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2019 20th International Conference on Electronic Packaging Technology(ICEPT)最新文献

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TSV-defect modeling based electromagnetic full wave analysis and defect diagnosis method design 基于tsv缺陷建模的电磁全波分析与缺陷诊断方法设计
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245163
Yang Yang, Xiaole Cui, Yufeng Jin, M. Miao, Huan Liu
In this paper, modeling for TSV pair structures with void defects, pinhole defects and open defects by using an electromagnetic full wave analysis tool is presented. A low-bandwidth equivalent lumped circuit model of above TSV structures are extracted to analyze the effects of different defect sizes and different defect locations. The simulation results show void defects only minimally affect the TSV resistance. And, the lumped circuit model and scattering parameter are changed by open defects which cut off the TSV completely. Besides, the pinhole of a TSV significantly change the equivalent coupling capacitance between TSV pair. Based on these results, some appropriate testing methods are discussed.
本文采用全波分析工具对含孔洞缺陷、针孔缺陷和开口缺陷的TSV副结构进行了建模。提取了上述TSV结构的低带宽等效集总电路模型,分析了不同缺陷尺寸和不同缺陷位置的影响。仿真结果表明,孔洞缺陷对TSV电阻的影响很小。同时,开放缺陷完全切断了TSV,改变了集总电路模型和散射参数。此外,TSV的针孔会显著改变TSV对之间的等效耦合电容。在此基础上,讨论了适当的测试方法。
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引用次数: 1
Design of an accelerometer in inclination monitoring of power transmission pole 输变电杆倾斜监测加速度计的设计
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245757
Yanning Chen, Shuaipeng Wang, Haifeng Zhang, Dongyan Zhao, Z. Fu, Yidong Yuan, Yubo Wang
Accelerometers are some of the most familiar micro electronic mechanical system (MEMS) sensor. Accelerometers are used in many fields, such as vehicle braking, mobile phone, gauge check and so on. In this paper, we summarize how accelerometers sensors can be operated, and their working principle is presented, and then the fabrication process of the accelerometers sensors is presented. Then we conducted a preliminary test on the performance of the sensor and discuss the optimization scheme of manufacturing process.
加速度计是人们最熟悉的微电子机械系统(MEMS)传感器之一。加速度计应用于许多领域,如车辆制动、手机、仪表检查等。本文概述了加速度计传感器的工作原理,介绍了加速度计传感器的工作原理,然后介绍了加速度计传感器的制作过程。然后对传感器的性能进行了初步测试,并讨论了制造工艺的优化方案。
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引用次数: 0
Investigations on Electrolytic Capacitors to Improve Reliability under Assembly-Level Impact Conditions 提高装配级冲击条件下电解电容器可靠性的研究
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245184
Qiming Zhang, N. Sinenian, R. Huang
Electrolytic capacitors are of great importance in modern power electronics due to their ability to withstand high voltages for PFC (power factor correction) applications. Solid capacitors, such as ceramic chip capacitors, are not able to achieve this purpose.One of the most common failure modes of electrolytic capacitors is dielectric breakdown, which may lead to internal short-circuits when the capacitor is being charged under high-voltage. Although protection features in the control circuit may be implemented, the voltage fluctuations during the short may still results in failures of other sensitive components in the circuit. Diagnosing such failures is difficult because the functional parameters of the capacitor return to normal following breakdown.One of the dominant reason for dielectric breakdown of electrolytic capacitors is repeated mechanical impact, such as drop loading and vibration, which the jelly-rolled structure of electrolytic capacitors are sensitive to. Repeated mechanical stress may also results in accumulative internal damage to the capacitor and trigger dielectric breakdown over