Pub Date : 2024-03-07DOI: 10.1016/j.ultramic.2024.113951
C.J. Hatchwell , M. Bergin , B. Carr , M.G. Barr , A. Fahy , P.C. Dastoor
A scanning helium microscope typically utilises a thermal energy helium atom beam, with an energy and wavelength (¡100 meV, 0.05 nm) particularly sensitive to surface structure. An angular detector stage for a scanning helium microscope is presented that facilitates the in-situ measurement of scattering distributions from a sample. We begin by demonstrating typical elastic and inelastic scattering from ordered surfaces. We then go on to show the role of topography in diffuse scattering from disordered surfaces, observing deviations from simple cosine scattering. In total, these studies demonstrate the wealth of information that is encoded into the scattering distributions obtained with the technique.
{"title":"Measuring scattering distributions in scanning helium microscopy","authors":"C.J. Hatchwell , M. Bergin , B. Carr , M.G. Barr , A. Fahy , P.C. Dastoor","doi":"10.1016/j.ultramic.2024.113951","DOIUrl":"https://doi.org/10.1016/j.ultramic.2024.113951","url":null,"abstract":"<div><p>A scanning helium microscope typically utilises a thermal energy helium atom beam, with an energy and wavelength (¡100<!--> <!-->meV, <span><math><mo>∼</mo></math></span>0.05 nm) particularly sensitive to surface structure. An angular detector stage for a scanning helium microscope is presented that facilitates the in-situ measurement of scattering distributions from a sample. We begin by demonstrating typical elastic and inelastic scattering from ordered surfaces. We then go on to show the role of topography in diffuse scattering from disordered surfaces, observing deviations from simple cosine scattering. In total, these studies demonstrate the wealth of information that is encoded into the scattering distributions obtained with the technique.</p></div>","PeriodicalId":23439,"journal":{"name":"Ultramicroscopy","volume":"260 ","pages":"Article 113951"},"PeriodicalIF":2.2,"publicationDate":"2024-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S0304399124000305/pdfft?md5=69717969f47cc4158f4ae9c35b2585c7&pid=1-s2.0-S0304399124000305-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140096158","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-03-06DOI: 10.1016/j.ultramic.2024.113950
Tian Bai , Xin Sun , Jiazhuan Qin , Fei Li , Qiang Gao , Weixing Xia , Renjie Chen , Aru Yan , Wei Li
A strong in-plane magnetic field is required for Lorentz transmission electron microscopy (LTEM) to observe the evolution of the magnetic domain structure of materials with high coercivity, particularly for research on rare-earth permanent magnets. However, the maximum field of the present in-situ magnetising holder applied in 200-kV or 300-kV TEM does not exceed 0.1 T. In this study, the reason for the low field was analysed, and the field strength was significantly elevated by reducing the field application area of the field generator. From finite element method calculations and experimental measurements, a 1.5 T in-plane field was achieved by our new holder in a 200-kV TEM, and images with good quality could still be obtained. Using the newly developed holder, the magnetisation process of hot-pressed NdFeB magnets was observed. The in-situ magnetising holder can be used in research on a wide variety of magnetic materials.
