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Proceedings of the 5th Electronics System-integration Technology Conference (ESTC)最新文献

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A new thermosetting resin prepared from a siloxane-containing benzoxazine and epoxy resin 一种由含硅氧烷的苯并恶嗪和环氧树脂制备的新型热固性树脂
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962803
Kai-Chi Chen, H. Li, Che-Hao Shih, Wen-Bin Chen, Shu-Chen Huang
Copolymerization of PBZ precursors with epoxies forms network structures with high crosslinking densities, potentially improving the thermal and mechanical properties. In this study, we copolymerized the siloxane-imide-containing benzoxazine BZ-A6 was with siloxane-epoxy GT-1000. Analyses using differential scanning calorimetry and Fourier transform infrared spectroscopy revealed that the copolymers were formed at a relatively low curing temperature of 150 °C. The siloxane benzoxazine/epoxy mixture exhibited high thermal stability, with a high char yield of 44.6% and a high decomposition temperature of 364.9 °C. Moreover, during UV exposure tests, the water contact angle of the BZ-A6/GT-1000 copolymer was more stable than that of the conventional bisphenol A-type benzoxazine-epoxy Ba/DGEBA, suggesting that our new benzoxazine/epoxy mixture would be more suitable for applications requiring hydrophobic materials that are UV resistant. The low curing temperature and good temperature- and UV-resistance of this siloxane benzoxazine/epoxy mixture should make it widely applicable, such as IC package materials (film type encapsulant, paste encapsulant) or weather resistance application.
PBZ 前体与环氧树脂共聚可形成具有高交联密度的网络结构,从而改善热性能和机械性能。在这项研究中,我们将含硅氧烷亚胺的苯并恶嗪 BZ-A6 与硅氧烷环氧树脂 GT-1000 进行了共聚。利用差示扫描量热法和傅立叶变换红外光谱进行的分析表明,共聚物是在相对较低的固化温度(150 ℃)下形成的。硅氧烷苯并恶嗪/环氧混合物具有很高的热稳定性,炭化率高达 44.6%,分解温度高达 364.9 ℃。此外,在紫外线曝晒测试中,BZ-A6/GT-1000 共聚物的水接触角比传统的双酚 A 型苯并恶嗪-环氧 Ba/DGEBA 更稳定,这表明我们的新型苯并恶嗪/环氧混合物更适用于需要抗紫外线的疏水材料的应用。这种硅氧烷苯并恶嗪/环氧混合物的固化温度低、耐温性和抗紫外线性能好,因此可广泛应用于集成电路封装材料(薄膜型封装材料、膏状封装材料)或耐候性应用。
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引用次数: 0
Development of an electro-optical circuit board technology with embedded single-mode glass waveguide layer 嵌入式单模玻璃波导层电光电路板技术的研制
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962733
L. Brusberg, D. Manessis, M. Neitz, Beatrice Schild, H. Schroder, T. Tekin, K. Lang
The goal of our research is the development of a single-mode electro-optical circuit board, the single-mode board-to-board pluggable connector and the single-mode chip-to-board coupling interface to silicon photonic devices. In this paper, the single-mode glass waveguide process is presented based on thermal silver ion-exchange for fabrication of low loss glass waveguide panels that will be developed for embedding as core layer of such printed circuit board. The single-mode glass waveguides (SM-WGs) were fabricated on 150 mm wafer size for characterization of different embedding scenarios. In the best case the measured propagation loss before and after lamination is below 0.1 dB/cm (λ=1550 nm). A suitable glass waveguide layer and embedding process was developed that can be applied for single-mode electro-optical circuit board fabrication.
