=4 monolayers were realized. The global mismatch introduced by 50 period In(4)/GaAs(4)/GaP(4)/GaAs(4) superlattices is below 2/spl times/10/sup -3/ and superlattice satellite peaks are clearly observed in the diffraction patterns, demonstrating that chemical beam epitaxy is perfectly suited for realization of such strain balanced short superlattices.<>
研究了一类新型伪晶应变层超晶格的生长。利用化学束外延技术在GaAs衬底上生长出n=1 ~ 4层和m=4 ~ 40层的InP(n)/GaAs(m)/GaP(n)/GaAs(m)超晶格。实现了n=4层的InP(n)/GaAs(m)/GaP(n)/ GaAs(m)超晶格的应变平衡。50周期In(4)/GaAs(4)/GaP(4)/GaAs(4)超晶格引入的全局失配小于2/spl倍/10/sup -3/,并且在衍射图中清晰地观察到超晶格卫星峰,表明化学束外延非常适合实现这种应变平衡的短超晶格。
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引用次数: 1
Monolithic, two-terminal InP/Ga/sub 0.47/In/sub 0.53/As tandem solar cells 单片双端InP/Ga/sub 0.47/In/sub 0.53/As串联太阳能电池
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380672
M. Wanlass, J. Ward, K. Emery, T. Coutts
Recent research has been directed towards the development of two-terminal, i.e., series-connected, monolithic InP/Ga/sub 0.47/In/sub 0. /tandem cells. Two fundamental problems must be addressed to realize high-performance, two-terminal cells. First, an ohmic electrical interconnect between the top and bottom subcells must be integrated into the monolithic structure to connect the subcells in series. The optical and joule losses in the interconnect should be negligible compared to the tandem cell output. Second, because the subcells are connected in series, techniques for matching the subcell photocurrents, and maximizing the tandem cell photocurrent, under relevant solar spectra, are necessary to achieve the highest tandem cell efficiency. The authors describe preliminary progress towards solving these problems, and outline directions for future work.<>
最近的研究方向是发展双端,即串联,单片InP/Ga/sub 0.47/In/sub 0。/串联细胞。要实现高性能的双端电池,必须解决两个基本问题。首先,顶部和底部子单元之间的欧姆电气互连必须集成到单片结构中,以串联子单元。与串联电池输出相比,互连中的光学和焦耳损耗应该可以忽略不计。其次,由于亚电池是串联连接的,因此需要在相关太阳光谱下匹配亚电池光电流并最大化串联电池光电流的技术,以实现最高的串联电池效率。作者描述了解决这些问题的初步进展,并概述了未来工作的方向。
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引用次数: 0
First fabrication of continuously graded InGaAsP on GaAs for 0.98/spl mu/m lasers 首次在GaAs上制备了0.98/spl mu/m的连续梯度InGaAsP激光器
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380561
A. Iketani, M. Ohkubo, S. Namiki, T. Ijichi, T. Kikuta
InGaAs/GaAs/InGaAsP continuously graded index separate confinement heterostructure (GRIN-SCH) lasers were fabricated by metal organic chemical vapor deposition (MOCVD) for the first time. Transmission electron microscope observation and secondary ion mass spectroscopy measurement show that the continuously graded InGaAsP layers were grown excellently. A very high characteristic temperature of 307K was obtained on the ridge waveguide lasers. Very stable and narrow far field patterns were obtained. The coupling to a single mode fiber was performed with high coupling efficiency of 60%, and output power as high as 78mW was achieved.<>
首次采用金属有机化学气相沉积(MOCVD)技术制备了InGaAs/GaAs/InGaAsP连续渐变指数分离约束异质结构(GRIN-SCH)激光器。透射电镜观察和二次离子质谱测量表明,连续梯度的InGaAsP层生长良好。在脊波导激光器上获得了307K的高特性温度。得到了非常稳定的窄远场模式。与单模光纤的耦合效率高达60%,输出功率高达78mW。
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引用次数: 0
期刊
1993 (5th) International Conference on Indium Phosphide and Related Materials
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