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2012 IEEE 62nd Electronic Components and Technology Conference最新文献

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Aging impact on the accelerated thermal cycling performance of lead-free BGA solder joints in various stress conditions 老化对不同应力条件下无铅BGA焊点加速热循环性能的影响
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248874
Tae-Kyu Lee, Hongtao Ma
Isothermal aging effects on lead-free solders have been extensively investigated in recent studies for both bulk solders and package solder joints. Researches show that aging significantly degrades the mechanical properties of bulk lead-free solders and dynamic performances of lead-free solder joints. There are studies exploring the impact of aging on accelerated thermal cycling (ATC) performance of lead-free solder joints, however, the results are discrepant, some research shows minimal impact of isothermal aging on long term ATC performances since most of the failure mode are not related to intermetallic (IMC) growth which has been impacted more significantly during aging. Some others show significant degradation of the of ATC life due to evidence of weakening of solder joints after aging. This study is intended to explore the factors that may affect the aging impact on the lead-free solder joint fatigue life. The test vehicle is designed with different package types, pitch sizes, and solder alloy metallurgies to capture the impact of affecting factors. The test vehicles have been aged at 100°C and 150°C for different aging durations, ATC test were subsequently performed on the aged samples and with the non aged samples as control. The effects of aging on the fatigue life of lead-free solder joints are extensively explored in this study.
无铅焊料的等温老化效应在近年来的研究中得到了广泛的研究,包括块状焊料和封装焊点。研究表明,时效会显著降低大块无铅焊料的力学性能和无铅焊点的动态性能。已有研究探讨了时效对无铅焊点加速热循环(ATC)性能的影响,但结果并不一致,一些研究表明,等温时效对长期ATC性能的影响很小,因为大多数失效模式与金属间化合物(IMC)生长无关,而IMC生长在时效过程中受到的影响更大。由于老化后焊点变弱的证据,其他一些显示ATC寿命的显著退化。本研究旨在探讨老化对无铅焊点疲劳寿命的影响因素。试验车辆采用不同封装类型、间距尺寸、焊料合金冶金等设计,捕捉影响因素的影响。试验车辆分别在100°C和150°C下进行不同时效时间的老化,随后对老化样品和未老化样品进行ATC试验。研究了老化对无铅焊点疲劳寿命的影响。
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引用次数: 17
Low-cost and low-loss 3D silicon interposer for high bandwidth logic-to-memory interconnections without TSV in the logic IC 低成本和低损耗的3D硅中间体,用于高带宽逻辑到存储器互连,在逻辑IC中没有TSV
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248844
V. Sundaram, Q. Chen, Y. Suzuki, G. Kumar, Fuhan Liu, R. Tummala
This paper presents the design, fabrication and electrical characterization of a low loss and low cost non-traditional silicon interposer, demonstrating the high bandwidth chip-to-chip interconnection capability of the 3D silicon interposer, with equivalent or better performance than 3D ICs with TSVs, at a much lower cost. This scalable approach uses thin polycrystalline silicon in wafer or panel form, forms lower cost through-package-vias (TPVs) at fine pitch by special high throughput laser processes. The electrical performance is improved by thick polymer liners within the TPVs. Double side package processes for TPV metallization and RDL layers using dry film polymers and plating leads to significant cost reduction compared to single side TSV and BEOL wafer processes. Combined loss of 3mm long CPW lines and two TPVs in the low loss silicon interposer was demonstrated at less than 1dB at 10GHz. The fine pitch TPV capability and low loss of this non-traditional silicon interposer leads to 3D interposers with double side chips interconnected at equivalent bandwidth to wide bus I/O 3D ICs at a much lower cost and with better testability, thermal management and scalability.
