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1993 (5th) International Conference on Indium Phosphide and Related Materials最新文献

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Flat FM response without thermal dip for an optimized two section phase tunable DFB laser 优化后的两段相位可调谐DFB激光器无热倾角的平坦调频响应
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380571
J. Jacquet, J. Provost, M. Sotom, O. Gautheron, F. Poingt, O. Le Gouezigou, D. Leclerc, C. Labourie, J. Benoit
The authors point out both theoretically and experimentally that photon distribution in two-active section lasers can greatly influence the FM response of such devices. Optical communication systems based on frequency shift keying (FSK) require laser sources featuring high FM efficiency for low spurious amplitude modulation, high bandwidth for high bit rate operation and flat FM response to avoid any degradation induced by long transmitted data sequences. These requirements are not fully met by standard distributed feedback (DFB) lasers, mainly because thermal effects induce a dip with phase inversion in the FM response at a relatively low frequency. To overcome this problem, a new two-segment DFB structure is proposed emitting at 1.5 /spl mu/m with high FM sensitivity and flat FM response up to 1 GHz. The design of this structure relies on the optimum use of the effect of the inhomogeneous photon distribution along the cavity.<>
从理论上和实验上指出,双有源截面激光器的光子分布对器件的调频响应有很大的影响。基于频移键控(FSK)的光通信系统要求激光源具有高调频效率以实现低杂散调幅,高带宽以实现高比特率操作,平坦调频响应以避免长时间传输数据序列引起的衰减。标准的分布式反馈(DFB)激光器不能完全满足这些要求,主要是因为在相对较低的频率下,热效应会导致调频响应的相位反转。为了克服这个问题,提出了一种新的两段DFB结构,发射频率为1.5 /spl mu/m,具有高调频灵敏度和高达1 GHz的平坦调频响应。这种结构的设计依赖于对沿腔不均匀光子分布效应的最佳利用。
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引用次数: 1
Determination of the refractive indices and interfaces of In/sub 0.53/Al/sub 0.16/Ga/sub 0.31/As and In/sub 0.53/Al/sub 0.21/ layers on InP in the wavelength range from 280 to 1900 nm In/sub 0.53/Al/sub 0.16/Ga/sub 0.31/As和In/sub 0.53/Al/sub 0.21/层在InP上280 ~ 1900 nm波长范围内折射率和界面的测定
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380555
H. Dinges, H. Burkhard, R. Losch, H. Nickel, W. Schlapp
The refractive indices of In/sub 0.53/Al/sub 0.16/Ga/sub 0.31/As and In/sub 0.53/Al/sub 0.21/Ga/sub 0.26/As/InP were measured for the first time in the wavelength range from 280 to 1900 nm by spectroscopic ellipsometry. The results on InP and GaAs are in good agreement with the measurements in the literature. The interface layer due to the exchange of phosphorus and arsenic atoms during the desorption procedure of the molecular beam epitaxy growth exists and was also found by high resolution X-ray diffraction.<>
在280 ~ 1900 nm波长范围内,利用椭圆偏振光谱首次测量了In/sub 0.53/Al/sub 0.16/Ga/sub 0.31/As和In/sub 0.53/Al/sub 0.21/Ga/sub 0.26/As/InP的折射率。对InP和GaAs的测量结果与文献中的测量结果一致。在分子束外延生长的解吸过程中,由于磷和砷原子的交换而形成的界面层也存在,并通过高分辨率x射线衍射发现
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引用次数: 0
Correlation between interfacial defects and electrical properties of LP-MOCVD GaInAs/InP heterostructures, application to high performance 1.67 /spl mu/m GaInAs/InP PiN photodiodes LP-MOCVD GaInAs/InP异质结构界面缺陷与电学性能的相关性,应用于高性能1.67 /spl mu/m GaInAs/InP PiN光电二极管
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380692
M. di Forte-Poisson, C. Brylinski, C. Herbeaux, Y. Androussi, A. Lefebvre, J. di Persio, E. Vassilakis, F. Herrbach, C. Carriere
