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2016 IEEE International Electron Devices Meeting (IEDM)最新文献

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First demonstration of FinFET split-gate MONOS for high-speed and highly-reliable embedded flash in 16/14nm-node and beyond 首次展示用于16/14nm及以上节点高速高可靠嵌入式闪存的FinFET分闸MONOS
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838393
S. Tsuda, Y. Kawashima, K. Sonoda, A. Yoshitomi, T. Mihara, S. Narumi, M. Inoue, S. Muranaka, T. Maruyama, T. Yamashita, Y. Yamaguchi, D. Hisamoto
FinFET split-gate metal-oxide nitride oxide silicon (SG-MONOS) Flash memories have been fabricated and operated for the first time. Excellent subthreshold characteristics and small threshold-voltage variability owing to a Fin-structure are clarified. It is demonstrated that Fin top-corner effects are well suppressed by incremental step pulse programming for source side injection. Highly reliable data retention at 150 °C after 250K program/erase cycles is confirmed for advanced automotive system applications.
FinFET分栅金属氮化氧化物硅(SG-MONOS)快闪存储器首次被制备并运行。由于鳍状结构,优异的亚阈值特性和小的阈值电压变异性得到了澄清。结果表明,采用增量阶跃脉冲规划可以很好地抑制源侧注入的翅片顶角效应。在250K程序/擦除周期后,在150°C下高度可靠的数据保留已被确认用于先进的汽车系统应用。
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引用次数: 18
Graphenic carbon-silicon contacts for reliability improvement of metal-silicon junctions 提高金属硅结可靠性的石墨碳硅触点
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838469
M. Stelzer, F. Kreupl
Contact resistance and thermal degradation of metal-silicon contacts are challenges in nanoscale CMOS as well as in power device applications. Titanium silicide (TiSi) contacts are commonly used metal-silicon contacts, but are known to diffuse into the active region under high current stress. In this paper we show that a graphenic carbon (C) contact deposited on n-type silicon (C-Si) by CVD, has the same low Schottky barrier height of 0.45 eV as TiSi, but a much improved reliability against high current stress. The C-Si contact is over 108 times more stable against high current stress pulses than the conventionally used TiSi junction. The C-Si contact properties even show promise to establish an ultra-low, high temperature stable contact resistance. The finding has important consequences for the enhancement of reliability in power devices as well as in Schottky-diodes and electrical contacts to silicon in general.
金属硅触点的接触电阻和热降解是纳米级CMOS和功率器件应用中面临的挑战。硅化钛(TiSi)触点是常用的金属硅触点,但已知在大电流应力下会扩散到有源区。在本文中,我们证明了通过CVD沉积在n型硅(C- si)上的石墨碳(C)触点具有与TiSi相同的0.45 eV的肖特基势垒高度,但在高电流应力下的可靠性大大提高。C-Si接触在高电流应力脉冲下的稳定性是传统使用的TiSi结的108倍以上。C-Si接触特性甚至显示出建立超低、高温稳定接触电阻的希望。这一发现对于提高功率器件、肖特基二极管和硅电触点的可靠性具有重要意义。
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引用次数: 5
Multi-barrier inter-layer tunnel field-effect transistor 多势垒层间隧道场效应晶体管
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838513
N. Prasad, X. Mou, L. Register, S. Banerjee
The resonant tunneling characteristics of the inter-layer tunnel field-effect transistor (ITFET) within 2D van der Waals' materials can be made sharper by the use of multiple (m) intermediate well and tunnel barrier layers within a “mlTFET” variation. Ballistic quantum transport simulations are used to obtain the resonance characteristics in an MoS2 based-system, for specificity. Circuit simulations illustrate how the sharper resonance can lead to lower operating voltages and, thus, power, thereby improving the circuit performance.