洛伦兹透射电子显微镜(LTEM)需要强大的面内磁场来观察高矫顽力材料磁畴结构的演变,特别是在稀土永磁研究中。然而,目前在 200 千伏或 300 千伏 TEM 中应用的原位磁化支架的最大磁场不超过 0.1 T。本研究分析了磁场过低的原因,并通过减小磁场发生器的磁场应用面积显著提高了磁场强度。通过有限元法计算和实验测量,我们的新支架在 200 千伏的 TEM 中实现了 1.5 T 的面内磁场,而且仍能获得质量良好的图像。使用新开发的支架,观察了热压钕铁硼磁体的磁化过程。这种原位磁化支架可用于多种磁性材料的研究。
{"title":"An in-situ magnetising holder achieving 1.5 T in-plane field in 200 kV transmission electron microscope","authors":"Tian Bai , Xin Sun , Jiazhuan Qin , Fei Li , Qiang Gao , Weixing Xia , Renjie Chen , Aru Yan , Wei Li","doi":"10.1016/j.ultramic.2024.113950","DOIUrl":"10.1016/j.ultramic.2024.113950","url":null,"abstract":"<div><p>A strong in-plane magnetic field is required for Lorentz transmission electron microscopy (LTEM) to observe the evolution of the magnetic domain structure of materials with high coercivity, particularly for research on rare-earth permanent magnets. However, the maximum field of the present <em>in-situ</em> magnetising holder applied in 200-kV or 300-kV TEM does not exceed 0.1 T. In this study, the reason for the low field was analysed, and the field strength was significantly elevated by reducing the field application area of the field generator. From finite element method calculations and experimental measurements, a 1.5 T in-plane field was achieved by our new holder in a 200-kV TEM, and images with good quality could still be obtained. Using the newly developed holder, the magnetisation process of hot-pressed NdFeB magnets was observed. The <em>in-situ</em> magnetising holder can be used in research on a wide variety of magnetic materials.</p></div>","PeriodicalId":23439,"journal":{"name":"Ultramicroscopy","volume":"260 ","pages":"Article 113950"},"PeriodicalIF":2.2,"publicationDate":"2024-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140074668","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-02-24DOI: 10.1016/j.ultramic.2024.113940
Patrick Trimby , Mohammed Al-Mosawi , Maisoon Al-Jawad , Stuart Micklethwaite , Zabeada Aslam , Aimo Winkelmann , Sandra Piazolo
The remarkable physical properties of dental enamel can be largely attributed to the structure of the hydroxyapatite (HAp) crystallites on the sub-micrometre scale. Characterising the HAp microstructure is challenging, due to the nanoscale of individual crystallites and practical challenges associated with HAp examination using electron microscopy techniques. Conventional methods for enamel characterisation include imaging using transmission electron microscopy (TEM) or specialised beamline techniques, such as polarisation-dependent imaging contrast (PIC). These provide useful information at the necessary spatial resolution but are not able to measure the full crystallographic orientation of the HAp crystallites. Here we demonstrate the effectiveness of enamel analyses using transmission Kikuchi diffraction (TKD) in the scanning electron microscope, coupled with newly-developed pattern matching methods. The pattern matching approach, using dynamic template matching coupled with subsequent orientation refinement, enables robust indexing of even poor-quality TKD patterns, resulting in significantly improved data quality compared to conventional diffraction pattern indexing methods. The potential of this method for the analysis of nanocrystalline enamel structures is demonstrated by the characterisation of a human enamel TEM sample and the subsequent comparison of the results to high resolution TEM imaging. The TKD – pattern matching approach measures the full HAp crystallographic orientation enabling a quantitative measurement of not just the c-axis orientations, but also the extent of any rotation of the crystal lattice about the c-axis, between and within grains. Results presented here show how this additional information highlights potentially significant aspects of the HAp crystallite structure, including intra-crystallite distortion and the presence of multiple high angle boundaries between adjacent crystallites with rotations about the c-axis. These and other observations enable a more rigorous understanding of the relationship between HAp structures and the physical properties of dental enamel.
