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2008 58th Electronic Components and Technology Conference最新文献

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Observations of the spontaneous growth of tin whiskers in various reliability conditions 不同可靠性条件下锡晶须自发生长的观察
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550172
Sungwon Han, Kyung-Seob Kim, Chung-Hee Yu, M. Osterman, M. Pecht
This study evaluated the growth of tin whiskers on tin plated alloy 42 lead-frames and copper lead-frames stored in ambient conditions for 4 years, samples stored in ambient conditions after a post-bake treatment, and stored at 55plusmn1degC/85plusmn3% conditions for 3000 hours. Analysis was conducted to investigate the propensity and the mechanisms of growth.
本研究考察了镀锡合金42铅架和铜铅架在常温条件下保存4年、样品经烘烤后在常温条件下保存、样品在55plusmn1degC/85plusmn3%条件下保存3000小时的锡须生长情况。对其生长倾向和生长机制进行了分析。
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引用次数: 10
Free-standing, parylene-sealed copper interconnect for stretchable silicon electronics 用于可拉伸硅电子器件的独立对二甲苯密封铜互连器件
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550149
S. Sosin, T. Zoumpoulidis, M. Bartek, L. Wang, R. Dekker, K. Jansen, L. Ernst
In this paper, development and characterization of a freestanding electroplated copper interconnect for applications in flexible and stretchable electronics is presented. The copper layer with typical thickness of 5 mum is plated into a photoresist mould realizing meander and mesh-like patterns. These are subsequently released resulting in a free-standing electrical interconnect that is optionally conformally coated by a ~8 mum thick Parylene N layer. Parylene sealing provides electrical insulation and increases rigidity of the structures. Tensile tests on fabricated samples have shown the elongation capability up to 300% for the mesh design and more than 1000% for the meander design. The Parylene coated samples showed increased rigidity but about 50% reduced elongation. Furthermore, parameterized FEM simulations were performed in order to estimate stress levels for different geometries under tensile stress.
本文介绍了用于柔性和可拉伸电子产品的独立电镀铜互连器件的开发和特性分析。典型厚度为 5 微米的铜层被电镀到光刻胶模具中,形成蜿蜒曲折的网状图案。随后,这些图案被释放,形成一个独立的电气互连器件,该器件可选择使用约 8 微米厚的聚对二甲苯(Parylene)N 层进行保形涂层。聚对二甲苯密封层可提供电绝缘,并提高结构的刚性。对制作的样品进行的拉伸测试表明,网状设计的伸长率高达 300%,蜿蜒设计的伸长率超过 1000%。聚对二甲苯涂层样品的刚度有所提高,但伸长率降低了约 50%。此外,还进行了参数化有限元模拟,以估算不同几何形状在拉伸应力下的应力水平。
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引用次数: 8
Assessment of a lasersingulation process for Si-wafers with metallized back side and small die size 背面金属化硅片及小尺寸硅片的激光模拟工艺评估
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550178
H. Theuss, A. Koller, W. Kroninger, S. Schoenfelder, M. Petzold
We report on the development of a "dry" lasersingulation process for Si-wafers with back side metallization targeting small die sizes below 0.07 mm2. The dicing technology aims at improved manufacturing of diodes with thicknesses ranging from approx. 100 mum to 150 mum, die sizes down to 230 times 230 mum2 and metallized back side metallization layers used for solder die attach. We discuss the impact of the laser process on subsequent assembly processes as well as on the die itself. Particular emphasis is set on the laser induced modification of the mechanical properties within the wafer, e. g. the reduction of the die strength. For the wafer technology under evaluation, the laser process is considered to be superior to standard blade dicing approaches.
我们报告了一种针对硅片背面金属化的“干”激光模拟工艺的发展,目标是小于0.07 mm2的小模具尺寸。该切割技术旨在改进二极管的制造,其厚度范围从大约。100mm2至150mm2,模具尺寸小于230 × 230 mm2,背面金属化层用于焊料模具连接。我们讨论了激光工艺对后续装配工艺以及对模具本身的影响。特别强调的是激光对晶圆片内机械性能的改变,例如降低模具强度。对于所评估的晶圆技术,激光工艺被认为优于标准刀片切割方法。
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引用次数: 2
Antenna integration with laser diodes and photodetectors for a miniaturized dual-mode wireless transceiver 天线集成激光二极管和光电探测器的小型化双模无线收发器
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550235
J. Liao, Shengling Deng, K. Connor, V. Joyner, Z.R. Huang
In this paper, a dual split director quasi-yagi antenna is introduced for RF/FSO integration. Bare die laser diodes and photodetectors are assembled on the antenna directors on the duroid substrate. Coupling between RF and optical dual mode wireless communication system is analyzed.