本文介绍了一种低损耗、低成本的非传统硅中间体的设计、制造和电学特性,展示了3D硅中间体的高带宽片对片互连能力,其性能与带有tsv的3D集成电路相当或更好,成本低得多。这种可扩展的方法使用晶圆或面板形式的薄多晶硅,通过特殊的高通量激光工艺在细间距上形成低成本的通封装通孔(TPVs)。电性能得到改善的厚聚合物衬里的TPVs。与单面TSV和BEOL晶圆工艺相比,使用干膜聚合物和电镀的TPV金属化和RDL层的双面封装工艺可显着降低成本。低损耗硅中间体中3mm长的CPW线和两个TPVs的综合损耗在10GHz时小于1dB。这种非传统硅中间体的细间距TPV能力和低损耗导致具有双面芯片的3D中间体以同等带宽与宽总线I/O 3D ic互连,成本低得多,具有更好的可测试性,热管理和可扩展性。
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引用次数: 39
Advanced low profile PoP solution with embedded wafer level PoP (eWLB-PoP) technology 采用嵌入式晶圆级PoP (eWLB-PoP)技术的先进低姿态PoP解决方案
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248995
S. Yoon, Jose Alvin Caparas, Yaojian Lin, P. Marimuthu
Current portable electronic products are driving component packaging towards 3D packaging technologies for integrating multiple memory die and application processors (AP). Among the 3D technologies, Package-on-Package (PoP) is increasingly becoming mainstream due to its flexibility of combination and sourcing. Moreover, device designs require functional integration of IC's, especially in the 3rd dimension, hence driving new technology development towards making IC components “thin and thinner”. eWLB (embedded Wafer Level Ball Grid Array) has been introduced into production to allow for higher ball count WLP, by extending the package size beyond the area of the chip. There is also great opportunity related to a 3D variation of eWLB which would allow for mounting of components or another package on the top surface with thinner profile and Package-on-Package (eWBL-PoP) technology. 3D PoP-eWLB is envisioned as an exciting technology which will open up the floodgates for system level integration utilizing very thin stacked eWLB packages as building blocks in mobile applications. This paper reports developments that are aimed to extend the low profile PoP application with eWLB + PoP technology. Test vehicle is designed and fabricated to demonstrate to be thin and 3D PoP solution for mobile and portable electronics. Assembly process details including laser ablation and interconnects process and mechanical characterizations are to be discussed with component and board level reliability results. Innovative package structures optimization that provide dual advantages of both form factor reduction and enhanced package reliability are reported. To enable higher interconnection density and signal routing, package with multi layer redistribution (RDL) and 10um/10um line width/spacing is fabricated and implemented on eWLB platform. Successful reliability characterization results on low profile PoP package configurations are reported that demonstrate eWLB-PoP as an enabling technology for miniaturized, low profile and cost-effective 3D PoP.
目前的便携式电子产品正在推动组件封装向集成多个存储芯片和应用处理器(AP)的3D封装技术发展。在3D技术中,包对包(PoP)由于其组合和采购的灵活性正日益成为主流。此外,器件设计需要集成电路的功能集成,特别是在三维空间,因此推动了新技术的发展,使集成电路组件“越来越薄”。嵌入式晶圆级球栅阵列(eWLB)已经投入生产,通过将封装尺寸扩展到芯片面积之外,可以实现更高的球数WLP。eWLB的3D变化也有很大的机会,它允许在顶部表面安装组件或另一个封装,具有更薄的轮廓和封装上封装(eWBL-PoP)技术。3D PoP-eWLB被认为是一项令人兴奋的技术,它将打开系统级集成的闸门,利用非常薄的堆叠eWLB包作为移动应用程序的构建块。本文介绍了利用eWLB + PoP技术扩展低功耗PoP应用的研究进展。测试车辆的设计和制造是为了展示移动和便携式电子产品的薄和3D PoP解决方案。装配工艺细节,包括激光烧蚀和互连工艺和机械特性,将与组件和板级可靠性结果进行讨论。创新的封装结构优化提供了双重优势,既减少了外形因素,又提高了封装的可靠性。为了实现更高的互连密度和信号路由,在eWLB平台上制作并实现了具有多层再分布(RDL)和10um/10um线宽/间距的封装。据报道,在低尺寸PoP封装配置上成功的可靠性表征结果表明,eWLB-PoP是一种小型化、低尺寸且具有成本效益的3D PoP技术。
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引用次数: 46
Study of low temperature and high heat-resistant fluxless bonding via nanoscale thin film control toward wafer-level multiple chip stacking for 3D LSI 三维大规模集成电路晶圆级多芯片堆叠的纳米级薄膜控制低温高耐热无熔合研究
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248799
E. Morinaga, Y. Oka, H. Nishimori, H. Miyagawa, R. Satoh, Y. Iwata, R. Kanezaki
The three dimensional system in package (3D-SiP) has been regarded as a promising solution to the scaling limit problem in the semiconductor industry. Practical realization of the 3D-SiP needs establishing a standard bonding technology for chip stacking. This research focuses on a low temperature and high heat-resistant fluxless bonding method, which can overcome the bump height variation problem in a chip/wafer, using high-boiling alcohol, an indium-tin (InSn) thin film and its transformation into high-melting intermetallic compound (IMC). Experimental studies showed high-rate deposition of InSn alloy and successive deposition of silver achieve successful bonding where the joint has high melting point (higher than 673K).
