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2018 7th Electronic System-Integration Technology Conference (ESTC)最新文献

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Controlling BGA joint microstructures using seed crystals 利用种子晶体控制BGA接头微结构
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546436
Z.L. Ma, S. Belyakov, J. Xian, T. Nishimura, K. Sweatman, C. Gourlay
This paper overviews methods to catalyse the nucleation of tin in BGA solder joints and explores the potential of engineering tin nucleation to control joint microstructures. A range of heterogeneous nucleants for Sn is overviewed. It is shown that CoSn3, PtSn4, PdSn4 and IrSn4 can all catalyse Sn nucleation and substantially reduce the nucleation undercooling. The nucleation mechanisms are discussed in terms of a crystallographic lattice matching analysis, where each nucleant is shown to have good planar matching across the closest packed planes in each crystal structure. We then demonstrate an approach to incorporate the nucleants into solder joints as seed crystals to control the orientation of the tin nucleation event. With this approach, it is possible to generate single-crystal joints all with the same c-axis orientation.
本文综述了催化BGA焊点锡成核的方法,并探讨了工程锡成核控制焊点微观组织的潜力。概述了锡的一系列非均相成核剂。结果表明,CoSn3、PtSn4、PdSn4和IrSn4均能催化Sn成核,并显著降低了成核过冷度。根据晶体学的晶格匹配分析讨论了成核机制,其中每个成核剂在每个晶体结构中最接近的排列平面上具有良好的平面匹配。然后,我们演示了一种将成核剂作为种子晶体加入焊点以控制锡成核事件的方向的方法。通过这种方法,可以生成具有相同c轴方向的单晶接头。
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引用次数: 0
Organic packaging with integrated NFC for harsh environments 有机包装集成NFC恶劣环境
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546424
Sven Johannsen, E. Bihler, M. Hauer
Liquid Crystal Polymer (LCP), a thermoplastic dielectric material with superior material properties can be used both as the substrate material and as the encapsulation for small miniaturized electronic packages and modules. Very small form factors can be obtained by integrating the NFC coil into the LCP substrate. Encapsulation in LCP can provide hermetically sealed and chemically inert miniaturized electronic modules for sensors applications in medical, industrial and automotive markets.
液晶聚合物(Liquid Crystal Polymer, LCP)是一种热塑性介质材料,具有优异的材料性能,既可以作为衬底材料,也可以作为小型微型化电子封装和模块的封装材料。通过将NFC线圈集成到LCP基板中,可以获得非常小的外形因素。LCP的封装可以为医疗、工业和汽车市场的传感器应用提供密封和化学惰性的小型化电子模块。
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引用次数: 0
The SiP Company [Advertisement] SiP公司[广告]
Pub Date : 2018-09-01 DOI: 10.1109/estc.2018.8546439
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引用次数: 0
Influences of SMD Package and Substrate Warpage on Quality and Reliability –Measurement, Effects and Counteractions SMD封装和基板翘曲对质量和可靠性的影响——测量、影响和对策
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546438
H. Wohlrabe, K. Meier, Oliver Albrecht
The coplanarity difference between a substrate or printed circuit board and a SMD package is a very important characteristic. It depends on the warpage of package and substrate and is caused by their heterogeneous build up. The materials involved – namely polymers, metals, ceramics etc. – come with differing coefficients of thermal expansion. This leads to temperature depending deformations due to thermal loads during assembly or field use. These warpage called deformations appear as twist and bow. A significant coplanarity or warpage mismatch can lead to quality issues during manufacturing. Solder joint shorts, pad cratering and open solder joints like head-inpillow or pin-in-pillow are examples of typical failure types. Also, additional mechanical stress especially in z-direction may occur in the solder joints and cause early failure under use.