本文介绍了一种用于射频/FSO集成的双分裂定向准八木天线。裸模激光二极管和光电探测器组装在二极管衬底上的天线导向上。分析了射频与光双模无线通信系统之间的耦合关系。
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引用次数: 3
LC-based WiFi and WiMAX Baluns embedded in a multilayer organic flip-chip ball grid array (FCBGA) package substrate 基于lc的WiFi和WiMAX balun嵌入多层有机倒装芯片球栅阵列(FCBGA)封装基板
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4549965
E. Davies-venn, T. Kamgaing
Two lumped element baluns designed using embedded inductors and capacitors are discussed in this paper. The structures designed for WiFi and mobile WiMAX applications have very small form-factors with surface area of 3 mm2 or less making them ideal for portable wireless communication devices such as mobile internet devices and ultra-mobile personal computers. The baluns, fabricated as part of a multi-layer FCBGA package substrate, also display very good electrical performance. The measured insertion loss and phase imbalances were lower than -0.85 dB and 3 degrees respectively for some implementations.
本文讨论了两种采用嵌入式电感和电容器设计的集总元件平衡器。为WiFi和移动WiMAX应用设计的结构具有非常小的形状因素,表面积为3mm2或更小,使其成为便携式无线通信设备(如移动互联网设备和超移动个人电脑)的理想选择。作为多层FCBGA封装基板的一部分制造的平衡器也显示出非常好的电气性能。在一些实现中,测量到的插入损耗和相位不平衡分别低于-0.85 dB和3度。
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引用次数: 7
Through silicon via technology — processes and reliability for wafer-level 3D system integration 通过硅通孔技术-工艺和可靠性为晶圆级3D系统集成
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550074
P. Ramm, M. J. Wolf, A. Klumpp, R. Wieland, Bernhard Wunderle, Bruno Michel, Herbert Reichl
3D integration is a rapidly growing topic in the semiconductor industry that encompasses different types of technologies. The paper addresses one of the most promising technologies which uses through silicon vias (TSV) for interconnecting stacked devices on wafer-level to perform high density interconnects with a good electrical performance at the smallest form factor for 3D architectures. Fraunhofer IZM developed a post frontend 3D integration process, the so- called ICV-SLID technology based on metal bonding using solid-liquid-interdiffusion (SLID) soldering. The SLID metal system provides the mechanical and the electrical connection, both in one single step. The ICV-SLID fabrication process is well suited for the cost-effective production of both, high- performance applications (e.g. 3D microprocessor) and highly miniaturized multi-functional systems. The latter preferably in combination with wafer-level die stacking, as e.g. Thin Chip Integration (TCI) or SnAg-microbump technologies. The fabrication of distributed wireless sensor systems (e. g. e-CUBESreg) is a typical example for the need of such mixed approaches.
3D集成是半导体行业中一个快速发展的话题,它涵盖了不同类型的技术。本文讨论了一种最有前途的技术,即通过硅通孔(TSV)在晶圆级上互连堆叠器件,以最小的外形尺寸实现高密度互连,并具有良好的电气性能。Fraunhofer IZM开发了一种前端3D集成工艺,即所谓的icv - slide技术,该技术基于使用固液互扩散(slide)焊接的金属键合。滑动金属系统提供机械和电气连接,两者都在一个步骤中。icv - glide制造工艺非常适合高性能应用(例如3D微处理器)和高度小型化多功能系统的经济高效生产。后者最好与晶圆级芯片堆叠相结合,例如薄芯片集成(TCI)或SnAg-microbump技术。分布式无线传感器系统(如e- cubesregg)的制造是需要这种混合方法的典型例子。
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引用次数: 100
Optimizing Au and In micro-bumping for 3D chip stacking 优化Au和In微碰撞三维芯片堆叠
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550255
W. Zhang, A. Matin, E. Beyne, W. Ruythooren
3D chip stacking technology requires repeated stacking of additional layers without remelting the bumps at lower levels of the stack. This can be achieved by transient liquid phase (TLP) bonding during which all solder is transformed into intermetallic compounds that have higher melting points than the solder itself. In this paper, we study Au/In reaction at different temperatures in order to develop a robust low temperature Au/In TLP bonding process. It is shown that the kinetics of intermetallic compound formation is diffusion-controlled, and the activation energy of Au/In reaction is temperature-dependent: 0.46 and 0.23 eV for temperatures above and below 150degC, respectively. Moreover, a thin Ti layer between Au and In is found to be an effective diffusion barrier at low temperature, while it does not inhibit intermetallic joint formation at elevated temperatures during flip-chip bonding. This allows us to control the intermetallic formation during the distinct stages of TLP bonding process. In addition, a minimal In thickness of 0.5 mum is required in order to enable TLP bonding. Finally, Au/In TLP joints of phi40 to phi60 mum are successfully fabricated at 180degC and with very small solder volume (1 mum thick). The shear strength of our phi40-60 mum joints is in the range of 6-20 MPa, and the electrical connection yield is 100% for the daisy chain containing 1380 bumps with a diameter of 60 mum.