牙釉质卓越的物理特性在很大程度上归因于亚微米级的羟基磷灰石(HAp)结晶结构。由于单个结晶的尺寸达到了纳米级,而且使用电子显微镜技术检测 HAp 存在实际困难,因此表征 HAp 的微观结构非常具有挑战性。珐琅质表征的传统方法包括使用透射电子显微镜(TEM)成像或专门的光束线技术,如偏振相关成像对比(PIC)。这些方法可提供必要空间分辨率的有用信息,但无法测量 HAp 晶体的全部晶体学取向。在这里,我们展示了利用扫描电子显微镜中的透射菊池衍射(TKD)和新开发的模式匹配方法进行珐琅质分析的有效性。这种模式匹配方法采用动态模板匹配和随后的取向细化,即使是质量较差的 TKD 模式也能进行稳健的索引,与传统的衍射模式索引方法相比,数据质量有了显著提高。通过对人体珐琅质 TEM 样品进行表征,并将结果与高分辨率 TEM 成像进行比较,证明了这种方法在分析纳米晶珐琅质结构方面的潜力。TKD - 图案匹配方法可测量整个 HAp 晶体取向,不仅能定量测量 c 轴取向,还能测量晶粒之间和晶粒内部晶格围绕 c 轴旋转的程度。本文介绍的结果显示了这些附加信息如何凸显出 HAp 晶粒结构的潜在重要方面,包括晶粒内部畸变以及相邻晶粒之间存在多个围绕 c 轴旋转的高角度边界。通过这些观察和其他观察,我们可以更深入地了解 HAp 结构与牙釉质物理性质之间的关系。
{"title":"The characterisation of dental enamel using transmission Kikuchi diffraction in the scanning electron microscope combined with dynamic template matching","authors":"Patrick Trimby , Mohammed Al-Mosawi , Maisoon Al-Jawad , Stuart Micklethwaite , Zabeada Aslam , Aimo Winkelmann , Sandra Piazolo","doi":"10.1016/j.ultramic.2024.113940","DOIUrl":"https://doi.org/10.1016/j.ultramic.2024.113940","url":null,"abstract":"<div><p>The remarkable physical properties of dental enamel can be largely attributed to the structure of the hydroxyapatite (HAp) crystallites on the sub-micrometre scale. Characterising the HAp microstructure is challenging, due to the nanoscale of individual crystallites and practical challenges associated with HAp examination using electron microscopy techniques. Conventional methods for enamel characterisation include imaging using transmission electron microscopy (TEM) or specialised beamline techniques, such as polarisation-dependent imaging contrast (PIC). These provide useful information at the necessary spatial resolution but are not able to measure the full crystallographic orientation of the HAp crystallites. Here we demonstrate the effectiveness of enamel analyses using transmission Kikuchi diffraction (TKD) in the scanning electron microscope, coupled with newly-developed pattern matching methods. The pattern matching approach, using dynamic template matching coupled with subsequent orientation refinement, enables robust indexing of even poor-quality TKD patterns, resulting in significantly improved data quality compared to conventional diffraction pattern indexing methods. The potential of this method for the analysis of nanocrystalline enamel structures is demonstrated by the characterisation of a human enamel TEM sample and the subsequent comparison of the results to high resolution TEM imaging. The TKD – pattern matching approach measures the full HAp crystallographic orientation enabling a quantitative measurement of not just the c-axis orientations, but also the extent of any rotation of the crystal lattice about the c-axis, between and within grains. Results presented here show how this additional information highlights potentially significant aspects of the HAp crystallite structure, including intra-crystallite distortion and the presence of multiple high angle boundaries between adjacent crystallites with rotations about the c-axis. These and other observations enable a more rigorous understanding of the relationship between HAp structures and the physical properties of dental enamel.</p></div>","PeriodicalId":23439,"journal":{"name":"Ultramicroscopy","volume":"260 ","pages":"Article 113940"},"PeriodicalIF":2.2,"publicationDate":"2024-02-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139986540","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-02-21DOI: 10.1016/j.ultramic.2024.113939
Oscar Recalde-Benitez , Yevheniy Pivak , Tianshu Jiang , Robert Winkler , Alexander Zintler , Esmaeil Adabifiroozjaei , Philipp Komissinskiy , Lambert Alff , William A. Hubbard , H. Hugo Perez-Garza , Leopoldo Molina-Luna