The authors report on low pressure-metal-organic chemical vapor deposition (LP-MOCVD) growth and the properties of GaInAs/InP double heterostructures grown on InP substrate. Some critical points for the LP-MOCVD process are the quality of the sources and appropriate growth conditions. These critical parameters were investigated together with the effect of different switching sequences from InP to GaInAs on the crystallographic and electrical properties of the direct InP/GaInAs interface. The relationship between crystallographic and electrical properties of GaInAs/InP interfaces is demonstrated. In addition a good correlation between such properties and performance of GaInAs/InP PiN photodiodes was observed.<>
本文报道了低压金属有机化学气相沉积(LP-MOCVD)生长及其在InP衬底上生长的GaInAs/InP双异质结构的性能。LP-MOCVD工艺的关键在于源的质量和适宜的生长条件。研究了这些关键参数以及从InP到GaInAs的不同开关顺序对直接InP/GaInAs界面的晶体学和电学性能的影响。研究了GaInAs/InP界面的晶体学和电学性能之间的关系。此外,还观察到这些特性与GaInAs/InP PiN光电二极管的性能之间存在良好的相关性。
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引用次数: 0
Residual impurities in high purity InP grown by chemical beam epitaxy 化学束外延生长高纯InP中的残留杂质
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380694
T. S. Rao, C. Lacelle, S. Rolfe, L. Allard, S. Charbonneau, A. P. Roth, T. Steiner, M. Thewalt
In the past few years, chemical beam epitaxy (CBE) has succeeded in producing high purity InP with residual carrier concentrations in the low 10/sup 14/ cm/sup -3/ range and liquid nitrogen temperature mobilities much higher than 10/sup 5/ cm/sup 2//Vs. The authors present the results of a study where they have combined electrical, chemical, and optical measurements to identify the residual impurities in InP layers grown with different growth parameters. It is shown that S and Si are the two major residual donor impurities in InP layers grown by CBE and that they originate from the gas sources. Arsenic contamination of InP layers is a common problem in gas source systems, particularly when a single cracker cell is used for both As and P sources. However this contamination can be greatly reduced with a thorough baking prior to InP growth. The concentration of acceptors is negligible and too low to allow the identification of the residual acceptor impurities. Under optimized growth conditions, InP layers with residual carrier concentrations less than 10/sup 14/ cm/sup -3/ can be routinely grown with 77 K mobilities larger than 2 /spl times/ 10/sup 5/ cm/sup 2//Vs.<>
在过去的几年里,化学束外延(CBE)已经成功地生产出了高纯度的InP,其残余载体浓度在10/sup 14/ cm/sup -3/范围内,液氮温度迁移率远高于10/sup 5/ cm/sup 2//Vs。作者介绍了一项研究的结果,他们将电学、化学和光学测量相结合,以确定在不同生长参数下生长的InP层中的残留杂质。结果表明,在CBE生长的InP层中,S和Si是两种主要的残余供体杂质,它们来源于气源。砷污染的InP层是一个常见的问题,在气源系统,特别是当一个裂化装置同时用于砷和磷源。然而,在InP生长之前进行彻底的烘烤可以大大减少这种污染。受体的浓度可以忽略不计,并且太低,无法识别残留的受体杂质。在优化的生长条件下,剩余载流子浓度小于10/sup 14/ cm/sup -3/ /的InP层可以正常生长,77k迁移率大于2/ spl倍/ 10/sup 5/ cm/sup 2//Vs.>
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引用次数: 0
Design of high quality thermally diffused p/sup +/n and n/sup +/p InP structures with the help of electrochemical studies 借助电化学研究设计高质量的热扩散p/sup +/n和n/sup +/p InP结构
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380620
M. Faur, M. Ghalla-Goradia, C. Vargas-Aburto
The authors report on the use of electrochemical (EC) techniques for characterization and step-by-step optimization of n/sup +/p and p/sup +/n InP structures fabricated by thermal diffusion, for making high efficiency radiation resistant InP solar cells. The emitter layer and the junction proximity of the base are characterized as functions of: (a) various surface preparation procedures; (b) diffusion cap; (c) diffusion source; and (d) diffusion conditions consisting of diffusion temperature and time, amount of source material and added phosphorus, and temperature difference between the source and substrates. The EC characterization of the emitter layer provides: (a) thickness of front damaged layers; (b) density of surface and deep dislocations, and precipitates; (c) net majority carrier concentration depth profiles; and (d) surface and deep trap levels. The EC characterization was done both before and after irradiating the structure with high energy electrons and protons.<>
