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Implementing a Tab Tape-based Known Good Die Method 基于标签带的已知好模方法的实现
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753523
M. Salatino, R. Nolan, T. Bishop, C. Bieber
The success of nearly every multichip electronic system depends on the availability of functional, reliable chips. As chip counts in a multichip system increase, this dependency is critical. In most cases, "known good" die (KGD) are not readily available in an unpackaged form. This was a prime consideration in MCC's. Flip Chip Development Project. As part of this project, MCC was chartered with developing a method for high speed test and dynamic burn-in of single, bare IC chips. The method developed can be implemented by bare die users using "off-the-shelf" technology. It can also be implemented by bare chip suppliers without modification to the existing fabrication processes. The heart of this process is a TAB tape-based carrier. TAB tape is used to contact the chip bond pads (without actual metallurgical bonding) at about 10 grams per lead contact force. The chip is clamped to the TAB leads, and held in place so that the tape site (in its JEDEC-standard slide carrier) can be transported, tested, and burned-in just like TAB chip-on-tape. Upon test completion, the chip is removed, and is ready for wire bonding, flip chip attach, etc. The carrier has been characterized with aluminum, gold, and solder-bumped chip bond pads, and is compatible with these pad metallizations. Four re-uses of the carrier through 168 hours/150"C of burn-in have been demonstrated. In this paper, the results of MCC's initial prototype testing are discussed. Data includes contact resistance vs. pressure, chip metallurgy, and time. The cost of this approach is presented for a wide range of production volumes. In addition, preliminary results from beta-site testing (by a bare chip supplier) of this method are presented.
几乎每个多芯片电子系统的成功都依赖于功能可靠的芯片的可用性。随着多芯片系统中芯片数量的增加,这种依赖性是至关重要的。在大多数情况下,“已知好的”模具(KGD)不容易以未包装的形式提供。这是世纪挑战集团的首要考虑因素。倒装芯片开发项目。作为该项目的一部分,中冶集团被授权开发一种高速测试和单个裸IC芯片动态老化的方法。所开发的方法可以由裸模用户使用“现成”技术实现。它也可以由裸片供应商实施,而无需修改现有的制造工艺。这个过程的核心是一个基于TAB磁带的载体。TAB胶带用于接触芯片粘合垫(没有实际的冶金粘合),每铅接触力约为10克。芯片夹在标签引线上,并固定在适当的位置,以便胶带部位(在其jedec标准滑动载体中)可以运输,测试和刻录,就像标签芯片在胶带上一样。测试完成后,芯片被移除,并准备进行导线键合,倒装芯片连接等。载体的特点是具有铝、金和焊接碰撞芯片键合垫,并且与这些垫金属化相兼容。通过168小时/150”C的老化,已经证明了载体的四次重复使用。本文讨论了MCC初始样机试验的结果。数据包括接触电阻与压力、切屑冶金和时间。这种方法的成本适用于各种产量。此外,本文还介绍了该方法(由一家裸片供应商)的beta-site测试的初步结果。
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引用次数: 0
Dual-use Microelectronics Manufacturing Specification for Single and Multichip Packaging Technologies 单芯片和多芯片封装技术的两用微电子制造规范
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753614
M. Gorniak, D.F. Fayette, J. P. Farrell
The reliability of systems and equipment is critical for both customer satisfaction and system supportability. As a technology evolves, it cannot be inserted into new systems without knowledge of the implication it has on reliability. Specifications and standards which support the insertion of new technology must be cost effective, practical and acceptable to vendors and users while assuring quality and reliability. This paper describes the strategy and status of a new initiative to develop an industry microelectronic manufacturing specification, using best commercial practices, for silicon (Si), gallium arsenide (GaAs) and hybrid microcircuits as well as multichip modules (MCMs), including chip-on-board (COB), in hermetic or plastic packaging. The intent is to establish a national (ANSI) specification that has worldwide acceptance similar to that of I S 0 9000 l , and is used by the DoD, NASA and commercial industries (i.e., automotive, telecommunications, medical, computer).