三维封装系统(3D-SiP)被认为是解决半导体行业缩放限制问题的一种很有前途的方法。3D-SiP的实际实现需要建立一种标准的芯片堆叠键合技术。本研究利用高沸点醇、铟锡(InSn)薄膜及其转化为高熔点金属间化合物(IMC),研究了一种克服芯片/晶圆中凹凸高度变化问题的低温高耐热无熔点键合方法。实验研究表明,在高熔点处(大于673K),高速率沉积InSn合金和连续沉积银可以成功结合。
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引用次数: 4
Void formation during reflow soldering 回流焊接时形成的空洞
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6249064
Thomas D. Ewald, Norbert Holle, Klaus-Jurgen Wolter
In the present study the interaction between solder paste and the PCB surface finish and its impact on void formation was investigated. Therefore, a comprehensive set of tests was performed on test vehicles with different diameter of the solder powder, solder alloy composition, PCB surface finish and flux chemistry. Based on these experimental results a hypothesis of void generating mechanisms is presented characterizing the wetting process.
本文研究了锡膏与PCB表面光洁度的相互作用及其对空洞形成的影响。因此,在不同直径的焊锡粉、焊锡合金成分、PCB表面光洁度和助焊剂化学性质的试验车上进行了一套全面的试验。基于这些实验结果,提出了表征润湿过程的孔隙生成机制假说。
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引用次数: 6
Non-conductive film and compression molding technology for self-assembly-based 3D integration 基于自组装的三维集成的非导电薄膜和压缩成型技术
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248860
T. Fukushima, Y. Ohara, J. Bea, M. Murugesan, K. Lee, T. Tanaka, M. Koyanagi
Two key technologies consisting of chip-to-wafer bonding through a non-conductive film (NCF) and wafer-level packaging using compression molding were studied for self-assembly-based 3D integration, especially reconfigured wafer-to-wafer stacking. 4-mm-by-5-mm chips having 20-μm-pitch Cu-SnAg microbumps were successfully bonded to wafers through NCF. The resulting daisy chain obtained from the chip-to-wafer structure showed low contact resistance of approximately 50 MΩ/bump. Compression molding was implemented to a chip-on-wafer structure. Grinding of the chip-on-wafer structure gave low total thickness variation (TTV) within 1 μm and the following CMP led good planarization capability.
研究了基于自组装的三维集成的两个关键技术,即通过非导电薄膜(NCF)的晶片键合和使用压缩成型的晶片级封装,特别是重新配置的晶片到晶片堆叠。具有20 μm间距Cu-SnAg微凸起的4 mm × 5 mm芯片通过NCF成功结合到晶圆上。从芯片到晶圆结构得到的菊花链显示出约50 MΩ/bump的低接触电阻。对片上芯片结构进行了压缩成型。对片上晶片结构进行磨削后,总厚度变化(TTV)在1 μm以内,磨削后的CMP具有良好的平面化能力。
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引用次数: 12
Remedies to control electromigration: Effects of CNT doped Sn-Ag-Cu interconnects 控制电迁移的补救措施:碳纳米管掺杂Sn-Ag-Cu互连的影响
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6249097
Sha Xu, Xiaoxin Zhu, H. Kotadia, Hua Lu, S. Mannan, C. Bailey, Y. Chan
Electromigration is a critical reliability problem in electronic industry, especially with the shrinkage and downscaling of microelectronic feature size, which results in gradual increase of current density. Carbon nanotube(CNT) doping is adopted in this paper. CNT has demonstrated high electromigration resistance. In our work, CNT doping is combined with SAC interconnects. A CNT after surfactant will be incorporated into SAC solder interconnection. Best percentage of CNT doping is found from this experiment, and better electromigration reliability can be observed from this work by SEM image. Moreover, the shear stress distribution is improved using computational study, which shows better mechanical properties. The combination of experimental and numerical study is highlighted in this work.
电迁移是电子工业中一个重要的可靠性问题,特别是随着微电子特征尺寸的缩小和缩小,电迁移导致电流密度逐渐增大。本文采用碳纳米管(CNT)掺杂。碳纳米管具有很高的电迁移阻力。在我们的工作中,碳纳米管掺杂与SAC互连相结合。表面活性剂后的碳纳米管将被纳入SAC焊料互连中。实验中发现了最佳的碳纳米管掺杂比例,并且通过SEM图像可以观察到更好的电迁移可靠性。此外,通过计算研究改善了剪切应力分布,使其具有更好的力学性能。实验与数值研究相结合是本研究的重点。
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引用次数: 3
Electrical characterization method to study barrier integrity in 3D through-silicon vias 研究三维硅通孔中势垒完整性的电表征方法
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248846
Y. Li, D. Velenis, T. Kauerauf, M. Stucchi, Y. Civale, A. Redolfi, K. Croes
In this paper, the controlled I-V (IVctrl) method is adopted for the barrier integrity characterization of TSVs at wafer level. Planar capacitor structures are used for the initial validation of the IVctrl method with respect to the traditional time dependent dielectric breakdown (TDDB) methodology. The TDDB field acceleration factor of the TSV liner is extracted by IVctrl in a reasonable time, and the results demonstrate that defective barriers can degrade TDDB field acceleration factor and thus TSV liner reliability.
