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Effect of nucleation layer thickness on reducing dislocation density in AlN layer for AlGaN-based UVC LED 成核层厚度对降低AlN层位错密度的影响
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2021-07-08 DOI: 10.1108/MI-02-2021-0012
M. Samsudin, Y. Yusuf, N. Zainal, A. Bakar, C. Zollner, M. Iza, S. Denbaars
PurposeThe purpose of this study is to investigate the influence of AlN nucleation thickness in reducing the threading dislocations density in AlN layer grown on sapphire substrate.Design/methodology/approachIn this work, the effect of the nucleation thickness at 5 nm, 10 nm and 20 nm on reducing the dislocation density in the overgrown AlN layer by metal organic chemical vapor deposition was discussed. The AlN layer without the nucleation layer was also included in this study for comparison.FindingsBy inserting the 10 nm thick nucleation layer, the density of the dislocation in the AlN layer can be as low as 9.0 × 108 cm−2. The surface of the AlN layer with that nucleation layer was smoother than its counterparts.Originality/valueThis manuscript discussed the influence of nucleation thickness and its possible mechanism in reducing dislocations density in the AlN layer on sapphire. The authors believe that the finding will be of interest to the readers of this journal, in particular those who are working on the area of AlN.
目的研究AlN成核厚度对降低蓝宝石衬底上生长的AlN层中穿线位错密度的影响。设计/方法/方法在这项工作中,5 nm,10 nm和20 nm对通过金属有机化学气相沉积降低过度生长的AlN层中的位错密度的影响进行了讨论。没有成核层的AlN层也包括在该研究中以进行比较。查找通过插入10 nm厚的成核层,AlN层中的位错密度可低至9.0×108 具有该成核层的AlN层的表面比其对应物更光滑。原创性/价值本文讨论了成核厚度的影响及其降低蓝宝石AlN层位错密度的可能机制。作者相信,这一发现将引起本杂志读者的兴趣,尤其是那些在AlN领域工作的读者。
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引用次数: 0
The role of growth temperature on the indium incorporation process for the MOCVD growth of InGaN/GaN heterostructures 生长温度对InGaN/GaN异质结构MOCVD生长铟掺杂过程的影响
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2021-07-08 DOI: 10.1108/MI-02-2021-0018
A. S. Yusof, Z. Hassan, S. O. Hamady, S. Ng, M. A. Ahmad, W. F. Lim, Muhd Azi Che Seliman, C. Chevallier, N. Fressengeas
PurposeThe purpose of this paper is to investigate the effect of growth temperature on the evolution of indium incorporation and the growth process of InGaN/GaN heterostructures.Design/methodology/approachTo examine this effect, the InGaN/GaN heterostructures were grown using Taiyo Nippon Sanso Corporation metal-organic chemical vapor deposition (MOCVD) SR4000-HT system. The InGaN/GaN heterostructures were epitaxially grown on 3.4 µm undoped-GaN (ud-GaN) and GaN nucleation layer, respectively, over a commercial 2” c-plane flat sapphire substrate. The InGaN layers were grown at different temperature settings ranging from 860°C to 820°C in a step of 20°C. The details of structural, surface morphology and optical properties were investigated using X-ray diffraction (XRD), field emission scanning electron microscope (FE-SEM), atomic force microscopy and ultraviolet-visible (UV-Vis) spectrophotometer, respectively.FindingsInGaN/GaN heterostructure with indium composition up to 10.9% has been successfully grown using the MOCVD technique without any phase separation detected within the sensitivity of the instrument. Indium compositions were estimated through simulation fitting of the XRD curve and calculation of Vegard’s law from UV-Vis measurement. The thickness of the structures was determined using the Swanepoel method and the FE-SEM cross-section image.Originality/valueThis paper report on the effect of MOCVD growth temperature on the growth process of InGaN/GaN heterostructure, which is of interest in solid-state lighting technology, especially in light-emitting diodes and solar cell application.