Recent advances in microelectromechanical systems (MEMS)-based substrates and sample holders for in situ transmission electron microscopy (TEM) are currently enabling exciting new opportunities for the nanoscale investigation of materials and devices. The ability to perform electrical testing while simultaneously capturing the wide spectrum of signals detectable in a TEM, including structural, chemical, and even electronic contrast, represents a significant milestone in the realm of nanoelectronics. In situ studies hold particular promise for the development of Metal-Insulator-Metal (MIM) devices for use in next-generation computing. However, achieving successful device operation in the TEM typically necessitates meticulous sample preparation involving focused ion beam (FIB) systems. Conducting contamination introduced during the FIB thinning process and subsequent attachment of the sample onto a MEMS-based chip remains a formidable challenge. This article delineates an improved FIB-based sample preparation methodology that results in good electrical connectivity and operational functionality across various MIM devices. To exemplify the efficacy of the sample preparation technique, we demonstrate preparation of a clean cross section extracted from a Au/Pt/BaSrTiO3/SrMoO3 tunable capacitor (varactor). The FIB-prepared TEM lamella mounted on a MEMS-based chip showed current levels in the tens of picoamperes range at 0.1 V. Furthermore, the electric response and current density of the TEM lamella device closely align with macro-scale devices. These samples exhibit comparable current densities to their macro-sized counterparts thus validating the sample preparation process and confirming device connectivity. The simultaneous operation and TEM characterization of electronic devices enabled by this process enables direct correlation between device structure and function, which could prove pivotal in the development of new MIM systems.
基于微机电系统(MEMS)的原位透射电子显微镜(TEM)基底和样品架的最新进展为材料和器件的纳米级研究带来了令人兴奋的新机遇。在进行电气测试的同时,还能捕捉 TEM 中可检测到的各种信号,包括结构、化学甚至电子对比,这是纳米电子学领域的一个重要里程碑。原位研究为开发用于下一代计算的金属-绝缘体-金属(MIM)器件带来了特别的希望。然而,要在 TEM 中成功实现器件操作,通常需要使用聚焦离子束 (FIB) 系统进行细致的样品制备。在 FIB 薄化过程中引入的传导污染以及随后将样品附着到基于 MEMS 的芯片上,仍然是一项艰巨的挑战。本文介绍了一种改进的基于 FIB 的样品制备方法,该方法可在各种 MIM 器件上实现良好的电气连接和操作功能。为了体现样品制备技术的功效,我们演示了从 Au/Pt/BaSrTiO3/SrMoO3 可调电容器(变容器)中提取的清洁横截面的制备。FIB 制备的 TEM 片安装在基于 MEMS 的芯片上,在 0.1 V 电压下显示出几十皮安的电流水平。此外,TEM薄片器件的电响应和电流密度与宏观尺度器件非常接近。这些样品的电流密度与宏观尺寸的样品相当,从而验证了样品制备过程并确认了器件的连接性。该工艺可同时对电子器件进行操作和 TEM 表征,从而实现器件结构与功能之间的直接关联,这在新型 MIM 系统的开发中将起到关键作用。
{"title":"Weld-free mounting of lamellae for electrical biasing operando TEM","authors":"Oscar Recalde-Benitez , Yevheniy Pivak , Tianshu Jiang , Robert Winkler , Alexander Zintler , Esmaeil Adabifiroozjaei , Philipp Komissinskiy , Lambert Alff , William A. Hubbard , H. Hugo Perez-Garza , Leopoldo Molina-Luna","doi":"10.1016/j.ultramic.2024.113939","DOIUrl":"10.1016/j.ultramic.2024.113939","url":null,"abstract":"<div><p>Recent advances in microelectromechanical systems (MEMS)-based substrates and sample holders for <em>in situ</em> transmission electron microscopy (TEM) are currently enabling exciting new opportunities for the nanoscale investigation of materials and devices. The ability to perform electrical testing while simultaneously capturing the wide spectrum of signals detectable in a TEM, including structural, chemical, and even electronic contrast, represents a significant milestone in the realm of nanoelectronics. <em>In situ</em> studies hold particular promise for the development of Metal-Insulator-Metal (MIM) devices for use in next-generation computing. However, achieving successful device operation in the TEM typically necessitates meticulous sample preparation involving focused ion beam (FIB) systems. Conducting contamination introduced during the FIB thinning process and subsequent attachment of the sample onto a MEMS-based chip remains a formidable challenge. This article delineates an improved FIB-based sample preparation methodology that results in good electrical connectivity and operational functionality across various MIM devices. To exemplify the efficacy of the sample preparation technique, we demonstrate preparation of a clean cross section extracted from a Au/Pt/BaSrTiO<sub>3</sub>/SrMoO<sub>3</sub> tunable capacitor (varactor). The FIB-prepared TEM lamella mounted on a MEMS-based chip showed current levels in the tens of picoamperes range at 0.1 V. Furthermore, the electric response and current density of the TEM lamella device closely align with macro-scale devices. These samples exhibit comparable current densities to their macro-sized counterparts thus validating the sample preparation process and confirming device connectivity. The simultaneous operation and TEM characterization of electronic devices enabled by this process enables direct correlation between device structure and function, which could prove pivotal in the development of new MIM systems.</p></div>","PeriodicalId":23439,"journal":{"name":"Ultramicroscopy","volume":"260 ","pages":"Article 113939"},"PeriodicalIF":2.2,"publicationDate":"2024-02-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S0304399124000184/pdfft?md5=b14163ac4a47eb82b03e6527291c58b1&pid=1-s2.0-S0304399124000184-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139922079","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-02-19DOI: 10.1016/j.ultramic.2024.113941