作者报告了利用电化学(EC)技术对热扩散制备的n/sup +/p和p/sup +/n InP结构进行表征和逐步优化,以制备高效耐辐射的InP太阳能电池。发射极层和基极的结邻近度的特征为:(a)各种表面制备程序的函数;(b)扩散帽;(c)扩散源;(d)扩散条件,包括扩散温度和时间、源物质和磷添加量、源与底物温差。发射层的EC表征提供:(a)前损伤层的厚度;(b)表面和深层位错和沉淀的密度;(c)净多数载流子浓度深度分布;(d)表层和深层圈闭水平。在高能电子和质子辐照前后对结构进行了EC表征。
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引用次数: 0
Properties of InP grown by migration-enhanced epitaxy using polycrystalline InP as phosphorus source 以多晶InP为磷源的迁移增强外延生长InP的性质
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380658
B.X. Yang, H. Hasegawa
The authors discuss the crystalline quality and electrical properties of InP grown by the migration-enhanced epitaxy (MEE) mode (Y. Horikoshi et al., 1986). InP layers were characterized by reflection high-energy electron diffraction, X-ray diffraction, X-ray photoelectron spectroscopy, Auger electron spectroscopy, photoluminescence, and Hall measurements. Electrical properties which are strongly dependent on growth temperature are explained in terms of the impurity conduction through the residual stoichiometry-related donor defects. A conventional molecular beam epitaxy (MBE) growth was also made for comparison.<>
作者讨论了通过迁移增强外延(MEE)模式生长的InP的晶体质量和电学性能(Y. Horikoshi et al., 1986)。采用反射高能电子衍射、x射线衍射、x射线光电子能谱、俄歇电子能谱、光致发光和霍尔测量对InP层进行了表征。电学性质是强烈依赖于生长温度解释的杂质通过残余化学计量相关的供体缺陷传导。为了进行比较,还进行了常规分子束外延(MBE)生长。
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引用次数: 3
InP-based quantum wells for electro-optic waveguide circuits 电光波导电路中基于inp的量子阱
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380607
J. Zucker
The author discusses some of the device issues that arise when InP-based quantum wells (QWs) are incorporated in guided-wave photonic integrated circuits (PICs). By operating at wavelengths close to the bandgap, enhanced electrooptic effects allow QW waveguide switches and modulators to have sizes that are significantly smaller than those in bulk semiconductors. Compactness is an advantage for monolithic integration with other components, for high-speed operation, and for lowering the unit cost by increasing the number of devices per wafer. However for QW devices to be useful in real optical systems, the negative implications of using near-bandedge phenomena must be confronted. These may include high propagation loss, limited optical bandwidth, and polarization-dependence. For manufacture of QW PICs the number of processing steps and their complexity must be reduced. These issues were examined and it was found that some can be successfully addressed through materials science and bandgap engineering.<>
作者讨论了在导波光子集成电路(PICs)中引入基于inp的量子阱(qw)时出现的一些器件问题。通过在接近带隙的波长下工作,增强的电光效应使QW波导开关和调制器的尺寸比体半导体中的开关和调制器小得多。对于与其他组件的单片集成,高速运行以及通过增加每个晶圆的器件数量来降低单位成本,紧凑性是一个优势。然而,为了使量子波器件在实际光学系统中发挥作用,必须面对使用近带现象的负面影响。这些可能包括高传播损耗,有限的光带宽,和偏振依赖性。为了制造量子阱光子晶体,必须降低加工步骤的数量和复杂性。对这些问题进行了研究,发现其中一些可以通过材料科学和带隙工程成功地解决
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引用次数: 0
ECR-plasma-deposited gate dielectrics for InP MISFETs 用于InP misfet的ecr等离子体沉积栅介电体
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380587
A. Fathimulla, D. Gutierrez
