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Accurate band alignment of sputtered Sc2O3 on GaN for high electron mobility transistor applications 高电子迁移率晶体管应用中氮化镓上溅射 Sc2O3 的精确带排列
IF 1.9 4区 工程技术 Q2 Physics and Astronomy Pub Date : 2024-05-13 DOI: 10.1088/1361-6641/ad4abe
P. Das, H. Finch, Holly. J. Edwards, S. Almalki, Vin Dhanak, Rajat Mahapatra, I. Mitrovic
Sc2O3 is a promising gate dielectric for surface passivation in GaN-based devices. However, the interface quality and band alignment of sputtered Sc2O3 on GaN is not fully explored. In this work, X-ray photoelectron spectroscopy (XPS) and variable angle spectroscopic ellipsometry (VASE) wereperformed to extract the discontinuities in the valence and conduction band of Sc2O3/GaN system. Sc2O3 films were deposited on GaN using radio frequency sputtering. The valence band offset of Sc2O3/GaN was deterimened to be 0.76±0.1 eV using Kraut's method. The Sc2O3band gap of 6.03± 0.25 eV has been measured using O 1s energy loss spectroscopy. The electron affinity measurements of GaN and Sc2O3 using XPS secondary electron cut-off spectra provide additional degree of accuracy to derived band line-up for Sc2O3/GaN interface. The band alignment results are compared with literature values of bandoffsets determined experimentally and theoretically for differently grown Sc2O3films on GaN.
Sc2O3 是一种很有前途的栅电介质,可用于氮化镓基器件的表面钝化。然而,对 GaN 上溅射 Sc2O3 的界面质量和能带排列还没有进行充分的探索。本研究采用 X 射线光电子能谱 (XPS) 和变角光谱椭偏仪 (VASE) 来提取 Sc2O3/GaN 系统价带和导带的不连续性。Sc2O3 薄膜通过射频溅射沉积在 GaN 上。利用克劳特方法确定了 Sc2O3/GaN 的价带偏移为 0.76±0.1 eV。利用 O 1s 能量损失光谱法测得 Sc2O3 带隙为 6.03± 0.25 eV。利用 XPS 二次电子截止谱对 GaN 和 Sc2O3 的电子亲和性进行了测量,为 Sc2O3/GaN 界面的带排列提供了更高的精确度。带排列结果与文献中针对 GaN 上不同生长方式的 Sc2O3 薄膜通过实验和理论确定的带集值进行了比较。
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引用次数: 0
Design considerations for a long-wavelength InAsSb detector diode 长波长 InAsSb 检测器二极管的设计考虑因素
IF 1.9 4区 工程技术 Q2 Physics and Astronomy Pub Date : 2024-05-13 DOI: 10.1088/1361-6641/ad4a6c
Stefan Svensson, William A. Beck, D. Donetski, G. Kipshidze, G. Belenky
InAsSb can absorb light across the entire long wavelength range (8-12 μm) and shares many of the other relevant basic materials properties of HgCdTe, the current incumbent detector technology for this band. We discuss here the device architectures in relation to the crystal growth technical aspects using molecular beam epitaxy and propose a simplified design consisting of an InAsSb absorber with a graded wider bandgap top layer of lattice matched AlInAsSb that exhibits a spontaneously formed p-n-junction. The 77 K device performance is predicted with a numerical model that indicates that quantum efficiencies of at least 75% should be achievable.