time.The research presented in this paper involves both non-destructive inspection techniques and root cause analysis approaches to analyze typical dielectric breakdown of the capacitor after industry-standard assembly-level drop tests. Based on the failure mode, several measures are proposed to improve the drop reliability of the capacitor in the power electronics. The feasibility of those measures is also analyzed.In summary, we have proposed a potential mitigating strategy to protect power electronics against impact (drop and vibration, etc.) applications, such as high-power portable converters, chargers and electric vehicles
电解电容器在现代电力电子中非常重要,因为它们能够承受PFC(功率因数校正)应用中的高电压。固体电容器,如陶瓷片式电容器,不能达到这一目的。电解电容器最常见的失效模式之一是介质击穿,当电容器在高压下充电时,介质击穿可能导致电容器内部短路。虽然可以在控制电路中实施保护功能,但短路期间的电压波动仍可能导致电路中其他敏感元件失效。诊断这种故障是困难的,因为电容器的功能参数在击穿后恢复正常。电解电容器介质击穿的主要原因之一是反复的机械冲击,如跌落载荷和振动,而电解电容器的果冻状结构对这种机械冲击非常敏感。随着时间的推移,重复的机械应力也可能导致电容器累积的内部损伤并触发介电击穿。本文的研究涉及无损检测技术和根本原因分析方法,以分析工业标准组装级跌落试验后电容器的典型介电击穿。针对这种失效模式,提出了提高电力电子系统中电容器跌落可靠性的措施。并对这些措施的可行性进行了分析。总之,我们提出了一种潜在的缓解策略,以保护电力电子设备免受冲击(跌落和振动等)应用,如大功率便携式转换器,充电器和电动汽车
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引用次数: 0
Copper wire off-center ball and 2nd smash bond issue resolution on XQFP package XQFP封装上的铜线偏离中心球和第二次粉碎债券问题解决方案
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245239
Jun Li, Ming-chuan Han, Mei Liu, Hangduo Wang, Zhijian Wang
For the past years, acceptance and implementation of copper wire has been become popular and mandatory, especially after gold price soaring for past these years. As compared to gold wire, copper wire poses better electrical conductivity, better thermal conductivity, higher mechanical strength, lower cost and better reliability and so on. But in mass production, we may not be able to achieve desirable performance and manufacturability due to the well-known disadvantages of copper wire. One is its greater hardness, another is being easy to be oxidized. These disadvantages bring challenge to copper wire such as none stick, weak bonding, missing ball, off-center ball, cratering, short tail, smash bond etc.In this paper, off-center ball and 2nd smash bond issue were investigated. a test vehicle with 66um fine pitch and 1.2um bond pad metal thickness was selected as vehicle to study the mechanism of off-center ball and 2nd smash bond issue. First, fish bone analysis was conducted to dig out root cause. Fish bone analysis shows wire tail, EFO current setting and lead frame floating during bonding were suspected to the root cause to the off-center ball and 2nd smash bond. Second, several types of capillary with different OR, tip size and FA were screened. Based on screen result, capillary design was finalized. Second, a DOE was conducted to 2nd bond parameter to resolve off-center ball and 2nd smash bond issue. The factors are 2nd bond force and 2nd bond USG, and 2nd bond scrub offset and phase. Stitch pull strength, 2nd bond width and abnormal 2nd bond shape are responses. 2nd bond parameter was established based on DOE result. Last, EFO parameter DOE was conducted. The factors are EFO time and EFO current. FAB size, FAB roundness and abnormal FAB are responses. Besides, a DOE was conducted to verify 2nd bond parameter. 2nd bond force and 2nd bond USG, and 2nd bond scrub offset are factors, FAB size, FAB roundness, abnormal FAB and stitch pull are responses. EFO parameter window was established based on DOE result. Confirmation run was designed with optimized FAB and 2nd bond parameter. No off-center ball and 2nd smash bond issue were found in high volume production. 2nd bond parameter optimization plays a great role in resolving off-center ball and 2nd smash bond issue.
