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2016 IEEE International Electron Devices Meeting (IEDM)最新文献

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Thinnest transparent epidermal sensor system based on graphene 基于石墨烯的最薄透明表皮传感器系统
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838446
S. K. Ameri, R. Ho, H. Jang, Yu Wang, David M Schnyer, D. Akinwande, N. Lu
We report the first demonstration of a graphene-based epidermal sensor system (GESS) with total thickness below 500 nm. The GESS is manufactured by the cost-effective and rapid “cut-and-paste” method on tattoo paper and can be directly laminated on human skin like a temporary transfer tattoo. Without any tape or adhesive, the GESS completely conforms to the microscopic morphology of human skin via van der Waals interaction. The softness and transparency of the GESS, make it the world's first epidermal sensor system that is invisible both mechanically and optically. The GESS has been successfully applied to measure electrocardiogram (ECG), electroencephalogram (EEG) and electromyogram (EMG) with signal-to-noise ratio comparable with commercial electrodes, in addition to skin temperature and skin hydration. The thin and transparent graphene epidermal sensor can be used for the first time enable simultaneous electrical and optical epidermal sensing.
我们报道了一种总厚度低于500纳米的石墨烯表皮传感器系统(GESS)的首次演示。GESS采用经济高效、快速的“剪切粘贴”方法在纹身纸上制造,可以像临时转移纹身一样直接层压在人体皮肤上。GESS无需任何胶带或粘合剂,通过范德华相互作用完全符合人体皮肤的微观形态。GESS的柔软和透明使其成为世界上第一个在机械和光学上都不可见的表皮传感器系统。GESS已成功应用于测量心电图(ECG)、脑电图(EEG)和肌电图(EMG),其信噪比与商用电极相当,此外还可以测量皮肤温度和皮肤水合作用。薄而透明的石墨烯表皮传感器首次可用于同时进行电和光表皮传感。
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引用次数: 9
Processing and characterization of Si/Ge quantum dots Si/Ge量子点的制备与表征
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838532
S. Miyazaki, K. Makihara, A. Ohta, M. Ikeda
We have demonstrated high density formation of Si quantum dots with Ge core on thermally-grown SiO2 with control of highly-selective CVD. Through luminescence measurements, we have reported characteristic carrier confinement and recombination properties in the Ge core. Also, an impact of P delta-doping to the Ge core on the properties were shown.
我们已经证明了在高选择性CVD控制下,在热生长的SiO2上高密度形成具有Ge核心的Si量子点。通过发光测量,我们报道了锗核的载流子约束和复合特性。此外,还研究了P δ掺杂对锗核性能的影响。
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引用次数: 1
Acceptor-like trap effect on negative-bias temperature instability (NBTI) of SiGe pMOSFETs on SRB 类受体陷阱对SRB上SiGe pmosfet负偏置温度不稳定性的影响
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838518
G. Jiao, M. Toledano-Luque, K. Nam, Nakanishi Toshiro, Seung-Hun Lee, Jin-Soak Kim, T. Kauerauf, Eun-ae Chung, D. Bae, Geumjong Bae, Dong-Won Kim, K. Hwang
In this work, the oxide electric field (Eox) reduction caused by negatively charged traps is proposed to explain the robustness of SiGe pMOSFETs to negative gate bias temperature instability (NBTI) stress. The high density of negatively charged acceptor-like traps close to the SiGe valance band (Ev) lowers the Eox and reduces the NBTI degradation at fixed overdrive. We demonstrate that trap engineering can be exploited to meet aggressive reliability requirements. Furthermore, it is predicted that there are no reliability issues in the SiGe pMOSFETs comparing with the Si counterparts.
在这项工作中,提出了由负电荷陷阱引起的氧化电场(Eox)减少来解释SiGe pmosfet对负栅极偏置温度不稳定性(NBTI)应力的稳健性。靠近SiGe价带(Ev)的高密度带负电荷的类受体陷阱降低了Eox,并减少了固定超速下NBTI的降解。我们证明陷阱工程可以用来满足激进的可靠性要求。此外,预计与Si对应物相比,SiGe pmosfet不存在可靠性问题。
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引用次数: 5
A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications 用于物联网应用的柔性硅上异构多传感器的cmos兼容大规模单片集成
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838448
J. M. Nassar, G. T. Sevilla, Seneca J. Velling, M. D. Cordero, M. Hussain
We report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.
我们报告了CMOS技术实现了基于柔性体硅(100)的多传感器平台的制造和系统级集成,该平台可以同时感知各种物理变形下的压力,温度,应变和湿度。我们还展示了用于身体生命监测的先进可穿戴版本,它可以为物联网应用提供先进的医疗保健。
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引用次数: 10
Understanding RRAM endurance, retention and window margin trade-off using experimental results and simulations 使用实验结果和模拟来理解RRAM的续航力、保留率和窗口裕度权衡
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838346
C. Nail, G. Molas, P. Blaise, G. Piccolboni, B. Sklénard, C. Cagli, M. Bernard, A. Roule, M. Azzaz, E. Vianello, C. Carabasse, R. Berthier, D. Cooper, C. Pelissier, T. Magis, G. Ghibaudo, C. Vallée, D. Bedeau, D. Bedau, O. Mosendz, B. De Salvo, L. Perniola
In this paper we clarify for the first time the correlation between endurance, window margin and retention of Resistive RAM. To this aim, various classes of RRAM (OXRAM and CBRAM) are investigated, showing high window margin up to 1010 cycles or high 300°C retention. From first principle calculations, we analyze the conducting filament composition for the various RRAM technologies, and extract the key filament features. We then propose an analytical model to calculate the dependence between endurance, window margin and retention, linking material parameters to memory characteristics.