InAsSb 可以在整个长波长范围(8-12 μm)内吸收光,并且与 HgCdTe(目前该波段的主流探测器技术)具有许多其他相关的基本材料特性。我们在此讨论了与使用分子束外延技术的晶体生长技术方面有关的器件结构,并提出了一种简化设计,其中包括一个 InAsSb 吸收体,其顶层是晶格匹配的 AlInAsSb,具有分级的更宽带隙,表现出自发形成的 p-n 结。通过数值模型预测了 77 K 器件的性能,结果表明至少可以实现 75% 的量子效率。
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引用次数: 0
Electrical characteristics and trap signatures for Schottky barrier diodes on 4H-SiC, GaN-on-GaN, AlGaN/GaN epitaxial substrates 4H-SiC、氮化镓基氮化镓、氮化铝/氮化镓外延衬底上肖特基势垒二极管的电气特性和陷阱特征
IF 1.9 4区 工程技术 Q2 Physics and Astronomy Pub Date : 2024-05-13 DOI: 10.1088/1361-6641/ad4a65
Shikha Kumari, Rashmi Singh, Shivam Kumar, N. V. L. N. Murty, D. Planson, Christophe Raynaud, C. Sonneville, Hervé Morel, L. Phung, Thi Huong Ngo, Philippe de Mierry, É. Frayssinet, Yvon Cordier, Hassan Maher, R. Sommet, J. Nallatamby, P. Raja
The forward and reverse current transport mechanisms, temperature dependence of Schottky barrier height (SBH) and ideality factor, barrier inhomogeneity analysis, and trap parameters for Schottky barrier diodes (SBDs) fabricated on 4H-SiC, GaN-on-GaN and AlGaN/GaN epitaxial substrates are reported. High SBH is identified for Ni/4H-SiC (1.31 eV) and Ti/4H-SiC (1.18 eV) SBDs with a low leakage current density of < 10-8 A/cm2 at -200 V. Thermally stimulated capacitance (TSCAP) detects the well-known Z1/2 electron trap at EC – 0.65 eV in both 4H-SiC SBDs, while an additional deep-level trap at EC – 1.13 eV is found only in Ni/4H-SiC SBDs. The vertical Ni/GaN SBD exhibits a promising SBH of 0.83 eV, and two electron traps at EC – 0.18 eV and EC – 0.56 eV are identified from deep-level transient Fourier spectroscopy (DLTFS). A peculiar two-diode model behaviour is detected at Metal/GaN/AlGaN/GaN interface of high-electron mobility transistor (HEMT); the first diode (SBH-1 of 1.15 eV) exists at the standard Metal/GaN Schottky junction, whereas the second diode (SBH-2 of 0.72 eV) forms due to the energy difference between the AlGaN conduction band and the heterojunction Fermi level. The compensational Fe-doping-related buffer traps at EC – 0.5 eV and EC – 0.6 eV are determined in the AlGaN/GaN HEMT, through the drain current transient spectroscopy (DCTS) experiments.
报告了在 4H-SiC、GaN-on-GaN 和 AlGaN/GaN 外延衬底上制造的肖特基势垒二极管 (SBD) 的正向和反向电流传输机制、肖特基势垒高度 (SBH) 和理想因子的温度依赖性、势垒不均匀性分析以及陷阱参数。在两种 4H-SiC SBD 中,热激励电容 (TSCAP) 在 EC - 0.65 eV 处检测到了著名的 Z1/2 电子陷阱,而仅在 Ni/4H-SiC SBD 中发现了 EC - 1.13 eV 处的额外深层陷阱。垂直镍/氮化镓 SBD 的 SBH 值为 0.83 eV,根据深电平瞬态傅里叶光谱(DLTFS),在 EC - 0.18 eV 和 EC - 0.56 eV 处发现了两个电子陷阱。在高电子迁移率晶体管 (HEMT) 的金属/GaN/AlGaN/GaN 接口上检测到了一种奇特的双二极管模型行为;第一个二极管(SBH-1,1.15 eV)存在于标准的金属/GaN 肖特基结,而第二个二极管(SBH-2,0.72 eV)则是由于 AlGaN 传导带和异质结费米级之间的能量差而形成的。通过漏极电流瞬态光谱(DCTS)实验,确定了 AlGaN/GaN HEMT 中 EC - 0.5 eV 和 EC - 0.6 eV 处与铁掺杂相关的补偿缓冲陷阱。
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引用次数: 0
Thermal management and switching performance of β-Ga2O3 vertical FinFET with diamond-gate structure 采用钻石栅结构的 β-Ga2O3 垂直 FinFET 的热管理和开关性能
IF 1.9 4区 工程技术 Q2 Physics and Astronomy Pub Date : 2024-05-13 DOI: 10.1088/1361-6641/ad4abf
Yehong Li, Xuefeng Zheng, Fang Zhang, Yunlong He, Zijian Yuan, Xinyang Wang, Yingzhe Wang, Xiaohua Ma, Yue Hao
In this paper, a beta-phase gallium oxide (β-Ga2O3) vertical FinFET with diamond-gate has been studied by Silvaco-ATLAS simulation. The diamond-gate structure achieves adjustable pin (p-insulator-n) junction owing to the diamond-SiO2-Ga2O3 heterostructure. This design also enhances heat dissipation by virtue of the high thermal conductivity of the diamond. Compared to conventional FinFETs, the diamond-gate FinFET (DG-FinFET) reduces the static operating temperature rise by around 17.30%. Additionally, due to its greater heat dissipation capacity, DG-FinFETs provide an 5.84% increase in current density at 1 kA/cm2 current density level. The structural changes in the diamond-gate also result in a significant reduction in the gate-source capacitance (CGS). At 1 MHz operating frequency and the same gate voltage, DG-FinFETs have 69.29% less gate-source charge (QGS), 70.80% less charge/discharge delay time, 73.70% less switching loss, and 57.15% less conduction loss. Overall, the simulation and analysis presented in this work indicate a promising advancement of the DG-FinFET structure in high-power and rapid switching applications.