在过去的几年里,铜线的接受和实施已经成为一种流行和强制性的,特别是在这几年黄金价格飙升之后。与金丝相比,铜丝具有导电性好、导热性好、机械强度高、成本低、可靠性好等特点。但在大规模生产中,由于众所周知的铜线缺点,我们可能无法达到理想的性能和可制造性。一是硬度大,二是易氧化。这些缺点给铜线带来了无粘、弱粘、缺球、离球、弹坑、短尾、断键等挑战。本文对离球和二次断键问题进行了研究。选取一辆细间距为66um、粘结垫金属厚度为1.2um的试验车辆,对球离心及二次粉碎粘结机理进行研究。首先进行鱼骨分析,找出根本原因。鱼骨分析显示,连接过程中钢丝尾、EFO电流设置和引线框架浮动被怀疑是导致偏离中心球和第二次粉碎连接的根本原因。其次,筛选了几种不同OR、尖端大小和FA的毛细管类型。根据筛选结果,完成了毛细管设计。其次,对二键参数进行DOE求解,解决了球偏心和二键粉碎问题。影响因素有二键力、二键USG、二键磨砂偏移和相。针脚拉力、二键宽度和二键形状异常是响应。根据DOE结果建立了第二个键参数。最后,对EFO参数进行DOE分析。影响因素是EFO时间和EFO电流。FAB尺寸、FAB圆度、FAB异常均为响应。此外,还对第二键参数进行了DOE验证。二键力、二键USG和二键搓洗偏移量是影响因素,FAB尺寸、FAB圆度、FAB异常和缝线拉力是响应因素。基于DOE结果建立了EFO参数窗口。采用优化后的FAB和二键参数设计了确认工序。在大批量生产中,没有发现偏离中心球和第二次粉碎债券问题。二次键参数优化对解决球偏心和二次扣杀键问题有重要作用。
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引用次数: 1
Thermal Property Evaluation of TSV interposer Embedded Microfluidics for Cooling 2.5D Integrated High Power IC Device 用于冷却2.5D集成高功率IC器件的TSV介面嵌入微流控热性能评估
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245289
Shengli Ma, Tingting Lian, Han Cai, Liu-lin Hu, Shuwei He
For cooling the 2.5D integrated high power IC device, this paper present a TSV interposer embedded parallel linear microchannels, demonstrate its assembly and thermal property evaluation. The sample is about 9.45 mm  9.5 mm in size, with liner microchannel 100 μm/100 μm in the width/space, 300 μm in the depth, a symmetric flow guiding structure arranged in inlet/outlet region. TSV interposer embedded microchannel is fabricated with DRIE process and Si-Si direct bonding process. For thermal property evaluation, a customized high power IC chip with on site temperature sensor is integrated on the TSV interposer and wired by PCB board. According to the current test results, when the equivalent thermal flux input density is risen to 283 w/cm2, a total thermal input about 66.55 W, the DI wafer is set at a flow rate of 100 ml/min, the temperature rise to 95.1°C, and the pressure drop is 40 Kpa, which is preliminarily verified that it has a good cooling capability.
针对2.5D集成高功率集成电路器件的散热问题,提出了一种嵌入并行线性微通道的TSV中间体,并对其组装和热性能进行了评价。样品尺寸约为9.45 mm9.5 mm,宽度/间距为100 μm/100 μm,深度为300 μm,进出口区设有对称导流结构。采用DRIE工艺和Si-Si直接键合工艺制备了TSV中间体嵌入式微通道。对于热性能评估,将定制的高功率IC芯片与现场温度传感器集成在TSV中间层上,并通过PCB板连接。根据目前的试验结果,当等效热流输入密度上升到283 w/cm2,总热输入约66.55 w, DI硅片设置为流量100 ml/min,温升到95.1℃,压降为40 Kpa时,初步验证其具有良好的散热能力。
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引用次数: 2
Finite-Element Analysis of Strain Distribution in Ceramic Multilayer Capacitors during Wave Soldering and Reflow Soldering 陶瓷多层电容器波峰焊和回流焊时应变分布的有限元分析
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245192
Hongqin Wang, Wei Li, Dawei Wang, Qingqiu Gong, Jinbao Cai, Sheng-zong He
The strain distributions in the MLCC during the wave soldering are analyzed with the use of the birth-death element strategy. It is confirmed that the larger size of MLCC is more sensitive to the thermal shock of the wave soldering, while the increased preheating temperature could decrease the principal strain in all the MLCCs. The maximum strain occurs at the junction of the bottom end of the electrode termination and the dielectric ceramics.In compare, the strain distribution in the same size MLCC during the reflow soldering is computed, which indicated smaller principal strain and less thermal shock.