3D芯片堆叠技术需要重复堆叠额外的层,而不会重新熔化堆栈较低水平的凸起。这可以通过瞬态液相(TLP)键合来实现,在此过程中,所有焊料都转化为具有比焊料本身更高熔点的金属间化合物。本文研究了Au/In在不同温度下的反应,以开发一种可靠的低温Au/In TLP键合工艺。结果表明,金属间化合物的形成动力学受扩散控制,Au/In反应的活化能与温度有关:在150℃以上和150℃以下,Au/In反应的活化能分别为0.46和0.23 eV。此外,在Au和In之间的薄Ti层在低温下是有效的扩散屏障,而在倒装晶片键合过程中,它不会抑制高温下金属间连接的形成。这使我们能够在TLP键合过程的不同阶段控制金属间化合物的形成。此外,为了实现TLP键合,最小厚度要求为0.5 mm。最后,在180℃的温度下成功制备了phi40至phi60 mum的Au/In TLP接头,并且焊料体积非常小(1 mum厚)。我们的phi40-60菊花接头的抗剪强度在6-20 MPa范围内,对于含有1380个直径为60妈妈的凸起的菊花链,电气连接率为100%。
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引用次数: 11
Comparison and analysis of integrated passive device technologies for wireless radio frequency module 无线射频模块集成无源器件技术的比较与分析
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550046
A. Kundu, M. Megahed, D. Schmidt
We have investigated the existing integrated passive device (IPD) technologies for cost effective IPD solutions for discrete radio frequency (RF) module. Based upon the investigation in terms of cost, size, performance & technology maturity, it comes out that silicon, glass & LTCC are the suitable technologies. We have designed IPDs using these technologies having same foot print to satisfy Intel Wi-MAX specs. Have taped out, validated the samples and made an electrical performance and cost comparison among three technologies. Result shows that Si_IPD & Glass_IPD both have well enough electrical performance required for Wi_MAX solution at lower cost and equivalent size compared to LTCC.
我们研究了现有的集成无源器件(IPD)技术,为离散射频(RF)模块提供具有成本效益的IPD解决方案。通过对成本、尺寸、性能和技术成熟度的考察,得出硅、玻璃和LTCC是合适的技术。我们使用这些技术设计了ipd,具有相同的占地面积,以满足英特尔Wi-MAX规格。对样品进行了粘贴、验证,并对三种技术的电性能和成本进行了比较。结果表明,Si_IPD和Glass_IPD都具有较低成本和同等尺寸的Wi_MAX解决方案所需的足够好的电性能。
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引用次数: 28
Impact of system level thermal solution on the interconnect reliability of high performance and high heat dissipating CSP package 系统级散热解决方案对高性能高散热CSP封装互连可靠性的影响
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4549993
M. Ahmad, K.C. Liu, C.J. Lee, J. Priest, S. Pak, S. Narasimhan, M. Nagar, J. Xue
A custom SRAM was developed for high performance and high reliability network switching applications using 90 nm low-k silicon technology. It is a 13.6 mm x 18.4 mm flip chip chip scale package (CSP) with a 11.12 mm x 16.36 mm die. The package has 838 BGA balls at 0.5 mm pitch. The 0.5 mm ball pitch CSP minimizes electrical package parasitics and enables higher data rate performance. However, the high aspect ratio of the die-to-package area leaves very little room for underfill dispensing and no room for a stiffener ring attachment. In addition, the high heat dissipation of the device requires the use of a metal heatspreader flip chip package as opposed to an overmolded flip chip package solution. The package design coupled with a large die and high I/O count presents significant challenges in the package assembly process and interconnect reliability. A lower glass transition (Tg) underfill material is typically preferred to reduce package warpage and to reduce the stress in the low-k dielectric caused by CTE mismatch between the silicon die and package materials. However, for high power applications where the operating temperature is very close to the