本文通过 Silvaco-ATLAS 仿真研究了一种具有金刚石栅极的β相氧化镓(β-Ga2O3)垂直 FinFET。由于采用了金刚石-二氧化硅-氧化镓异质结构,金刚石栅结构实现了可调引脚(p-绝缘体-n)结。这种设计还能利用金刚石的高导热性提高散热效果。与传统的 FinFET 相比,金刚石栅极 FinFET(DG-FinFET)的静态工作温升降低了约 17.30%。此外,由于散热能力更强,DG-FinFET 在 1 kA/cm2 电流密度水平下的电流密度提高了 5.84%。菱形栅极的结构变化还显著降低了栅源电容(CGS)。在 1 MHz 工作频率和相同栅极电压下,DG-FinFET 的栅源电荷 (QGS) 减少了 69.29%,充放电延迟时间减少了 70.80%,开关损耗减少了 73.70%,传导损耗减少了 57.15%。总之,本研究中的仿真和分析表明,DG-FinFET 结构在大功率和快速开关应用中的发展前景广阔。
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引用次数: 0
Effects of spacer layer thickness in InAlN/GaN double-channel HEMTs InAlN/GaN 双通道 HEMT 中间隔层厚度的影响
IF 1.9 4区 工程技术 Q2 Physics and Astronomy Pub Date : 2024-05-12 DOI: 10.1088/1361-6641/ad4a2d
Siyin Guo, Q. Zhu, Yilin Chen, Meng Zhang, Minhan Mi, Jiejie Zhu, Yi-Min Lei, Sirui An, Jia-Ni Lu, Can Gong, Xiaohua Ma
In this paper, the impact of upper channel layer thickness on the electrical characteristics and hysteresis behavior of double-channel InAlN/GaN HEMTs were investigated. The devices with an upper channel layer thickness of 20 nm exhibit higher output current and lower Ron compared to devices with a thickness of 10/6 nm. This is attributed to the higher sheet carrier density and the reduced scattering. However, a 20 nm thickness of the upper channel layer in HEMT exhibits hysteresis phenomena in its electrical characteristics. For this hysteresis phenomenon, capacitance measurements and TEM characterization indicate that it is caused by dislocations in the lower barrier layer under the gate. A thicker upper channel layer is beneficial to increasing the output current of the device but leads to degradation of the lower InAlN barrier layer, resulting in hysteresis. This study provides an optimized solution for the growth and device fabrication of double-channel InAlN materials.
本文研究了上沟道层厚度对双通道 InAlN/GaN HEMT 器件电气特性和滞后行为的影响。与厚度为 10/6 nm 的器件相比,上沟道层厚度为 20 nm 的器件具有更高的输出电流和更低的罗恩。这归因于较高的片载流子密度和较低的散射。然而,HEMT 上沟道层厚度为 20 nm 时,其电气特性会出现滞后现象。电容测量和 TEM 表征表明,这种滞后现象是由栅极下阻挡层中的位错造成的。较厚的上沟道层有利于增加器件的输出电流,但会导致较低的 InAlN 势垒层退化,从而产生滞后现象。这项研究为双通道 InAlN 材料的生长和器件制造提供了优化解决方案。
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引用次数: 0
Impacts of eliminating ungated access regions on DC and thermal performances of GaN-based MIS-HEMT 消除未栅接入区对氮化镓基 MIS-HEMT 直流和热性能的影响
IF 1.9 4区 工程技术 Q2 Physics and Astronomy Pub Date : 2024-05-12 DOI: 10.1088/1361-6641/ad4a2e
Xinkun Zhang, Yu Zhou, Shuqian Xu, Haoran Qie, Qingru Wang, Qian Li, Jianxun Liu, Xiujian Sun, Quan Dai, Xiaoning Zhan, Gaofei Zhi, Qian Sun, Hui Yang
Impacts of eliminating access regions on DC and thermal performances of GaN-based MIS-HEMT have been studied using a device of 4-μm gate length. Nominal absence of access regions was achieved by MOCVD-regrown heavily n-doped GaN contact region extended to the 2DEG channel (sheet resistance as low as 14 Ω/□ and ohmic contact resistance of 0.20 Ω·mm) and 22-nm-thick AlN/Al2O3/HfO2 insulator layers acting as both gate dielectrics and sidewall spacers. As a result, a low knee voltage (2.5 V @ VGS = + 2 V) comparable to deeply-scaled devices was attained, revealing the dominant role of access regions in knee voltages. High linearity at lower supply voltages (gate voltage swing of 7.3 V @ VDS = 5 V) and a faster gate voltage swing saturation trend with VDS increasing was observed benefiting from the improved utility of applied lateral voltage. Moreover, a much lower thermal resistance compared with that of the conventional MIS-HEMT structure (146 vs. 202 K/W) was extracted by a static-pulsed I-V measurement method. Simplified TCAD simulations were conducted to explain the underlying mechanisms, demonstrating that the enhanced surface heat flow covered by gate metal as well as the more uniform electric field along the 2DEG channel accounts for the better capability of heat management in the device free of access regions. Our results indicate how much enhancements in terms of DC and thermal performances can be obtained by eliminating access regions in a GaN-based MIS-HEMT structure.