目的研究生长温度对铟掺杂演化及InGaN/GaN异质结构生长过程的影响。为了研究这种影响,使用Taiyo Nippon Sanso Corporation的金属有机化学气相沉积(MOCVD) SR4000-HT系统生长InGaN/GaN异质结构。InGaN/GaN异质结构分别外延生长在3.4 μ m未掺杂的GaN (ud-GaN)和GaN成核层上,生长在商用2 " c-plane扁平蓝宝石衬底上。在不同的温度设置下生长InGaN层,温度范围为860 ~ 820℃,步长为20℃。采用x射线衍射仪(XRD)、场发射扫描电镜(FE-SEM)、原子力显微镜(atomic force microscope)和紫外-可见分光光度计(UV-Vis)研究了材料的结构、表面形貌和光学性能。利用MOCVD技术成功生长出铟含量高达10.9%的singan /GaN异质结构,在仪器灵敏度范围内未检测到任何相分离。通过对XRD曲线的模拟拟合和UV-Vis测量的维加德定律计算,估算了铟的组成。采用斯瓦内普尔法和FE-SEM截面图确定了结构的厚度。本文报道了MOCVD生长温度对InGaN/GaN异质结构生长过程的影响,这是固态照明技术,特别是发光二极管和太阳能电池应用的兴趣。
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引用次数: 1
Structural and mechanical properties of a-axis AlN thin films growth using reactive RF magnetron sputtering plasma 反应性射频磁控溅射等离子体生长a轴AlN薄膜的结构和力学性能
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2021-06-16 DOI: 10.1108/MI-02-2021-0015
A. S. Bakri, N. Nayan, C. Soon, M. K. Ahmad, A. Bakar, Wan Haliza Abd Majid, N. A. Raship
PurposeThis paper aims to report the influence of sputtering plasma deposition time on the structural and mechanical properties of the a-axis oriented aluminium nitride (AlN) thin films.Design/methodology/approachThe AlN films were prepared using RF magnetron sputtering plasma on a silicon substrate without any external heating with various deposition times. The films were characterized using X-ray diffraction (XRD), field-emission scanning electron microscope (FESEM), atomic force microscope (AFM) and nanoindentation techniques.FindingsThe XRD results show that the AlN thin films are highly oriented along the (100) AlN plane at various deposition times indicating the a-axis preferred orientation. All the AlN thin films exhibit hexagonal AlN with a wurtzite structure. The hardness and Young’s modulus of AlN thin films with various deposition times were measured using a nanoindenter. The measured hardness of the AlN films on Si was in the range of 14.1 to 14.7 GPa. The surface roughness and the grain size measured using the AFM revealed that both are dependent on the deposition times.Originality/valueThe novelty of this work lies with a comparison of hardness and Young’s modulus result obtained at different sputtering deposition temperature. This study also provides the relation of AlN thin films’ crystallinity with the hardness of the deposited films.
目的研究溅射等离子体沉积时间对a轴取向氮化铝(AlN)薄膜结构和力学性能的影响。设计/方法/方法使用RF磁控溅射等离子体在硅衬底上制备AlN薄膜,无需任何外部加热,沉积时间不同。利用X射线衍射(XRD)、场发射扫描电子显微镜(FESEM)、原子力显微镜(AFM)和纳米压痕技术对薄膜进行了表征。XRD结果表明,在不同的沉积时间下,AlN薄膜沿(100)AlN平面高度取向,表明a轴取向是优选的。所有的AlN薄膜都呈现出纤锌矿结构的六方AlN。用纳米压头测量了不同沉积时间下AlN薄膜的硬度和杨氏模量。Si上的AlN膜的测量硬度在14.1至14.7的范围内 GPa。使用AFM测量的表面粗糙度和晶粒尺寸表明两者都取决于沉积时间。新颖性/价值这项工作的新颖性在于比较了在不同溅射沉积温度下获得的硬度和杨氏模量结果。本研究还提供了AlN薄膜的结晶度与沉积薄膜硬度的关系。
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引用次数: 0
A 1.8 V high-speed 8-bit hybrid DAC with integrated rail-to-rail buffer amplifier in CMOS 180 nm 一种1.8V高速8位混合DAC,带有CMOS 180nm的集成轨对轨缓冲放大器
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2021-05-18 DOI: 10.1108/MI-10-2020-0073
N. Idros, A. Rosli, Z. Aziz, J. Rajendran, A. Marzuki
PurposeThe purpose of this paper is to present the performance of an 8-bit hybrid DAC which is suitable for wireless application or part of a built-in test block for ADC. The hybrid architecture used is the combination of thermometer coding and binary-weighted resistor architectures.Design/methodology/approachThe conventional DAC topology performance tends to degrade at high-resolution applications. A hybrid topology, which combines an equal number of bits of thermometer coding and binary-weighted resistor architectures operating at higher sampling frequency, was proposed in this work. The die was fabricated in 180 nm CMOS process technology with a supplied voltage of 1.8 V.FindingsMeasured results showed that the DNL and INL errors are within −1 to +1 LSB and −0.9 to +0.9 LSB, respectively for the input range of 0.9 V at the clock rate of 200 MHz, and this DAC was proven monotonic. This 0.068 mm2 DAC consumed 12.6 mW for the data conversion.Originality/valueThis paper is of value in showing the equal division of bits from thermometer coding and binary-weighted resistor architectures provides smaller die size and enhances the performance of hybrid DAC, in terms of linearity, which are DNL and INL errors and guarantees monotonicity at higher sampling frequency.