underfill Tg, the system level thermal solution must be optimized for improved cooling while at the same time ensuring that the interconnect and package reliability at the system application level is not compromised. In this paper, both Experimental and Finite Element analyses were performed to investigate the key system level thermal solution design parameters that impact package interconnect reliability. The effect of heatsink compressive loading on the thermal excursions, the underfill material, and the interconnect metallurgy was evaluated. In addition to the compressive loading effect, the effect of the heatsink attachment method on interconnect reliability was also investigated. Three dimensional fatigue analyses were performed to derive the hysteresis loops for different test cases, to understand the interaction between the heatsink attachment method and the package material and design variables. The finite element model data was benchmarked against experimental data to determine the optimal design conditions for effective thermal cooling without compromising interconnect reliability. Real time pressure measurement and failure analysis were also performed to understand the potential failure modes and failure rates occurring in the system level design. Finally, recommendations are provided on ways to mitigate critical failure modes in the thermal and interconnect design of such complex flip chip CSP packages at the system level.
采用90nm低k硅技术,为高性能和高可靠性网络交换应用开发了定制SRAM。它是一个13.6毫米x 18.4毫米倒装芯片芯片规模封装(CSP)与11.12毫米x 16.36毫米的芯片。封装有838个0.5毫米间距的BGA球。0.5 mm球距CSP最大限度地减少了电气封装的寄生,并实现了更高的数据速率性能。然而,高宽高比的模具包装区域留下很少的空间下填充点胶和没有空间加强环附件。此外,器件的高散热要求使用金属散热器倒装芯片封装,而不是复模倒装芯片封装解决方案。封装设计加上大芯片和高I/O数,在封装组装过程和互连可靠性方面提出了重大挑战。较低的玻璃化转变(Tg)下填充材料通常是首选的,以减少封装翘曲和减少低k介电中的应力,这是由硅芯片和封装材料之间的CTE不匹配引起的。然而,对于工作温度非常接近下填Tg的高功率应用,系统级热解决方案必须进行优化,以改善冷却,同时确保系统应用级的互连和封装可靠性不受影响。本文通过实验和有限元分析来研究影响封装互连可靠性的关键系统级热解决方案设计参数。评价了热沉压缩载荷对热漂移、下填料和互连材料的影响。除了压缩载荷效应外,还研究了散热器连接方式对互连可靠性的影响。通过三维疲劳分析,得出了不同测试用例下的滞回线,了解了散热器附着方式与封装材料和设计变量之间的相互作用。将有限元模型数据与实验数据进行基准比对,以确定在不影响互连可靠性的情况下实现有效热冷却的最佳设计条件。同时进行实时压力测量和故障分析,以了解系统级设计中潜在的故障模式和故障率。最后,提出了在系统级上减轻此类复杂倒装CSP封装的热和互连设计中的关键失效模式的方法。
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引用次数: 3
Highly reliable multi stripe laser diodes 高可靠的多条纹激光二极管
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550101
E. Wolak, K. Kuppuswamy, J. Harrison, Xu Jin, Hanxuan Li, B. Fidric, R. Miller, P. Cross, T. Towe, T. Truchan, Hoa Nguyen, C. Edirisinghe
This paper describes reliability data for multi-stripe arrays of laser diodes with limited emitter count. The empirical behavior of these arrays is compared with a model based on independent random failures of the individual stripes in a multi-element array operating in an ensemble mode. Such reliability data is of particular interest for multi-mode multi- stripe laser pump modules operating in the 910 nm to 990 nm wavelength range.
本文描述了限制发射极数的激光二极管多条纹阵列的可靠性数据。将这些阵列的经验行为与基于集成模式下多单元阵列中单个条纹独立随机失效的模型进行了比较。这样的可靠性数据是特别感兴趣的多模多条纹激光泵浦模块在910纳米至990纳米波长范围内工作。
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引用次数: 0
期刊
2008 58th Electronic Components and Technology Conference
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