Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176最新文献
Pub Date : 1998-01-25DOI: 10.1109/MEMSYS.1998.659775
J. Go, Young‐Ho Cho
Anodic bonding quality has been quantitatively evaluated in terms of interfacial fracture toughness. In the theoretical analysis, the interfacial fracture toughness at the interface of an anodically bonded two dissimilar material layers has been analyzed and related with energy release rate. The energy release rate at an anodically bonded silicon-to-glass interface has been investigated for 81 different bonding conditions: three conditions for each of the four parameters, including bonding load, bonding temperature, anodic potential and bonding time. Taguchi method has been used to reduce the number of experiments required for the bonding quality evaluation, thus resulting in 9 experiment cases out of 81 possible cases. Interfacial fracture toughness has been measured from the specially designed blade test specimen, where an 80 /spl mu/m-thick aluminum blade is pre-inserted and bonded between the 535 /spl mu/m-thick silicon plate and the 517 /spl mu/m-thick Pyrex #7740 glass. The process condition, resulting in the maximum energy release rate, has been found. The influence of bonding process conditions on the interfacial fracture toughness has been quantified and discussed. It is found that the bonding temperature is the most dominant factor influencing the anodic bonding strength. Other process parameters, such as bonding load, anodic potential and bonding time, contribute weakly to the bonding strength, although they influence the speed and area of anodic bonding.
{"title":"Experimental evaluation of anodic bonding process using Taguchi method for maximum interfacial fracture toughness","authors":"J. Go, Young‐Ho Cho","doi":"10.1109/MEMSYS.1998.659775","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659775","url":null,"abstract":"Anodic bonding quality has been quantitatively evaluated in terms of interfacial fracture toughness. In the theoretical analysis, the interfacial fracture toughness at the interface of an anodically bonded two dissimilar material layers has been analyzed and related with energy release rate. The energy release rate at an anodically bonded silicon-to-glass interface has been investigated for 81 different bonding conditions: three conditions for each of the four parameters, including bonding load, bonding temperature, anodic potential and bonding time. Taguchi method has been used to reduce the number of experiments required for the bonding quality evaluation, thus resulting in 9 experiment cases out of 81 possible cases. Interfacial fracture toughness has been measured from the specially designed blade test specimen, where an 80 /spl mu/m-thick aluminum blade is pre-inserted and bonded between the 535 /spl mu/m-thick silicon plate and the 517 /spl mu/m-thick Pyrex #7740 glass. The process condition, resulting in the maximum energy release rate, has been found. The influence of bonding process conditions on the interfacial fracture toughness has been quantified and discussed. It is found that the bonding temperature is the most dominant factor influencing the anodic bonding strength. Other process parameters, such as bonding load, anodic potential and bonding time, contribute weakly to the bonding strength, although they influence the speed and area of anodic bonding.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116057227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1998-01-25DOI: 10.1109/MEMSYS.1998.659744
E. Fullin, J. Gobet, H. Tilmans, J. Bergqvist
This paper presents a new technology for the fabrication of electromagnetic micro-actuators. This technology allows "U-core" electromagnets to be built on ferromagnetic substrates. The electromagnets consist of multi-level copper coils and electroplated NiFe poles. Combined with a NiFe "keeper", an electromagnetic actuator is obtained, which can generate a magnetic force up to several tens of mN. The actuator can be implemented in several applications, such as valves, motors and relays. In this paper, an electromagnetic microrelay, to be used, for instance, in the automatic test equipment (ATE) market, is described. First experimental results of the relay, using a driving coil of 127 turns and having gold contacts, have shown an on-resistance of less than 0.4 /spl Omega/ for an input (driving) current of 8 mA, corresponding to a driving power of 14 mW. These data compare favorably well with previous results of electromagnetic microrelays as presented in the literature.