基板或印刷电路板与SMD封装之间的共平面性差异是一个非常重要的特性。它取决于封装和衬底的翘曲,是由它们的异质堆积引起的。所涉及的材料-即聚合物,金属,陶瓷等-具有不同的热膨胀系数。这导致在装配或现场使用期间由于热负荷而产生的温度依赖变形。这些被称为变形的翘曲表现为扭曲和弯曲。明显的共面性或翘曲不匹配会导致制造过程中的质量问题。焊点短路,焊盘凹坑和开放焊点,如头枕或针枕是典型的失效类型的例子。此外,额外的机械应力,特别是在z方向上,可能会出现在焊点上,并在使用过程中导致早期失效。
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引用次数: 2
High Density Interconnect Processes for Panel Level Packaging 面板级封装的高密度互连工艺
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546431
A. Ostmann, F. Schein, M. Dietterle, Marc Kunz, K. Lang
Advanced packaging technologies like wafer-level fan-out and 3D System-in-Package (3D SIP) are rapidly penetrating the market of electronic components. A recent trend to reduce cost is the extension of processes to large manufacturing formats, called Panel Level Packaging (PLP). In a consortium of German partners from industry and research advanced technologies for PLP are developed. The project aims for an integrated process flow for 3D SIPs with chips embedded into an organic laminate matrix. At first 6x6 mm2 chips with Cu bumps $( 100 mu mathrm{m}$ pitch) are placed into holes of a PCB core layer with low coefficient of thermal expansion (CTE). They are embedded by vacuum lamination of thin organic films, filling the small gap down to $15 mu mathrm{m}$ between chips and core. The core provides fiducials for a local alignment of following processes, limits die shift during embedding and gives a remarkable handling robustness. Developments are initially performed on a 305x256 mm2 panel format, aiming for a final size of 600x600 mm2. On the top side of embedded chips $mathrm{a}25 mu mathrm{m}$ dielectric film is applied and the bump surface is exposed by plasma etching. By sputtering and electroplating of Cu contacts to the chips are formed without via opening. High aspect ratio vias around the chip to lower interconnect layers are formed by UV laser drilling. At via diameters of $17 mu mathrm{ma}$ drill hole depth of $74 mu mathrm{m}$ was achieved (aspect ration 4.4:1). Currently a microvia filling by Cu plating using a newly developed electrolyte could be demonstrated for aspect ratios up to 2.5:1. Then in $mathrm{a}7 mu mathrm{m}$ dry film photo resist forming of $4 mu mathrm{m}$ RDL structures was demonstrated by a newly developed Laser Direct Imaging (LDI) machine.
晶圆级扇出和3D系统级封装(3D SIP)等先进封装技术正在迅速渗透电子元件市场。最近降低成本的趋势是将工艺扩展到大型制造格式,称为面板级封装(PLP)。在一个由德国工业和研究合作伙伴组成的联盟中,开发了PLP的先进技术。该项目旨在将芯片嵌入有机层压板矩阵的3D sip集成工艺流程。首先,将带有Cu凸点$(100 mu mathm {m}$间距)的6x6 mm2芯片放置在具有低热膨胀系数(CTE)的PCB核心层的孔中。它们通过有机薄膜的真空层压嵌入,填补了芯片和核心之间的小间隙,小到15 mu m}$。核心为以下过程的局部对齐提供了基准,限制了嵌入过程中的模具移位,并提供了显着的处理鲁棒性。开发最初是在305x256 mm2的面板格式上进行的,目标是最终尺寸为600x600 mm2。在嵌入式芯片$mathrm{a}的顶部涂覆25 mu mathrm{m}$介质膜,并通过等离子体刻蚀暴露凹凸面。通过溅射镀铜,在芯片上形成无孔触点。通过紫外激光钻孔,在芯片周围形成高纵横比的通孔,以降低互连层。孔径为$17 mathrm{m}$时,钻孔深度为$74 mathrm{m}$(纵横比为4.4:1)。目前,使用新开发的电解质镀铜的微孔填充可以证明宽高比高达2.5:1。然后在$ $mathrm{a}7 mu mathrm{m}$干膜光刻胶中,用新研制的激光直接成象(LDI)机演示了$ $4 mu mathrm{m}$ RDL结构的形成过程。
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引用次数: 5
Board Level Reliability assessment of Wafer Level Chip Scale Packages for SACQ, a lead-free solder with a novel life prediction model 具有新颖寿命预测模型的无铅焊料SACQ的晶圆级芯片级封装的板级可靠性评估
