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Decapsulation of silver-alloy wire-bonded devices 银合金线键合装置的解封装
F. Kerisit, M. J. Lefevre, B. Domengès, W. Prellier, Michael Obein
In order to reduce costs and improve the bonding process, silver has been recently introduced as an alternative to common bonding wire metals (gold, aluminum, copper), leading to new failure analysis issues. This study compares the efficiency of wet and dry chemistries for decapsulation on three Ag-based alloy wires. Introduction New developments of silver alloy bonding wire have emphasized specific problems due to silver alloy properties. Whereas this new type of wiring materials seemed to fulfill most challenges, like physical properties and reliability [1,2], it was suggested that epoxy molding compound (EMC) should be adapted in order to ease decapsulation[3]. Indeed, afterthe packaging industry moved from gold to copper wires, the failure analysis community had to come up with new decapsulation techniques [4,5]. Again, a new type of bonding will raise new problems of decapsulation. Furthermore, people facing failure analysis cases do not always have all required information on the type of EMC and the true composition of the bonding wires. Twomajor techniques of decapsulation regarding wirebonded devices are known: wet (acid) and dry etching (plasma). LASER ablation or milling are used for preopening, This study will compare the capabilities of these techniques on three different types of Ag-based wiring integrated circuits(IC).
为了降低成本和改进键合工艺,最近引入了银作为普通键合线金属(金、铝、铜)的替代品,这导致了新的失效分析问题。本研究比较了湿法和干法在三种银基合金丝上脱封的效率。银合金焊丝的新发展强调了由于银合金的特性而引起的特殊问题。尽管这种新型布线材料似乎满足了大多数挑战,如物理性能和可靠性[1,2],但有人建议应采用环氧成型化合物(EMC),以减轻解封装[3]。事实上,在包装行业从金线转向铜线之后,失效分析界不得不提出新的解封装技术[4,5]。同样,一种新型的键合会带来新的解封装问题。此外,面对故障分析案例的人们并不总是拥有有关电磁兼容类型和键合线真实组成的所有必要信息。关于线键器件的两种主要解封装技术是已知的:湿(酸)和干(等离子)蚀刻。激光烧蚀或铣削用于预开孔,本研究将比较这些技术在三种不同类型的银基布线集成电路(IC)上的性能。
{"title":"Decapsulation of silver-alloy wire-bonded devices","authors":"F. Kerisit, M. J. Lefevre, B. Domengès, W. Prellier, Michael Obein","doi":"10.1109/IPFA.2014.6898187","DOIUrl":"https://doi.org/10.1109/IPFA.2014.6898187","url":null,"abstract":"In order to reduce costs and improve the bonding process, silver has been recently introduced as an alternative to common bonding wire metals (gold, aluminum, copper), leading to new failure analysis issues. This study compares the efficiency of wet and dry chemistries for decapsulation on three Ag-based alloy wires. Introduction New developments of silver alloy bonding wire have emphasized specific problems due to silver alloy properties. Whereas this new type of wiring materials seemed to fulfill most challenges, like physical properties and reliability [1,2], it was suggested that epoxy molding compound (EMC) should be adapted in order to ease decapsulation[3]. Indeed, afterthe packaging industry moved from gold to copper wires, the failure analysis community had to come up with new decapsulation techniques [4,5]. Again, a new type of bonding will raise new problems of decapsulation. Furthermore, people facing failure analysis cases do not always have all required information on the type of EMC and the true composition of the bonding wires. Twomajor techniques of decapsulation regarding wirebonded devices are known: wet (acid) and dry etching (plasma). LASER ablation or milling are used for preopening, This study will compare the capabilities of these techniques on three different types of Ag-based wiring integrated circuits(IC).","PeriodicalId":409316,"journal":{"name":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"201 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133094412","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Microstructural approach to failure analysis of thin film transistors 薄膜晶体管失效分析的微结构方法
J. Lee, Sungsoon Choi, K. Lee
As size of electronic device miniaturized, microstructural characteristics of materials significantly affect the electrical properties of devices. In this study, microstructural approach to failure analysis of thin film transistors is presented using two examples. Also, we directly demonstrated correlation between electrical properties and microstructural characteristics using transmission electron microscopy.