{"title":"A new basic technology for magnetic micro-actuators","authors":"E. Fullin, J. Gobet, H. Tilmans, J. Bergqvist","doi":"10.1109/MEMSYS.1998.659744","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659744","url":null,"abstract":"This paper presents a new technology for the fabrication of electromagnetic micro-actuators. This technology allows \"U-core\" electromagnets to be built on ferromagnetic substrates. The electromagnets consist of multi-level copper coils and electroplated NiFe poles. Combined with a NiFe \"keeper\", an electromagnetic actuator is obtained, which can generate a magnetic force up to several tens of mN. The actuator can be implemented in several applications, such as valves, motors and relays. In this paper, an electromagnetic microrelay, to be used, for instance, in the automatic test equipment (ATE) market, is described. First experimental results of the relay, using a driving coil of 127 turns and having gold contacts, have shown an on-resistance of less than 0.4 /spl Omega/ for an input (driving) current of 8 mA, corresponding to a driving power of 14 mW. These data compare favorably well with previous results of electromagnetic microrelays as presented in the literature.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116792468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1998-01-25DOI: 10.1109/MEMSYS.1998.659771
T. Matsushima, H. Yagyu, Y. Matsumura, M. Ikari, K. Horiuchi
We have successfully developed a high performance LiTaO/sub 3/ microsensor with ideal adiabatic structure. A finite element method (FEM) was employed to design ideal structure with efficient temperature distribution. The FEM was also employed to reduce a stress concentration of the LiTaO/sub 3/ element. Four infrared detector segments were formed in the LiTaO/sub 3/ element. Each segment, with 500 /spl mu/m square, is thermally isolated by an 100 /spl mu/m wide slit penetrated around the segment using a sandblasting technique. The IR sensitivity per unit area of the developed sensor element is twice that of a conventional type element without slits. Furthermore this small sensor element enables to reduce a size of focusing multi-lens to one-fifth as large as that of the conventional multi-lens. The S/N ration of the developed sensor is five times as large as that of the conventional type pyroelectric sensors such as PZT sensor.
{"title":"Ideal adiabatic structure LiTaO/sub 3/ pyroelectric microsensor fabricated by sandblasting technique","authors":"T. Matsushima, H. Yagyu, Y. Matsumura, M. Ikari, K. Horiuchi","doi":"10.1109/MEMSYS.1998.659771","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659771","url":null,"abstract":"We have successfully developed a high performance LiTaO/sub 3/ microsensor with ideal adiabatic structure. A finite element method (FEM) was employed to design ideal structure with efficient temperature distribution. The FEM was also employed to reduce a stress concentration of the LiTaO/sub 3/ element. Four infrared detector segments were formed in the LiTaO/sub 3/ element. Each segment, with 500 /spl mu/m square, is thermally isolated by an 100 /spl mu/m wide slit penetrated around the segment using a sandblasting technique. The IR sensitivity per unit area of the developed sensor element is twice that of a conventional type element without slits. Furthermore this small sensor element enables to reduce a size of focusing multi-lens to one-fifth as large as that of the conventional multi-lens. The S/N ration of the developed sensor is five times as large as that of the conventional type pyroelectric sensors such as PZT sensor.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123088057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1998-01-25DOI: 10.1109/MEMSYS.1998.659813
R. Rossberg, H. Sandmaier, S. Buttgenbach
We are able to present a portable battery powered micro liquid dosing system, which controls the liquid flow from a pressurized reservoir to a capillary output port. The system consists of a capillary buffer volume controlled by a resonant sensor, a micromachined silicon valve driven by a piezoelectrical actuator, an electronic control system comprising of a sensor processing electronics, a DC/DC-converter for controlling the actuator and a pressurized reservoir. Components have been designed, validated each in characteristics and at last been assembled to a complete dosing system. The typical input pressure is in the range of 0 to 0.4 bar, typical flow rates are up to 0.25 mi/min at 0.22 bar.