本文采用可控I-V (IVctrl)方法在晶圆级对tsv的势垒完整性进行表征。平面电容结构用于IVctrl方法相对于传统的时间相关介质击穿(TDDB)方法的初始验证。利用IVctrl在合理的时间内提取了TSV衬管的TDDB场加速度因子,结果表明,缺陷屏障会降低TDDB场加速度因子,从而降低TSV衬管的可靠性。
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引用次数: 23
Reliability and microstructural studies of Sn-Ag-Cu lead-free solder joints in pulse-heated reflow soldering 脉冲加热回流焊Sn-Ag-Cu无铅焊点的可靠性和显微组织研究
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6249142
M. Mostofizadeh, K. Kokko, L. Frisk
With the advent of miniaturization in the electronics industry, the application of flexible interconnections has become necessary and inevitable for many new designs such as flexible circuits (flex) to printed circuit boards (PCB), flex to flex, and multiwire to PCB. Pulse-heated reflow soldering is demonstrably a reliable and repeatable soldering process for manufacturing such products, especially in the attachment of flex-to-PCB in the electronics industry. This paper reports on the microstructure and reliability of flex-to-PCB solder joints. Flex-to-PCB samples were made using Pulse-heated reflow soldering and conventional reflow oven soldering. To study the reliability of the solder joints, three different environmental tests were conducted including thermal shock, thermal humidity, and thermal aging. Microstructural studies and failure analysis were performed on all samples before and after the reliability tests in order to ascertain the cause of failure in both bonding methods. Additionally, a comparison of both attachment methods comprising pulse-heated reflow soldering and reflow oven is presented demonstrating their applicability in manufacturing flex-to-PCB assemblies.
随着电子工业小型化的到来,柔性互连的应用已成为许多新设计的必要和不可避免的,例如柔性电路(挠性)到印刷电路板(PCB),挠性到挠性,多线到PCB。脉冲加热回流焊显然是制造此类产品的可靠且可重复的焊接工艺,特别是在电子工业中柔性到pcb的附件中。本文报道了柔性- pcb焊点的微观结构和可靠性。采用脉冲加热回流焊和常规回流炉焊接两种方法制备柔性- pcb样品。为了研究焊点的可靠性,进行了热冲击、热湿度和热老化三种不同的环境试验。在可靠性试验前后对所有试样进行了显微组织研究和失效分析,以确定两种粘结方法失效的原因。此外,还比较了两种连接方法,包括脉冲加热回流焊和回流炉,证明了它们在制造柔性到pcb组件中的适用性。
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引用次数: 0
Effect of Joule heating on electromigration reliability of Pb-free interconnect 焦耳加热对无铅互连电迁移可靠性的影响
Pub Date : 2012-07-30 DOI: 10.1109/ECTC.2012.6248890
Minhua Lu, S. Wright, Gerard McVicker, S. M. Sri-Jayantha
Temperature and current are two major parameters that impact electromigration reliability. Due to the large current used in the accelerated electromigration test, the Joule self-heating associated with the stress current can be significant. The paper presents a study of electromigration fails in Pb-free interconnect from the point of view of localized Joule heating. The Joule heating effect in two types of packages, a fully assembled flip chip module with standard C4s and a silicon to silicon assembly with microbumps, is considered. A thermal FEM model is used as a guide to interpret the experimental observations.
温度和电流是影响电迁移可靠性的两个主要参数。由于在加速电迁移试验中使用的大电流,与应力电流相关的焦耳自热可能是显著的。本文从局域焦耳加热的角度对无铅互连中的电迁移失效进行了研究。考虑了两种封装中的焦耳热效应,一种是具有标准C4s的完全组装倒装芯片模块,另一种是具有微凸点的硅对硅组件。采用热有限元模型作为解释实验结果的指导。
{"title":"Effect of Joule heating on electromigration reliability of Pb-free interconnect","authors":"Minhua Lu, S. Wright, Gerard McVicker, S. M. Sri-Jayantha","doi":"10.1109/ECTC.2012.6248890","DOIUrl":"https://doi.org/10.1109/ECTC.2012.6248890","url":null,"abstract":"Temperature and current are two major parameters that impact electromigration reliability. Due to the large current used in the accelerated electromigration test, the Joule self-heating associated with the stress current can be significant. The paper presents a study of electromigration fails in Pb-free interconnect from the point of view of localized Joule heating. The Joule heating effect in two types of packages, a fully assembled flip chip module with standard C4s and a silicon to silicon assembly with microbumps, is considered. A thermal FEM model is used as a guide to interpret the experimental observations.","PeriodicalId":6384,"journal":{"name":"2012 IEEE 62nd Electronic Components and Technology Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81070293","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
期刊
2012 IEEE 62nd Electronic Components and Technology Conference
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