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Technique of Time Depend Dielectric Breakdown for the Wafer-Level Testing of Thin Dielectrics of MIS Devices 用于 MIS 设备薄介质晶圆级测试的随时间变化的介质击穿技术
Q4 Engineering Pub Date : 2024-03-21 DOI: 10.1134/s1063739723600450
D. V. Andreev, V. M. Maslovsky, V. V. Andreev

Abstract—

The paper proposes a novel technique of time depend dielectric breakdown for the wafer-level testing of thin dielectric of MIS devices based on concatenation of J-Ramp and Bounded J-Ramp methods. The suggested method enhances the existing method capabilities by introducing measurement injection modes. When DUT is under the measurement mode, the charge injection into the gate dielectric is realized under constant current density Jm at which any significant charge degradation of dielectric is not observed. Introduction of the measurement modes give an opportunity to monitor a change of the charge state of thin gate dielectric during all the test. The suggested test is started similar to Bounded J-Ramp method and then in order to raise the monitoring speed, the value of bounded current Jb could be step wisely increased over certain time intervals which are much longer in time in comparison with J-Ramp method. As a result, the charge injection into the gate dielectric could be implemented under multiple Jb values. This test algorithm gives an opportunity to greatly enhance functional capabilities of the existing test methods and the suggested technique raises speed to test.

摘要--本文在 J-Ramp 和 Bounded J-Ramp 方法的基础上,为 MIS 器件薄介质的晶圆级测试提出了一种新的时间依赖性介质击穿技术。所建议的方法通过引入测量注入模式增强了现有方法的功能。当 DUT 处于测量模式时,电荷注入栅极电介质是在恒定电流密度 Jm 下实现的,此时电介质不会出现明显的电荷衰减。测量模式的引入使我们有机会在整个测试过程中监控薄栅极电介质的电荷状态变化。建议的测试开始时类似于有界 J 斜坡法,然后为了提高监测速度,有界电流 Jb 的值可以在一定的时间间隔内逐步增加,与 J 斜坡法相比,有界电流 Jb 的时间间隔要长得多。因此,可以在多个 Jb 值下向栅极电介质注入电荷。这种测试算法大大提高了现有测试方法的功能,所建议的技术也提高了测试速度。
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引用次数: 0
Ruthenium for Subtractive and Semi-Damascene Processes of Interconnects Formation 用于互连器件形成的减法和半减法过程的钌
Q4 Engineering Pub Date : 2024-03-21 DOI: 10.1134/s1063739723600851
A. Rogozhin, A. Miakonkikh, K. Rudenko

Abstract

Ruthenium thin films were deposited by plasma enhanced atomic layer deposition (PEALD) using Ru(EtCp)2 and oxygen plasma on the modified silicon surface and SiO2/Si substrates. The substrate temperature has a significant impact on film growth. The GXRD and SIMS analysis have shown that at the substrate temperature T = 375°C there is a sharp change in the mechanisms of surface reactions, which leads to a change in the film composition from RuO2 at low temperatures to a pure Ru film at higher temperatures. This was confirmed by measurements of the electrical resistivity of Ru-based films. The lowest surface roughness ~1.5 nm was obtained at a film thickness of 29 nm deposited at 375°C on a SiO2/Si-substrate. The measured resistivity of the Ru film was 18–19 μΩ cm. Issues regarding the plasma-chemical etching of ruthenium and the spin-on of a low-k dielectric onto arrays of lines are taken into account.

摘要 利用等离子体增强原子层沉积(PEALD)技术,使用 Ru(EtCp)2 和氧等离子体在改性硅表面和二氧化硅/硅衬底上沉积钌薄膜。基底温度对薄膜的生长有显著影响。GXRD 和 SIMS 分析表明,在基底温度 T = 375°C 时,表面反应机制发生了急剧变化,导致薄膜成分从低温下的 RuO2 变为高温下的纯 Ru 薄膜。Ru 基薄膜的电阻率测量结果证实了这一点。在 375°C 下,在二氧化硅/硅基底上沉积的薄膜厚度为 29 纳米时,表面粗糙度最低,约为 1.5 纳米。测得的 Ru 薄膜电阻率为 18-19 μΩ cm。该研究考虑了钌的等离子化学蚀刻和低 k 电介质在线路阵列上的自旋问题。
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引用次数: 0
A Method to Compute QAOA Fixed Angles 计算 QAOA 固定角度的方法
Q4 Engineering Pub Date : 2024-03-21 DOI: 10.1134/s1063739723600577
A. Yu. Chernyavskiy, B. I. Bantysh

Abstract

QAOA (Quantum Approximate Optimization Algorithms) is one of the most promising algorithms of Noisy Intermediate Scale Quantum (NISQ) era. The standard approach to QAOA involves the use of a hybrid quantum-classical optimization, although this approach was not considered as the main one in the original paper on QAOA. Recently, a new approach has emerged based on the hypothesis that optimal circuit parameters (angles) are close for a wide class of problems. However, the search for fixed angles itself remains a challenge with different approaches. We propose one specific method based on the use of a fixed training set and the special metric associated with increasing the probability of a correct answer. We carry out the analysis of the proposed method performance on the unweighted Max-Cut problems and random weighted QUBO (Quadratic Unconstrained Binary Optimization) problems of the special type.

