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2016 IEEE International Electron Devices Meeting (IEDM)最新文献

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InGaAs tri-gate MOSFETs with record on-current 具有导通电流记录的InGaAs三栅极mosfet
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838336
C. Zota, Fredrik Lindelow, L. Wernersson, E. Lind
We demonstrate InGaAs tri-gate MOSFETs with an on-current of ION = 650 μA/μm at VDD = 0.5 V and IOFF = 100 nA/μm, enabled by an inverse subthreshold slope of SS = 66 mV/decade and transconductance of gm = 3 mS/μm, a Q-factor of 45. This is the highest reported Ion for both Si-based and III-V MOSFETs. These results continue to push III-V MOSFET experimental performance towards its theoretical limit. We find an improvement in SS from 81 to 75 mV/dec. as the effective oxide thickness (EOT) is scaled down from 1.4 to 1 nm, as well as improvements in SS, gd and DIBL from reducing the nanowire width. We also find that electron mobility remains constant as the width is scaled to 18 nm.
我们展示了InGaAs三栅极mosfet,在VDD = 0.5 V时,导通电流为ION = 650 μA/μm, IOFF = 100 nA/μm,通过逆亚阈值斜率SS = 66 mV/ 10年和跨导gm = 3 mS/μm (q因子为45)实现。这是硅基和III-V型mosfet中报道的最高离子。这些结果继续将III-V型MOSFET的实验性能推向其理论极限。我们发现SS从81 mV/dec提高到75 mV/dec。由于有效氧化物厚度(EOT)从1.4 nm缩小到1 nm,以及SS, gd和DIBL的改善来自减小纳米线宽度。我们还发现,当宽度缩放到18nm时,电子迁移率保持不变。
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引用次数: 31
4Gbit density STT-MRAM using perpendicular MTJ realized with compact cell structure 4Gbit密度STT-MRAM采用垂直MTJ实现,小区结构紧凑
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838490
Sung-Woong Chung, T. Kishi, Jeongsoo Park, M. Yoshikawa, Kyoung-Hwan Park, T. Nagase, K. Sunouchi, H. Kanaya, G. Kim, K. Noma, Mun-Haeng Lee, A. Yamamoto, KwangMyoung Rho, K. Tsuchida, Suock Chung, J. Yi, Hyeongon Kim, Chun Yun-Seok, H. Oyamatsu, Sung-Kee Hong
For the first time, 4Gbit density STT-MRAM using perpendicular MTJ in compact cell was successfully demonstrated through the tight distributions for resistance and magnetic properties. This paper includes the results regarding parasitic resistance control process, MTJ process, and MTJ stack engineering. Both of successful 4Gb read and write operations were performed with high TMR, low Ic. This result will brighten the prospect of high-density STT-MRAM.
首次成功地证明了垂直MTJ的4Gbit密度STT-MRAM在紧凑电池中的电阻和磁性能分布紧密。本文包括寄生电阻控制过程、MTJ过程和MTJ堆栈工程方面的研究成果。这两个成功的4Gb读写操作都是在高TMR、低Ic的条件下完成的,这一结果将照亮高密度STT-MRAM的前景。
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引用次数: 111
Tunable and wearable high performance strain sensors based on laser patterned graphene flakes 基于激光图案石墨烯薄片的可调谐和可穿戴的高性能应变传感器
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838445
L. Tao, Dan-Yang Wang, H. Tian, Zhenyi Ju, Y. Liu, Yuan-Quan Chen, Qian‐Yi Xie, Haiming Zhao, Yi Yang, T. Ren
Tunable and wearable strain sensors with high gauge factor (GF) and large strain range based on laser patterned graphene flakes (LPGF) are demonstrated in this paper. The performance can be adjusted by laser patterning, resulting in a preferable GF (up to 457) or strain range (over 100%), both of which are significantly higher than most of the state-of-the-art graphene strain sensors. Most importantly, the tunable strain sensors with high GF and large strain range can be fabricated simultaneously by a one-step laser patterning. These tunable strain sensors can meet the demands of monitoring both subtle and large human motions, indicating that they will have great potentials in health care, voice recognition, gesture control and many other areas.