D.G. Şentürk , A. De Backer , S. Van Aert
In this paper, a methodology is presented to count the number of atoms in heterogeneous nanoparticles based on the combination of multiple annular dark field scanning transmission electron microscopy (ADF STEM) images. The different non-overlapping annular detector collection regions are selected based on the principles of optimal statistical experiment design for the atom-counting problem. To count the number of atoms, the total intensities of scattered electrons for each atomic column, the so-called scattering cross-sections, are simultaneously compared with simulated library values for the different detector regions by minimising the squared differences. The performance of the method is evaluated for simulated Ni@Pt and Au@Ag core–shell nanoparticles. Our approach turns out to be a dose efficient alternative for the investigation of beam-sensitive heterogeneous materials as compared to the combination of ADF STEM and energy dispersive X-ray spectroscopy.
{"title":"Element specific atom counting for heterogeneous nanostructures: Combining multiple ADF STEM images for simultaneous thickness and composition determination","authors":"D.G. Şentürk , A. De Backer , S. Van Aert","doi":"10.1016/j.ultramic.2024.113941","DOIUrl":"10.1016/j.ultramic.2024.113941","url":null,"abstract":"<div><p>In this paper, a methodology is presented to count the number of atoms in heterogeneous nanoparticles based on the combination of multiple annular dark field scanning transmission electron microscopy (ADF STEM) images. The different non-overlapping annular detector collection regions are selected based on the principles of optimal statistical experiment design for the atom-counting problem. To count the number of atoms, the total intensities of scattered electrons for each atomic column, the so-called scattering cross-sections, are simultaneously compared with simulated library values for the different detector regions by minimising the squared differences. The performance of the method is evaluated for simulated Ni@Pt and Au@Ag core–shell nanoparticles. Our approach turns out to be a dose efficient alternative for the investigation of beam-sensitive heterogeneous materials as compared to the combination of ADF STEM and energy dispersive X-ray spectroscopy.</p></div>","PeriodicalId":23439,"journal":{"name":"Ultramicroscopy","volume":"259 ","pages":"Article 113941"},"PeriodicalIF":2.2,"publicationDate":"2024-02-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139921818","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-02-15DOI: 10.1016/j.ultramic.2024.113937
Vadimas Ivinskij , Antanas Zinovicius , Andrius Dzedzickis , Jurga Subaciute-Zemaitiene , Juste Rozene , Vytautas Bucinskas , Eugenijus Macerauskas , Sonata Tolvaisiene , Inga Morkvenaite-Vilkonciene
Scanning electrochemical microscopy (SECM) is a scanning probe microscope with an ultramicroelectrode (UME) as a probe. The technique is advantageous in the characterization of the electrochemical properties of surfaces. However, the limitations, such as slow imaging and many functions depending on the user, only allow us to use some of the possibilities. Therefore, we applied visual recognition and machine learning to detect micro-objects from the image and determine their electrochemical activity. The reconstruction of the image from several approach curves allows it to scan faster and detect active areas of the sample. Therefore, the scanning time and presence of the user is diminished. An automated scanning electrochemical microscope with visual recognition has been developed using commercially available modules, relatively low-cost components, design, software solutions proven in other fields, and an original control and data fusion algorithm.