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546504
B. Muthuraman, B. Cañete
Smart devices nowadays require more functionality in the integrated circuits with smaller packages. Wafer Level Chip Scale Package (WLCSP) is one of a best choice in the industry due to their small size and functionalitz. However, the reliability of such WLCSPs is very critical as they are used in consumer products. With new solder alloy material, SACQ (Sn92.45% / Ag4% / Cu 0.5% / Ni 0.05% / Bi 3%), it is vital to have a reliable life prediction mode for the Wafer Level Chip Scale package family. At the current industry trend, there is no much reliability assessment of WLCSPs using this new solder alloy. Even, if some exists, the accuracy between the board level reliability qualification test and numerical simulation is still more than 10% tolerance. In this work, a fatigue model is developed for SACQ for wafer level package family with the help of board level reliability qualification test; statistical approach and numerical approach using Finite Element Method (FEM) leading to a close correlation between the measured characteristic life time from temperature cycling on board (TCoB) tests and predicted life from numerical method. In this paper, a fatigue life prediction model for SACQ is introduced after studying five different wafer-level chip scale packages (WLCSP) subjected to Board Level Reliability (BLR) Temperature Cycling Qualification Tests (TCT). Number of solder interconnects (IOs) or pincounts in the wafer level packages ranges from 182 IOs till 360IOs. Temperature cycling range between - 40°C till +85°C is applied to samples, until significant solder joint fatigue failures are observed. A Weibull lifetime model is used to describe the BLR qualification test data. In order to validate BLR-TCT qualification, several numerical simulations are carried out based on Finite Element Method (FEM). Anand viscoplasticity material constitutive law is used for SACQ. Increment of volume averaged inelastic strain energy density is used as damage parameter in order to determine the fatigue life prediction model. This new fatigue life prediction model developed demonstrates that the relative error of the predicted life time for the wafer level chip scale package (WLCSPs) with the new lead-free solder is within relative error of 10% with respect BLR-TCT tests. Such a close correlation between measurement and numerical simulation for SACQ solder is illustrated first time in industry for WLCSP package family. This research work can answer the reliability challenges faced in WLCSP packages with SACQ as solder material and the future work will be based on impact of underfills on WLCSP device reliability with SACQ as solder material.