我们的研究目标是开发单模光电电路板,单模板对板可插拔连接器和单模芯片对板耦合接口到硅光子器件。本文提出了一种基于热银离子交换的单模玻璃波导工艺,用于制造低损耗玻璃波导板,这种玻璃波导板将被开发用于嵌入这种印刷电路板的核心层。在150mm的晶圆上制备了单模玻璃波导(SM-WGs),以表征不同的嵌入场景。在最佳情况下,层压前后的传输损耗均小于0.1 dB/cm (λ=1550 nm)。开发了一种适合于单模光电电路板制作的玻璃波导层和嵌入工艺。
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引用次数: 5
Si dry etching for TSV formation and backside reveal TSV形成和背面显露的硅干蚀刻
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962840
Z. Wang, F. Jiang, W. Zhang
In 3D IC packaging, through silicon via (TSV) technology is being considered as a promising technology, enabling massive and short interconnections between stacked chips, increasing performance and data bandwidth, and reducing signal delay and the power consumption. Currently, dry etch process plays an important role in TSV fabrication. TSVs with diameters ranging from one hundred to ten micrometers are mainly fabricated by deep reactive ion etching (DRIE) technology. Bosch process is used for DRIE process for producing high-aspect ratio TSVs and non-Bosch process is used for TSV reveal process. In Bosch process, the primary steps are silicon isotropic etching and wall passivation in sequential cycles. SF6 is widely used as the main etching gas for the high density of F+ radicals; C4F8 is used in wall passivation as it polymerizes to deposits on walls to form an etch barrier that is sufficiently impervious to side scattered F+ ions but not to direct ions at the bottom of the via. Wall scalloping occurs primarily near the top of the via where scattered ions have wide trajectories and less at greater depths where ion trajectories are more restricted. After completion of the via-middle TSV integration and front-side wafer processing, the wafer is temporarily bonded onto a carrier wafer which could be glass or silicon. Then Si from the backside of the wafer was removed to make contact with the bottom of the TSVs by a mechanical grind followed by a reveal etch, which is a key step for the successful implementation of TSV. The via reveal was required to maintain acceptably low total thickness variation (TTV) to allow subsequent stacking steps.
在3D IC封装中,通过硅孔(TSV)技术被认为是一种有前途的技术,可以在堆叠芯片之间实现大规模和短互连,提高性能和数据带宽,并降低信号延迟和功耗。目前,干蚀刻工艺在TSV制造中起着重要的作用。直径在100 ~ 10微米之间的tsv主要是通过深度反应离子蚀刻(DRIE)技术制备的。生产高纵横比TSV的DRIE工艺采用博世工艺,TSV显示工艺采用非博世工艺。在博世工艺中,主要步骤是硅各向同性蚀刻和壁面钝化。由于F+自由基密度高,SF6被广泛用作主要蚀刻气体;C4F8用于壁钝化,因为它聚合成沉积在壁上,形成一个蚀刻屏障,足以不渗透侧面分散的F+离子,但不能渗透直接离子在通孔底部。壁扇贝主要发生在孔道顶部附近,在那里分散的离子具有宽的轨迹,而在离子轨迹更受限制的更深的地方则较少。在完成通过-中间TSV集成和正面晶圆加工后,晶圆暂时粘合到载体晶圆上,载体晶圆可以是玻璃或硅。然后通过机械研磨和显露蚀刻去除晶圆背面的Si,使其与TSV底部接触,这是成功实现TSV的关键步骤。通孔显露需要保持可接受的低总厚度变化(TTV),以允许后续的堆叠步骤。
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引用次数: 2
Multilayer dispensing of remote phosphor for LED wafer level packaging with pre-formed silicone lens 预成型硅透镜LED晶圆级封装用远端荧光粉的多层点胶
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962713
J. Lo, S. Lee, Xungao Guo, Huishan Zhao
Phosphor converted LED is commonly used as the white light source in solid state luminaires. Among the packaging processes involved, phosphor deposition is a critical step, which controls the overall optical performance of LEDs. There are several phosphor deposition methods, among which disperse dispensing and conformal coating methods are widely used. In these two methods, phosphor materials are applied directly on top of the LED chip. The phosphor materials are heated up by the LED chip during the operation. The behavior of phosphor materials highly depends on their temperature. The emission efficiency decreases as temperature increases. High phosphor temperature may also introduce reliability problems. The situation can be improved by adopting a remote phosphor method. Some high power LEDs packages utilize silicone lens to increase the light extraction efficiency. It is difficult to apply a remote phosphor layer on the convex surface using a regular dispensing process. In this paper, an innovative multilayer remote phosphor deposition method is proposed for the packages with silicone lens. Phosphor slurry was dispensed directly on the silicone lens with steps. The slurry flowed and spread on the dome, and stopped when it reached the edge of the step. The unique step feature stopped the phosphor slurry from overflowing. A package with multilayer remote phosphor layer was fabricated. The phosphor material in each layer was different. This method provides a simple and flexible platform for adopting different types of phosphor materials in one package, and hence to achieve the designed optical performance.