采用生-死单元策略分析了波峰焊时MLCC内部的应变分布。结果表明,尺寸越大的MLCC对波峰焊的热冲击越敏感,而预热温度的升高会降低MLCC的主应变。最大应变发生在电极端底端与介电陶瓷的连接处。计算了相同尺寸MLCC回流焊时的应变分布,结果表明主应变较小,热冲击较小。
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引用次数: 1
Reliability of nano-silver soldering paste with high thermal conductivity 高导热纳米银焊膏的可靠性
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.9080930
Chunyu Yu, Dongsheng Yang, Donglei Zhao, Zhong Sheng
As electronic devices are becoming faster and incorporating more functions, they are simultaneously shrinking in size and weight. These factors suggest significant increases in the packaging densities and heat fluxes for the integrated circuits. Effective thermal management will be the key factor to ensure that these devices perform well with high efficiency and reliability. As the heat dissipation concentrates on tiny gate fingers, the operation of the GaN high-electron mobility transistor (HEMT) posts a huge challenge on thermal management. In order to enhance the heat dissipation capability of GaN power device, it is mostly soldered on the heat spreader with the AuSn solder. However, the thermal conductivity of the AuSn solder is only 57 W•K−1•m−1, which cannot fulfil the reliability requirements of future power electronic devices. New interconnection technologies have to be developed and one of them is a low-temperature pressure-less silver sintering paste with nano silver technology.The joining strength, thermal conduction, electric conductivity and long-term reliability of nano-silver soldering paste under low temperature without pressure are studied, and then compared with AuSn bonder. It forms a strong, highly electrically and thermally conductive bond. Chip shear tests show that 200 °C is already sufficient to generate bonds comparable to solder and high-strength welding interface if the remaining parameters (r, t and T, respectively) are set correctly. However, the strength of the welding interface is only a necessary criterion as chip performance comes into play. Therefore, reliability performance of thermal shock test, high temperature storage test and low temperature storage test are run, which return superior reliability of the sintered samples.In addition, the electrical performance of the GaN power chip is tested. The nano-silver bonded sample is compared with the AuSn sintered sample. The saturated signal output power of these two packaging processes can reach 41dBm, and the leakage current is in the normal range of 0.2A~0.3A. Through reliability test, there is no significant change in these samples, and they all achieve normal electrical performance of the power amplifier component.Besides, thermal performance is one of the important parameters affecting the reliability of high-power devices. In the field of electronic assembly, it is of vital importance to reduce the junction temperature. Ordinary conductive adhesives have lower thermal conductivity which generally below 10 W•K−1•m−1 compared with the AuSn solder. Considering that, it is not suitable to join GaN power devices with the AuSn solder and conductive adhesives. In order to verify the heat dissipation performance of the nano-sintered silver solder samples, 20 samples are prepared for thermal imaging experiments. By observing and comparing the temperature distribution on the surface of nano-silver solder paste sintered chips and the AuSn sintered chips. There are some
随着电子设备变得越来越快,功能越来越多,它们的体积和重量同时也在缩小。这些因素表明集成电路的封装密度和热通量显著增加。有效的热管理将是确保这些器件具有高效率和可靠性的关键因素。氮化镓高电子迁移率晶体管(HEMT)的散热集中在微小的栅极手指上,对其热管理提出了巨大的挑战。为了提高GaN功率器件的散热能力,GaN功率器件多采用AuSn焊料焊接在散热片上。然而,AuSn焊料的导热系数仅为57 W•K−1•m−1,无法满足未来电力电子器件的可靠性要求。新的互连技术必须得到发展,其中之一是采用纳米银技术的低温无压银烧结浆料。研究了纳米银钎焊膏在低温无压力下的连接强度、热传导、电导率和长期可靠性,并与AuSn焊剂进行了比较。它形成了一个强大的,高导电性和导热性的纽带。切屑剪切试验表明,如果其余参数(分别为r, t和t)设置正确,200°C已经足以产生与焊料和高强度焊接界面相当的键合。然而,焊接界面的强度只是芯片性能发挥作用的必要标准。因此,进行了热冲击试验、高温贮存试验和低温贮存试验的可靠性性能测试,结果表明烧结试样具有优良的可靠性。此外,还对GaN功率芯片的电性能进行了测试。将纳米银结合样品与AuSn烧结样品进行了比较。这两种封装工艺的饱和信号输出功率可达41dBm,泄漏电流在0.2A~0.3A的正常范围内。通过可靠性测试,这些样品均无明显变化,均达到功放元件的正常电气性能。此外,热性能是影响大功率器件可靠性的重要参数之一。在电子组装领域,降低结温是至关重要的。与AuSn焊料相比,普通导电胶的导热系数较低,一般低于10 W•K−1•m−1。考虑到这一点,用AuSn焊料和导电粘合剂连接GaN功率器件是不合适的。为了验证纳米烧结银焊料样品的散热性能,制备了20个样品进行热成像实验。通过观察和比较纳米银锡膏烧结芯片和AuSn烧结芯片表面的温度分布。纳米银锡膏烧结晶片与AuSn烧结晶片的热阻存在一定的波动。虽然两种样品的热阻都集中在1.00°C•W−1至1.20°C•W−1之间,且加热功率相同,但纳米烧结银焊料的测试芯片最高温度降低了约16.7%。配有散热片,可散热50w功率。