如今的智能设备需要更小封装的集成电路更多功能。晶圆级芯片规模封装(WLCSP)由于其小尺寸和功能性而成为业界的最佳选择之一。然而,这种wlcsp的可靠性是非常关键的,因为它们用于消费产品。采用新的钎料合金材料SACQ (Sn92.45% / Ag4% / Cu 0.5% / Ni 0.05% / Bi 3%),对于晶圆级芯片规模封装系列而言,拥有可靠的寿命预测模式至关重要。在目前的行业趋势下,使用这种新型焊料合金的wlcsp的可靠性评估并不多。即使存在一定误差,板级可靠性鉴定试验与数值模拟之间的误差仍在10%以上。本文利用板级可靠性鉴定试验,建立了圆片级封装族SACQ的疲劳模型;利用有限单元法(FEM)将统计方法和数值方法相结合,得出板载温度循环(TCoB)试验的实测特征寿命与数值方法的预测寿命之间具有密切的相关性。本文通过对5种不同晶圆级芯片规模封装(WLCSP)进行板级可靠性(BLR)温度循环验证试验(TCT)的研究,建立了SACQ的疲劳寿命预测模型。晶圆级封装中的焊接互连(IOs)或引脚数从182个IOs到360个IOs不等。温度循环范围为- 40°C至+85°C,适用于样品,直到观察到明显的焊点疲劳失效。采用威布尔寿命模型对BLR验证试验数据进行描述。为了验证BLR-TCT的合格性,进行了基于有限元法的数值模拟。SACQ采用粘塑性材料本构法。采用体积平均非弹性应变能密度增量作为损伤参数,确定疲劳寿命预测模型。所建立的疲劳寿命预测模型表明,采用新型无铅焊料的晶圆级芯片级封装(WLCSPs)的疲劳寿命预测相对误差在BLR-TCT测试的10%以内。这是WLCSP封装家族首次在工业上证明SACQ焊料的测量与数值模拟之间的密切联系。本研究工作可以解决以SACQ为钎料的WLCSP封装所面临的可靠性挑战,未来的工作将基于衬底填充物对以SACQ为钎料的WLCSP器件可靠性的影响。
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引用次数: 3
Miniaturized Printed Wiring Board Consisting of Polyimide Layers and Three Embedded Integrated Circuit Chips in Stacked Configuration 由聚酰亚胺层和三个嵌入式集成电路芯片堆叠构成的小型化印刷线路板
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546444
S. Sato, Koji Munakata, Masakazu Sato, N. Ueta, Yoshio Nakao, O. Nakao
In the history of electronics packaging, continuous efforts have been made to achieve seemingly conflicting goals of reducing the size of electronic devices and increasing theirfunctionality. With more sophisticated packages, wearable and portable devices in particular are required to be more compact as well as reliable. To reduce the size of a package, embeddingIC (integrated circuit) chips inside is an effective solution instead of placing them on the surface. Based on this thought, we have developed a technology to produce WABE package}}$^{mathbf{TM}}$(wafer and board level device embedded package). The packages are produced by combining thin polyimide film layers and backgrinded IC chips. WABE Package technology has an unmatched feature thatit can reduce the footprint of a package drastically by stacking IC chips if multiple chips need to be embedded in the package. Even if the package has two or morechips, the increase in the thickness of the chip-stack structure is very limited because each layer is so thin. Another feature of the technology is parallel fabrication of each polyimide-based layer with vias filled with a conductive material for interconnection. The individual and simultaneous preparation of layers enables “one-step” colamination, which has an advantagethat only one-time press is needed even though the number of layers increases due to the chip-stack structure. This report describes the fabrication of aprototype circuit board that consists of 14 copper layers and 3 IC chips embedded vertically in them. The board is less than 0.9 mm in thickness even though it includes a large number of layers. We also report the results of various reliability testing conducted on the package. These results were obtained by electrical measurements of daisy chain patterns formed between some of the layers. The prototype showed high reliability under moisture and heat test conditions simulating those in autoclave sterilization and heat-shock test conditions simulating those in the production process. These results show that the WABE Package technology that allows three chips to be embedded vertically in the package is the most promising packaging technology for extremely miniaturizing electronic circuits for medical and wearable electronics.