我们使用栅极长度为 4μm 的器件研究了消除接入区对氮化镓基 MIS-HEMT 直流和热性能的影响。通过将 MOCVD 生长的重 n 掺杂氮化镓接触区扩展到 2DEG 沟道(薄层电阻低至 14 Ω/□,欧姆接触电阻为 0.20 Ω-mm)和 22nm 厚的 AlN/Al2O3/HfO2 绝缘层作为栅极电介质和侧壁间隔,实现了名义上无接入区。因此,实现了与深栅极器件相当的低膝部电压(2.5 V @ VGS = + 2 V),揭示了接入区在膝部电压中的主导作用。由于提高了横向电压的效用,因此在较低电源电压下具有较高的线性度(VDS = 5 V 时的栅极电压摆幅为 7.3 V),并且随着 VDS 的增加,栅极电压摆幅饱和趋势加快。此外,与传统的 MIS-HEMT 结构相比,通过静态脉冲 I-V 测量方法得出的热阻更低(146 K/W 对 202 K/W)。我们进行了简化的 TCAD 仿真来解释其基本机制,结果表明,栅极金属覆盖的表面热流增强以及沿着 2DEG 沟道的电场更加均匀,是器件无接入区热量管理能力增强的原因。我们的研究结果表明,在基于氮化镓的 MIS-HEMT 结构中消除接入区可以大大提高直流和热性能。
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引用次数: 0
Green synthesis and photocatalytic proficiency of tunable SnO2 nanostructures: unveiling environmental-friendly strategies for sustainable water remediation 可调控 SnO2 纳米结构的绿色合成与光催化能力:为可持续水污染治理探索环境友好型策略
IF 1.9 4区 工程技术 Q2 Physics and Astronomy Pub Date : 2024-05-10 DOI: 10.1088/1361-6641/ad49c7
Shalu Gupta, Rakesh Kumar
This study demonstrates a proficient and eco-friendly synthesis of SnO2 nanostructures using a hydrothermal method, without the requirement of extra surfactants. The synthesis was systematically performed by adjusting the molar ratio of stannic chloride to sodium hydroxide and varying the pH settings. It was noted that the pH value rises according to the concentration of sodium hydroxide. A comprehensive analysis was performed to characterize the resulting nanostructures, which involved studying their structural features, chemical composition, morphology, and optical properties. An X-ray diffraction (XRD) analysis showed that increasing the pH values resulted in a noticeable improvement in the crystalline structure and a decrease in the density of surface defects. The SnO2 nanostructures, synthesized using different pH settings, were subsequently assessed for their photocatalytic performance in the degradation of methylene blue (MB) dye under simulated solar irradiation. Surprisingly, the nanostructure produced at higher pH levels showed outstanding results, as 97% of the dye was broken down in just 70 minutes when exposed to simulated solar radiation. The analysis uncovered a maximum rate constant (k) value of 0.04 min−1, determined using pseudo first-order rate kinetics. In order to better understand the photodegradation process, scavenger experiments were performed to identify the active species involved. These investigations provided valuable insights into the complex mechanisms that drive the observed photocatalytic activity. This study not only enhances the progress of SnO2 nanostructures but also highlights their potential as strong and environmentally friendly materials for effective photocatalytic applications.