摘要QAOA(量子近似优化算法)是噪声中间量级量子(NISQ)时代最有前途的算法之一。量子近似优化算法的标准方法是使用量子-经典混合优化,尽管这种方法在有关量子近似优化算法的原始论文中并未被视为主要方法。最近,出现了一种新方法,它基于这样一种假设,即最优电路参数(角度)对于很多问题来说都很接近。然而,通过不同的方法寻找固定角度本身仍是一项挑战。我们提出了一种基于使用固定训练集和与增加正确答案概率相关的特殊度量的具体方法。我们对所提方法在非加权 Max-Cut 问题和随机加权 QUBO(二次无约束二元优化)特殊类型问题上的性能进行了分析。
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引用次数: 0
Constant-Depth Algorithm for Quantum Hashing 量子散列的恒定深度算法
Q4 Engineering Pub Date : 2024-03-21 DOI: 10.1134/s106373972360067x
A. Vasiliev

Abstract

Quantum hashing is one of the techniques that allow to construct space-efficient quantum algorithms and protocols. We present a construction that allows to make it extremely time efficient. Our approach is based on the shallow implementation of the quantum fingerprinting technique but uses additional circuit identities specific to the quantum hash function for the cyclic group. The resulting algorithm is equivalent to the one we have implemented earlier using single-photon states with orbital angular momentum encoding.

摘要量子散列是构建空间高效量子算法和协议的技术之一。我们提出了一种能使其极具时间效率的构造。我们的方法基于量子指纹技术的浅层实现,但使用了循环群量子哈希函数特有的附加电路标识。由此产生的算法等同于我们之前使用轨道角动量编码的单光子态实现的算法。
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引用次数: 0
Hybrid Atom-Ion Quantum Gate Engineering 原子-离子混合量子门工程
Q4 Engineering Pub Date : 2024-03-21 DOI: 10.1134/s1063739723600437
D. Shaposhnikov, L. Fedichkin

Abstract—

Overview of some recent research advancements in ultracold Rydberg atoms with laser-cooled trapped ions control is presented. We show also an effective way to create multi-q-bit gates on such a system. We demonstrate how to implement a gate similar to C-PHASE and discuss the prospects of atom-ion coupling approach.

摘要-本文概述了最近在利用激光冷却被困离子控制超冷里德伯原子方面取得的一些研究进展。我们还展示了在这种系统上创建多 Q 位门的有效方法。我们演示了如何实现与 C-PHASE 类似的门,并讨论了原子-离子耦合方法的前景。
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引用次数: 0
Rhenium Effect in Thin Films and Wires of Tungsten–Rhenium Alloys 钨铼合金薄膜和金属丝中的铼效应
Q4 Engineering Pub Date : 2024-03-21 DOI: 10.1134/s1063739723600395
A. V. Timakov, V. I. Shevyakov

Abstract

This research is devoted to the study of the influence of rhenium admixture on the mechanical and conductive properties of tungsten thin films. The results of the study of adhesive films properties are obtained. For pure tungsten, tungsten–rhenium 5% and tungsten–rhenium 20% wires with a thickness of 0.25 μm studies of the structure and elemental analysis at the grain boundary and in the grain itself were carried out. An explanation of the reason for improving the mechanical properties of tungsten thin films when rhenium is added to their composition (“rhenium effect”) is proposed. A study of the mechanical stresses level has been carried out, which corresponds to the theoretically obtained data. The resistivity was measured for pure tungsten films and films with alloying rhenium of 5, 10, 15 and 20%. Films that meet the requirements of industry standards have been obtained.

