Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607802
A. Nichol, G. Barbastathis
We present experimental results indicating fine alignment of stacked nanopatterned silicon nitride membranes to better than 30 nm. The initial coarse alignment via membrane folding was 2 mum, which gives a coarse-to-fine alignment improvement of more than 60times. Alignment was achieved by using the attractive force between arrays of nanomagnets patterned on the membranes before folding. Optical gratings and circular voids forming a 3D photonic crystal-like structure were patterned before membrane release and self-aligned after folding. Alignment performance was maintained during multiple folding and unfolding operations.
{"title":"Sub-30nm alignment accuracy between layered photonic nanostructures using optimized nanomagnet arrays","authors":"A. Nichol, G. Barbastathis","doi":"10.1109/OMEMS.2008.4607802","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607802","url":null,"abstract":"We present experimental results indicating fine alignment of stacked nanopatterned silicon nitride membranes to better than 30 nm. The initial coarse alignment via membrane folding was 2 mum, which gives a coarse-to-fine alignment improvement of more than 60times. Alignment was achieved by using the attractive force between arrays of nanomagnets patterned on the membranes before folding. Optical gratings and circular voids forming a 3D photonic crystal-like structure were patterned before membrane release and self-aligned after folding. Alignment performance was maintained during multiple folding and unfolding operations.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128964078","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607887
A. Gawarikar, R. Shea, A. Mehdaoui, J. Talghader
Radiation heat transfer limited thermal conductance represents the ultimate lower limit of the thermal isolation achievable in a microbolometer. A microbolometer structure with radiation limited thermal conductance has been fabricated and its operation demonstrated.
{"title":"Radiation heat transfer dominated microbolometers","authors":"A. Gawarikar, R. Shea, A. Mehdaoui, J. Talghader","doi":"10.1109/OMEMS.2008.4607887","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607887","url":null,"abstract":"Radiation heat transfer limited thermal conductance represents the ultimate lower limit of the thermal isolation achievable in a microbolometer. A microbolometer structure with radiation limited thermal conductance has been fabricated and its operation demonstrated.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"16 3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133506745","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607812
Suhyun Kim, Doo-Gun Kim, N. Dagli, Youngchul Chung, Y. Byun
Coupled-ring reflector laser diodes composed of squared ring waveguides are fabricated and it is demonstrated that the laser diodes exhibit single mode operation and 15 nm tuning range with SMSR exceeding 25 dB.
{"title":"Coupled-ring reflector laser diodes composed of squared ring waveguides","authors":"Suhyun Kim, Doo-Gun Kim, N. Dagli, Youngchul Chung, Y. Byun","doi":"10.1109/OMEMS.2008.4607812","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607812","url":null,"abstract":"Coupled-ring reflector laser diodes composed of squared ring waveguides are fabricated and it is demonstrated that the laser diodes exhibit single mode operation and 15 nm tuning range with SMSR exceeding 25 dB.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131680136","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607823
B. Cunningham
Summarizes the development of tunable photonic crystal structures for a variety of applications within the Nano Sensors Group at the University of Illinois. The author focuses on the design, fabrication, and application of large, plastic-based photonic crystal slabs for label-free biosensing, fluorescence enhancement, mechanical strain sensors, and tunable reflectors for laser modulation.
{"title":"Photonic crystal biosensors and tunable resonant optical devices","authors":"B. Cunningham","doi":"10.1109/OMEMS.2008.4607823","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607823","url":null,"abstract":"Summarizes the development of tunable photonic crystal structures for a variety of applications within the Nano Sensors Group at the University of Illinois. The author focuses on the design, fabrication, and application of large, plastic-based photonic crystal slabs for label-free biosensing, fluorescence enhancement, mechanical strain sensors, and tunable reflectors for laser modulation.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"106 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133127422","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607844
R. Hokari, K. Hane
We propose a method to generate a pure parabolic surface of varifocal micromirror by applying a bending moment to the circumference of the micromirror. Pure paraboloid can focus light without aberration a one of the ideal mirror surfaces. In the conventional method, varifocal mirror generates an approximate spherical surface or a paraboloid-like surface by applying a distributed load to the central part of the mirror with parallel plate electrodes. In this study, the micromirror is deformed only by applying a bending moment to the circumference of the mirror in order to generate an ideal paraboloid. The proposed mirror was fabricated from SOI wafer. The deviation of the varifocal mirror from the ideal paraboloid was measured to be smaller than 5 nm for the 400 mum diameter mirror with the focal lengths from the infinity to 24 mm at the voltages from 0 to 215 V.
{"title":"A varifocal micromirror with pure parabolic surface using bending moment drive","authors":"R. Hokari, K. Hane","doi":"10.1109/OMEMS.2008.4607844","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607844","url":null,"abstract":"We propose a method to generate a pure parabolic surface of varifocal micromirror by applying a bending moment to the circumference of the micromirror. Pure paraboloid can focus light without aberration a one of the ideal mirror surfaces. In the conventional method, varifocal mirror generates an approximate spherical surface or a paraboloid-like surface by applying a distributed load to the central part of the mirror with parallel plate electrodes. In this study, the micromirror is deformed only by applying a bending moment to the circumference of the mirror in order to generate an ideal paraboloid. The proposed mirror was fabricated from SOI wafer. The deviation of the varifocal mirror from the ideal paraboloid was measured to be smaller than 5 nm for the 400 mum diameter mirror with the focal lengths from the infinity to 24 mm at the voltages from 0 to 215 V.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114455214","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607858
M. Sasaki, M. Fujishima, K. Hane, H. Miura
The micromirror with the tense thin film torsion bar can realize the low-voltage driving. The temperature characteristic is improved using polycrystalline (poly-) Si thin film taking advantage of the following features. The large tensile stress is obtained by the crystallization of amorphous (a-) Si film. The doping realizes the electrical connection. The poly-Si has the almost same coefficient of thermal expansion (CTE) with that of Si substrate.