本文的目的是介绍一种适用于无线应用或ADC内置测试块的8位混合DAC的性能。使用的混合架构是温度计编码和二元加权电阻架构的组合。设计/方法/方法在高分辨率应用中,传统的DAC拓扑性能往往会下降。在这项工作中,提出了一种混合拓扑,它结合了等量的温度计编码和在更高采样频率下工作的二进制加权电阻架构。该芯片采用180nm CMOS工艺,电源电压为1.8 V。测量结果表明,在时钟频率为200mhz时,输入范围为0.9 V时,DNL和INL误差分别在−1 ~ +1 LSB和−0.9 ~ +0.9 LSB之间,且该DAC是单调的。这个0.068 mm2的DAC用于数据转换消耗12.6 mW。这篇论文的价值在于展示了温度计编码和二进制加权电阻架构的等分位,提供了更小的芯片尺寸,并提高了混合DAC的性能,就线性度而言,这是DNL和INL误差,并保证了在更高采样频率下的单调性。
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引用次数: 0
Adapting M2 silicon half-wafers processing on industrial-scale equipment dedicated to 4″ solar technology 在4〃太阳能技术专用的工业规模设备上适应M2硅半晶圆加工
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2021-05-17 DOI: 10.1108/MI-09-2020-0065
M. Boumaour, S. Kermadi, S. Sali, Abdelkader El-Amrani, S. Mezghiche, L. Zougar, Sarah Boulahdjel, Y. Pellegrin
PurposeThe purpose of this study is to address the issue of technology equipment formerly dedicated to the process of 4- and even 5-inch photovoltaic cells and whose use has become critical with the evolution of silicon wafer size standards (M2–M10). Fortunately, the recent concept of 6'' half-cut cell with its many advantages appears promising insofar as it offers the possibility of further extend the use of costly, still operational process equipment, but doomed to obsolescence.Design/methodology/approachIn the background of a detailed Al-BSF process, the authors show how to experimentally adapt specific accessories and arrange 6” half-wafers to enable the upgrade of a complete industrial process of silicon solar cells at a lower cost. Step by step, the implementation of the processes for the two wafer sizes (4” wafers and 6” half wafers) is compared and analyzed in terms of performance and throughput.FindingsGlobally, the same process effectiveness is observed for both types of wafers with slightly better sheet resistance uniformity for the thermal diffusion carried out on the half wafers; however, the horizontal arrangement of the wafer carriers in the diffusion and the plasma-enhanced chemical vapor deposition tubes limits the thermal balance regarding the total number of cells processed per batch.Originality/valueIn terms of the development of prototypes on a preindustrial scale, this paves the way to further continue operating outdated equipment for high-performance processes (passivated emitter and rear contact, Tunnel oxide passivated contact (TOPCon)), while complying with current standards for silicon wafers up to M10 format.