荧光粉转换LED是固态灯具中常用的白光光源。在封装过程中,荧光粉沉积是一个关键步骤,它控制着led的整体光学性能。荧光粉沉积方法有很多种,其中分散点胶法和保形镀膜法应用最为广泛。在这两种方法中,荧光粉材料直接应用于LED芯片的顶部。荧光粉材料在工作过程中被LED芯片加热。荧光粉材料的性能在很大程度上取决于它们的温度。发射效率随温度的升高而降低。较高的荧光粉温度也可能带来可靠性问题。采用远程荧光粉方法可以改善这种情况。一些高功率led封装使用硅透镜来提高光提取效率。使用常规点胶工艺难以在凸表面上涂抹远端荧光粉层。本文提出了一种新颖的硅透镜封装多层远端荧光粉沉积方法。将荧光粉浆按步骤直接涂在硅胶透镜上。泥浆在圆屋顶上流动、扩散,到了台阶边上就停了下来。独特的台阶结构,防止了磷光料浆溢出。制备了具有多层远端荧光粉层的封装材料。每一层的荧光粉材料不同。该方法为在一个封装中采用不同类型的荧光粉材料,从而实现设计的光学性能提供了一个简单灵活的平台。
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引用次数: 2
Fully roll-to-roll gravure printed carbon nanotube based flexible thin film transistor backplane on 100 m of poly(ethyleneterephtalate) (PET) web 全卷对卷凹印基于碳纳米管的柔性薄膜晶体管背板在100米的聚乙二甲酸乙酯(PET)网
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962824
Wookyu Lee, Hyunmo Koo, Junfeng Sun, Yunchang Choi, Gyoujin Cho
R2R gravure with two printing units with the overlay printing registration accuracy of ±20 μm is introduced to fabricate 20 × 20 TFTs backplane on 150 m of PET web. The resultants of fully printed TFT backplanes were characterized based on the concept to extract the scalability for manufacturing wall paper like sensor sheets. In this gravure system, silver nanoparticle based conductive ink, BaTiO3 based dielectric ink and single walled carbon nanotube based semiconducting ink were used for printing 20 × 20 TFT backplanes on 100 m of PET web. Rheological properties were optimized with the consideration of printing reliability and electrical properties of resulting TFTs. Mobility, transconductance, threshold voltage, and on-off current ratio of 20 × 20 printed TFT backplanes were analyzed for extracting the parameters to define the scalability factors for practical applications.
采用R2R凹版双印刷单元,覆盖印刷配准精度为±20 μm,在150m PET卷材上制作了20 × 20 TFTs背板。基于该概念,对全印刷TFT背板的结果进行了表征,以提取制造类似传感器片的墙纸的可扩展性。在该凹印系统中,采用纳米银导电油墨、BaTiO3介电油墨和单壁碳纳米管半导体油墨在100 m的PET卷材上印刷20 × 20 TFT背板。考虑到打印可靠性和电学性能,优化了tft的流变性能。分析了20 × 20印刷TFT背板的迁移率、跨导、阈值电压和通断电流比,以提取参数来定义实际应用的可扩展性因素。
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引用次数: 4
Packaging of thin film thermoelectric generators for autonomous sensor nodes 自主传感器节点用薄膜热电发电机的封装
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962735
T. Zoller, Ricardo Ehrenpfordt, A. Gavrikov, J. Nurnus, H. Kuck
This paper focuses on packaging of thin film thermoelectric generators (TEG) for energy harvesting applications in sensor nodes for the internet of things (IoT). The TEGs have to be robust against mechanical stress caused by the assembly and packaging process steps and the mismatch of the coefficients of thermal expansion of the used materials. In this work, the mechanical stability of TEGs was evaluated by using a shear force test apparatus and a four line bending test. Furthermore the influence of underfill and stress decoupling thermal adhesives on the mechanical performance was investigated. It could be shown that underfill between the two substrates improves the shear force stability of the investigated thermoelectric generators. During mechanical tests the internal electrical resistance of the modules was monitored. It was observed, that the electrical shutdown coincides with the mechanical shutdown of the generator. By using selected thermal adhesives with and without underfill a sufficient robustness of the thermoelectric generator against typical warpage as known from a standard molded land grid array (LGA) sensor package was achieved.
