Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607827
H. Herzig, T. Scharf, O. Manzardo
Spectroscopy with miniaturized systems is one of the fastest developing fields and enters now industrial applications. We will discuss near infrared sensing systems based on MEMS spectrometers starting from concepts, explain prototypes and show final product.
{"title":"Microspectrometer: From ideas to product","authors":"H. Herzig, T. Scharf, O. Manzardo","doi":"10.1109/OMEMS.2008.4607827","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607827","url":null,"abstract":"Spectroscopy with miniaturized systems is one of the fastest developing fields and enters now industrial applications. We will discuss near infrared sensing systems based on MEMS spectrometers starting from concepts, explain prototypes and show final product.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115756712","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607879
M. Hasegawa, P. Dziuban, L. Nieradko, A. Douahi, C. Gorecki, V. Giordano
Cesium vapor microcells incorporating a Cs dispenser were fabricated. An organosilane monolayer was successfully applied to the microcell walls as an anti-relaxation coating to improve the relaxation time of Cs atoms.
{"title":"Fabrication of wall-coated Cs vapor cells for a chip-scale atomic clock","authors":"M. Hasegawa, P. Dziuban, L. Nieradko, A. Douahi, C. Gorecki, V. Giordano","doi":"10.1109/OMEMS.2008.4607879","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607879","url":null,"abstract":"Cesium vapor microcells incorporating a Cs dispenser were fabricated. An organosilane monolayer was successfully applied to the microcell walls as an anti-relaxation coating to improve the relaxation time of Cs atoms.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115554631","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607870
C. Liao, J. Tsai
The incorporation of a micro spherical reflecting mirror (MSRM) onto a cantilever beam sensor magnifies the optical deflection angle and therefore enhances the sensitivity of an optical sensing system. The curvature of the spherical reflecting mirror determines the angle magnification. Given a certain bending amount and a fixed distance between the cantilever and position sensing detector, the cantilever integrated with a micro spherical mirror with a smaller radius of curvature produces a larger optical deflection. Currently at an intermediate stage, our optical sensing system includes a traditional cantilever and a separate spherical mirror with a radius of curvature of 10 cm, which experimentally simulates a system with a MSRM-integrated cantilever beam. The experimental results show that the sensitivity is enhanced by 70%.
{"title":"A glass cantilever beam sensor combined with a spherical reflecting mirror for sensitivity enhancement","authors":"C. Liao, J. Tsai","doi":"10.1109/OMEMS.2008.4607870","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607870","url":null,"abstract":"The incorporation of a micro spherical reflecting mirror (MSRM) onto a cantilever beam sensor magnifies the optical deflection angle and therefore enhances the sensitivity of an optical sensing system. The curvature of the spherical reflecting mirror determines the angle magnification. Given a certain bending amount and a fixed distance between the cantilever and position sensing detector, the cantilever integrated with a micro spherical mirror with a smaller radius of curvature produces a larger optical deflection. Currently at an intermediate stage, our optical sensing system includes a traditional cantilever and a separate spherical mirror with a radius of curvature of 10 cm, which experimentally simulates a system with a MSRM-integrated cantilever beam. The experimental results show that the sensitivity is enhanced by 70%.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116006705","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607828
D. Mader, A. Seifert, H. Zappe
Pressure-actuated liquid-filled micro-lenses may be tuned in focal length from several millimeters to infinity and are thus suitable for use in tunable lens systems. A novel fabrication method for pneumatic multi-chamber lens systems which correct imaging errors such as chromatic and spherical aberrations is presented. The approach is a highly flexible, accurate and inexpensive way to implement lens combinations on the micro-scale which are similar to those in conventional macroscopic systems. A three-chamber lens system will demonstrate the potential of the process.