系统和设备的可靠性对客户满意度和系统可支持性都至关重要。随着技术的发展,如果不了解其对可靠性的影响,就不能将其插入新系统。支持新技术插入的规范和标准必须具有成本效益,实用性和可接受的供应商和用户,同时确保质量和可靠性。本文描述了采用最佳商业实践开发工业微电子制造规范的新举措的策略和现状,用于硅(Si),砷化镓(GaAs)和混合微电路以及多芯片模块(mcm),包括片上芯片(COB),密封或塑料包装。其目的是建立一个国家(ANSI)规范,具有世界范围内的接受类似于is9000 l,并被国防部,NASA和商业行业(即,汽车,电信,医疗,计算机)使用。
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引用次数: 1
Implementation of Advanced Micro-Interconnection Technologies on a Thin-Film Multichip Module 先进微互连技术在薄膜多芯片模块上的实现
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753531
M. Interrante, H. Clearfield, K. Beckham, L. Economikos
The performance of multichip modules (MCM's) is ultimately governed by the signal propagation delay between its components. With both increasing 1/0 counts on dice and higher operating frequencies, it is critical to develop fine pitch interconnection techniques. Additionally, as multichip modules gain acceptance in commercial applications, it will be necessary to combine dice obtained from various sources on a single substrate. Such dice may have differing interconnection techniques. As part of ARPA's program for application-specific electronic modules, we have designed and built a thin film substrate that incorporates (solder) flip chip, wirebond, TAB and discrete components. In this abstract, we describe the unique interconnection aspects of the module. This includes the use of lasersonic bonding (LSB) to attach a fine (outer lead bond) pitch TAB die, a simultaneous wire microconnection technique that allows customizing the function of certain features on the module, and a top surface metallurgy compatible with the three most common interconnection technologies.
多芯片模块(MCM)的性能最终取决于其组件之间的信号传播延迟。随着骰子上的1/0计数和更高的工作频率的增加,开发细间距互连技术至关重要。此外,随着多芯片模块在商业应用中获得认可,将有必要在单个基板上组合从各种来源获得的骰子。这些骰子可能有不同的互连技术。作为ARPA特定应用电子模块计划的一部分,我们设计并制造了一种薄膜基板,该基板包含(焊接)倒装芯片,线键,TAB和分立元件。在这个摘要中,我们描述了模块独特的互连方面。这包括使用激光超声键合(LSB)来连接一个精细的(外引线键合)螺距标签模具,一种同步线微连接技术,允许定制模块上某些功能的功能,以及与三种最常见的互连技术兼容的顶部表面冶金。
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引用次数: 0
Applications of Latent Open Test 潜在开放试验的应用
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753552
L. Economikos, S. Chiang, A. Halperin
As metal interconnections in multichip modules (MCM) are getting narrower and thinner, latent open defects such as notches, nicks, weak connections, etc., will have a greater chance to occur under normal manufacturing processes. We have applied a phase-sensitive nonlinearity detection technique to detect such latent open defects in MCM-D and MCM-C substrates. Use of this technique for qualifying opens repair techniques and wire bonding process control is reported.
随着多芯片模块(MCM)中的金属互连变得越来越窄和薄,在正常的制造过程中,潜在的开放缺陷(如缺口、刻痕、弱连接等)将更有可能发生。我们已经应用相敏非线性检测技术来检测MCM-D和MCM-C衬底的潜在开放缺陷。报道了该技术在开口修补技术和焊线工艺控制中的应用。
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引用次数: 1
A Twenty-Seven Chip MCM-C 一个二十七芯片MCM-C
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753609
R. Amerson, P. Kuekes
As systems become larger with more chips, multichip modules are an attractive alternative to single chip modules on printed circuit boards for achieving high density systems. Using low density design rules necessary for especially large modules presents significant challenges to achieving high density interconnect. A module with twenty-seven large chips is described with particular emphasis on the methods used to achieve extremely high density.
随着系统变得更大,更多的芯片,多芯片模块是一个有吸引力的替代单芯片模块在印刷电路板上实现高密度系统。对于特别大的模块,使用必要的低密度设计规则对实现高密度互连提出了重大挑战。描述了一个包含27个大芯片的模块,特别强调了实现极高密度的方法。
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引用次数: 3
Mixed-Signal Mcm-L Design Using a Global Positioning System (gps) Receiver as an Example 以全球定位系统(gps)接收机为例的混合信号Mcm-L设计
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753544
P. Zabinski, B. Gilbert, P. J. Zucarelli, D. Weninger, T. Keller
Under an Advanced Research Projects Agency program (NRaD contract N66001-89-C-0104), the Special Purpose Processor Development Group, Mayo Foundation and the Government and Systems Technology Group, Motorola, have developed a fully functional Global Positioning System (GPS) receiver using Laminated Multichip Modules (MCM-Ls) fabricated by Acsist Associates. Though the many facets of GPS are of interest in themselves, this paper will use this particular module design as an example of a more generic mixed-signal (i.e., containing both analog and digital electronic elements) system, concentrating on the design, assembly, and test aspects related to typical mixed-signal MCM problems. Topics include system requirements, design constraints, substrate selection and description, design approach, assembly, and test.
