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A rigorous diffraction theory for the optical properties of black chrome 黑铬光学性质的严格衍射理论
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90214-4
G.B. Smith, G.H. Derrick, R.C. McPhedran

Quantitative three-dimensional studies of morphology together with analysis of validity of quasistatic effective medium theories show the need for a diffraction treatment of the optical properties of solar selective black chrome. The spectral absorptance A(λ) is calculated for a doubly periodic modulation of chrome overcoated with Cr2O3 or a cermet of Cr2O3 and Cr metal. Various profiles, depths and coating thicknesses are used. Diffraction caused by the surface morphology explains the major features of A(λ) for black chrome. Internal structure is of secondary importance.

三维形貌的定量研究和准静态有效介质理论的有效性分析表明,需要对太阳选择性黑铬的光学性质进行衍射处理。计算了用Cr2O3或Cr2O3 - Cr金属陶瓷包覆铬的双周期调制的光谱吸收系数A(λ)。使用各种型材,深度和涂层厚度。由表面形貌引起的衍射解释了黑铬A(λ)的主要特征。内部结构是次要的。
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引用次数: 1
Two-process model of PSEE from scratched metals 刮伤金属PSEE的两过程模型
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90068-6
Hidemi Shigekawa, Shin-ichi Hyodo

When photoillumination is interrupted, the exoelectron emission from scratched metal samples decays quickly. When the illumination is resumed, however, the recovered exoelectron emission shoots up to a value significantly higher than before and then decreases gradually - a fact overlooked by previous researchers. To explain this “storage effect” in PSEE (photo- stimulated exoelectron emission), the authors have proposed a model, according to which there are two excitation processes competing during PSEE; one is the photoexcitation of the electrons at energy levels within the band gap of surface oxide layers, and the other is the tunneling transition of electrons in bulk metals to occupy the vacant levels of the oxide layers. From the rate equations based on this model and also from the PSEE data obtained for scratched aluminum and zinc, three kinds of quantities, i.e., the number of exo-active sites, the emission rate from the sites and the rate of activating exo-inactive sites, are successfully estimated. Other PSEE phenomena such as the peculiar emission intensity versus time profiles can also be elucidated in view of this model.

当光照射中断时,划痕金属样品的外电子发射迅速衰减。然而,当恢复照明时,恢复的外电子发射会急剧上升到一个明显高于之前的值,然后逐渐下降,这是以前的研究人员忽略的一个事实。为了解释PSEE(光激发外电子发射)中的这种“存储效应”,作者提出了一个模型,根据该模型,PSEE过程中存在两个相互竞争的激发过程;一种是表面氧化层带隙内能级电子的光激发,另一种是大块金属中电子的隧穿跃迁,以占据氧化层的空能级。根据基于该模型的速率方程和获得的划痕铝和锌的PSEE数据,成功地估计了三种数量,即外活性位点的数量、位点的发射率和外活性位点的激活率。其他PSEE现象,如特殊的发射强度随时间分布,也可以根据该模型来解释。
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引用次数: 0
Charge state fractions of sputtered Ni 溅射镍的电荷态分数
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90045-5
H.-J. Barth, E. Mühling, W. Eckstein

Energy distributions of sputtered Ni ions and neutrals were measured at non-normal incidence of Ne and Ar ions. Only the Ni particles sputtered in a binary collision can be used for the determination of the charge state fractions. Monte Carlo simulations (TRIM SP) were used for the absolute calibration of the total intensity in the binary recoil peak. The charged fractions are found to be less than 10% for energies below 5 keV. The positive fraction is about one order of magnitude larger than the negative and the doubly charged fractions.

在非正态入射下,测量了溅射Ni离子和中性离子的能量分布。只有在二元碰撞中溅射的Ni粒子才能用于电荷态分数的测定。采用蒙特卡罗模拟(TRIM SP)对双后坐力峰的总强度进行了绝对标定。发现能量低于5kev的带电分数小于10%。正电荷部分大约比负电荷部分和双电荷部分大一个数量级。
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引用次数: 1
The growth mode of Cu overlayers on Pd(100) Pd(100)上Cu覆层的生长方式
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90186-2
H. Asonen, C. Barnes, A. Salokatve, A. Vuoristo

The growth mode of Cu deposits on clean Pd(100) has been studied by means of LEED. AES and angular resolved ultraviolet photoemission spectroscopy. Auger signal versus deposition time curves showed that the growth follows a layer-by-layer mode for two monolayers after which it involves formation of islands as in the Stranski-Krastanov model. Despite the large lattice mismatch between Cu and Pd (7.7%) the substrate p(1×1) LEED pattern persisted with clear distinct spots at least up to the equivalent coverage of 4 ML indicating that Cu starts to grow epitaxially with the Pd lattice constant (pseudomorphic growth). Photoemission results show that the spectrum of the Cu/Pd(100) system does not converge to that of bulk Cu(100) until about 65 ML equivalent coverage. The spectrum below that coverage is composed of separate contributions from the thick regions and from the pseudomorphic basic slab.