{"title":"Fast detection of micro-objects using scanning electrochemical microscopy based on visual recognition and machine learning","authors":"Vadimas Ivinskij , Antanas Zinovicius , Andrius Dzedzickis , Jurga Subaciute-Zemaitiene , Juste Rozene , Vytautas Bucinskas , Eugenijus Macerauskas , Sonata Tolvaisiene , Inga Morkvenaite-Vilkonciene","doi":"10.1016/j.ultramic.2024.113937","DOIUrl":"https://doi.org/10.1016/j.ultramic.2024.113937","url":null,"abstract":"<div><p>Scanning electrochemical microscopy (SECM) is a scanning probe microscope with an ultramicroelectrode (UME) as a probe. The technique is advantageous in the characterization of the electrochemical properties of surfaces. However, the limitations, such as slow imaging and many functions depending on the user, only allow us to use some of the possibilities. Therefore, we applied visual recognition and machine learning to detect micro-objects from the image and determine their electrochemical activity. The reconstruction of the image from several approach curves allows it to scan faster and detect active areas of the sample. Therefore, the scanning time and presence of the user is diminished. An automated scanning electrochemical microscope with visual recognition has been developed using commercially available modules, relatively low-cost components, design, software solutions proven in other fields, and an original control and data fusion algorithm.</p></div>","PeriodicalId":23439,"journal":{"name":"Ultramicroscopy","volume":"259 ","pages":"Article 113937"},"PeriodicalIF":2.2,"publicationDate":"2024-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139738274","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Four-dimensional Scanning Transmission Electron Microscopy (4D-STEM) is a powerful technique for high-resolution and high-precision materials characterization at multiple length scales, including the characterization of beam-sensitive materials. However, the field of view of 4D-STEM is relatively small, which in absence of live processing is limited by the data size required for storage. Furthermore, the rectilinear scan approach currently employed in 4D-STEM places a resolution- and signal-dependent dose limit for the study of beam sensitive materials. Improving 4D-STEM data and dose efficiency, by keeping the data size manageable while limiting the amount of electron dose, is thus critical for broader applications. Here we introduce a general method for reconstructing 4D-STEM data with subsampling in both real and reciprocal spaces at high fidelity. The approach is first tested on the subsampled datasets created from a full 4D-STEM dataset, and then demonstrated experimentally using random scan in real-space. The same reconstruction algorithm can also be used for compression of 4D-STEM datasets, leading to a large reduction (100 times or more) in data size, while retaining the fine features of 4D-STEM imaging, for crystalline samples.