本研究展示了一种利用水热法合成二氧化锡纳米结构的高效环保方法,无需额外的表面活性剂。通过调整氯化锡与氢氧化钠的摩尔比和改变 pH 值设置,系统地进行了合成。结果发现,pH 值随着氢氧化钠浓度的增加而升高。对所得纳米结构的特性进行了全面分析,包括研究其结构特征、化学成分、形态和光学特性。X 射线衍射 (XRD) 分析表明,pH 值升高会明显改善晶体结构,降低表面缺陷的密度。利用不同的 pH 值合成的二氧化锡纳米结构随后在模拟太阳照射下降解亚甲基蓝(MB)染料的光催化性能方面进行了评估。令人惊讶的是,pH 值较高的纳米结构表现出了卓越的性能,在模拟太阳辐射下,仅 70 分钟就分解了 97% 的染料。分析发现,最大速率常数 (k) 值为 0.04 min-1,这是利用伪一阶速率动力学确定的。为了更好地了解光降解过程,还进行了清道夫实验,以确定所涉及的活性物种。这些研究为了解驱动所观察到的光催化活性的复杂机制提供了宝贵的见解。这项研究不仅提高了二氧化锡纳米结构的研究进展,还凸显了其作为强力环保材料在有效光催化应用方面的潜力。
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引用次数: 0
Thymus schimperi Ronniger plant flowers extracted dye-sensitized solar cells 提取染料敏化太阳能电池的 Thymus schimperi Ronniger 植物花朵
IF 1.9 4区 工程技术 Q2 Physics and Astronomy Pub Date : 2024-05-10 DOI: 10.1088/1361-6641/ad49c6
Getye Behailu Yitagesu, Dereje Tsegaye Leku, Getachew Adam Workneh
Today’s energy demand is highly increased with the world’s population growth and technological advancement. Natural dye-sensitized solar cells (N-DSSCs) are attracting research areas as an alternative and renewable energy source due to their simple preparation technique, availability, cost-effectiveness, and environmentally friendliness. In the present work, we have successfully fabricated DSSC from Thymus schimperi Ronniger plant flowers for the first time. The solvents used for extraction of the flower dye were deionized water and its mixture with ethanol. The Thymus schimperi Ronniger flowers extracted dye solutions and sensitized photoanodes were characterized by FTIR and UV-Vis characterization techniques. The crystallinity of TiO2 film was analyzed by the XRD technique and shows pure anatase phase behavior. The photoelectrochemical solar cell performance parameters, like, short circuit current density (JSC), open circuit voltage VOC), fill factor (FF), and efficiency were evaluated from the current density-voltage (J-V) measurement using a Keithley 2450 source meter. DSSC sensitized with extracted dye solution by the mixture of water and ethanol showed better performance (1.37%) as compared with that of extracted dye solution by Deionized water alone (1,02%). Keywords: Renewable energy, Dye-sensitized solar cells, Thymus Schimperi Ronniger, photoelectrochemical
随着世界人口的增长和技术的进步,当今的能源需求急剧增加。天然染料敏化太阳能电池(N-DSSC)因其制备技术简单、可用性强、成本效益高且环保,作为一种替代性可再生能源正吸引着研究领域的目光。在本研究中,我们首次从 Thymus schimperi Ronniger 植物花中成功制备出了 DSSC。提取花朵染料的溶剂是去离子水及其与乙醇的混合物。利用傅立叶变换红外光谱和紫外可见光谱表征技术对五味子花提取的染料溶液和敏化光阳极进行了表征。通过 XRD 技术分析了二氧化钛薄膜的结晶度,结果显示其为纯锐钛矿相。光电化学太阳能电池的性能参数,如短路电流密度(JSC)、开路电压(VOC)、填充因子(FF)和效率,是通过使用 Keithley 2450 源表进行电流密度-电压(J-V)测量来评估的。与单独使用去离子水萃取的染料溶液(1.02%)相比,使用水和乙醇的混合物萃取的染料溶液敏化的 DSSC 表现出更好的性能(1.37%)。关键词可再生能源、染料敏化太阳能电池、胸腺五味子、光电化学
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引用次数: 0
A novel double-gate trench SOI LDMOS with double-dielectric material by TCAD Simulation Study 采用双介电材料的新型双栅极沟槽 SOI LDMOS(通过 TCAD 仿真研究
IF 1.9 4区 工程技术 Q2 Physics and Astronomy Pub Date : 2024-05-10 DOI: 10.1088/1361-6641/ad49c9
Jinjun Guo, Hongli Dai, Luoxin Wang, Yuming Xue, Haitao Lyu, Wenze Niu