{"title":"Portable micro liquid dosing system","authors":"R. Rossberg, H. Sandmaier, S. Buttgenbach","doi":"10.1109/MEMSYS.1998.659813","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659813","url":null,"abstract":"We are able to present a portable battery powered micro liquid dosing system, which controls the liquid flow from a pressurized reservoir to a capillary output port. The system consists of a capillary buffer volume controlled by a resonant sensor, a micromachined silicon valve driven by a piezoelectrical actuator, an electronic control system comprising of a sensor processing electronics, a DC/DC-converter for controlling the actuator and a pressurized reservoir. Components have been designed, validated each in characteristics and at last been assembled to a complete dosing system. The typical input pressure is in the range of 0 to 0.4 bar, typical flow rates are up to 0.25 mi/min at 0.22 bar.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"461 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123649561","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1998-01-25DOI: 10.1109/MEMSYS.1998.659832
I. Park, C.W. Lee, H. Jang, Y. Oh, B. Ha
A novel concept surface micromachined silicon accelerometer which has a stiffness tuning capability to improve the sensor resolution is developed. The stiffness of the sensor structure is reduced by providing an electrostatic negative stiffness. By adopting the stiffness tuning, the initially stiff structure guarantees the stability of the fabrication and the reduced stiffness only along the sensing direction produces the improved resolution. In particular, one of the improved structure of this accelerometer is a branched comb-finger that senses the relative position between the mass and the electrode itself. Maintaining the same capacitance variation, it is able to achieve a larger initial gap between the mass and the electrode which fences the clash problem. The accelerometer has an active size of 650/spl times/530 /spl mu/m/sup 2/, a thickness of polysilicon structure of 7 /spl mu/m, and a proof mass of about 1 /spl mu/g. Experimental results shows that the equivalent noise level of the accelerometer is improved by 30 dB through the stiffness tuning. The accelerometer has a bandwidth of 350 Hz, a linearity of 0.3% FS, and a sensing range of 50 g.
{"title":"Capacitive sensing type surface micromachined silicon accelerometer with a stiffness tuning capability","authors":"I. Park, C.W. Lee, H. Jang, Y. Oh, B. Ha","doi":"10.1109/MEMSYS.1998.659832","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659832","url":null,"abstract":"A novel concept surface micromachined silicon accelerometer which has a stiffness tuning capability to improve the sensor resolution is developed. The stiffness of the sensor structure is reduced by providing an electrostatic negative stiffness. By adopting the stiffness tuning, the initially stiff structure guarantees the stability of the fabrication and the reduced stiffness only along the sensing direction produces the improved resolution. In particular, one of the improved structure of this accelerometer is a branched comb-finger that senses the relative position between the mass and the electrode itself. Maintaining the same capacitance variation, it is able to achieve a larger initial gap between the mass and the electrode which fences the clash problem. The accelerometer has an active size of 650/spl times/530 /spl mu/m/sup 2/, a thickness of polysilicon structure of 7 /spl mu/m, and a proof mass of about 1 /spl mu/g. Experimental results shows that the equivalent noise level of the accelerometer is improved by 30 dB through the stiffness tuning. The accelerometer has a bandwidth of 350 Hz, a linearity of 0.3% FS, and a sensing range of 50 g.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128555086","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1998-01-25DOI: 10.1109/MEMSYS.1998.659769
H. Ota, K. Matsukawa, M. Takeda, T. Ohara, H. Narumiya
A hydrodynamic gas bearing able to reduce power losses is selected, and the possibility of reducing its size is examined. The first consideration is how laser-assisted etching can be employed to form spiral grooves on the cylindrical shaft. In a hydrodynamic gas bearing, the shaft and bearing come into contact with each other when the actuator is started and stopped. It is thus necessary to reduce the frictional torque during starting and to ensure a satisfactory level of wear resistance. Next, the grooved shaft surface is modified by ion mixing. Its sliding characteristics are investigated to assess the reduction in friction and improvement in wear resistance. This reveals that it is possible to form a spiral grove 6 /spl mu/m in width and 2 /spl mu/m in depth on a 0.5-mm-diameter shaft, It is also established that, by forming a CrN film on the shaft, it is possible to achieve a friction coefficient of approx. 0.2, representing a satisfactory wear resistance. It is thus concluded that the hydrodynamic gas bearing selected can be used as a micro-actuator component.