目的本研究的目的是解决以前专门用于4英寸甚至5英寸光伏电池工艺的技术设备的问题,随着硅片尺寸标准(M2–M10)的发展,这些设备的使用变得至关重要。幸运的是,最近提出的6英寸半切割单元的概念及其许多优点似乎很有希望,因为它提供了进一步扩大使用昂贵的、仍在运行的工艺设备的可能性,但注定会过时。设计/方法/方法在详细的Al BSF工艺的背景下,作者展示了如何通过实验调整特定的附件并布置6“半晶片,以实现以较低成本升级硅太阳能电池的完整工业工艺。逐步比较和分析了两种晶片尺寸(4英寸晶片和6英寸半晶片)的工艺实施情况,从性能和产量方面进行了分析。发现在全球范围内,观察到两种类型的晶片具有相同的工艺效果,在半晶片上进行的热扩散具有略好的薄层电阻均匀性;然而,晶片载体在扩散管和等离子体增强化学气相沉积管中的水平布置限制了关于每批处理的细胞总数的热平衡。独创性/价值就工业化前规模的原型开发而言,这为进一步继续操作过时的高性能工艺设备(钝化发射极和背面接触、隧道氧化物钝化接触(TOPCon))铺平了道路,同时符合M10格式硅片的现行标准。
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引用次数: 1
Effect of different temperature distribution on multi-stack BGA package 不同温度分布对多层BGA封装的影响
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2021-02-26 DOI: 10.1108/MI-10-2020-0066
L. H. Tung, Fei Chong Ng, A. Abas, M. Z. Abdullah, Zambri Samsudin, M. Y. Tura Ali
PurposeThis paper aims to determine the optimum set of temperatures through correlation study to attain the most effective capillary flow of underfill in a multi-stack ball grid array (BGA) chip device.Design/methodology/approachFinite volume method is implemented in the simulation. A three-layer multi-stack BGA is modeled to simulate the underfill flow. The simulated models were well validated with the previous experimental work on underfill process.FindingsThe completion filling time shows high regression R-squared value of up to 0.9918, which indicates a substantial acceleration on the underfill process because of incorporation of thermal delta. An introduction of 11 °C thermal delta to the multi-stacks BGA managed to reduce the filling time by up to 16.4%.Practical implicationsTemperature-induced capillary flow is a relatively new type of driven underfill designed specifically for package on package BGA components. Its simple implementation can further improve the productivity of existing underfill process in the industry that is desirable in reducing the process lead time.Originality/valueThe effect of temperature-induced capillary flow in underfill encapsulation on multi-stacks BGA by means of statistical correlation study is a relatively new topic, which has never been reported in any other research according to the authors’ knowledge.
目的通过相关研究确定最佳温度组合,以获得多层球栅阵列(BGA)芯片中最有效的下填料毛细流动。设计/方法/方法仿真中采用有限体积法。建立了一种三层多堆BGA模型来模拟下填土的流动。所建立的模拟模型与前人的下填过程实验结果吻合较好。发现充填时间的回归r平方值高达0.9918,表明由于热δ的加入,充填过程明显加速。在多层叠BGA中引入11°C的热增量,可将填充时间缩短16.4%。实际意义温度诱导毛细管流动是一种相对较新的驱动下填料,专为包对包BGA组件设计。它的简单实施可以进一步提高行业中现有底填工艺的生产率,这在减少工艺交货时间方面是可取的。利用统计相关性研究温度诱导下充填体毛细管流动对多堆BGA的影响是一个比较新的课题,据笔者所知尚未有其他研究报道。
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引用次数: 0
An investigation of physical properties and photovoltaic performance of methylammonium lead-tin iodide (CH3NH3Sn1-xPbxI3) solar cells 甲基铵-铅-锡碘化物(CH3NH3Sn1-xPbxI3)太阳能电池物理性能和光伏性能的研究
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2021-02-15 DOI: 10.1108/MI-09-2020-0064
O. Malekan, M. Adelifard, M. M. Mohagheghi
In the past several years, CH3NH3PbI3 perovskite material has been extensively evaluated as an absorber layer of perovskite solar cells due to its excellent structural and optical properties, and greater than 22% conversion efficiency. However, improvement and future commercialization of solar cells based on CH3NH3PbI3 encountered restrictions due to toxicity and instability of the lead element. Recently, studies on properties of lead-free and mixture of lead with other cations perovskite thin films as light absorber materials have been reported. The purpose of this paper was the fabrication of CH3NH3Sn1-xPbxI3 thin films with different SnI2 concentrations in ambient condition, and study on the structural, morphological, optical, and