根据一项高级研究计划局计划(NRaD合同N66001-89-C-0104),特殊用途处理器开发组、梅奥基金会、摩托罗拉政府和系统技术集团已经开发了一种全功能的全球定位系统(GPS)接收器,该接收器使用Acsist Associates制造的层压多芯片模块(MCM-Ls)。虽然GPS的许多方面本身都很有趣,但本文将使用这种特殊的模块设计作为更通用的混合信号(即包含模拟和数字电子元件)系统的示例,重点关注与典型混合信号MCM问题相关的设计,组装和测试方面。主题包括系统需求、设计约束、基板选择和描述、设计方法、组装和测试。
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引用次数: 1
On Wafer Burn-in Strategies for MCM Die MCM模具晶圆磨损策略研究
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753559
A. Singh
The high cost associated with replacing faulty die in many MCM technologies suggests that die used in their manufacture be known to be good with high confidence. This requires some burn-in of the die since significant "infant mortality" failures are observed for semiconductor parts. Burn-in generally involves mounting the die on temporary die carriers so that signals can be applied to activate the circuits. In this paper we present a more efficient strategy that allows the burn-in of the die on the wafer before they are diced. Our proposed approach requires that power, ground and clock connections to each die be fabricated on the wafer so that all the circuits can be powered up and clocked using only a few probe connects to the wafer. These extra connections use the space between die, and are lost once the wafer is diced into individual circuits. During burn-in, the circuits are activated in the built-in self test (BIST) mode. Here inputs to subcircuits within each die is provided by linear feedback shift registers. Power dissipation and thermal stress during burn-in is managed by controlling the air flow over the wafer surface and by appropriate selection of the thermal conduction properties of the temporary wafer carrier system employed. It is also possible to selectively power up subsets of the die to manage power dissipation. Wafer level burn-in promises to be a cost effective approach for delivering known good die.
在许多MCM技术中,更换有缺陷的模具的高成本表明,在其制造中使用的模具被认为是高可靠性的。这需要一些烧进的模具,因为显著的“婴儿死亡率”失效被观察到半导体零件。烧坏通常涉及到将芯片安装在临时的芯片载体上,以便可以应用信号来激活电路。在本文中,我们提出了一种更有效的策略,允许在晶圆片上的晶圆片在他们被切成小块之前的烧蚀。我们提出的方法要求在晶圆上制造每个芯片的电源,接地和时钟连接,以便所有电路都可以上电和时钟,只需使用几个探针连接到晶圆上。这些额外的连接使用了芯片之间的空间,一旦晶圆被切成单独的电路就会丢失。在老化期间,电路在内置自检(BIST)模式下被激活。在这里,每个芯片内的子电路的输入由线性反馈移位寄存器提供。通过控制晶圆片表面的气流和适当选择所采用的临时晶圆载体系统的热传导特性,可以控制功耗和老化过程中的热应力。也可以有选择地为模具的子集上电以管理功耗。晶圆级老化有望成为交付已知优质模具的一种经济有效的方法。
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引用次数: 1
Mcm Substrate with High Capacitance 高电容的Mcm衬底
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753542
R. Kambe, R. Imai, T. Takada, M. Arakawa, M. Kuroda
It is well established that thin film capacitors have good electrical characteristics and for that reason are often used in high frequency applications. Unfortunately, it is also very difficult to form thin film capacitors on the relatively rough surface of cofired ceramics. We have investigated planarization of bottom capacitive electrodes which must make direct contact with a cofired ceramic surface, and adjustment and control of the T.C.E. difference between high dielectric constant material and the bass MCM ceramic substrate. Combining thin film capacitors with MCM substrates can result in high frequency decoupling capacitors (with 100X the capacitance of comparable cofired thin layer alumina constructions); space saving, and significant improvements in performance over conventional discrete chip capacitors.