随着电子器件尺寸的小型化,材料的微结构特性对器件的电学性能有着重要的影响。本文通过两个实例介绍了薄膜晶体管失效分析的微观结构方法。同时,我们利用透射电子显微镜直接证明了电学性能与微观结构特征之间的相关性。
{"title":"Microstructural approach to failure analysis of thin film transistors","authors":"J. Lee, Sungsoon Choi, K. Lee","doi":"10.1109/IPFA.2014.6898168","DOIUrl":"https://doi.org/10.1109/IPFA.2014.6898168","url":null,"abstract":"As size of electronic device miniaturized, microstructural characteristics of materials significantly affect the electrical properties of devices. In this study, microstructural approach to failure analysis of thin film transistors is presented using two examples. Also, we directly demonstrated correlation between electrical properties and microstructural characteristics using transmission electron microscopy.","PeriodicalId":409316,"journal":{"name":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133181762","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Hourglass concept for RRAM: A dynamic and statistical device model RRAM的沙漏概念:一个动态和统计的设备模型
R. Degraeve, A. Fantini, N. Raghavan, L. Goux, S. Clima, Y. Chen, A. Belmonte, S. Cosemans, B. Govoreanu, D. Wouters, P. Roussel, G. Kar, G. Groeseneken, M. Jurczak
In this paper we review a dynamic device model for filamentary RRAM in HfO-based dielectrics. We summarize its transient modeling features and its statistical properties. The model explains with satisfactory quantitative resolution all main features of the RRAM switching, not just the voltage, time and temperature dependence, but also statistical fluctuations resulting from atomistic motion and their resulting LRS and HRS-distributions.
本文综述了基于hfo介质的细丝RRAM的动态器件模型。总结了它的瞬态建模特征和统计特性。该模型以令人满意的定量分辨率解释了RRAM开关的所有主要特征,不仅包括电压、时间和温度依赖性,而且还包括原子运动引起的统计波动及其产生的LRS和hrs分布。
{"title":"Hourglass concept for RRAM: A dynamic and statistical device model","authors":"R. Degraeve, A. Fantini, N. Raghavan, L. Goux, S. Clima, Y. Chen, A. Belmonte, S. Cosemans, B. Govoreanu, D. Wouters, P. Roussel, G. Kar, G. Groeseneken, M. Jurczak","doi":"10.1109/IPFA.2014.6898205","DOIUrl":"https://doi.org/10.1109/IPFA.2014.6898205","url":null,"abstract":"In this paper we review a dynamic device model for filamentary RRAM in HfO-based dielectrics. We summarize its transient modeling features and its statistical properties. The model explains with satisfactory quantitative resolution all main features of the RRAM switching, not just the voltage, time and temperature dependence, but also statistical fluctuations resulting from atomistic motion and their resulting LRS and HRS-distributions.","PeriodicalId":409316,"journal":{"name":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132811250","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 43
High energy electron degradation of the bonding connections 键合连接的高能电子降解
P. Laskowski, M. Olszacki, M. Al Bahri, P. Pons, M. Jasiorski
The influence of the high energy electrons on the wire bonding connections has been investigated. To degrade the devices 6MeV electron source has been employed. The irradiation resulted in both: bonding rupture force and ohmic resistance decrease. Device degradation level was additionally evaluated by means of the electron microscopy inspection.
研究了高能电子对金属丝键合连接的影响。为了降低器件的性能,采用了6MeV的电子源。辐照降低了粘结断裂力和欧姆电阻。此外,还通过电子显微镜检查来评估器件的降解水平。
{"title":"High energy electron degradation of the bonding connections","authors":"P. Laskowski, M. Olszacki, M. Al Bahri, P. Pons, M. Jasiorski","doi":"10.1109/IPFA.2014.6898190","DOIUrl":"https://doi.org/10.1109/IPFA.2014.6898190","url":null,"abstract":"The influence of the high energy electrons on the wire bonding connections has been investigated. To degrade the devices 6MeV electron source has been employed. The irradiation resulted in both: bonding rupture force and ohmic resistance decrease. Device degradation level was additionally evaluated by means of the electron microscopy inspection.","PeriodicalId":409316,"journal":{"name":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"96 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115027102","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spatial correction in dynamic photon emission by affine transformation matrix estimation 基于仿射变换矩阵估计的动态光子发射空间校正
S. Chef, S. Jacquir, P. Perdu, K. Sanchez, S. Binczak
Photon emission microscopy and Time Resolved Imaging have proved their efficiency for defect localization on VLSI. A common process to find defect candidate locations is to draw a comparison between acquisitions on a normally working device and a faulty one. In order to be accurate and meaningful, this method requires that the acquisition scene remains the same between the two parts. In practice, it can be difficult to set. In this paper, a method to correct position by affine matrix transformation is suggested. It is based on image features detection, description and matching and affine transformation estimation.