{"title":"Framework of compressive sensing and data compression for 4D-STEM","authors":"Hsu-Chih Ni , Renliang Yuan , Jiong Zhang , Jian-Min Zuo","doi":"10.1016/j.ultramic.2024.113938","DOIUrl":"https://doi.org/10.1016/j.ultramic.2024.113938","url":null,"abstract":"<div><p>Four-dimensional Scanning Transmission Electron Microscopy (4D-STEM) is a powerful technique for high-resolution and high-precision materials characterization at multiple length scales, including the characterization of beam-sensitive materials. However, the field of view of 4D-STEM is relatively small, which in absence of live processing is limited by the data size required for storage. Furthermore, the rectilinear scan approach currently employed in 4D-STEM places a resolution- and signal-dependent dose limit for the study of beam sensitive materials. Improving 4D-STEM data and dose efficiency, by keeping the data size manageable while limiting the amount of electron dose, is thus critical for broader applications. Here we introduce a general method for reconstructing 4D-STEM data with subsampling in both real and reciprocal spaces at high fidelity. The approach is first tested on the subsampled datasets created from a full 4D-STEM dataset, and then demonstrated experimentally using random scan in real-space. The same reconstruction algorithm can also be used for compression of 4D-STEM datasets, leading to a large reduction (100 times or more) in data size, while retaining the fine features of 4D-STEM imaging, for crystalline samples.</p></div>","PeriodicalId":23439,"journal":{"name":"Ultramicroscopy","volume":"259 ","pages":"Article 113938"},"PeriodicalIF":2.2,"publicationDate":"2024-02-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S0304399124000172/pdfft?md5=8e2f018c37eccbf882d300e115155e45&pid=1-s2.0-S0304399124000172-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139733423","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-02-08DOI: 10.1016/j.ultramic.2024.113936
Shahar Seifer , Lothar Houben , Michael Elbaum
We demonstrate the use of a 4-dimensional scanning transmission electron microscope (4D-STEM) to extract atomic cross section information in amorphous materials. We measure the scattering amplitudes of 200 keV electrons in several representative specimens: amorphous carbon, silica, amorphous ice of pure water, and vitrified phosphate buffer solution. Diffraction patterns are recorded by 4D-STEM with or without energy filter at the zero-loss peak. In addition, Electron Energy Loss Spectroscopy (EELS) data are acquired at several thicknesses and energies. Mixed elastic and inelastic contributions for thick samples can be decoupled based on a convolution model. Measured differential cross sections between 1 and 3 mrad are due primarily to plasmon excitations and follow precisely a 1/θ2 angular distribution. The measured intensities match Inokuti's calculations of total dipole matrix elements for discrete dipole transitions alone, i.e., transitions to bound states of the atom and not to continuum states. We describe the fundamental mechanism of plasmon excitation in insulators as a two-step interaction process with a fast electron. First, a target electron in the specimen is excited, the probability for which follows from the availability of atomic transitions, with a strong dependence on the column of the periodic table. Second, the dielectric response of the material determines the energy loss. The energy of the loss peak depends primarily on the valence electrons. Elastic scattering is dominant at higher angles, and can be fitted conveniently to 1/θ3.7 with a linear dependence on atomic number for light atoms. In order to facilitate the interpretation of 4D STEM measurements in terms of material composition, we introduce two key parameters. Zeta is an analytical equivalent of classical STEM Z-contrast, determined by the ratio of elastic to inelastic scattering coefficients, while eta is the elastic coefficient divided by thickness. The two parameters may serve for identification of basic classes of materials in biological and other amorphous organic specimens.
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Pub Date : 2024-02-06DOI: 10.1016/j.ultramic.2024.113935
Rudolf M. Tromp
Energy-Dispersive X-Ray Spectroscopy (EDS) is a technique frequently used in Scanning and Transmission Electron Microscopes to study the elemental composition of a sample. Briefly, high energy electrons of the incident electron beam may ionize an electron from a core shell. The decay of this excited state may result in the emission of a characteristic X-ray photon or Auger-Meitner electron. A solid-state EDS detector captures the X-ray photon and determines its energy. The energy spectrum thus contains information on the elemental make-up of the sample. Low Energy Electron Microscopy (LEEM) typically utilizes incident electrons with energies in the range 0–100 eV, insufficient for the generation of elemental X-rays. In general, LEEM does therefore not allow for elemental characterization of the sample under study. Here we show how relatively simple modifications and additions to the LEEM instrument make in-situ EDS spectroscopy possible, and how high-quality EDS spectra can be obtained, thus enabling elemental analysis in LEEM instruments for the first time.