在电子封装的历史上,不断的努力已经实现了减少电子设备的尺寸和增加其功能的看似矛盾的目标。随着封装越来越复杂,可穿戴和便携式设备尤其需要更加紧凑和可靠。为了减小封装的尺寸,在内部嵌入集成电路芯片是一种有效的解决方案,而不是将它们放在表面上。基于这一思想,我们开发了一种生产WABE封装}}$^{mathbf{TM}}$(晶圆和板级器件嵌入式封装)的技术。这种封装是由聚酰亚胺薄膜层和背景IC芯片结合而成的。WABE封装技术具有无与伦比的特点,如果需要在封装中嵌入多个芯片,则可以通过堆叠IC芯片大幅减少封装的占地面积。即使封装有两个或更多的芯片,芯片堆栈结构厚度的增加是非常有限的,因为每一层都很薄。该技术的另一个特点是将每个聚酰亚胺基层与填充导电材料用于互连的过孔平行制造。单独和同时制备层可以实现“一步”叠层,其优点是即使由于芯片堆栈结构而增加层数,也只需要一次压印。本报告描述了一个原型电路板的制造,该电路板由14个铜层和3个垂直嵌入其中的IC芯片组成。虽然包含了大量的层数,但该板的厚度小于0.9毫米。我们还报告了对包装进行的各种可靠性测试的结果。这些结果是通过在一些层之间形成的菊花链图案的电测量得到的。该样机在模拟高压灭菌的湿热试验条件和模拟生产过程的热冲击试验条件下均表现出较高的可靠性。这些结果表明,可以在封装中垂直嵌入三个芯片的WABE封装技术是用于医疗和可穿戴电子产品的极小型化电子电路的最有前途的封装技术。
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引用次数: 0
High Precision Numerical and Experimental Thermal Studies of Microelectronic Packages in Still Air Chamber Tests 微电子封装在静气室测试中的高精度数值和实验热研究
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546346
P. M. Souare, M. K. Touré, Stéphanie Allard, B. Borzou, J. Sylvestre, B. Foisy, É. Duchesne
In order to contribute to a better understanding of the relevant thermal phenomena, we have performed a high precision comparison of a microelectronic package cooled by natural convection with experimental data obtained in the Still Air JEDEC configuration. The heat transfer problem was solved by a bidirectional coupling method iterating between the solid domain and the fluid domain. At the first iteration, the conduction heat transfer in the solid domain was solved using convection coefficients estimated from empirical relations available from the literature, for each solid-fluid interface. The numerical temperature field so-obtained at the solid-fluid interface was then applied as a boundary condition for the numerical simulation of the of air flow around the package by computational fluid dynamics (CFD), to find the velocity, pressure and temperature fields in the fluid domain. The convection coefficient of each element at the solid-fluid interfaces was then computed from the heat flux in the CFD results. Finally, the convection coefficients obtained from the CFD analysis were applied back to the solid domain, and the same procedure was repeated iteratively until the solution converged to a stable temperature field. The comparison between the heat transfer coefficients obtained from the CFD method and those obtained from the empirical relations shows significant differences, thus validating the utility and effectiveness of the iterative approach to obtain precise thermal results. The numerical results for temperature were compared with measurements from a test vehicle. The experiments were carried out under natural convection according to the JEDEC standards in a still air chamber for the horizontal and vertical positioning of the test vehicle. The large difference in temperature between the walls of the still air chamber and the test vehicle leads to large errors in predicted temperatures if the radiation effects are not properly treated in the heat transfer problem. The junction temperatures obtained with the numerical simulations in the vertical and horizontal orientations were in excellent agreement with the experimental measurements, with an absolute difference of less than 1 °C. Such agreement demonstrates the accuracy of our methodology for the modeling of natural heat transfer for microelectronic packages mounted on printed circuit boards in the horizontal and vertical orientations.