In this paper, a novel double-gate trench silicon-on-insulator (SOI) lateral double-diffused metal oxide semiconductor field-effect transistor (LDMOS) with double-dielectric material (DGDK-LDMOS) is proposed. DGDK-LDMOS has two dielectric materials: a reverse-L-shaped high-k (HK) thin film and an low-k (LK) buried oxide layer. The HK thin film optimizes the electric field distribution on the drift region surface, attracting electric flux, and the excellent withstand voltage of the LK buried oxide layer can significantly improve the breakdown voltage (BV) and reduce specific on-resistance (Ron,sp) of the device. The modulation mechanism of LDMOS by HK thin film and LK buried oxide layer is analyzed. The results show that compared with conventional LDMOS (C-LDMOS), when the permittivity of HK thin film is 25 and the permittivity of LK buried oxide is 3, the BV of DGDK-LDMOS is increased by 89.6%, the Ron,sp is decreased by 26.4%, and the figure of merit (FOM, FOM = BV2/Ron,sp) is increased by 397.2% from 3.6 MW·cm−2 to 17.9 MW·cm−2. Meanwhile, the output characteristics, transfer characteristics, lattice temperature, AC characteristics and switching characteristics of DGDK-LDMOS are also discussed and compared.
本文提出了一种新型双栅极沟槽硅绝缘体(SOI)横向双扩散金属氧化物半导体场效应晶体管(LDMOS)(DGDK-LDMOS)。DGDK-LDMOS 有两种介电材料:反向 L 型高 K(HK)薄膜和低 K(LK)埋入氧化层。HK 薄膜优化了漂移区表面的电场分布,吸引了电通量,而 LK 埋层氧化物的优异耐压性能可显著提高器件的击穿电压(BV)并降低比导通电阻(Ron,sp)。本文分析了 HK 薄膜和 LK 埋入氧化层对 LDMOS 的调制机理。结果表明,与传统 LDMOS(C-LDMOS)相比,当 HK 薄膜的介电常数为 25、LK 埋层氧化物的介电常数为 3 时,DGDK-LDMOS 的 BV 提高了 89.6%,Ron,sp 降低了 26.4%,优越性系数(FOM,FOM = BV2/Ron,sp)从 3.6 MW-cm-2 提高到 17.9 MW-cm-2,提高了 397.2%。同时,还讨论并比较了 DGDK-LDMOS 的输出特性、传输特性、晶格温度、交流特性和开关特性。
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引用次数: 0
Resistor-to-Schottky barrier analytical model for ohmic contact test structures 欧姆接触测试结构的电阻器-肖特基势垒分析模型
IF 1.9 4区 工程技术 Q2 Physics and Astronomy Pub Date : 2024-05-10 DOI: 10.1088/1361-6641/ad49c8
Thanh Chi Pham, Hiep Tran, James G Partridge, Anthony Holland
Analytical models for investigating Metal-Semiconductor (M-S) ohmic contacts in test structures have conventionally included resistive-only contact interfaces. Given that M-S contacts are fundamentally governed by electron tunnelling across the potential energy barrier at the M-S interface, this simplified approach may result in misinterpretation. This paper describes, in detail, a novel Resistor-to-Schottky (RSB) barrier analytical model that enables a more in-depth exploration of the physics underlying ohmic contacts. The proposed model is analysed and compared with models constructed using the semiconductor device simulator tool TCAD. The study reveals significant differences in outcomes when employing the RSB model rather than the conventional Transmission Line (TLM) model and contributes to a more comprehensive understanding of M-S ohmic contacts in test structures.
用于研究测试结构中金属-半导体(M-S)欧姆接触的分析模型通常包括纯电阻接触界面。鉴于 M-S 触点从根本上受电子穿过 M-S 接口势能势垒的隧穿作用支配,这种简化方法可能会导致误解。本文详细介绍了一种新颖的电阻-肖特基(RSB)势垒分析模型,该模型能够更深入地探索欧姆接触的基本物理原理。本文对提出的模型进行了分析,并将其与使用半导体器件模拟工具 TCAD 构建的模型进行了比较。研究表明,采用 RSB 模型而非传统的传输线 (TLM) 模型时,结果会有显著差异,有助于更全面地了解测试结构中的 M-S 欧姆触点。
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