{"title":"Fabrication of aberration-corrected tunable micro-lenses","authors":"D. Mader, A. Seifert, H. Zappe","doi":"10.1109/OMEMS.2008.4607828","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607828","url":null,"abstract":"Pressure-actuated liquid-filled micro-lenses may be tuned in focal length from several millimeters to infinity and are thus suitable for use in tunable lens systems. A novel fabrication method for pneumatic multi-chamber lens systems which correct imaging errors such as chromatic and spherical aberrations is presented. The approach is a highly flexible, accurate and inexpensive way to implement lens combinations on the micro-scale which are similar to those in conventional macroscopic systems. A three-chamber lens system will demonstrate the potential of the process.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115594670","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607824
D. Hill
SABIO is a multidisciplinary project involving the emerging fields of micro-nano technology, photonics, fluidics and bio-chemistry, targeting a contribution to the development of intelligent diagnostic equipment through the demonstration of a compact polymer based and silicon-based CMOS-compatible micro-nano system. It integrates optical biosensors for label-free biomolecular recognition based on a novel photonic structure named slot-waveguide with immobilised biomolecular receptors on its surface. The slot-waveguides provide high optical intensity in a subwavelength-size low refractive index region (slot-region) sandwiched between two high refractive index strips (rails) [Almeida, V., et al., 2004] leading to an enhanced interaction between the optical probe and biomolecular complexes (antibody-antigen). As such a biosensor is predicted to exhibit a surface concentration detection-limit lower than 1 pg/mm2, state-of-the-art in label-free integrated optical biosensors, as well as the possibility of multiplexed assay, which, together with reduced reaction volumes, leads to the ability to perform rapid multi-analyte sensing and comprehensive tests. This offers the further advantageous possibility of assaying several parameters simultaneously and consequently, statistical analysis of these results can potentially increase the reliability and reduce the measurement uncertainty of a diagnostic over single-parameter assays. In addition, the SABIO micro-nano system device applied to its novel protein-based diagnostic technology has the potential to be fast and easy to use, making routine screening or monitoring of diseases more cost-effective.
{"title":"Ultrahigh sensitivity slot-waveguide biosensor on a highly integrated chip for simultaneous diagnosis of multiple diseases","authors":"D. Hill","doi":"10.1109/OMEMS.2008.4607824","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607824","url":null,"abstract":"SABIO is a multidisciplinary project involving the emerging fields of micro-nano technology, photonics, fluidics and bio-chemistry, targeting a contribution to the development of intelligent diagnostic equipment through the demonstration of a compact polymer based and silicon-based CMOS-compatible micro-nano system. It integrates optical biosensors for label-free biomolecular recognition based on a novel photonic structure named slot-waveguide with immobilised biomolecular receptors on its surface. The slot-waveguides provide high optical intensity in a subwavelength-size low refractive index region (slot-region) sandwiched between two high refractive index strips (rails) [Almeida, V., et al., 2004] leading to an enhanced interaction between the optical probe and biomolecular complexes (antibody-antigen). As such a biosensor is predicted to exhibit a surface concentration detection-limit lower than 1 pg/mm2, state-of-the-art in label-free integrated optical biosensors, as well as the possibility of multiplexed assay, which, together with reduced reaction volumes, leads to the ability to perform rapid multi-analyte sensing and comprehensive tests. This offers the further advantageous possibility of assaying several parameters simultaneously and consequently, statistical analysis of these results can potentially increase the reliability and reduce the measurement uncertainty of a diagnostic over single-parameter assays. In addition, the SABIO micro-nano system device applied to its novel protein-based diagnostic technology has the potential to be fast and easy to use, making routine screening or monitoring of diseases more cost-effective.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126871829","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607880
Tsung-Lin Tang, Wen-Chien Chen, Rongshun Chen, W. Fang
This study presents two designs to enhance the magnetostatic torque to drive the scanner, (1) the lever arm, and (2) the ferromagnetic material pattern with higher length to width ratio.