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引用次数: 0
Simulation and Fatigue Damage Prediction for Board Level CBGA Solder Joint of LTCC-based SiP Module under Random Vibration Loading 基于ltcc的SiP模块板级CBGA焊点随机振动载荷仿真及疲劳损伤预测
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245193
Yangyang Li, Dong Dong, Hui Wang, Yilong Wu, Le Dong, Rongqing Xu
Aerospace/airborne military SiP modules have strong demand in high performance, multi-layer flexibility, embedded passive integration and airtightness requirement. Based on this, high-density integrated LTCC (Low Temperature Co-fired Ceramic) based SiP modules with ball grid array (BGA) I/Os show obvious superiority upon other packaging, often being soldered onto Digital/RF printed circuit board (PCB). However, board level ceramic BGA solder joints suffer sustaining random vibration mechanical stress under complicated conditions, for which the interconnection reliability need to be evaluated in advance. In this paper, 3D finite element analysis (FEA) models were developed using ANSYS workbench to understand the vibration-mechanical behavior of CBGA under random vibration test. Related materials properties were accurately obtained by DMA analysis. Simulated load boundaries are consistent with random vibration test bench. The natural frequencies of board level CBGA solder joint LTCC-based SiP specimen were obtained from modal analysis to confirm the vibration mode, based on which the subsequent random vibration simulations were conducted to mapping the equivalent stress/strain distribution of BGAs at interconnect solder joints in X/Y/Z directions. For fatigue prediction, the "three-zone technology" suggested by Steinberg, which taken into consideration both Gaussian distribution and Miner’s linear damage theory together, was used to predict fatigue life of CBGA solder joint under random vibration conditions.
航空航天/机载军用SiP模块在高性能、多层灵活性、嵌入式被动集成和气密性等方面有很强的需求。基于此,高密度集成LTCC(低温共烧陶瓷)的SiP模块与球栅阵列(BGA) I/ o相比,具有明显的优势,通常被焊接到数字/射频印刷电路板(PCB)上。然而,板级陶瓷BGA焊点在复杂条件下承受随机振动机械应力,需要对其互连可靠性进行提前评估。利用ANSYS workbench建立三维有限元分析(FEA)模型,了解CBGA在随机振动试验下的振动力学行为。通过DMA分析准确地获得了相关材料的性能。模拟载荷边界与随机振动试验台一致。通过模态分析获得板级CBGA焊点ltcc - SiP试样的固有频率,确定其振动模态,在此基础上进行随机振动模拟,绘制互连焊点处BGAs在X/Y/Z方向上的等效应力/应变分布。在疲劳预测方面,采用Steinberg提出的同时考虑高斯分布和Miner线性损伤理论的“三区技术”对CBGA焊点在随机振动条件下的疲劳寿命进行了预测。
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引用次数: 4
Plasma treatment achieving enhanced thermal conductivity of a thermal interface material 实现增强热界面材料导热性的等离子体处理
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.246349
Jiake Ma, Yu Wang, Ming Gao, L. Ren, Yifan Huang, R. Sun
In the modern microelectronic devices, one of the most important challenges is efficient removal of heat via thermal interface materials. The interface problem between fillers and polymer is an important issue that restricts the thermal conductivity of thermal interface materials. Herein, we introduce plasma treatment technology to treat the surface of carbon fibers (CFs) to improve the interfacial compatibility between CFs and polymer matrix. The introduced polar oxygen-containing functional groups can promote the intermolecular bonding and the compatibility between the CFs and polymer matrix after the plasma treatment, thereby improving the thermal conductivity of the composites. At the CFs loading of 30 wt%, the CFs/PDMS composites show a better through-plane thermal conductivity (0.43 Wm−1K−1) compared to that of untreated CFs/PDMS composites (0.35 Wm−1K−1). Plasma treatment technology which is environmentally friendly has less damage to fillers and has broad application prospects.