本文重点研究了用于物联网传感器节点能量收集应用的薄膜热电发生器(TEG)的封装。teg必须能够抵抗由装配和包装过程步骤以及所用材料热膨胀系数不匹配引起的机械应力。本文采用剪切力试验装置和四线弯曲试验对teg的力学稳定性进行了评价。此外,还研究了下填料和应力解耦热胶粘剂对胶粘剂力学性能的影响。结果表明,衬底之间的下填料改善了热电发电机的剪切力稳定性。在机械测试期间,监测了模块的内部电阻。据观察,发电机的电气停机与机械停机同时发生。通过使用选定的带和不带底填料的热电粘合剂,实现了热电发电机对典型翘曲的足够坚固性,如标准模压的陆地网格阵列(LGA)传感器封装所知。
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引用次数: 2
Investigations studying the electromigration phenomena in interconnects 互连中电迁移现象的研究
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962758
H. Albrecht, J. Strogies
The main trends in consumer electronics are increasing product performances and costs reduction. These trends lead to an ongoing integration on package level which leads to a decreasing size of the solder contacts. This goes along with a higher sensibility to thermal-mechanical stress and the immanent void formation due to electromigration (EM) effects in interfaces and bulk materials like solder fillets or solder balls Following the Flip Chip-Technology in terms of Chip Size Packages or other miniaturized components, the size of solder bump interconnects have been significantly reduced with the development of high-density packaging, and therefore the evaluation of the electromigration behavior in solder bumps is significantly required. The paper proposes evaluation trials to test the electromigration resistance of different Pb-free solders, also with special additions to minimize material transport phenomena at interfaces and in the bulk (SnAgCu, SnAg+, SnBi+, SnAgBiSb+. SnAgBiIn+). Miniaturized interconnects with sufficient current density are under investigation to cause electromigration as phenomena concerning the diffusion of metallic atoms induced by high density electron flow and Joule heating, that can create local defects in terms of voids, etc. With the rapid downsizing of interconnections, the electromigration-resistant solder material and interfaces becomes more interest. In addition to that, for power electronic applications the acceptable current density must be compared with the design orientated constructional parameter in terms of back side metallizations of the die, bump or ball interconnects and the Cu width and thickness of wiring solutions in the package and the surrounding area. Results will be presented to discuss the risk of EM and solutions to stabilize interfaces. The electromigration effects are also under investigation for extended power electronics applications under the influence of Cu trace dimensions, electrical and thermal interfaces, current density applied, higher operating temperatures and metallizations in the vertical layer stack of power modules.
消费电子产品的主要趋势是提高产品性能和降低成本。这些趋势导致封装级的持续集成,从而导致焊锡触点的尺寸减小。这与对热机械应力的更高敏感性以及由于界面和块状材料(如焊角或焊球)中的电迁移(EM)效应而形成的固有空洞有关。在芯片尺寸封装或其他小型化组件方面,随着高密度封装的发展,焊料凹凸互连的尺寸已显着减小。因此,对焊料凹凸处的电迁移行为进行评价是非常必要的。本文提出了评估试验,以测试不同的无铅焊料的电迁移电阻,并通过特殊的添加来减少界面和块体(SnAgCu, SnAg+, SnBi+, SnAgBiSb+)的材料传输现象。SnAgBiIn +)。具有足够电流密度的微型化互连正在研究引起电迁移的现象,这种现象与高密度电子流和焦耳加热引起的金属原子扩散有关,可以在空隙等方面产生局部缺陷。随着互连结构的快速小型化,抗电迁移的焊料材料和接口受到越来越多的关注。除此之外,对于电力电子应用,可接受的电流密度必须与设计导向的结构参数进行比较,包括模具背面金属化、凹凸或球形互连以及封装和周围区域布线解决方案的Cu宽度和厚度。结果将讨论电磁的风险和稳定接口的解决方案。在铜径线尺寸、电和热界面、施加的电流密度、更高的工作温度和功率模块垂直层堆叠中的金属化的影响下,扩展的电力电子应用也在研究电迁移效应。
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引用次数: 0
Drawbacks of the nanoparticle reinforced lead-free BGA solder joints 纳米颗粒增强无铅BGA焊点的缺点
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962816
Huayu Sun, Y. Chan
In this study, 0.5 wt.% CNTs-doped solder paste, that prepared by mechanical stirring, was used to detect the redistribution phenomenon of nanoparticles in the solder ball. Some of nanoparticles seriously separated out with the outward flow of solder flux, making related quantitative experiments loss their accuracy. Some of nanoparticles seriously gathered in the solder ball, having negative effects on the solder joint and making the phenomenon of degradation of reinforcement become serious. To study the degradation phenomenon of nanoparticle reinforced solder joint, mechanical properties of Sn58Bi, Sn57.6Bi0.4Ag and doped Sn58Bi+0.4Ag were compared during aging. According to the result of ball shear test, the degradation of reinforcement was seriously happened in the doped Sn58Bi+0.4Ag solder joints. Caused by the gathered Ag3Sn IMCs, the doped Sn58Bi+0.4Ag solder joints lost its mechanical advantages after 100h aging, comparing with Sn58Bi and Sn57.6Bi0.4Ag solder joints.