{"title":"Fabrication and surface modification process for micro gas bearing","authors":"H. Ota, K. Matsukawa, M. Takeda, T. Ohara, H. Narumiya","doi":"10.1109/MEMSYS.1998.659769","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659769","url":null,"abstract":"A hydrodynamic gas bearing able to reduce power losses is selected, and the possibility of reducing its size is examined. The first consideration is how laser-assisted etching can be employed to form spiral grooves on the cylindrical shaft. In a hydrodynamic gas bearing, the shaft and bearing come into contact with each other when the actuator is started and stopped. It is thus necessary to reduce the frictional torque during starting and to ensure a satisfactory level of wear resistance. Next, the grooved shaft surface is modified by ion mixing. Its sliding characteristics are investigated to assess the reduction in friction and improvement in wear resistance. This reveals that it is possible to form a spiral grove 6 /spl mu/m in width and 2 /spl mu/m in depth on a 0.5-mm-diameter shaft, It is also established that, by forming a CrN film on the shaft, it is possible to achieve a friction coefficient of approx. 0.2, representing a satisfactory wear resistance. It is thus concluded that the hydrodynamic gas bearing selected can be used as a micro-actuator component.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"550 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117051031","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1998-01-25DOI: 10.1109/MEMSYS.1998.659745
S. Sewa, K. Onishi, K. Asaka, N. Fujiwara, K. Oguro
There is considerable present interest in developing mechanochemical materials which use the swelling of ion exchange membranes technologies suitable for the construction of electromechanical actuators of very small dimensions. Both sides of a film of perfluorocarboxylic acid were chemically plated with gold. A pulse voltage of 2.0 V between the gold electrodes on the polymer ribbon gave a quick bend 90 degree angle, 8 mm displacement toward the anode side of the ribbon in water. The displacement performance of this composite is five times larger than that of Nafion-Pt composite. This report describes in detail the remarkably large bending motion polymer-micro-actuator using perfluorocarboxylic acid film and gold plate composite.
{"title":"Polymer actuator driven by ion current at low voltage, applied to catheter system","authors":"S. Sewa, K. Onishi, K. Asaka, N. Fujiwara, K. Oguro","doi":"10.1109/MEMSYS.1998.659745","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659745","url":null,"abstract":"There is considerable present interest in developing mechanochemical materials which use the swelling of ion exchange membranes technologies suitable for the construction of electromechanical actuators of very small dimensions. Both sides of a film of perfluorocarboxylic acid were chemically plated with gold. A pulse voltage of 2.0 V between the gold electrodes on the polymer ribbon gave a quick bend 90 degree angle, 8 mm displacement toward the anode side of the ribbon in water. The displacement performance of this composite is five times larger than that of Nafion-Pt composite. This report describes in detail the remarkably large bending motion polymer-micro-actuator using perfluorocarboxylic acid film and gold plate composite.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125198420","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1998-01-25DOI: 10.1109/MEMSYS.1998.659791
A. Yamamoto, T. Nino, T. Higuchi
A novel electrode design of electrostatic surface drives, which can reduce the drives' force ripple considerably, is described in this paper. Actuators with large travel and highly precise motion control are required for many micro mechanical systems. Electrostatic surface drives are promising, since their structures are very simple and they easily possess large travel. However, surface drives often have large force ripple that prevents precise motion control. To suppress the force ripple, we propose to utilize skew technique for their electrodes. The analytical results show that utilizing the new electrode design can reduce force ripple by 75%, without a remarkable lowering of thrust. Reducing force ripple leads to smooth slider motions, higher driving efficiency, more quietness, and higher controllability which is experimentally confirmed using a newly fabricated prototype drive.