在现代微电子器件中,最重要的挑战之一是通过热界面材料有效地去除热量。填料与聚合物之间的界面问题是制约热界面材料导热性能的重要问题。本文采用等离子体处理技术对碳纤维表面进行处理,以改善碳纤维与聚合物基体的界面相容性。引入极性含氧官能团可以促进等离子体处理后的碳纤维与聚合物基体之间的分子间键合和相容性,从而提高复合材料的导热性。在CFs负载为30 wt%时,CFs/PDMS复合材料的通平面导热系数(0.43 Wm−1K−1)优于未处理的CFs/PDMS复合材料(0.35 Wm−1K−1)。等离子体处理技术对环境友好,对填料损伤小,具有广阔的应用前景。
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引用次数: 0
A Selective Grafting Method of Polyacrylic Acid Insulation Films on Silicon and Aluminum Surfaces for TSV-CIS Package TSV-CIS封装用聚丙烯酸绝缘膜在硅和铝表面的选择性接枝方法
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245760
J. Zhuo, Yang Liu, Lishuang Xiong, Yaofang Hu, Liming Gao, Ming Li
With the development of miniaturization of electronic devices, the demand for through-silicon via (TSV) technology has become increasingly urgent. Insulation technology with function of preventing copper diffusion is a key issue for TSV quality and reliability. In this paper, a one-step selective grafting method was reported for covalently grafting polyacrylic acid (PAA) insulation films only on silicon (Si) surface without grafting on aluminum (Al) surface. This method is implemented in an acidic aqueous solution with 4-nitrobenzene diazonium tetrafluoroborate (NBD), hydrofluoric acid (HF), sodium tripolyphosphate (STPP) and acrylic acid (AA) monomers. The existence of STPP in the solution can not only make Si more susceptible to corrosion and further facilitate grafting reaction of PAA films on Si substrate, but also form a layer of sodium fluoroaluminate precipitated film on the Al surface and further avoid the grafting reaction caused by NBD and corrosion of Al by HF. In addition, the effect of surfactants on PAA film formation was studied. Experiments shows that the combination of Sodium dodecyl sulfate (SDS) and sodium lauryl sulfate (SLS) as surfactant can obtain PAA films with great compactness and uniform thickness. This one-step selective grafting method on Si and Al surfaces will have great application prospects for CMOS image sensors (CIS) package when the aspect ratio of TSV increases.
随着电子器件小型化的发展,对硅通孔(TSV)技术的需求日益迫切。具有防止铜扩散功能的绝缘技术是保证TSV质量和可靠性的关键。本文报道了一种仅在硅(Si)表面共价接枝聚丙烯酸(PAA)绝缘膜而不接枝铝(Al)表面的一步选择性接枝方法。该方法是在含有4-硝基苯四氟硼酸重氮(NBD)、氢氟酸(HF)、三聚磷酸钠(STPP)和丙烯酸(AA)单体的酸性水溶液中实现的。溶液中STPP的存在不仅可以使Si更容易被腐蚀,进一步促进PAA膜在Si衬底上的接枝反应,还可以在Al表面形成一层氟铝酸钠沉淀膜,进一步避免NBD引起的接枝反应和HF对Al的腐蚀。此外,还研究了表面活性剂对PAA成膜的影响。实验表明,十二烷基硫酸钠(SDS)和十二烷基硫酸钠(SLS)复合作为表面活性剂可以得到致密性好、厚度均匀的PAA膜。随着TSV宽高比的增加,这种在Si和Al表面的一步选择性接枝方法在CMOS图像传感器封装中具有很大的应用前景。
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引用次数: 0
期刊
2019 20th International Conference on Electronic Packaging Technology(ICEPT)
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