利用LEED技术研究了洁净钯(100)表面Cu沉积的生长模式。原子发射光谱和角分辨紫外光谱学。俄歇信号与沉积时间曲线表明,两层单层的生长遵循一层接一层的模式,之后就像斯特兰斯基-克拉斯坦诺夫模型中一样,它涉及到岛屿的形成。尽管Cu和Pd之间存在较大的晶格失配(7.7%),但衬底p(1×1) LEED模式仍然存在清晰的斑点,至少达到4 ML的等效覆盖范围,这表明Cu开始随着Pd晶格常数(伪晶生长)外延生长。光电发射结果表明,Cu/Pd(100)体系的光谱直到65 ML左右的等效覆盖范围才收敛到体Cu(100)的光谱。该覆盖范围以下的频谱由来自厚区和伪晶基板的单独贡献组成。
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引用次数: 16
Improvement in the adhesion of thin films to semiconductors and oxides using electron and photon irradiation 利用电子和光子辐照改善薄膜对半导体和氧化物的附着力
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90238-7
J. Gazecki, G.A. Sai-Halasz , R.G. Elliman , A. Kellock, G.L. Nyberg, J.S. Williams

The adhesion enhancement of evaporated metal films on silicon and silicon dioxide substrates following electron and photon irradiation has been investigated. It is shown that an electric field applied across the metal-oxide-semiconductor interface during electron irradiation has a dramatic influence on adhesion enhancement. For photon irradiation, comparative adhesion measurements were undertaken as a function of increasing metal film thickness and different irradiation doses, for photon energies <4, <6 and 10.2 eV. Metal-oxide-semiconductor structures were also biased during photon irradiation to indicate the role of secondary processes such as charge flow to the interface from the oxide. Results indicate that adhesion enhancement can be significant even if the metal film thickness exceeds the photon penetration depth, supporting the view that low-energy secondary excitations are responsible for the stronger bonding configurations. It was also concluded that both electron and photon irradiation give rise not only to increased adhesion but also to increased cohesion within the metal film.

研究了电子和光子辐照对蒸发金属薄膜在硅和二氧化硅衬底上的附着力增强的影响。结果表明,在电子辐照过程中,施加在金属-氧化物-半导体界面上的电场对金属-氧化物-半导体的粘附增强有显著的影响。对于光子辐照,在光子能量为4、6和10.2 eV时,作为增加金属膜厚度和不同辐照剂量的函数,进行了比较粘附测量。在光子辐照过程中,金属-氧化物-半导体结构也有偏倚,以表明二次过程的作用,如从氧化物流向界面的电荷流。结果表明,即使金属膜厚度超过光子穿透深度,附着力也会显著增强,这支持了低能二次激发导致更强的键构型的观点。电子和光子辐照不仅增加了金属膜的附着力,而且增加了金属膜内的内聚力。
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引用次数: 18
Characteristics of moisture-sensitive Ta2O5/TiO2 ceramic films 水敏Ta2O5/TiO2陶瓷膜的特性
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90216-8
Tatsuo Yamamoto, Hiromi Shimizu

This paper reports on the degradation characteristics of moisture-sensitive Ta2O5/TiO2 ceramic films, whose electrical capacitances change with relative humidity. The fabrication process and the capacitance characteristics of the tested samples are described. The durability tests against the temperature and humidity cycle and against 10 ppm CO or SO2 gas in the atmosphere have been carried out. In order to examine the interaction between water molecules and toxic gases on the ceramic surface, the electrical capacitance and resistance changes are investigated using the samples placed in a vacuum containing traces of CO or SO2 gas to which pure water is subsequently added. Finally, possible physicochemical effects on the electrical characteristics of the ceramic films are proposed.

研究了电容随相对湿度变化的湿敏Ta2O5/TiO2陶瓷膜的降解特性。介绍了样品的制备工艺和电容特性。对温度和湿度循环以及大气中10ppm CO或SO2气体进行了耐久性测试。为了研究水分子与陶瓷表面有毒气体之间的相互作用,将样品放置在含有微量CO或SO2气体的真空中,随后加入纯水,研究了电容和电阻的变化。最后,提出了可能对陶瓷薄膜电学特性产生影响的物理化学因素。
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引用次数: 0
Effect of hydrogen pressure on the deposition of amorphous silicon films by tetrode RF sputtering 氢压力对四极射频溅射沉积非晶硅薄膜的影响
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90222-3
Yasuo Gekka, Hiroshi Asai, Tsuyoshi Temma, Yoh-ichi Yasumura

Hydrogenated amorphous silicon (a-Si:H) films were deposited on the surface of quartz substrates using the tetrode RF sputtering technique. The conditions for film deposition were controlled by changing the pressure ratio of hydrogen to argon gas, ξ, in the atmospheric gas. We studied the dependence of the optical and electrical properties of deposited films on ξ, and discuss the complex changes of optical absorption coefficient, α, and electrical conductivity, σ, at ξ ≧ 20% in terms of the silicon-hydrogen configuration from the results of infra-red absorption and SEM measurements.