本研究采用机械搅拌法制备掺杂了0.5 wt.%碳纳米管的锡膏,检测了纳米颗粒在锡球中的再分布现象。部分纳米粒子随助焊剂向外流动而严重分离,使相关定量实验失去准确性。一些纳米粒子严重聚集在焊锡球中,对焊点产生不利影响,使补强层的降解现象变得严重。为了研究纳米颗粒增强焊点的退化现象,比较了Sn58Bi、Sn57.6Bi0.4Ag和掺杂Sn58Bi+0.4Ag在时效过程中的力学性能。球剪试验结果表明,掺入Sn58Bi+0.4Ag的焊点出现了严重的补强退化现象。与Sn58Bi和sn576 bi0.4 ag焊点相比,由于Ag3Sn IMCs的聚集,掺杂Sn58Bi+0.4Ag焊点在时效100h后失去了力学优势。
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引用次数: 0
Relationship between bonding conditions and strength for joints using a Au nanoporous sheet 金纳米孔板连接条件与连接强度的关系
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962855
K. Matsunaga, Min-Su Kim, H. Nishikawa, M. Saito, J. Mizuno
As the establishment of high-temperature lead-free solders and other interconnection technologies is an urgent priority in the electronics industry, a strong drive exists to find Pb-free alternatives for high-temperature bonding processes. We propose a no-solvent, no-flux solid-state bonding technique that uses a nanoporous sheet, a process we call nanoporous bonding (NPB). Nanoporous sheets can be made from binary alloys by selective dissolution of one element. In this study, Au nanoporous sheets were fabricated by dealloying a Au-Ag binary alloy with nitric acid. The effects of joining conditions on the shear strength of joints using this sheet were investigated. The joints bonded at 350 °C showed high shear strengths of above 20 MPa. It was found that joining using Au NPB was successfully achieved, and that NPB shows potential as a Pb-free interconnection material for high-temperature electronic applications.
由于建立高温无铅焊料和其他互连技术是电子工业的当务之急,因此寻找高温键合工艺的无铅替代品的强烈动力存在。我们提出了一种使用纳米多孔片的无溶剂、无通量固态键合技术,我们称之为纳米多孔键合(NPB)。通过选择性溶解其中一种元素,可以制备出纳米多孔片。在本研究中,用硝酸将Au- ag二元合金合金化制备了Au纳米孔片。研究了连接条件对接头抗剪强度的影响。在350℃下,接头的抗剪强度达到20 MPa以上。研究发现,使用Au NPB成功地实现了连接,并且NPB显示出作为高温电子应用的无铅互连材料的潜力。
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引用次数: 1
Novel glass welding technique for hermetic encapsulation 新型玻璃焊接密封封装技术
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962719
H. Lundén, T. Kumpulainen, Antti Matanen, J. Vihinen
Conventional glass bonding methods do not fill all the requirements set by the industry. A novel hermetic room temperature glass welding technology was investigated. The aim was to avoid additive materials and multistep manufacturing process as well as minimize the heat affect. However, a good quality hermetic, mechanically sound bond was desired. In this study, a temperature cycling test was performed to glass samples welded with this novel technology. Notable advantages of using the novel welding technology were discovered: resistance of rapid temperature changes, excellent mechanical properties, room temperature welding, and hermetic encapsulation can be achieved. Use of only one material ensures that no problems with different temperature coefficients will be appeared. As a result, a newly develop glass welding technology can offer solution for the novel challenges set by the industry.
传统的玻璃粘接方法不能满足行业设定的所有要求。研究了一种新型的室温密封玻璃焊接工艺。其目的是避免添加材料和多步骤的制造过程,并尽量减少热影响。然而,一个良好的密封,机械健全的键是需要的。在这项研究中,对采用这种新技术焊接的玻璃样品进行了温度循环测试。采用这种新型焊接技术的显著优点是:耐快速温度变化、力学性能优异、可实现室温焊接和密封封装。只使用一种材料,确保不会出现不同温度系数的问题。因此,一项新开发的玻璃焊接技术可以为行业提出的新挑战提供解决方案。
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引用次数: 7
期刊
Proceedings of the 5th Electronics System-integration Technology Conference (ESTC)
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