为了更好地理解相关的热现象,我们对自然对流冷却的微电子封装与在静止空气JEDEC配置下获得的实验数据进行了高精度比较。采用固体和流体之间的双向耦合迭代法求解传热问题。在第一次迭代中,利用从文献中获得的经验关系估计的对流系数,对每个固-流界面求解固体域的导热传热。将得到的固流界面数值温度场作为边界条件,利用计算流体力学(CFD)对包体周围的气流进行数值模拟,得到包体内部的速度场、压力场和温度场。然后根据CFD结果中的热流密度计算出各单元在固流界面处的对流系数。最后,将CFD分析得到的对流系数应用到固体区域,并重复相同的过程,直到解收敛到稳定的温度场。通过CFD方法计算的换热系数与经验关系式计算的换热系数的比较,发现了明显的差异,从而验证了迭代法在获得精确热结果方面的实用性和有效性。数值计算结果与试验车辆的测量结果进行了比较。实验在自然对流条件下,按照JEDEC标准在静止气室进行,用于测试车辆的水平和垂直定位。由于静气室壁面温度与试验车壁面温度存在较大差异,如果在传热问题中不适当处理辐射效应,将导致预测温度误差较大。数值模拟得到的垂直和水平方向结温与实验测量值吻合良好,绝对差值小于1°C。这种一致性证明了我们的方法在水平和垂直方向上安装在印刷电路板上的微电子封装的自然传热建模的准确性。
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引用次数: 3
TCB optimization for stacking large thinned dies with 40 and 20 μm pitch microbumps 40 μm和20 μm微凸块厚度的TCB优化
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546425
C. Gerets, J. Derakhshandeh, P. Bex, M. Lofrano, V. Cherman, T. Cochet, K. Rebibis, G. Beyer, Andy Miller, E. Beyne
In this paper optimization process of D2W (Die to Wafer) TCB (Thermal Compression Bonding) stacking for thinned, warped and large dies are investigated. TCB related characteristics of WLUF (Wafer Level Underfill) is studied in detail by both analytical calculations/simulations and insitu deformation measurement techniques and then the results are used to lower the required bond force of TCB profile. Further optimizations include the enhancement of the interface temperature uniformity, and modification of the top bond tool called Thermode. These optimizations result in good flattening of the thin and warped large die, and uniform pressure distribution during the TCB process. The large stacked dies show very low warpage, very good joint formation between TSVs and 20um pitch microbumps and close to 100{%} electrical yield.
本文研究了薄型、翘曲型和大型模具的D2W (Die to Wafer) TCB (Thermal Compression Bonding)叠层优化工艺。通过分析计算/模拟和原位变形测量技术对WLUF (Wafer Level Underfill)的TCB相关特性进行了详细的研究,并将研究结果用于降低TCB剖面所需的粘结力。进一步的优化包括增强界面温度均匀性,以及修改称为Thermode的顶部键合工具。这些优化的结果使薄型和翘曲型大模具在TCB过程中具有良好的压平性和均匀的压力分布。大型叠合模具有非常低的翘曲变形,tsv和20um节距微凸点之间的连接形成非常好,电导率接近100%。
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引用次数: 2
Influence of environmental factors like temperature and humidity on MEMS packaging materials. 温度、湿度等环境因素对MEMS封装材料的影响
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546484
Mahesh Yalagach, P. Fuchs, I. Mitev, T. Antretter, M. Feuchter, A. Wolfberger, Tao Qi
Microelectromechanical systems (MEMS) and MEMS packaging solutions are gaining increased interests for electronic applications. These packages feature a variety of polymeric materials and composites e.g. fiber reinforced polymer laminates, insulating and conductive adhesives. Due to the sensitivity of MEMS devices to mechanical stress and environmental factors such as temperature and humidity, the influence of these factors on the device’s performance needs to be accounted for. In this contribution, a fabric woven glass fiber reinforced epoxy resin (BT epoxy resin) and two chosen adhesives commonly used in semiconductor and MEMS packaging have been considered and their dependency on environmental parameters have been studied with different testing methods. Based on the measured material properties a simulation process predicting the package under defined environmental loads is presented.
微机电系统(MEMS)和MEMS封装解决方案在电子应用中获得了越来越多的兴趣。这些包装具有各种聚合物材料和复合材料,如纤维增强聚合物层压板,绝缘和导电粘合剂。由于MEMS器件对机械应力和环境因素(如温度和湿度)的敏感性,需要考虑这些因素对器件性能的影响。在这篇文章中,考虑了一种织物编织玻璃纤维增强环氧树脂(BT环氧树脂)和半导体和MEMS封装中常用的两种粘合剂,并通过不同的测试方法研究了它们对环境参数的依赖性。在测量材料性能的基础上,提出了在规定的环境载荷下预测包装的模拟过程。
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引用次数: 3
期刊
2018 7th Electronic System-Integration Technology Conference (ESTC)
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