能量色散 X 射线光谱(EDS)是扫描和透射电子显微镜中常用的一种技术,用于研究样品的元素组成。简而言之,入射电子束的高能电子可能会电离出核壳中的电子。这种激发态的衰变可能会导致特征 X 射线光子或奥杰-迈特纳电子的发射。固态 EDS 检测器可捕获 X 射线光子并确定其能量。因此,能谱包含了样品元素构成的信息。低能电子显微镜(LEEM)通常利用能量在 0-100 eV 之间的入射电子,这些电子不足以产生元素 X 射线。因此,低能电子显微镜一般无法对所研究的样品进行元素表征。在这里,我们将展示如何通过对 LEEM 仪器进行相对简单的修改和添加,实现原位 EDS 光谱分析,以及如何获得高质量的 EDS 光谱,从而首次在 LEEM 仪器中实现元素分析。
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Pub Date : 2024-02-01DOI: 10.1016/j.ultramic.2024.113928
Masayuki Kamaya
The local misorientation, known as KAM, is affected by both the step size (representing the spacing of measurement points applied in orientation measurements) and the point distance (indicating the distance between the points used in the misorientation calculation). The point distance can be increased by selecting surrounding points that are far from the target point. This study proposed the concept of an equidistant local misorientation, for which surrounding points at the same point distance from the target point were selected to calculate misorientation. An arbitrary point distance can be set for the equidistant local misorientation regardless of the step size. The changes in equidistant local misorientation for various point distances were calculated for the crystal orientation datasets obtained with different step sizes and measurement grids (square or hexagonal) using Type 316 stainless steel specimens, in which plastic strain of about 5 % was induced. It was shown that the equidistant local misorientation was identical regardless of the step size and measurement grid when the same point distance was used. Then, it was concluded that the difference in the local misorientation which emanated from the difference in step size could be corrected by employing the equidistant local misorientation. Increasing the point distance improved the signal-to-noise (S/N) ratio in the mapping data of the equidistant local misorientation. However, the results suggested that the maximum point distance for enhancing the S/N ratio should be within 30 % of the average grain size. On the other hand, decreasing the step size by keeping the point distance constant was found not to improve the S/N ratio, while it enhanced the spatial resolution of the mapping data.
被称为 KAM 的局部方向偏差受步长(表示方向测量中测量点的间距)和点距(表示方向偏差计算中使用的点之间的距离)的影响。可以通过选择远离目标点的周围点来增加点距。本研究提出了等距局部迷失方向的概念,即选择与目标点点距相同的周围点来计算迷失方向。无论步长大小如何,都可以为等距局部迷失方向设置任意点距。使用 316 型不锈钢试样计算了不同步长和测量网格(正方形或六角形)下获得的晶体取向数据集在不同点距下的等距局部定向错误的变化,在试样中诱导了约 5% 的塑性应变。结果表明,在使用相同点距的情况下,无论步长大小和测量网格如何,等距局部错向都是相同的。因此可以得出结论,步长不同造成的局部迷失方向差异可以通过采用等距局部迷失方向来纠正。增加点距可以改善等距局部测偏法测绘数据的信噪比(S/N)。但结果表明,提高信噪比的最大点距应在平均晶粒尺寸的 30% 以内。另一方面,在保持点距不变的情况下减小步长并不能提高信噪比,但却提高了测绘数据的空间分辨率。
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