本文首次阐明了电阻式RAM的续航力、窗口裕度和保持力之间的关系。为此,研究了各种类型的RRAM (OXRAM和CBRAM),显示出高达1010个周期的高窗口余量或300°C的高保留率。从第一性原理计算出发,分析了各种RRAM技术的导电灯丝组成,提取了关键的灯丝特征。然后,我们提出了一个分析模型来计算耐久性,窗口裕度和保留率之间的依赖关系,将材料参数与记忆特性联系起来。
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引用次数: 75
Highly functional and reliable 8Mb STT-MRAM embedded in 28nm logic 高功能和可靠的8Mb STT-MRAM嵌入在28nm逻辑
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838491
Y. Song, J. Lee, H. Shin, K. H. Lee, K. Suh, J. R. Kang, S. Pyo, H. Jung, S. Hwang, G. Koh, Sechung Oh, Soojeoung Park, Jinhak Kim, Jae-Kyun Park, Ju-Sik Kim, K. Hwang, G. Jeong, K. Lee, E. Jung
We fabricated 8Mb 1T-1MTJ STT-MRAM macro embedded in 28nm CMOS logic platform by developing novel integration/stack/patterning technologies. MTJ memory cell array was successfully embedded into Cu backend without open fail and severe degradation of magnetic property. Advanced perpendicular MTJ stack using MgO/CoFeB was developed to show high TMR value of 180% after full integration. In addition, ion beam etching (IBE) process was optimized with power, angle, and pressure to reduce a short fail below 1 ppm. Through these novel technologies, we demonstrated highly functional and reliable 8Mb eMRAM macro having a wide sensing margin and strong retention property of 85 0C and 10yrs.
我们通过开发新的集成/堆栈/图像化技术,在28nm CMOS逻辑平台上制造了8Mb 1T-1MTJ STT-MRAM宏。MTJ存储单元阵列成功嵌入Cu后端,没有出现开放性失效和严重的磁性退化。开发了采用MgO/CoFeB的先进垂直MTJ堆栈,完全集成后TMR值高达180%。此外,对离子束蚀刻(IBE)工艺进行了功率、角度和压力等方面的优化,使短失效率降低到1ppm以下。通过这些新技术,我们展示了高功能和可靠的8Mb eMRAM宏,具有宽传感裕度和85℃和10年的强保留性能。
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引用次数: 84
Study of RF-circuit linearity performance of GaN HEMT technology using the MVSG compact device model 基于MVSG紧凑器件模型的GaN HEMT技术射频电路线性性能研究
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838341
U. Radhakrishna, Pilsoon Choi, J. Grajal, L. Peh, T. Palacios, D. Antoniadis
This study is a first demonstration of the use of a physical compact model as a tool to identify technology bottlenecks to the linearity performance of emerging devices such as GaN HEMTs and to provide solutions to improve linearity both through device-design and circuit-design techniques. GaN-based HEMTs are emerging as key technology solutions in wireless communication systems that can address the increasing demand for highly efficient, linear amplification of digitally modulated information to cater to new applications such as personal communication, internet of things, 5G etc [1]. The primary advantage of GaN-HEMTs in terms of higher bandgap, carrier-mobility and charge-density can yield better output power (Pout), and power-added-efficiency (PAE) but the linearity behavior of GaN-based power amplifiers (PAs) that trades-off with the aforementioned figures of merit (FoMs) is still to be understood. Non-linearity results in adjacent channel interference, spectral regrowth, and degrading error vector magnitude (EVM) that impose bandwidth constraints and higher bit error rate (BER) for complex modulated signals.
这项研究首次展示了使用物理紧凑模型作为工具来识别GaN hemt等新兴器件线性性能的技术瓶颈,并通过器件设计和电路设计技术提供改善线性度的解决方案。基于gan的hemt正在成为无线通信系统中的关键技术解决方案,可以满足对数字调制信息的高效线性放大日益增长的需求,以满足个人通信、物联网、5G等新应用[1]。gan - hemt的主要优势在于更高的带隙、载流子迁移率和电荷密度,可以产生更好的输出功率(Pout)和功率附加效率(PAE),但gan - hemt功率放大器(PAs)的线性行为与上述性能指标(fom)相权衡仍有待了解。非线性会导致相邻信道干扰、频谱再生和降低误差矢量幅度(EVM),从而对复杂调制信号施加带宽限制和更高的误码率(BER)。
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引用次数: 23
Quantum information processing in a silicon-based system 硅基系统中的量子信息处理
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838538
Tsung-Yeh Yang, A. Andreev, Y. Yamaoka, T. Ferrus, S. Oda, T. Kodera, D. Williams
For the first time, long coherence times (T2) up to tens of microseconds were observed in a silicon-based charge quantum bit (qubit) device at 4.2 K. The coherence times demonstrated in this paper are two orders of magnitude longer, and the operating temperature is two orders of magnitude higher than the reported semiconductor charge qubit systems (see Table 1). In contrast to other approaches, in this work the qubits are formed by trench isolation instead of surface gate-defined. The qubits were fabricated on P-doped silicon-on-insulator (SOI) wafers through current industrial semiconductor manufacturing technology. We have demonstrated the accurate readout of the qubits' electronic states by using a single electron transistor (SET) as an electrometer. The first observation of the interaction between two sets of capacitively coupled charge movements was achieved by using our charge detection technique.