photovoltaic performance of the studied solar cells. The X-ray diffraction studies revealed the formation of both CH3NH3PbI3 and CH3NH3SnI3 phases with increasing the Sn concentration, and improvement in crystallinity and morphology was also observed. All perovskite layers had a relatively high absorption coefficient >104 cm−1 in the visible wavelengths, and the bandgap values varied in the range from 1.46 to 1.63 eV. Perovskite solar cells based on these thin films have been fabricated, and device performance was investigated. Results showed that photo-conversion efficiency (PCE) for the pure CH3NH3PbI3sample was 1.20%. With adding SnI2, PCE was increased to 4.48%.,In this work, the author mixed tin and lead with different percentages in the perovskite thin film. Also, the preparation of these layers and also other layers to fabricate solar cells based on them were conducted in an open and non-glove box environment. Finally, the effect of [Sn/Pb] ratio in the CH3NH3Sn1-xPbxI3 layers on the structural, morphological, optical, electrical and photovoltaic performance have been investigated.,CH3NH3Sn1-xPbxI3 (x = 0.0, 0.25, 0.50, 0.75, 1.0) perovskite thin films have been grown by a spin-coating technique. It was found that as tin concentration increases, the X-ray diffraction and FESEM images studies revealed the formation of both CH3NH3PbI3 and CH3NH3SnI3 phases, and improvement in crystallinity, and morphology; all thin films had high absorption coefficient values close to 104 cm−1 in the visible region, and the direct optical bandgap in the layers decreases from 1.63 eV in pure CH3NH3SnI3 to 1.46 eV for CH3NH3Sn0.0.25Pb0.75I3 samples; all thin films had p-type conductivity, and mobility and carrier density increased; perovskite solar cells based on these thin films have been fabricated, and device performance was investigated. Results showed that photo-conversion efficiency (PCE) for the pure CH3NH3PbI3sample was 1.20%. With adding SnI2, PCE was increased to 4.48%.,The preparation method seems to be interesting as it is in an ambient environment without the protection of nitrogen or argon gas.
在过去的几年里,CH3NH3PbI3钙钛矿材料由于其优异的结构和光学性能以及大于22%的转换效率而被广泛评价为钙钛矿太阳能电池的吸收层。然而,由于铅元素的毒性和不稳定性,基于CH3NH3PbI3的太阳能电池的改进和未来的商业化遇到了限制。近年来,人们对无铅和铅与其他阳离子的混合物钙钛矿薄膜作为吸光材料的性能进行了研究。本文的目的是在环境条件下制备不同SnI2浓度的CH3NH3Sn1-xPbxI3薄膜,并研究所研究的太阳能电池的结构、形态、光学和光伏性能。X射线衍射研究表明,随着Sn浓度的增加,CH3NH3PbI3和CH3NH3SnI3相都形成了,并且还观察到结晶度和形态的改善。所有钙钛矿层都具有相对较高的吸收系数>104 cm−1,带隙值在1.46到1.63之间变化 基于这些薄膜制备了钙钛矿太阳能电池,并对其器件性能进行了研究。结果表明,纯CH3NH3PbI3样品的光转换效率(PCE)为1.20%,随着SnI2的加入,PCE提高到4.48%。此外,这些层以及用于制造基于它们的太阳能电池的其他层的制备是在开放和非手套箱环境中进行的。最后,研究了CH3NH3Sn1-xPbxI3层中[Sn/Pb]比例对结构、形态、光学、电学和光伏性能的影响。,通过旋涂技术生长了CH3NH3Sn1-xPbxI3(x=0.0、0.25、0.50、0.75、1.0)钙钛矿薄膜。研究发现,随着锡浓度的增加,X射线衍射和FESEM图像研究揭示了CH3NH3PbI3和CH3NH3SnI3相的形成,以及结晶度和形态的改善;所有薄膜都具有接近104的高吸收系数值 cm−1,并且层中的直接光学带隙从1.63减小 纯CH3NH3SnI3中的eV至1.46 CH3NH3Sn0.0.25Pb0.75I3样品的eV;所有薄膜都具有p型导电性,并且迁移率和载流子密度增加;基于这些薄膜制备了钙钛矿太阳能电池,并对其器件性能进行了研究。结果表明,纯CH3NH3PbI3样品的光转换效率(PCE)为1.20%。随着SnI2的加入,PCE提高到4.48%。这种制备方法似乎很有趣,因为它是在没有氮气或氩气保护的环境中进行的。
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引用次数: 0
Advanced utilization of 3D digital image correlation for thermal and impact reliabilities of electronics components 先进利用3D数字图像相关性提高电子元件的热可靠性和冲击可靠性
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2021-02-01 DOI: 10.1108/MI-08-2020-0052
J. Kwak, Soonwan Chung