采用四极射频溅射技术在石英衬底表面制备了氢化非晶硅(a-Si:H)薄膜。通过改变大气中氢气与氩气的压力比ξ来控制薄膜沉积的条件。我们研究了沉积薄膜的光电性能与ξ值的关系,并从红外吸收和扫描电镜的测量结果讨论了在ξ≧20%时硅氢结构的光学吸收系数α和电导率σ的复杂变化。
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引用次数: 3
Destructive and non-destructive depth profiling using ESCA 使用ESCA进行破坏性和非破坏性深度剖面分析
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90062-5
K.L. Smith, J.S. Hammond

While the chemical analysis of a surface has become commonplace using a variety of techniques including Auger Electron Spectroscopy (AES) and Electron Spectroscopy for Chemical Analysis (ESCA), it is often advantageous to differentiate between the chemistry of the surface and the near surface. The method used to make this distinction depends on the thickness of the layers to be differentiated. If the combined thickness of the layers is greater than 100 Å, then the surface must be physically removed by ion bombardment before the subsurface components can be identified. An example of the chemistry revealed by this method is given in a sputter profile of an eight layer, 3000 Å, metal magnetic tape. The internal interfaces show more oxidation than the bulk of the metal layers. If the combined thickness of the layers is less than 100 Å, then the surface and subsurface components can be identified by non-destructive techniques. This is accomplished by using high energy excitation or by angle resolved studies. Examples will be shown of the change in the surface and near surface chemistry of polystyrene as it is treated in H2 and H2O plasmas. The degree of oxidation of the polymer surface can be monitored as a function of reaction depth using angle resolved ESCA. Extending the range of angle resolved studies by using Au Mα X-rays is shown for a native oxide on silicon.

虽然使用包括俄歇电子能谱(AES)和电子能谱化学分析(ESCA)在内的各种技术对表面进行化学分析已经变得司空见惯,但区分表面和近表面的化学性质通常是有利的。用于进行这种区分的方法取决于要区分的层的厚度。如果层的总厚度大于100 Å,则必须通过离子轰击物理去除表面,然后才能识别地下成分。以八层3000 Å金属磁带的溅射剖面为例,给出了该方法所揭示的化学性质。内部界面比大部分金属层表现出更多的氧化。如果层的总厚度小于100 Å,则可以通过非破坏性技术识别表面和次表面成分。这是通过使用高能激发或角分辨研究来完成的。当聚苯乙烯在H2和H2O等离子体中处理时,将展示其表面和近表面化学变化的例子。利用角分辨ESCA可以监测聚合物表面的氧化程度作为反应深度的函数。用Au - m - α x射线扩展了硅上天然氧化物的角度分辨研究范围。
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引用次数: 0
Comparison of properties of thin films of CuInSe2 and its alloys produced by evaporation, RF-sputtering and chemical spray pyrolysis 蒸发、射频溅射和化学喷雾热解制备CuInSe2薄膜及其合金的性能比较
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90197-7
J.J. Loferski, C. Case, M. Kwietniak , P.M. Sarro , L. Castaner , R. Beaulieu

This paper summarizes a six-year research program aimed at preparation and characterization of thin films of the chalcopyrite semiconductor CuInSe2 suitable for photovoltaic solar cells and other semiconductors devices. The thin film deposition methods used were evaporation, flash evaporation, RF-sputtering and chemical spray pyrolysis. Problems with producing films of reproducible properties by these methods are discussed. Gaps in our knowledge of the dependence of the opto-electronic properties of CuInSe2 crystals and films on structural defects and other imperfections are pointed out.

本文总结了一项为期六年的研究计划,旨在制备和表征适用于光伏太阳能电池和其他半导体器件的黄铜矿半导体CuInSe2薄膜。薄膜沉积方法有蒸发法、闪蒸法、射频溅射法和化学喷雾热解法。讨论了用这些方法制备可重复性薄膜的问题。指出了我们对CuInSe2晶体和薄膜的光电性质与结构缺陷和其他缺陷的依赖关系的认识上的空白。
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引用次数: 8
Determination of tunneling transmission probability through thin oxide layer in a tunnel MIS system 隧道MIS系统中薄氧化层隧穿传输概率的测定
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90235-1
A.G. Nassibian, A.K. Duong

A new method is developed to determine the tunneling transmission probability through a thin oxide layer by making use of the switching characteristic of a metal-tunnel oxide-semiconductor thyristor. It is found that the tunneling transmission probability is very sensitive to oxide thickness and is dependent on the voltage drop across the oxide layer.

利用金属-隧道氧化物-半导体晶闸管的开关特性,提出了一种确定薄氧化层隧穿传输概率的新方法。发现隧道传输概率对氧化层厚度非常敏感,并且依赖于氧化层上的电压降。
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引用次数: 2
期刊
Applications of Surface Science
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