{"title":"High precision electrostatic actuator with novel electrode design","authors":"A. Yamamoto, T. Nino, T. Higuchi","doi":"10.1109/MEMSYS.1998.659791","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659791","url":null,"abstract":"A novel electrode design of electrostatic surface drives, which can reduce the drives' force ripple considerably, is described in this paper. Actuators with large travel and highly precise motion control are required for many micro mechanical systems. Electrostatic surface drives are promising, since their structures are very simple and they easily possess large travel. However, surface drives often have large force ripple that prevents precise motion control. To suppress the force ripple, we propose to utilize skew technique for their electrodes. The analytical results show that utilizing the new electrode design can reduce force ripple by 75%, without a remarkable lowering of thrust. Reducing force ripple leads to smooth slider motions, higher driving efficiency, more quietness, and higher controllability which is experimentally confirmed using a newly fabricated prototype drive.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131312206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1998-01-25DOI: 10.1109/MEMSYS.1998.659802
J.I. Bu, J. Hwang, J.B. Lee, G. Kim, K.Y. Yang, S. Noh
This paper describes design and fabrication of micromachined annular shutter mirror (ASM) for use as an adjusting means of the numerical aperture (NA) in a digital video (or versatile) disk (DVD) pick-up module. The ASM was fabricated using conventional 3 masks process based on surface micromachining technology. Driven by an electrostatic force, it is clearly observed that the ASM can control effective beam spot size. The eye pattern of the readout signal of CD proved that the jitter value is 25 ns. We have demonstrated that the ASM is potentially applicable for a compact disk (CD) compatible DVD player that has a growing popularity in the optical data storage market.
{"title":"Annular shutter mirror for a digital video disk pick-up module","authors":"J.I. Bu, J. Hwang, J.B. Lee, G. Kim, K.Y. Yang, S. Noh","doi":"10.1109/MEMSYS.1998.659802","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659802","url":null,"abstract":"This paper describes design and fabrication of micromachined annular shutter mirror (ASM) for use as an adjusting means of the numerical aperture (NA) in a digital video (or versatile) disk (DVD) pick-up module. The ASM was fabricated using conventional 3 masks process based on surface micromachining technology. Driven by an electrostatic force, it is clearly observed that the ASM can control effective beam spot size. The eye pattern of the readout signal of CD proved that the jitter value is 25 ns. We have demonstrated that the ASM is potentially applicable for a compact disk (CD) compatible DVD player that has a growing popularity in the optical data storage market.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"22 12","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131575606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1998-01-25DOI: 10.1109/MEMSYS.1998.659797
J.J. Tullstall, S. Taylor, R. Syms, T. Tate, M.M. Ahmad
This article considers the design, realisation and initial tests of a quadrupole mass spectrometer with a novel silicon micromachined mass filter. The construction of this device is discussed along with its mounting on a conventional ion source and testing in a vacuum system. Results are presented for the operation of this mass lens including a mass spectrum, and the effect of cage voltage, emission current and pressure on the performance.
{"title":"Silicon micromachined mass filter for a low power, low cost quadrupole mass spectrometer","authors":"J.J. Tullstall, S. Taylor, R. Syms, T. Tate, M.M. Ahmad","doi":"10.1109/MEMSYS.1998.659797","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659797","url":null,"abstract":"This article considers the design, realisation and initial tests of a quadrupole mass spectrometer with a novel silicon micromachined mass filter. The construction of this device is discussed along with its mounting on a conventional ion source and testing in a vacuum system. Results are presented for the operation of this mass lens including a mass spectrum, and the effect of cage voltage, emission current and pressure on the performance.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132743919","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176
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