PurposeThis paper aims to present an adaptation of digital image correlation (DIC) to the electronics industry for reliability assessment of electronic packages. Two case studies are presented: one for warpage measurement of a micro-electro-mechanical system (MEMS) package under different temperature conditions and the other for the measurement of transient displacements on the surface of a printed circuit board (PCB) assembly under free-fall drop conditions, which is for explaining the typical camera setup requirement and comparing among different boundary conditions by fastening methods of PCB.Design/methodology/approachDIC warpage measurements on a small device, such as a MEMS package, require a special speckle pattern. A new method for the creation of speckle patterns was developed using carbon coating and aluminum evaporative deposition. To measure the transient response on the surface of a PCB during a free-fall impact event, three-dimensional (3D) DIC was integrated with synchronized stereo-high speed cameras. This approach enables the measurement of full-field displacement on the PCB surface during a free-fall impact event, contrary to the localized information that is obtained by the conventional strain gage and accelerometer method.FindingsThe authors suggest the proposed patterning method to the small-sized microelectronics packages for DIC measurements. More generally, the idea is to have a thin layer of the dark or bright color of the background and then apply the white or black colored pattern, respectively, so that the surface has high contrast. Also, to achieve a proper size of speckles, this paper does not want to expose the measuring objects to high temperatures or pressures during the sample preparation stage. Of course, it seems a complicated process to use aluminum evaporator, carbon coater and electroformed mesh. However, the authors intend to share one of the solutions to achieve a proper pattern on such small-sized electronic packages.Originality/value3D DIC technique can be successfully implemented for the measurement of micro-scale deformations in small packages (such as MEMS) and for the analysis of dynamic deformation of complex PCB.
目的本文旨在提出一种适用于电子行业的数字图像相关性(DIC),用于电子封装的可靠性评估。给出了两个案例研究:一个用于微机电系统(MEMS)封装在不同温度条件下的翘曲测量,另一个用于测量自由跌落条件下印刷电路板(PCB)组件表面的瞬态位移,用于解释典型的相机设置要求,并通过PCB.的紧固方法在不同的边界条件之间进行比较。在诸如MEMS封装的小型器件上的设计/方法/approachDIC翘曲测量需要特殊的散斑图案。开发了一种使用碳涂层和铝蒸发沉积来产生斑点图案的新方法。为了测量自由落体撞击事件期间PCB表面的瞬态响应,将三维(3D)DIC与同步立体高速摄像机集成在一起。这种方法能够在自由落体撞击事件期间测量PCB表面上的全场位移,这与传统应变仪和加速度计方法获得的局部信息相反。作者对用于DIC测量的小型微电子封装提出了所提出的图案化方法。更普遍地说,这个想法是在背景上涂上一层深色或亮色的薄层,然后分别涂上白色或黑色的图案,使表面具有高对比度。此外,为了获得合适尺寸的散斑,本文不希望在样品制备阶段将测量对象暴露在高温或高压下。当然,使用铝蒸发器、碳涂层器和电铸网似乎是一个复杂的过程。然而,作者打算分享其中一种解决方案,以在这种小型电子封装上实现适当的模式。Originality/value3DDIC技术可以成功地用于测量小封装(如MEMS)中的微尺度变形和分析复杂PCB的动态变形。
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引用次数: 2
Small ozone generator fabricated from low-temperature co-fired ceramics 低温共烧陶瓷制备小型臭氧发生器
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2021-01-13 DOI: 10.1108/MI-07-2020-0043
K. Makarovič, D. Belavic, B. Malič, A. Benčan, F. Kovač, J. Holc
The purpose of this study is the design, fabrication and evaluation of a miniature ozone generator using the principle of electric discharge are presented.,The device was fabricated using a low-temperature co-fired ceramics (LTCC) technology, by which a multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimeter scales was realized.,The developed ozone generator with the dimensions of 63.6 × 41.8 × 1.3 mm produces approximately 1 vol. % of ozone in oxygen flow of 15 ml/min, at an applied voltage of 7 kV.,A miniature ozone generator, manufactured in LTCC technology, produces high amount of ozone and more than it is described in the available references or in datasheets of commercial devices of similar size.