首次在4.2 K的硅基电荷量子比特(qubit)器件中观察到长达数十微秒的长相干时间(T2)。本文展示的相干时间比报道的半导体电荷量子比特系统长两个数量级,工作温度比报道的半导体电荷量子比特系统高两个数量级(见表1)。与其他方法相比,在这项工作中,量子比特是通过沟槽隔离而不是表面门定义形成的。量子比特是通过当前的工业半导体制造技术在掺磷的绝缘体上硅(SOI)晶圆上制造的。我们已经证明了通过使用单电子晶体管(SET)作为静电计来准确读出量子位的电子状态。利用电荷检测技术首次观察到两组电容耦合电荷运动之间的相互作用。
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引用次数: 3
Thermal resistance modeling of back-end interconnect and intrinsic FinFETs, and transient simulation of inverters with capacitive loading effects 后端互连和本征finfet的热阻建模,以及电容负载效应逆变器的瞬态仿真
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838550
Jhih-Yang Yan, Sun-Rong Jan, Yu-Jiun Peng, H. H. Lin, W. K. Wan, Y.-H. Huang, B. Hung, K.T. Chan, Michael Huang, M. Yang, C. Liu
A two-step pseudo isothermal plane model is used to calculate the thermal resistance of BEOL (Rth, beol). The intrinsic thermal resistances of 14nm FinFETs (Rth0, Device) are extracted with face-up (conventional measurement, heat flow from the channel to substrate) and face-down (flip-chip, heat flow from the channel to metal contact) configurations. Since the free convection of air has a large thermal resistance, the heat flow direction affects Rth0, Device. The face-up Rth0, Device is higher than face-down Rth0, Device. This is more significant for multi-finger FinFETs. The volume of hot spot affects the cooling time. In an inverter, the maximum temperature (Tmax) of pFET is higher than nFET due to the low thermal conductivity of SiGe S/D. Tmax and the high temperature duration can be controlled by the current and output capacitive loading of the inverter. The residual temperature in the channel and the temperatures of M1 layer are found too low to reflect the real device temperature, which may lead to an underestimation of device temperature with transient AC input.
采用两步拟等温平面模型计算了BEOL (Rth, BEOL)的热阻。14nm finfet (Rth0, Device)的固有热阻采用面朝上(传统测量,热流从通道到衬底)和面朝下(倒装芯片,热流从通道到金属触点)配置提取。由于空气的自由对流具有较大的热阻,因此热流方向影响Rth0, Device。正面朝上的Rth0, Device高于正面朝下的Rth0, Device。这对于多指finfet来说更为重要。热点的体积影响冷却时间。在逆变器中,由于SiGe S/D的导热系数低,pet的最高温度(Tmax)高于net。Tmax和高温持续时间可以通过逆变器的电流和输出容性负载来控制。通道内的残余温度和M1层的温度过低,无法反映器件的实际温度,这可能导致瞬态交流输入下器件温度的低估。
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引用次数: 22
Two-dimensional transistors based on MoS2 lateral heterostructures 基于二硫化钼横向异质结构的二维晶体管
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838413
D. Marian, Elias Dib, T. Cusati, Alessandro Fortunelli, G. Iannaccone, G. Fiori
We propose two types of transistors based on lateral heterostructures of metallic and semiconducting phases of monolayer MoS2, whose top-down patterning has been recently demonstrated via electron beam irradiation [1]. The proposed transistors a MoS2 lateral heterostructure FET, and a “planar barristor”, a gate Schottky diode that is the full 2D counterpart of the graphene barristor device proposed in [2]. We evaluate their performance with ab-initio simulations using as a benchmark the CMOS technology roadmap.
我们提出了两种基于单层二硫化钼金属相和半导体相横向异质结构的晶体管,其自上而下的图像化最近已通过电子束辐照[1]得到证实。所提出的晶体管是二硫化钼横向异质结构场效应管,和一个“平面阻碍器”,一个栅极肖特基二极管,是[2]中提出的石墨烯阻碍器的完整2D对应物。我们通过ab-initio模拟来评估它们的性能,并将其作为CMOS技术路线图的基准。
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引用次数: 7
期刊
2016 IEEE International Electron Devices Meeting (IEDM)
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