众所周知,薄膜电容器具有良好的电特性,因此常用于高频应用。不幸的是,在相对粗糙的共烧陶瓷表面上形成薄膜电容器也是非常困难的。我们研究了必须与共烧陶瓷表面直接接触的底部电容电极的平面化,以及高介电常数材料与低MCM陶瓷衬底之间的T.C.E.差的调节和控制。将薄膜电容器与MCM衬底相结合可以产生高频去耦电容器(具有可比共烧薄层氧化铝结构的100倍电容);节省空间,并显著提高性能优于传统的分立芯片电容器。
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引用次数: 17
3-D Multichip Packaging for Memory Modules 存储模块的3-D多芯片封装
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753592
R. Crowley, E. J. Vardaman
High density memory packaging is important for high performance computing systems and for small size memory systems. Smaller single chip packages as well as multichip packages have been developed for these applications. Three-dimensional (3-D) packaging is another technique that provides size and performance benefits. Memory chips are well suited to 3-D stacking techniques due to the relatively low number of I/O terminals, the ability to share many common signal lines, and low power dissipation. This paper presents an analysis of recent worldwide developments in 3-D multichip packaging for memory modules, including analyses of assembly processes and vertical interconnection.
高密度存储器封装对于高性能计算系统和小尺寸存储器系统非常重要。较小的单芯片封装以及多芯片封装已经为这些应用开发。三维(3-D)封装是另一种提供尺寸和性能优势的技术。由于相对较少的I/O终端数量、共享许多公共信号线的能力和低功耗,存储芯片非常适合3-D堆叠技术。本文分析了最近世界范围内用于存储模块的三维多芯片封装的发展,包括组装过程和垂直互连的分析。
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引用次数: 4
A High-Performance Second-Generation Sparc Mcm 高性能第二代Sparc Mcm
Pub Date : 1994-04-13 DOI: 10.1109/ICMCM.1994.753568
D. Tuckerman, D. Benson, H. Moore, J. Horner, J. Gibbons
ROSS Technology, Inc., and nCHIP, Inc., have successfully produced a second-generation SPARC processor multichip module (MCM). Based on ROSS's hyperSPARC/sup TM/ architecture, the module sets a new standard for performance in the SPARC marketplace. The MCM is packaged in a 45mm-square 256-lead, ceramic quad flatpack carrier, and is footprint-compatible with ROSS' current SPARC MCM, the CYM6111. However, the new module runs at clock speeds in excess of 80 MHz, more than twice that of the CYM6111, and will offer 3-5 times the performance in most applications. The full module contains six CMOS chips: a CPU containing both integer and floating point ALUs, a cache controller/memory management unit, and four cache RAM chips. Each chip uses both 3.3 and 5.0 volt power supplies, so the MCM substrate incorporates a split power plane. The chips are interconnected using nCHIP's nC1000 substrate technology which incorporates aluminum interconnect, SiO/sub 2/ dielectric, and an integral decoupling capacitor. ROSS's multichip design strategy does not depend on massive integration or complex fabrication processes; similarly, the nCHIP nC1000 substrate process is based on a robust, IC-like technology. This combination provides excellent manufacturability and allows a fast production ramp into high volume.
ROSS科技公司和nCHIP公司成功生产了第二代SPARC处理器多芯片模块(MCM)。该模块基于ROSS的hyperSPARC/sup TM/架构,为SPARC市场的性能设定了新的标准。MCM封装在一个45mm平方的256引线陶瓷四平面包装载体中,与ROSS目前的SPARC MCM CYM6111兼容。然而,新模块的时钟速度超过80 MHz,是CYM6111的两倍多,并且在大多数应用中提供3-5倍的性能。整个模块包含六个CMOS芯片:一个包含整数和浮点alu的CPU,一个缓存控制器/内存管理单元,以及四个缓存RAM芯片。每个芯片都使用3.3伏和5.0伏电源,因此MCM基板包含一个分离的电源平面。这些芯片采用nCHIP的nC1000衬底技术互连,该技术集成了铝互连,SiO/sub 2/介电和集成去耦电容器。ROSS的多芯片设计策略不依赖于大规模集成或复杂的制造工艺;同样,nCHIP nC1000基板工艺基于强大的类似ic的技术。这种组合提供了出色的可制造性,并允许快速生产进入大批量。
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引用次数: 6
期刊
Proceedings of the International Conference on Multichip Modules
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