本文介绍了一种基于放电原理的微型臭氧发生器的设计、制造和性能评价。该器件采用低温共烧陶瓷(LTCC)技术,实现了微、毫米尺度上具有集成电极、埋置通道和空腔的多层陶瓷结构。研制的臭氧发生器尺寸为63.6 × 41.8 × 1.3 mm,体积约为1 vol。在7千伏电压下,在15毫升/分钟的氧气流量中臭氧的百分比。采用LTCC技术制造的微型臭氧发生器产生的臭氧量高,比现有参考文献或类似尺寸的商业设备的数据表中所描述的臭氧量多。
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引用次数: 0
Enhancement of luminous flux of InGaAlP-based low-power SMD LEDs using substrates with different thermal resistances 不同热阻衬底增强ingaalp基小功率SMD led光通量
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2020-12-28 DOI: 10.1108/mi-06-2020-0035
M. E. Raypah, S. Mahmud, M. Devarajan, A. Alshammari
PurposeOptimization of light-emitting diodes’ (LEDs’) design together with long-term reliability is directly correlated with their photometric, electric and thermal characteristics. For a given thermal layout of the LED system, the maximum luminous flux occurs at an optimal electrical input power and can be determined using a photo-electro-thermal (PET) theory. The purpose of this study is to extend the application of the luminous flux equation in PET theory for low-power (LP) LEDs.Design/methodology/approachLP surface-mounted device LEDs were mounted on substrates of different thermal resistances. Three LEDs were attached to substrates which were flame-retardant fiberglass epoxy (FR4) and two aluminum-based metal core printed circuit boards (MCPCBs) with thermal conductivities of about 1.0 W/m.K, 2.0 W/m.K and 5.0 W/m.K, respectively. The conjunction of thermal transient tester and thermal and radiometric characterization of LEDs system was used to measure the thermal and optical parameters of the LEDs at a certain range of input current and temperature.FindingsThe validation of the extended application of the luminous flux equation was confirmed via a good agreement between the practical and theoretical results. The outcomes show that the optimum luminous flux is 25.51, 31.91 and 37.01 lm for the LEDs on the FR4 and the two MCPCBs, respectively. Accordingly, the stipulated maximum electrical input power in the LED datasheet (0.185 W) is shifted to 0.6284, 0.6963 and 0.8838 W between the three substrates.Originality/valueUsing a large number of LP LEDs is preferred than high-power (HP) LEDs for the same system power to augment the heat transfer and provide a higher luminous flux. The PET theory equations have been applied to HP LEDs using heatsinks with various thermal resistances. In this work, the PET theory luminous flux equation was extended to be used for Indium Gallium Aluminum Phosphide LP LEDs attached to the substrates with dissimilar thermal resistances.
目的:发光二极管(led)设计的优化及其长期可靠性与其光度、电学和热特性直接相关。对于给定的LED系统热布局,最大光通量发生在最佳的电输入功率,可以使用光电热学(PET)理论确定。本研究的目的是将PET理论中的光通量方程扩展到低功率(LP) led。设计/方法/方法lp表面安装器件led安装在不同热阻的基板上。三个led连接在阻燃玻璃纤维环氧树脂(FR4)基片和两个导热系数约为1.0 W/m的铝基金属芯印刷电路板(mcpcb)上。K, 2.0 W/m。K和5.0 W/m。分别K。采用热瞬态测试仪与led系统的热辐射特性相结合的方法,在一定的输入电流和温度范围内测量led的热光学参数。结果光通量方程推广应用的正确性得到了验证,实际计算结果与理论计算结果吻合较好。结果表明,FR4和两种mcpcb上的led的最佳光通量分别为25.51、31.91和37.01 lm。因此,LED数据表中规定的最大电输入功率(0.185 W)在三种基板之间转移到0.6284,0.6963和0.8838 W。原创性/价值在相同的系统功率下,使用大量低功耗led比高功率(HP) led更可取,以增加传热并提供更高的光通量。PET理论方程已应用于使用各种热阻散热器的HP led。本文将PET理论光通量方程推广到不同热阻衬底上的磷化铟镓铝LP led。
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Microelectronics International
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