The authors present the properties of SiO/sub 2/ and Si/sub 3/N/sub 4/ films for various deposition parameters and the performance of an InP metal-insulated semiconductor FET (MISFET) with a SiO/sub 2/ gate dielectric. The experiments were performed in a Plasma Therm SLR 770 ECR system with an Astex microwave source. Both Si and undoped InP substrates were used to study the quality of the films. The InP MISFET fabricated with the ECR-deposited SiO/sub 2/ exhibited DC characteristics and drain current drift as good or better than those of MISFETs fabricated using other techniques for depositing gate dielectrics. The results indicate that the ECR-deposited films are excellent candidates for gate dielectrics and passivation of III-V devices.<>
研究了不同沉积参数下SiO/sub 2/和Si/sub 3/N/sub 4/薄膜的性能,以及SiO/sub 2/栅极介质下InP金属绝缘半导体场效应管(MISFET)的性能。实验在Astex微波源的等离子体Therm SLR 770 ECR系统中进行。采用Si衬底和未掺杂的InP衬底对薄膜的质量进行了研究。用ecr沉积SiO/ sub2 /制备的InP MISFET表现出与使用其他沉积栅介电体技术制备的MISFET相同或更好的直流特性和漏极电流漂移。结果表明,ecr沉积膜是栅极介质和III-V器件钝化的理想候选材料。
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引用次数: 0
High efficiency buried quantum wires defined by a local order-disorder transition in Ga/sub 0.5/In/sub 0.5/P/ (Al/sub 0.3/Ga/sub 0.7/)/sub 0.5/In/sub 0.5/P Ga/sub 0.5/ in /sub 0.5/P/ (Al/sub 0.3/Ga/sub 0.7/)/sub 0.5/ in /sub 0.5/P中局部有序-无序跃迁定义的高效埋地量子线
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380540
Y. Hamisch, R. Steffen, A. Forchel, P. Rontgen
The bandgap difference between the ordered and the disordered phase of GaInP of about 100 meV was used for a lateral potential modulation in GaInP/AlGaInP heterostructures by means of masked ion implantation and rapid thermal annealing. The authors found a very sharp transition from the ordered to the disordered state of the material both as a function of the annealing temperature and the implantation dose. The photoluminescence of the buried quantum wires fabricated with mask widths down to 25 nm shows a high quantum efficiency and a maximum blue shift of the wire luminescence of 35 meV.<>
利用GaInP有序相和无序相之间约100 meV的带隙差,通过掩膜离子注入和快速热退火,实现了GaInP/AlGaInP异质结构的横向电位调制。作者发现材料从有序状态到无序状态的急剧转变是退火温度和注入剂量的函数。掩模宽度为25 nm的埋地量子线的光致发光表现出较高的量子效率和最大蓝移为35 meV。
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引用次数: 0
Optical characterization of InAlAs/InP single and double heterostructures InAlAs/InP单质和双质异质结构的光学特性
Pub Date : 1993-04-19 DOI: 10.1109/ICIPRM.1993.380686
M. Garcia Perez, T. Benyattou, A. Tabata, G. Guillot, M. Sacilotti, P. Abraham, Y. Monteil, J. Tardy
The authors report low temperature photoluminescence studies of single (InP/InAlAs) and double (InP/InAlAs/InP) heterostructures. The samples were grown by atmospheric pressure metal organic vapor phase epitaxy at 650/spl deg/C. On the single heterostructure, the well known emission was observed at 1.2 eV due to InAlAs on InP type II direct interface. On the double heterostructure, a new emission at 1.3 eV has been observed. The influence of the excitation power and the electric field was investigated on this transition. Optical measurement results are presented carried out on a bevelled sample. The results show that this emission is related to an interface recombination and that both interfaces are not equivalent.<>
作者报道了单(InP/InAlAs)和双(InP/InAlAs/InP)异质结构的低温光致发光研究。样品采用650℃常压金属有机气相外延生长。在单一异质结构上,由于InP II型直接界面上的InAlAs,在1.2 eV处观察到众所周知的发射。在双异质结构上,观察到1.3 eV的新发射。研究了激发功率和电场对这一转变的影响。给出了对斜面样品进行光学测量的结果。结果表明,这种发射与界面复合有关,两者的界面不是等效的
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引用次数: 0
期刊
1993 (5th) International Conference on Indium Phosphide and Related Materials
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