{"title":"Stabilization of temperature characteristics of micromirror for low-voltage driving using thin film torsion bar of tensile poly-Si","authors":"M. Sasaki, M. Fujishima, K. Hane, H. Miura","doi":"10.1109/OMEMS.2008.4607858","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607858","url":null,"abstract":"The micromirror with the tense thin film torsion bar can realize the low-voltage driving. The temperature characteristic is improved using polycrystalline (poly-) Si thin film taking advantage of the following features. The large tensile stress is obtained by the crystallization of amorphous (a-) Si film. The doping realizes the electrical connection. The poly-Si has the almost same coefficient of thermal expansion (CTE) with that of Si substrate.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114620030","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607874
C. Hsu, Wen-Chien Chen, Tsung-Lin Tang, M. Yip, W. Fang
A simple 2-mask process to realize a two-axis micro scanning mirror is presented. The scanning mirror is made of single-crystal-silicon, and Ni is electroplated at the backside of scanner to induce the magnetostatic driving force.
{"title":"The two-axis magnetostatic-drive single-crystal-Si micro scanner driven by back-side electroplating Ni film","authors":"C. Hsu, Wen-Chien Chen, Tsung-Lin Tang, M. Yip, W. Fang","doi":"10.1109/OMEMS.2008.4607874","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607874","url":null,"abstract":"A simple 2-mask process to realize a two-axis micro scanning mirror is presented. The scanning mirror is made of single-crystal-silicon, and Ni is electroplated at the backside of scanner to induce the magnetostatic driving force.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130556638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607820
K. Aljasem, A. Seifert, H. Zappe
A pneumatically actuated tunable liquid micro-lens is developed for integration in an endoscopic optical coherence tomography (OCT) system allowing dynamic focusing along the scan depth. An evaluation of the optical performance, particularly transverse resolution, is presented and its utility in OCT discussed. A transverse resolution of about 15 mum which does not vary with a scan depth of 9 mm scan depth has been obtained, performance which cannot be obtained with a fixed focal length lens.
{"title":"Tunable multi-micro-lens system for high lateral resolution endoscopic optical coherence tomography","authors":"K. Aljasem, A. Seifert, H. Zappe","doi":"10.1109/OMEMS.2008.4607820","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607820","url":null,"abstract":"A pneumatically actuated tunable liquid micro-lens is developed for integration in an endoscopic optical coherence tomography (OCT) system allowing dynamic focusing along the scan depth. An evaluation of the optical performance, particularly transverse resolution, is presented and its utility in OCT discussed. A transverse resolution of about 15 mum which does not vary with a scan depth of 9 mm scan depth has been obtained, performance which cannot be obtained with a fixed focal length lens.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129260052","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607808
B. Offrein
Optical interconnect technology will play an increasingly important role in servers and supercomputers. High density and low-cost optical packaging concepts are required. We consider optical interconnects for board-level and chip-level communication.
{"title":"Optical interconnects & nanophotonics","authors":"B. Offrein","doi":"10.1109/OMEMS.2008.4607808","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607808","url":null,"abstract":"Optical interconnect technology will play an increasingly important role in servers and supercomputers. High density and low-cost optical packaging concepts are required. We consider optical interconnects for board-level and chip-level communication.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133365722","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607864
I. Kanno, S. Tsuda, H. Kotera
In this paper, we report a piezoelectric deformable mirror composed of high-density actuator array for low-voltage adaptive optics. A piezoelectric Pb(Zr,Ti)O3 (PZT) film was deposited on a Pt-coated silicon on insulator (SOI) substrate, and a diaphragm structure of 15 mm in diameter was fabricated by etching a Si handle wafer. A hexagonal 61-element unimorph actuator array was produced with an Al or Au reflective layer over the backside of the diaphragm. In order to reduce the dead space for the lead lines between the actuators, they were prepared on the polyimide insulating layer. The displacement of each actuator was measure by using a laser Doppler vibrometer and we confirmed a relatively large displacement of more than 1 mum by applying a voltage of 10 Vpp.
{"title":"High-density piezoelectric actuator array for MEMS deformable mirrors composed of PZT thin films","authors":"I. Kanno, S. Tsuda, H. Kotera","doi":"10.1109/OMEMS.2008.4607864","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607864","url":null,"abstract":"In this paper, we report a piezoelectric deformable mirror composed of high-density actuator array for low-voltage adaptive optics. A piezoelectric Pb(Zr,Ti)O3 (PZT) film was deposited on a Pt-coated silicon on insulator (SOI) substrate, and a diaphragm structure of 15 mm in diameter was fabricated by etching a Si handle wafer. A hexagonal 61-element unimorph actuator array was produced with an Al or Au reflective layer over the backside of the diaphragm. In order to reduce the dead space for the lead lines between the actuators, they were prepared on the polyimide insulating layer. The displacement of each actuator was measure by using a laser Doppler vibrometer and we confirmed a relatively large displacement of more than 1 mum by applying a voltage of 10 Vpp.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"150 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123229711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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