本文介绍了一种基于激光图纹石墨烯薄片(LPGF)的高应变因子(GF)和大应变范围的可调谐可穿戴应变传感器。性能可以通过激光图像化来调整,从而产生更好的GF(高达457)或应变范围(超过100%),这两者都明显高于大多数最先进的石墨烯应变传感器。最重要的是,可调应变传感器具有高GF和大应变范围可同时制作一步激光图板。这些可调应变传感器可以满足监测细微和大的人体运动的需求,表明它们在医疗保健、语音识别、手势控制等许多领域都有很大的潜力。
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引用次数: 4
First demonstration of a wrap-gated CNT-FET with vertically-suspended channels 首次演示具有垂直悬浮通道的包裹门控碳纳米管场效应管
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838351
Dongil Lee, Byung-Hyun Lee, J. Yoon, Bongsik Choi, Jun-Y. Park, Dae-Chul Ahn, C. Kim, Byeong-Woon Hwang, Seung‐Bae Jeon, Hyun Jun Ahn, Myeong-Lok Seol, Min-Ho Kang, B. Cho, Sung-Jin Choi, Yang‐Kyu Choi
Fully wrap-gated carbon nanotube (CNT) transistors with vertically suspended (VS) semiconducting single-walled CNTs, purified up to 99.9%, are demonstrated for the first time. Without a sacrifice of scalability, remarkably enhanced gate controllability and charge transport capabilities were achieved due to the geometrical advantage of the gate-all-around (GAA) structure with multiple channels. The VS channels were formed with the aid of a silicon-processed vertically integrated nanowire frame, offering high completeness and compatibility with silicon processes. This approach will increase the applicability of CNTs toward high-performance emerging materials.
完全包裹的碳纳米管(CNT)晶体管具有垂直悬浮(VS)半导体单壁碳纳米管,纯度高达99.9%,首次被证明。在不牺牲可扩展性的情况下,由于具有多通道的栅极全能(GAA)结构的几何优势,栅极的可控性和电荷传输能力得到了显著增强。VS通道是在硅加工垂直集成纳米线框架的帮助下形成的,具有高完整性和与硅工艺的兼容性。这种方法将增加碳纳米管在高性能新兴材料中的适用性。
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引用次数: 0
Experimental study on polarization-limited operation speed of negative capacitance FET with ferroelectric HfO2 铁电HfO2负电容FET限极化运行速度的实验研究
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838402
M. Kobayashi, Nozomu Ueyama, Kyungmin Jang, T. Hiramoto
We have experimentally investigated the polarization-limited operation speed of Negative Capacitance FET (NCFET) through direct measurement of negative capacitance in transient behavior of ferroelectric HfO2 capacitor and physics-based modeling, for the first time. Systematic analysis of frequency dependence and transient characteristics of ferroelectric HfO2 capacitor enabled accurate parameter extraction. With extracted parameters, our newly developed time-dependent NCFET model provided the evidence that NCFET can operate at >MHz, which is suitable for ultralow power IoT application.