摘要 本研究致力于研究掺铼对钨薄膜机械和导电性能的影响。获得了粘合薄膜性能的研究结果。对厚度为 0.25 μm 的纯钨丝、5% 的钨铼丝和 20% 的钨铼丝进行了晶界和晶粒本身的结构和元素分析研究。提出了在钨薄膜成分中添加铼("铼效应")可改善其机械性能的原因。对机械应力水平进行了研究,结果与理论数据相符。测量了纯钨薄膜和铼合金含量分别为 5%、10%、15% 和 20% 的薄膜的电阻率。结果表明,薄膜符合工业标准的要求。
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引用次数: 0
Simulation of the Radio Absorbing Properties of Pyrolyzed Polyacrylonitrile in the Frequency Range from 3 to 50 GHz 模拟热解聚丙烯腈在 3 至 50 千兆赫频率范围内的无线电吸收特性
Q4 Engineering Pub Date : 2024-03-05 DOI: 10.1134/s1063739723080036
D. P. Radchenko, I. V. Zaporotskova, L. V. Kozhitov, P. A. Zaporotskov, A. V. Popkova, V. G. Kosushkin

Abstract

At present, the electromagnetic characteristics of various materials, including polymeric materials, are being widely studied with the aim of using them as radio-absorbing coatings in electronics products. One such material is pyrolyzed polyacrylonitrile (PPAN). This article considers a model of electromagnetic wave absorption by PPAN layers with electrical conductivity of 72 and 180 S/m and a layer width of 0.15 to 2 mm, including those containing a metal filler (the so-called PPAN-based metal composite), in the frequency range of 3–50 GHz. The experimental data are compared with the data obtained in the course of simulation in terms of parameters such as the reflection, transmission, and absorption indices. Modeling is done in the software package COMSOL Multiphysics.

摘要 目前,人们正在广泛研究包括聚合物材料在内的各种材料的电磁特性,目的是将它们用作电子产品中的无线电吸收涂层。热解聚丙烯腈(PPAN)就是这样一种材料。本文研究了导电率为 72 和 180 S/m、层宽为 0.15 至 2 mm 的 PPAN 层(包括含有金属填料的层,即所谓的 PPAN 基金属复合材料)在 3-50 GHz 频率范围内吸收电磁波的模型。实验数据与模拟过程中获得的数据在反射率、透射率和吸收率等参数方面进行了比较。建模是在 COMSOL Multiphysics 软件包中完成的。
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引用次数: 0
Simulation Modeling of an Analog Impulse Neural Network Based on a Memristor Crossbar Using Parallel Computing Technologies 利用并行计算技术建立基于晶闸管交叉棒的模拟脉冲神经网络仿真模型
Q4 Engineering Pub Date : 2024-03-05 DOI: 10.1134/s1063739723080024
A. Yu. Morozov, K. K. Abgaryan, D. L. Reviznikov

Abstract

The issues of simulation modeling of an analog impulse neural network based on memristive elements in the problem of pattern recognition are studied. Simulation modeling allows us to configure the network at the level of a mathematical model, and subsequently use the obtained parameters directly in the process of operation. The network model is given as a dynamic system, which can consist of tens or hundreds of thousands of ordinary differential equations. Naturally, there is a need for an efficient and parallel implementation of an appropriate simulation model. Open multiprocessing (OpenMP) is used as the technology for parallelizing calculations, since it allows us to easily create multithreaded applications in various programming languages. The efficiency of parallelization is evaluated on the problem of modeling the process of training the network to recognize a set of five images of a size of 128 by 128 pixels, which leads to the solution of about 80 000 differential equations. In this problem, the calculations are accelerated by a factor of over six. According to the experimental data, the operating character of memristors is stochastic, as shown by the scatter in the current-voltage characteristics (VACs) when switching between high-resistance and low-resistance states. To take this feature into account, a memristor model with interval parameters is used, which gives upper and lower limits on the values of interest, and encloses the experimental curves in corridors. When simulating the operation of the entire analog self-learning impulse neural network, in each epoch of training, the parameters of the memristors are set randomly from the selected intervals. This approach makes it possible to dispense with the use of a stochastic mathematical apparatus, thereby further reducing computational costs.

摘要 研究了模式识别问题中基于记忆元件的模拟脉冲神经网络的仿真建模问题。通过仿真建模,我们可以在数学模型的层面上对网络进行配置,然后在运行过程中直接使用所获得的参数。网络模型是一个动态系统,可以由数万或数十万个常微分方程组成。因此,自然需要高效、并行地实现适当的仿真模型。开放式多处理(OpenMP)被用作并行计算的技术,因为它允许我们用各种编程语言轻松创建多线程应用程序。对并行化效率的评估是针对网络识别一组 5 幅 128×128 像素图像的训练过程建模问题,这一过程需要求解约 8 万个微分方程。在这个问题上,计算速度加快了 6 倍多。根据实验数据,忆阻器的工作特性是随机的,在高阻态和低阻态之间切换时,电流-电压特性(VAC)的散布就表明了这一点。考虑到这一特点,我们使用了带有区间参数的忆阻器模型,该模型给出了相关值的上限和下限,并将实验曲线包围在走廊中。在模拟整个模拟自学脉冲神经网络的运行时,每个训练周期的忆阻器参数都是从选定的区间中随机设置的。这种方法可以避免使用随机数学装置,从而进一步降低计算成本。
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引用次数: 0
Modeling a Broadband Amplifier on a Printed Circuit Board with an Increased Conductivity Dielectric 在带增导电介质的印刷电路板上模拟宽带放大器
Q4 Engineering Pub Date : 2024-02-15 DOI: 10.1134/s1063739723070028
D. A. Abrameshin, E. D. Pozhidaev, V. S. Saenko, S. R. Tumkovskiy