光子发射显微镜和时间分辨成像已经证明了它们在超大规模集成电路缺陷定位中的有效性。寻找缺陷候选位置的一个常见过程是在正常工作的设备和有缺陷的设备上进行比较。为了准确和有意义,该方法要求两部分的采集场景保持一致。在实践中,它可能很难设置。本文提出了一种用仿射矩阵变换进行位置校正的方法。它是基于图像特征检测、描述与匹配和仿射变换估计。
{"title":"Spatial correction in dynamic photon emission by affine transformation matrix estimation","authors":"S. Chef, S. Jacquir, P. Perdu, K. Sanchez, S. Binczak","doi":"10.1109/IPFA.2014.6898158","DOIUrl":"https://doi.org/10.1109/IPFA.2014.6898158","url":null,"abstract":"Photon emission microscopy and Time Resolved Imaging have proved their efficiency for defect localization on VLSI. A common process to find defect candidate locations is to draw a comparison between acquisitions on a normally working device and a faulty one. In order to be accurate and meaningful, this method requires that the acquisition scene remains the same between the two parts. In practice, it can be difficult to set. In this paper, a method to correct position by affine matrix transformation is suggested. It is based on image features detection, description and matching and affine transformation estimation.","PeriodicalId":409316,"journal":{"name":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"283 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116091960","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Reliability analysis from field data and prediction models for customer risk assessments: Case studies and strategy 从客户风险评估的现场数据和预测模型进行可靠性分析:案例研究和策略
C. Bergès, Y. Chandon, Pierre Soufflet
In the automotive industry, risk analysis are performed as soon as quality incidents with the same defect signature are reported from the field. The tools used may be the defect distribution modeling, used for the failure rate estimations required by ISO26262 standard, but adapted to the stronger constraints of quality issues. One of these constraints is the low number of failing parts on which a modeling has to be performed. Some case studies seemed to indicate that it is possible to assert the assumption of a constant failure rate when there are a small number of defects. A novel strategy to assess risk has been developed from this number of defects.
在汽车行业,一旦从现场报告具有相同缺陷特征的质量事件,就会进行风险分析。使用的工具可能是缺陷分布建模,用于ISO26262标准要求的故障率估计,但适应于质量问题的更强约束。这些约束之一是必须在其上执行建模的故障部件的数量很少。一些案例研究似乎表明,当存在少量缺陷时,可以断言一个恒定的故障率假设。一种新的评估风险的策略已经从这些缺陷中发展出来。
{"title":"Reliability analysis from field data and prediction models for customer risk assessments: Case studies and strategy","authors":"C. Bergès, Y. Chandon, Pierre Soufflet","doi":"10.1109/IPFA.2014.6898171","DOIUrl":"https://doi.org/10.1109/IPFA.2014.6898171","url":null,"abstract":"In the automotive industry, risk analysis are performed as soon as quality incidents with the same defect signature are reported from the field. The tools used may be the defect distribution modeling, used for the failure rate estimations required by ISO26262 standard, but adapted to the stronger constraints of quality issues. One of these constraints is the low number of failing parts on which a modeling has to be performed. Some case studies seemed to indicate that it is possible to assert the assumption of a constant failure rate when there are a small number of defects. A novel strategy to assess risk has been developed from this number of defects.","PeriodicalId":409316,"journal":{"name":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"142 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123477166","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
An innovative method to overcome signal instability during TDR measurement of power MOSFET 一种克服功率MOSFET TDR测量中信号不稳定性的创新方法
S. Y. Tan, K. K. Ng, S. Y. Gan, C. Sin
Hand probing is the most common technique being applied in Time Domain Reflectometry (TDR) measurement. It is a simple and easy method, but it produced instability on overall signal. Therefore, a new test fixture is designed to maximize its reproducibility. Repeatability test will be used to show its effectiveness on Power MOSFET. In addition, with the test fixture, the standard deviation for impedance results was σ=0.12 based on the same part for eight times measurement, compare to σ=3.26 with hand probing. Therefore a significant improvement on the repeatability test was clearly demonstrated.
手探测是时域反射测量中最常用的技术。该方法简单易行,但对整体信号产生不稳定性。因此,设计了一种新的测试夹具,以最大限度地提高其再现性。可重复性测试将用于显示其在功率MOSFET上的有效性。此外,使用测试夹具对同一零件进行8次测量,阻抗结果的标准差为σ=0.12,而用手探测的阻抗结果的标准差为σ=3.26。因此,重复性测试的显著改进是显而易见的。
{"title":"An innovative method to overcome signal instability during TDR measurement of power MOSFET","authors":"S. Y. Tan, K. K. Ng, S. Y. Gan, C. Sin","doi":"10.1109/IPFA.2014.6898150","DOIUrl":"https://doi.org/10.1109/IPFA.2014.6898150","url":null,"abstract":"Hand probing is the most common technique being applied in Time Domain Reflectometry (TDR) measurement. It is a simple and easy method, but it produced instability on overall signal. Therefore, a new test fixture is designed to maximize its reproducibility. Repeatability test will be used to show its effectiveness on Power MOSFET. In addition, with the test fixture, the standard deviation for impedance results was σ=0.12 based on the same part for eight times measurement, compare to σ=3.26 with hand probing. Therefore a significant improvement on the repeatability test was clearly demonstrated.","PeriodicalId":409316,"journal":{"name":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"197 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121070292","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A stain chemical etching rate study and used to detect implant defect 一种染色化学腐蚀率的研究,并用于检测种植体缺陷
Miao Wu, Y. Che
In this paper, a chemical is used to stain the implant profile. Its etching rate to different dope type and density is studied by performing cross-section on three typical devices and then dipping in the chemical for staining. Due to etching rate difference, the method is shown to be effective in localizing implant profile in the Si active area. Meanwhile real failure analysis cases are presented, and the stain chemical is proved effective in localizing non-uniform implantation.