我们首次通过直接测量铁电HfO2电容器瞬态行为中的负电容,并基于物理建模,实验研究了负电容FET (NCFET)的极化限制运行速度。系统分析了铁电HfO2电容器的频率依赖性和瞬态特性,实现了参数的准确提取。通过提取的参数,我们新开发的时间相关NCFET模型提供了证据,证明NCFET可以工作在>MHz,适用于超低功耗物联网应用。
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引用次数: 75
GaN-on-Si μLED optoelectrodes for high-spatiotemporal-accuracy optogenetics in freely behaving animals 用于自由活动动物的高时空精度光遗传学的GaN-on-Si μLED光电极
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838486
K. Kim, D. English, S. McKenzie, F. Wu, E. Stark, J. Seymour, P. Ku, K. Wise, G. Buzsáki, E. Yoon
We present the micromachined GaN-on-Si μLED optoelectrodes with neuron-sized LEDs monolithically integrated on a thin narrow silicon shank for optical stimulation and electrical recording in a behaving animal. The fabricated μLEDs show an optical power of 1.9 μW at 4 V from a small size of 15 μm × 10 μm with a peak plug efficiency of 0.6 %. This allows high spatial and temporal resolution optogenetic studies from the μLED array in a small pitch of 60 μm along with the integrated recording electrodes in 20-μm pitch. Stimulation artifacts were significantly mitigated by two-metal-layer shielding topology. In vivo validation of the fabricated optoelectrode confirmed the successful light-induced modulation of neuronal activities in hippocampus with square optical pulses of 100-ms duration.
我们提出了一种微机械GaN-on-Si μLED光电极,其神经元大小的led单片集成在薄而窄的硅柄上,用于行为动物的光刺激和电记录。在15 μm × 10 μm的小尺寸下,所制备的μ led在4 V时的光功率为1.9 μW,峰值插头效率为0.6%。这使得μLED阵列在60 μm的小间距以及20 μm间距的集成记录电极上进行高空间和时间分辨率的光遗传学研究成为可能。双金属层屏蔽拓扑结构显著减轻了刺激伪影。在体内对制备的光电极进行验证,证实了持续时间为100毫秒的方形光脉冲对海马神经元活动的成功光诱导调制。
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引用次数: 22
Devices and circuits in CMOS for THz applications 太赫兹应用的CMOS器件和电路
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838509
Z. Ahmad, W. Choi, N. Sharma, J. Zhang, Q. Zhong, D. Kim, Z. Chen, Y. Zhang, R. Han, D. Shim, S. Sankaran, E. Seok, C. Cao, C. Mao, R. Schueler, I. Medvedev, David John Lary, Hyun-Joo Nam, P. Raskin, F. Delucia, J. P. McMillan, C. Neese, I. Kim, I. Momson, P. Yellswarapu, S. Dong, B.-K. Kim
Recent advances of CMOS technology and circuits have made it an alternative for realizing capable and affordable THz systems. With process and circuit optimization, it should be possible to generate useful power and coherently detect signals at frequencies beyond 1THz, and incoherently detect signals at 40THz in CMOS.
CMOS技术和电路的最新进展使其成为实现功能强大且价格合理的太赫兹系统的替代方案。通过工艺和电路优化,应该可以产生有用的功率,并在CMOS中相干检测频率超过1THz的信号,以及非相干检测频率为40THz的信号。
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引用次数: 9
Scaling perspective for III-V broken gap nanowire TFETs: An atomistic study using a fast tight-binding mode-space NEGF model III-V型断隙纳米线tfet的尺度视角:使用快速紧密结合模式空间NEGF模型的原子性研究
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838510
A. Afzalian, M. Passlack, Y. Yeo
We report an in-depth atomistic study of the scaling potential of III-V GAA nanowire heterojunction TFET using an innovative tight-binding mode space (MS) technique with large speedup (up to 250×) while keeping good accuracy (error < 1%). It is shown that both n- and pTFET performances are best above 20 nm gate length for a cross-section of 5.5 nm in the [111] crystal orientation. At Vdd = 0.3 V and Ioff = 50 pA/μm, the on-current (Ion) and energy-delay product (ETP) gain over a Si NW GAA MOSFET are 58× and 56× respectively. In a beyond 5 nm node low power ITRS 2.0 horizontal GAA design rule however, where the gate length is restricted to 12 nm, a [100] orientation is best but features up to 3× Ion and 2.4× ETP degradation vs. the 20 nm TFET GAA design.