二维范德华材料中的层间隧道场效应晶体管(ITFET)的共振隧穿特性可以通过在“mlTFET”变化中使用多个(m)中间阱和隧道势垒层而变得更加清晰。弹道量子输运模拟用于获得基于二硫化钼的系统的共振特性。电路仿真说明了更尖锐的谐振如何导致更低的工作电压,从而降低功率,从而改善电路性能。
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引用次数: 3
Compact models of negative-capacitance FinFETs: Lumped and distributed charge models 负电容finfet的紧凑模型:集中和分布电荷模型
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838514
J. Duarte, S. Khandelwal, A. Khan, A. Sachid, Yen-Kai Lin, Huan-Lin Chang, S. Salahuddin, C. Hu
This work presents insights into the device physics and behaviors of ferroelectric based negative capacitance FinFETs (NC-FinFETs) by proposing lumped and distributed compact models for its simulation. NC-FinFET may have a floating metal between ferroelectric (FE) and the dielectric layers and the lumped charge model represents such a device. For a NC-FinFET without a floating metal, the distributed charge model should be used and at each point in the channel the ferroelectric layer will impact the local channel charge. This distributed effect has important implications on device characteristics as shown in this paper. The proposed compact models have been implemented in circuit simulators for exploring circuits based on NC-FinFET technology.
这项工作通过提出集中和分布式紧凑模型来模拟铁电负电容finfet (nc - finfet)的器件物理和行为。NC-FinFET可以在铁电层(FE)和介电层之间有一个浮动金属,集总电荷模型代表了这种器件。对于没有浮动金属的NC-FinFET,应使用分布式电荷模型,并且在通道中的每个点上,铁电层将影响局部通道电荷。这种分布效应对器件特性有重要影响,如本文所示。提出的紧凑模型已在电路模拟器中实现,用于探索基于NC-FinFET技术的电路。
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引用次数: 70
NSP: Physical compact model for stacked-planar and vertical Gate-All-Around MOSFETs NSP:堆叠平面和垂直栅极全能mosfet的物理紧凑模型
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838369
O. Rozeau, S. Martinie, T. Poiroux, F. Triozon, S. Barraud, J. Lacord, Y.-M. Niquet, C. Tabone, R. Coquand, E. Augendre, M. Vinet, O. Faynot, J. Barbe
In this work, a predictive and physical compact model for NanoWire/NanoSheet (NW/NS) Gate-All-Around (GAA) MOSFET is presented. Based on a novel methodology for the calculation of the surface potential including quantum confinement, this model is able to handle arbitrary NW/NS cross-section shape of stacked-planar and vertical GAA MOSFETs (circular, square, rectangular). This Nanowire Surface Potential (NSP) based model, validated both by numerical simulations and experimental data, is demonstrated to be very accurate in all operation regimes of GAA MOSFETs.
在这项工作中,提出了纳米线/纳米片(NW/NS)栅极全能(GAA) MOSFET的预测和物理紧凑模型。基于一种包含量子约束的表面势计算新方法,该模型能够处理任意NW/NS横截面形状的堆叠平面和垂直GAA mosfet(圆形,方形,矩形)。这种基于纳米线表面电位(NSP)的模型,通过数值模拟和实验数据验证,在GAA mosfet的所有工作状态下都是非常准确的。
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引用次数: 11
An APD-CMOS image sensor toward high sensitivity and wide dynamic range 一种面向高灵敏度、宽动态范围的APD-CMOS图像传感器
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838374
M. Mori, Y. Sakata, M. Usuda, S. Kasuga, S. Yamahira, Y. Hirose, Y. Kato, A. Odagawa, T. Tanaka
We present a sensitivity-boosting technique by incorporating an avalanche photodiode into a normal photo-conversion region. Under a dark scene, an avalanche photodiode operation is selected, where the photo-electrons are multiplied up to 105 electrons. Under a bright scene, a photodiode operation is selected, where photo-electrons in proportional to light intensity are generated in a similar way to conventional CMOS image sensors. Alternating the two operations enables wide operational range extending to dark conditions.