本研究提出了两种增强静磁转矩驱动扫描仪的设计，即杠杆臂和高长宽比的铁磁材料模式。
{"title":"The torque-enhancement design for magnetostatic scanner","authors":"Tsung-Lin Tang, Wen-Chien Chen, Rongshun Chen, W. Fang","doi":"10.1109/OMEMS.2008.4607880","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607880","url":null,"abstract":"This study presents two designs to enhance the magnetostatic torque to drive the scanner, (1) the lever arm, and (2) the ferromagnetic material pattern with higher length to width ratio.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114784018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607819
W. Piyawattanametha, M. Mandella, H. Ra, J.T.C. Liu, E. Garai, G. Kino, O. Solgaard, C. Contag
We demonstrate a dual-axes confocal endoscope in a 5.5 mm diameter package for clinical use. Miniaturization is achieved by using a barbell-shaped, gimbaled, two-dimensional MEMS scanner that is actuated by self-aligned, vertical-comb actuators. The maximum DC optical scan angles are plusmn2.6deg on the inner axis and plusmn0.8deg on the outer axis, and the corresponding resonance frequencies are 3.1 kHz and 1.1 KHz. The maximum imaging rate is 10 frames/second, and the microscope achieves full-width-half-maximum transverse and axial resolutions of 5 mum and 7 mum, respectively when operated in the near infrared wavelength (785 nm).
{"title":"MEMS based dual-axes confocal clinical endoscope for real time in vivo imaging","authors":"W. Piyawattanametha, M. Mandella, H. Ra, J.T.C. Liu, E. Garai, G. Kino, O. Solgaard, C. Contag","doi":"10.1109/OMEMS.2008.4607819","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607819","url":null,"abstract":"We demonstrate a dual-axes confocal endoscope in a 5.5 mm diameter package for clinical use. Miniaturization is achieved by using a barbell-shaped, gimbaled, two-dimensional MEMS scanner that is actuated by self-aligned, vertical-comb actuators. The maximum DC optical scan angles are plusmn2.6deg on the inner axis and plusmn0.8deg on the outer axis, and the corresponding resonance frequencies are 3.1 kHz and 1.1 KHz. The maximum imaging rate is 10 frames/second, and the microscope achieves full-width-half-maximum transverse and axial resolutions of 5 mum and 7 mum, respectively when operated in the near infrared wavelength (785 nm).","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"104 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114188254","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607856
C. Lo, J. Hast, Olli‐Heikki Huttunen, J. Petaja, J. Hiitola-Keinanen, A. Maaninen, H. Kopola, H. Fujita, H. Toshiyoshi
A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit.
{"title":"Low operation voltage non self-emissive MEMS color filter pixels","authors":"C. Lo, J. Hast, Olli‐Heikki Huttunen, J. Petaja, J. Hiitola-Keinanen, A. Maaninen, H. Kopola, H. Fujita, H. Toshiyoshi","doi":"10.1109/OMEMS.2008.4607856","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607856","url":null,"abstract":"A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117093898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607811
Linghan Li, A. Higo, M. Kubota, M. Sugiyama, Y. Nakano
A novel etching and oxidation method utilizing space effect of dry etching for three dimensional silicon structure is presented. Testing devices of SOI symmetric waveguide with ultra thick SiO2 cladding and silicon waveguide structure integrated with 3D taper spot size converter are fabricated using this method.
{"title":"A novel etching-oxidation fabrication method for 3D nano structures on silicon and its application to SOI symmetric waveguide and 3D taper spot size converter","authors":"Linghan Li, A. Higo, M. Kubota, M. Sugiyama, Y. Nakano","doi":"10.1109/OMEMS.2008.4607811","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607811","url":null,"abstract":"A novel etching and oxidation method utilizing space effect of dry etching for three dimensional silicon structure is presented. Testing devices of SOI symmetric waveguide with ultra thick SiO2 cladding and silicon waveguide structure integrated with 3D taper spot size converter are fabricated using this method.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116246554","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607882
K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel
We present the design and the fabrication of a silicon X-Y microstage and a new concept of its integration with a glass microlens to obtain an optical 2D scanner for the miniaturized microscope on-chip.
{"title":"Towards integration of glass microlens with silicon comb-drive X-Y microstage","authors":"K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel","doi":"10.1109/OMEMS.2008.4607882","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607882","url":null,"abstract":"We present the design and the fabrication of a silicon X-Y microstage and a new concept of its integration with a glass microlens to obtain an optical 2D scanner for the miniaturized microscope on-chip.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127261010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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