在本文中,一种化学物质被用来染色种植体的轮廓。通过对三种典型器件进行截面分析,研究了其对不同涂料类型和密度的腐蚀速率。由于蚀刻速率的差异,该方法可以有效地定位Si活性区域的植入物轮廓。同时给出了实际的失效分析案例,证明了该染色剂对定位非均匀注入是有效的。
{"title":"A stain chemical etching rate study and used to detect implant defect","authors":"Miao Wu, Y. Che","doi":"10.1109/IPFA.2014.6898125","DOIUrl":"https://doi.org/10.1109/IPFA.2014.6898125","url":null,"abstract":"In this paper, a chemical is used to stain the implant profile. Its etching rate to different dope type and density is studied by performing cross-section on three typical devices and then dipping in the chemical for staining. Due to etching rate difference, the method is shown to be effective in localizing implant profile in the Si active area. Meanwhile real failure analysis cases are presented, and the stain chemical is proved effective in localizing non-uniform implantation.","PeriodicalId":409316,"journal":{"name":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127195032","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Observation of long term potentiation in papain-based memory devices 木瓜基记忆装置的长时程增强观察
A. Bag, M. K. Hota, S. Mallik, C. Maiti
Biological synaptic behavior in terms of long term potentiation has been observed in papain-based (plant protein) memory devices (memristors) for the first time. Improvement in long term potentiation depends on pulse amplitude and width (duration). Continuous/repetitive dc voltage sweep leads to an increase in memristor conductivity leading to a long term memory in the `learning' processes.
在木瓜蛋白酶(植物蛋白)记忆装置(忆阻器)中首次观察到长期增强的生物学突触行为。长期增强的改善取决于脉冲幅度和宽度(持续时间)。连续/重复的直流电压扫描导致记忆电阻器电导率的增加,从而在“学习”过程中产生长期记忆。
{"title":"Observation of long term potentiation in papain-based memory devices","authors":"A. Bag, M. K. Hota, S. Mallik, C. Maiti","doi":"10.1109/IPFA.2014.6898182","DOIUrl":"https://doi.org/10.1109/IPFA.2014.6898182","url":null,"abstract":"Biological synaptic behavior in terms of long term potentiation has been observed in papain-based (plant protein) memory devices (memristors) for the first time. Improvement in long term potentiation depends on pulse amplitude and width (duration). Continuous/repetitive dc voltage sweep leads to an increase in memristor conductivity leading to a long term memory in the `learning' processes.","PeriodicalId":409316,"journal":{"name":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121623090","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Hot carrier injection on back biasing double-gate FinFET with 10 and 25-nm fin width 10和25nm翅片宽度的后偏置双栅FinFET热载流子注入
W. Chang, Li-Gong Cin, W. Yeh, Po-Ying Chen
The effects of hot carrier injection on double-gate FinFETs with fin widths (Wfin) of 10 and 25 nm with positive and negative back biases are compared in this study. The FinFETs with a positive bias and narrow Wfin exhibit a large current tuning range but experiences high degradation after stress. By contrast, a negative back bias alleviates degradation but also eliminates the drive current.
本文比较了热载流子注入对鳍宽分别为10 nm和25 nm、正背偏和负背偏双栅finfet的影响。具有正偏置和窄Wfin的finfet具有较大的电流调谐范围,但应力后劣化程度高。相反,负的反向偏置减轻了退化,但也消除了驱动电流。
{"title":"Hot carrier injection on back biasing double-gate FinFET with 10 and 25-nm fin width","authors":"W. Chang, Li-Gong Cin, W. Yeh, Po-Ying Chen","doi":"10.1109/IPFA.2014.6898122","DOIUrl":"https://doi.org/10.1109/IPFA.2014.6898122","url":null,"abstract":"The effects of hot carrier injection on double-gate FinFETs with fin widths (Wfin) of 10 and 25 nm with positive and negative back biases are compared in this study. The FinFETs with a positive bias and narrow Wfin exhibit a large current tuning range but experiences high degradation after stress. By contrast, a negative back bias alleviates degradation but also eliminates the drive current.","PeriodicalId":409316,"journal":{"name":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114309732","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
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