我们提出了一种通过将雪崩光电二极管纳入正常光转换区域的灵敏度提高技术。在黑暗场景下,选择雪崩光电二极管操作,其中光电子倍增到105个电子。在明亮的场景下,选择光电二极管操作,以与传统CMOS图像传感器类似的方式产生与光强度成正比的光电子。交替使用这两种操作可以扩展到黑暗条件下的宽操作范围。
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引用次数: 3
Hyperdimensional computing with 3D VRRAM in-memory kernels: Device-architecture co-design for energy-efficient, error-resilient language recognition 三维VRRAM内存内核的超维计算:节能、容错语言识别的设备架构协同设计
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838428
Haitong Li, Tony F. Wu, Abbas Rahimi, Kai-Shin Li, M. Rusch, Chang-Hsien Lin, Juo-Luen Hsu, M. Sabry, S. Eryilmaz, Joon Sohn, W. Chiu, Min-Cheng Chen, Tsung-Ta Wu, J. Shieh, W. Yeh, J. Rabaey, S. Mitra, H. Wong
The ability to learn from few examples, known as one-shot learning, is a hallmark of human cognition. Hyperdimensional (HD) computing is a brain-inspired computational framework capable of one-shot learning, using random binary vectors with high dimensionality. Device-architecture co-design of HD cognitive computing systems using 3D VRRAM/CMOS is presented for language recognition. Multiplication-addition-permutation (MAP), the central operations of HD computing, are experimentally demonstrated on 4-layer 3D VRRAM/FinFET as non-volatile in-memory MAP kernels. Extensive cycle-to-cycle (up to 1012 cycles) and wafer-level device-to-device (256 RRAMs) experiments are performed to validate reproducibility and robustness. For 28-nm node, the 3D in-memory architecture reduces total energy consumption by 52.2% with 412 times less area compared with LP digital design (using registers as memory), owing to the energy-efficient VRRAM MAP kernels and dense connectivity. Meanwhile, the system trained with 21 samples texts achieves 90.4% accuracy recognizing 21 European languages on 21,000 test sentences. Hard-error analysis shows the HD architecture is amazingly resilient to RRAM endurance failures, making the use of various types of RRAMs/CBRAMs (1k ∼ 10M endurance) feasible.
从少数例子中学习的能力,即所谓的一次性学习,是人类认知的一个标志。超高维计算(HD)是一种受大脑启发的计算框架,能够使用高维随机二进制向量进行一次学习。提出了基于三维VRRAM/CMOS的语言识别高清认知计算系统的器件架构协同设计。采用4层三维VRRAM/FinFET作为非易失性内存MAP内核,实验验证了HD计算的核心运算——乘法-加法-置换(MAP)。进行了广泛的周期对周期(多达1012周期)和晶圆级器件对器件(256 rram)实验,以验证可重复性和稳健性。对于28纳米节点,3D内存架构与LP数字设计(使用寄存器作为内存)相比,由于节能的VRRAM MAP内核和密集的连接,总能耗降低了52.2%,面积减少了412倍。同时,用21个样本文本训练的系统在21,000个测试句子中识别21种欧洲语言的准确率达到90.4%。硬错误分析表明,HD架构对RRAM耐久性故障具有惊人的弹性,使得使用各种类型的RRAM / cbram (1k ~ 10M耐久性)是可行的。
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引用次数: 101
Si, SiC and GaN power devices: An unbiased view on key performance indicators Si, SiC和GaN功率器件:对关键性能指标的公正看法
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838458
G. Deboy, M. Treu, O. Haeberlen, D. Neumayr
This paper discusses key parameters such as capacitances & switching losses for silicon, SiC and GaN power devices with respect to applications in switch mode power supplies. Whereas wide bandgap devices deliver roughly one order of magnitude lower charges stored in the output capacitance, the energy equivalent is nearly on par with latest generation super junction devices. Silicon devices will hence prevail in classic hard switching applications at moderate switching frequencies whereas SiC and GaN based power devices will play to their full benefits in resonant topologies at moderate to high switching frequencies.