Abstract

Spacecraft are affected by cosmic plasma electrons, which cause the electrification of their dielectric materials. As a result, electrostatic discharges occur, leading to failures in the operation of onboard radio electronics, reducing the period of the active existence of the spacecraft. The use of composite polymer dielectrics with increased conductivity is a promising method for protecting against the effects of electrostatic discharges. This paper presents the results of modeling the characteristics of a broadband amplifier made on a printed circuit board using a highly conductive composite dielectric. Resistances are added to the model of the ongoing electrical processes that characterize current leakage from the circuit nodes to the zero conductor due to the decrease in the specific volume resistance of the printed circuit board’s material. A computer simulation of a broadband amplifier and an experimental study of its performance in the operating frequency band of 0.5–70 MHz are carried out. It is shown that a change in the bandwidth and gain occurs only when the conductivity becomes higher than 6 × 10–4 Ohm–1 m–1. The results of an experimental study of a broadband amplifier show that the proposed model for accounting for the specific volume resistance of the printed circuit board material adequately describes its characteristics. The fact that even with a conductivity of 10–9 Ohm–1 m–1 electrostatic discharges are excluded indicates the possibility of protecting broadband amplifiers as part of the radio-electronic devices of spacecraft from electrification when using composite dielectrics of increased conductivity.

摘要航天器受到宇宙等离子体电子的影响,导致其介电材料电化。因此,会发生静电放电,导致机载无线电电子设备运行故障,缩短航天器的有效寿命。使用电导率更高的复合聚合物电介质是防止静电放电影响的一种可行方法。本文介绍了使用高导电性复合电介质在印刷电路板上制作宽带放大器的特性建模结果。由于印刷电路板材料的比容电阻减小,电流从电路节点泄漏到零导体的过程中,电阻被添加到正在进行的电气过程模型中。对宽带放大器进行了计算机模拟,并对其在 0.5-70 兆赫工作频段内的性能进行了实验研究。结果表明,只有当导电率高于 6 × 10-4 欧姆-1 m-1 时,带宽和增益才会发生变化。宽带放大器的实验研究结果表明,所提出的印刷电路板材料特定体积电阻模型能充分描述其特性。即使电导率为 10-9 欧姆-1 m-1 也能排除静电放电,这一事实表明,在使用电导率更高的复合电介质时,有可能保护作为航天器无线电电子设备一部分的宽带放大器免受电击。
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引用次数: 0
White Noise Suppression Based on Wiener Filtering Using Neural Network Technologies in the Domain of the Discrete Wavelet Transform 在离散小波变换领域利用神经网络技术实现基于维纳滤波的白噪声抑制
Q4 Engineering Pub Date : 2024-02-15 DOI: 10.1134/s106373972307003x
K. A. Alimagadov, S. V. Umnyashkin

Abstract

Computer vision algorithms are widely used in solving a number of applied problems. The correct operation of such algorithms depends on the photo and video data that they receive at the input, which are subject to the effect of noise; hence, noise suppression is an important stage in low-level digital image processing. In this work, the Wiener filtering of normal white noise with using neural networks in the domain of the discrete wavelet transform is studied. The architecture of the networks and the algorithm developed for their application for filtering in the domain of a discrete wavelet transform are described. The proposed algorithm is tested on the BSDS500 dataset at various noise levels. The filtering quality is evaluated by the calculated signal-to-noise ratio (SNR) and structural similarity index (SSIM) values. The results of processing test images indicate that the developed algorithm is superior in noise reduction quality to most of the other considered filters, including Wiener filtering without the use of neural networks in the domain of the discrete wavelet transform.

摘要--计算机视觉算法被广泛应用于解决许多应用问题。这些算法的正确运行取决于其输入端接收到的照片和视频数据,而这些数据会受到噪声的影响;因此,噪声抑制是低级数字图像处理中的一个重要阶段。在这项工作中,研究了在离散小波变换域中使用神经网络对正常白噪声进行维纳滤波。文中介绍了网络的结构以及为在离散小波变换域中进行滤波而开发的算法。在 BSDS500 数据集上对所提出的算法进行了各种噪声水平的测试。通过计算信噪比(SNR)和结构相似性指数(SSIM)值来评估过滤质量。处理测试图像的结果表明,所开发的算法在降噪质量方面优于大多数其他滤波器,包括在离散小波变换域中不使用神经网络的维纳滤波。
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引用次数: 0
期刊
Russian Microelectronics
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