本文采用创新的紧密结合模式空间(MS)技术对III-V GAA纳米线异质结TFET的标度潜力进行了深入的原子研究,该技术具有高加速(高达250倍),同时保持良好的精度(误差< 1%)。结果表明,在晶体取向上,当栅极长度为5.5 nm时,n-和pTFET的性能在20 nm以上都是最好的。在Vdd = 0.3 V和Ioff = 50 pA/μm时,Si NW GAA MOSFET的导通电流(Ion)和能量延迟积(ETP)增益分别为58倍和56倍。然而,在超过5nm节点的低功率ITRS 2.0水平GAA设计规则中,栅极长度被限制在12nm,[100]取向是最好的,但与20 nm的ttfet GAA设计相比,它具有高达3倍的离子和2.4倍的ETP退化。
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引用次数: 12
High performance Ge junctionless gate-all-around NFETs with simultaneous Ion =1235 μA/μm at Vov=Vds=1V, SS=95 mV/dec, high Ion/Ioff=2×106, and reduced noise power density using S/D dopant recovery by selective laser annealing 在Vov=Vds=1V, SS=95 mV/dec, High Ion/Ioff=2×106条件下,同时离子浓度为1235 μA/μm的高性能Ge无结栅极全方位非场效应管,采用选择性激光退火技术回收S/D掺杂剂,降低了噪声功率密度
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838536
I-Hsieh Wong, Fang-Liang Lu, Shih-Hsien Huang, Hung-Yu Ye, Chun-Ti Lu, Jhih-Yang Yan, Yu-Cheng Shen, Yu-Jiun Peng, H. Lan, C. W. Liu
The low channel doping concentrations of 1.2×1019 cm−3 to deplete the channel and the high S/D doping of 1.2×1020 cm−3 to reduce the S/D resistance are achieved simultaneously by selective laser annealing on the same CVD P-doped epi-Ge on SOI without ion implantation. The device with Wfin down to 7 nm, EOT = 2.2 nm, and Lch = 60 nm has Ion = 1146 μA/pm, Ion/Ioff = 2×106, and SS = 95 mV/dec. The Ion can be further boost to 1235 μA/μm with external uniaxial tensile strain of 0.16%. The self-heating effect is responsible in part for such high Ion, because the high device temperature can reduce the dominant impurity scattering in the channel. The increasing mobility with increasing temperature indicates the impurity scattering is dominant. The lower low frequency noise is observed with junctionless (JL) gate-all-around (GAA) FETs than planar inversion mode (INV) devices due to the bulk conduction nature of JL FETs.
在不注入离子的情况下,将相同的CVD p掺杂epi-Ge在SOI上进行选择性激光退火,同时获得了1.2×1019 cm−3的低通道掺杂浓度以耗尽通道和1.2×1020 cm−3的高S/D掺杂以降低S/D电阻。当Wfin降至7 nm, EOT = 2.2 nm, Lch = 60 nm时,器件的Ion = 1146 μA/pm, Ion/Ioff = 2×106, SS = 95 mV/dec。当外单轴拉伸应变为0.16%时,离子可进一步提升至1235 μA/μm。自热效应是产生高离子的部分原因,因为较高的器件温度可以减少通道中主要杂质的散射。迁移率随温度升高而增加,表明杂质散射起主导作用。由于无结栅极全能(GAA)场效应管的体传导特性,与平面反转模式(INV)器件相比,无结栅极场效应管具有更低的低频噪声。
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引用次数: 8
Automotive requirements to non-volatile memories — A holistic approach to qualification 非易失性存储器的汽车要求。鉴定的整体方法
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838396
V. Kottler
This work describes a holistic approach to the application of the Robustness Validation methodology to the qualification of non-volatile memories (NVM) for automotive applications, as well as the resulting requirements to the NVM supplier and to the NVM design and technology.
这项工作描述了一种将鲁棒性验证方法应用于汽车应用的非易失性存储器(NVM)鉴定的整体方法,以及对NVM供应商和NVM设计和技术的最终要求。
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引用次数: 3
期刊
2016 IEEE International Electron Devices Meeting (IEDM)
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