本文讨论了硅、碳化硅和氮化镓功率器件的电容和开关损耗等关键参数在开关电源中的应用。而宽频带隙器件在输出电容中存储的电荷大约低一个数量级,其能量当量几乎与最新一代超级结器件相当。因此,硅器件将在中等开关频率的经典硬开关应用中占据主导地位,而基于SiC和GaN的功率器件将在中等到高开关频率的谐振拓扑中发挥其全部优势。
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引用次数: 41
Ag/HfO2 based threshold switch with extreme non-linearity for unipolar cross-point memory and steep-slope phase-FETs 用于单极交叉点记忆和陡坡相场效应管的极非线性Ag/HfO2阈值开关
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838542
N. Shukla, B. Grisafe, R. Ghosh, N. Jao, Ahmedullah Aziz, J. Frougier, M. Jerry, S. Sonde, S. Rouvimov, T. Orlova, S. Gupta, S. Datta
We demonstrate a novel Ag/HfO2 based threshold switch (TS) with a selectivity∼107, a high ON-state current (Ion) of 100 μA, and ∼10pA leakage current. The thresholding characteristics of the TS result from electrically triggered spontaneous formation and rupture of an Ag filament which acts an interstitial dopant in the HfO2 insulating matrix. Further, we harness the extreme non-linearity of the TS in (1) Selectors for Phase Change Memory (PCM) based cross-point memory. We show through array level simulations of a 1024kb memory, a read margin of 28% and write margin of 32% for a leakage power of <25μW (V/3 scheme); (2) A steep-slope sub-kT/q Phase-FET, experimentally demonstrating a switching-slope (SS) of 3mV/decade (over 5 orders of Ids), and >10x Ion improvement over the conventional FET (at iso-Ioff) at T=90C (50x at T=25C); making this a promising TS for both emerging memory, and steep-slope transistor applications.
我们展示了一种新的基于Ag/HfO2的阈值开关(TS),其选择性为~ 107,高导通状态电流(离子)为100 μA,漏电流为~ 10pA。TS的阈值特性是由电触发银丝的自发形成和断裂引起的,银丝在HfO2绝缘基体中充当间隙掺杂剂。此外,我们利用(1)选择器中TS的极端非线性用于基于交叉点存储器的相变存储器(PCM)。我们通过对1024kb存储器的阵列级模拟显示,在温度为90C时(温度为25C时为50x),与传统FET相比,在泄漏功率提高10倍的情况下,读取余量为28%,写入余量为32%;使其成为新兴存储器和陡坡晶体管应用的有前途的TS。
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引用次数: 40
Vertical InAs/GaAsSb/GaSb tunneling field-effect transistor on Si with S = 48 mV/decade and Ion = 10 μA/μm for Ioff = 1 nA/μm at Vds = 0.3 V 垂直InAs/GaAsSb/GaSb隧道场效应晶体管,S = 48 mV/decade,离子= 10 μA/μm, Ioff = 1 nA/μm, Vds = 0.3 V
Pub Date : 2016-12-01 DOI: 10.1109/IEDM.2016.7838450
E. Memišević, J. Svensson, M. Hellenbrand, E. Lind, L. Wernersson
We present a vertical nanowire InAs/GaAsSb/GaSb TFET with a highly scaled InAs diameter (20 nm). The device exhibits a minimum subthreshold swing of 48 mV/dec. for Vds = 0.1–0.5 V and achieves an Ion = 10.6 μA/μm for Ioff = 1 nA/μm at Vds = 0.3 V. The lowest subthreshold swing achieved is 44 mV/dec. at Vds= 0.05 V. Furthermore, a benchmarking is performed against state-of-the-art TFETs and MOSFETs demonstrating a record high I60 and performance benefits for Vds between 0.1 and 0.3 V.
我们提出了一种垂直纳米线InAs/GaAsSb/GaSb TFET,具有高度缩放的InAs直径(20 nm)。该器件的最小亚阈值摆幅为48mv /dec。在Vds = 0.1 ~ 0.5 V时,达到了Ioff = 1 nA/μm时离子= 10.6 μA/μm。实现的最低亚阈值摆幅为44 mV/dec。Vds= 0.05 V。此外,对最先进的tfet和mosfet进行了基准测试,显示出在0.1和0.3 V之间的Vds具有创纪录的高I60和性能优势。
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引用次数: 90
期刊
2016 IEEE International Electron Devices Meeting (IEDM)
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