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Au-coated Ag alloy bonding wires with enhanced oxidation resistance for electronic packaging applications 电子封装应用中抗氧化性增强的Au涂层Ag合金键合线
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-09-21 DOI: 10.1108/mi-08-2022-0158
Yuchen Xiao, H. Tang, Hehe Zhang, Xiaoling Yang, Ling Sun, Yong Xie, Baoan Wu, B. Luan, W. Xie, X. Cai
PurposeThe purpose of this paper is to develop high-performance Au-coated Ag alloy wires (ACAA wires) and demonstrate the effect of Au coating layers on the bonding performance and oxidation resistance for stable and reliable electronic packaging applications.Design/methodology/approachACAA wire with a diameter of approximately 25 µm and Au layer thickness of approximately 100 nm were prepared by the continuous casting, plating and wire drawing method. The bonding performance of the ACAA wires were studied through bonding on 3,535 chips. The oxidation resistance of ACAA wires and Ag alloy wires (AA wires) were comparatively studied by means of chemical oxidation tests, accelerated life tests and electrochemical tests systematically.FindingsACAA wires could form axi-symmetrical spherical free air balls with controllable diameter of 1.5∼2.5 times of the wire diameter after electric flame-off process. The ball shear strength of ACAA wire was higher than that of AA wires. Most importantly, because of the surface Au coating layer, the oxidation resistance of ACAA wires was much enhanced.Research limitations/implicationsACAA wires with different lengths of heat affected zone were not developed in this study, which limited their application with different loop height requirements.Practical implicationsWith higher bonding strength and oxidation resistance, ACAA wires would be a better choice than previous reported AA wire in chip packaging which require high stability and reliability.Originality/valueThis paper provides a kind of novel ACAA wire, which possess the merits of high bonding strength and reliability, and show great potential in electronic packaging applications.
目的研制高性能镀金银合金线(ACAA线),并研究镀金层对其键合性能和抗氧化性能的影响,从而实现稳定可靠的电子封装应用。采用连续铸造、电镀和拉丝的方法制备了直径约为25 μ m、金层厚度约为100 nm的acaa金属丝。通过在3535个芯片上的键合,研究了ACAA导线的键合性能。采用化学氧化试验、加速寿命试验和电化学试验等方法,系统地比较研究了ACAA丝和Ag合金丝(AA丝)的抗氧化性能。结果表明,sacaa丝经电燃后可形成直径为丝径1.5 ~ 2.5倍可控的轴对称球形自由空气球。ACAA丝的球抗剪强度高于AA丝。最重要的是,由于表面有一层Au涂层,使得ACAA导线的抗氧化性大大提高。研究局限性/意义本研究未开发具有不同热影响区长度的acaa导线,这限制了其在不同环路高度要求下的应用。实际意义ACAA线具有更高的结合强度和抗氧化性,在要求高稳定性和可靠性的芯片封装中,ACAA线将是比先前报道的AA线更好的选择。本文提供了一种新型的ACAA线,具有高的结合强度和可靠性,在电子封装方面具有很大的应用潜力。
{"title":"Au-coated Ag alloy bonding wires with enhanced oxidation resistance for electronic packaging applications","authors":"Yuchen Xiao, H. Tang, Hehe Zhang, Xiaoling Yang, Ling Sun, Yong Xie, Baoan Wu, B. Luan, W. Xie, X. Cai","doi":"10.1108/mi-08-2022-0158","DOIUrl":"https://doi.org/10.1108/mi-08-2022-0158","url":null,"abstract":"\u0000Purpose\u0000The purpose of this paper is to develop high-performance Au-coated Ag alloy wires (ACAA wires) and demonstrate the effect of Au coating layers on the bonding performance and oxidation resistance for stable and reliable electronic packaging applications.\u0000\u0000\u0000Design/methodology/approach\u0000ACAA wire with a diameter of approximately 25 µm and Au layer thickness of approximately 100 nm were prepared by the continuous casting, plating and wire drawing method. The bonding performance of the ACAA wires were studied through bonding on 3,535 chips. The oxidation resistance of ACAA wires and Ag alloy wires (AA wires) were comparatively studied by means of chemical oxidation tests, accelerated life tests and electrochemical tests systematically.\u0000\u0000\u0000Findings\u0000ACAA wires could form axi-symmetrical spherical free air balls with controllable diameter of 1.5∼2.5 times of the wire diameter after electric flame-off process. The ball shear strength of ACAA wire was higher than that of AA wires. Most importantly, because of the surface Au coating layer, the oxidation resistance of ACAA wires was much enhanced.\u0000\u0000\u0000Research limitations/implications\u0000ACAA wires with different lengths of heat affected zone were not developed in this study, which limited their application with different loop height requirements.\u0000\u0000\u0000Practical implications\u0000With higher bonding strength and oxidation resistance, ACAA wires would be a better choice than previous reported AA wire in chip packaging which require high stability and reliability.\u0000\u0000\u0000Originality/value\u0000This paper provides a kind of novel ACAA wire, which possess the merits of high bonding strength and reliability, and show great potential in electronic packaging applications.\u0000","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":null,"pages":null},"PeriodicalIF":1.1,"publicationDate":"2022-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47577351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Surface quality prediction and lapping process optimisation on the fixed-abrasive lapping plate of sapphire wafers 蓝宝石晶片固定研磨研磨板表面质量预测及研磨工艺优化
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-08-24 DOI: 10.1108/mi-01-2022-0007
Yanfu Wang, X. Wang, Lifei Liu
PurposeLapping is a vital flattening process to improve the quality of processed semiconductor wafers such as single-crystal sapphire wafers. This study aims to optimise the lapping process of the fixed-abrasive lapping plate of sapphire wafers with good overall performance [i.e. high material removal rate (MRR), small surface roughness (Ra) of the wafers after lapping and small lapping plate wear ratio (η)].Design/methodology/approachThe influence of process parameters such as lapping time, abrasive size, abrasive concentration, lapping pressure and lapping speed on MRR, Ra and η of lapping-processed sapphire wafers was studied, and the results were combined with experimental data to establish a regression model. The multi-evaluation index optimisation problem was transformed into a single-index optimisation problem via an entropy method and the grey relational analysis (GRA) to comprehensively evaluate the performance of each parameter.FindingsThe results revealed that lapping time, abrasive size, abrasive concentration, lapping pressure and lapping speed had different influence degrees on MRR, Ra and η. Among these parameters, lapping time, lapping speed and abrasive size had the most significant effects on MRR, Ra and η, and the established regression equations predicted the response values of MRR, Ra and η to be 99.56%, 99.51% and 93.88% and the relative errors between the predicted and actual measured values were <12%, respectively. With increased lapping time, MRR, Ra and η gradually decreased. With increased abrasive size, MRR increased nearly linearly, whereas Ra and η initially decreased but subsequently increased. With an increase in abrasive concentration, MRR, Ra and η initially increased but subsequently decreased. With increased lapping pressure, MRR and η increased nearly linearly and continuously, whereas Ra decreased nearly linearly and continuously. With increased lapping speed, Ra initially decreased sharply but subsequently increased gradually, whereas η initially increased sharply but subsequently decreased gradually; however, the change in MRR was not significant. Comparing the optimised results obtained via the analysis of influence law, the parameters optimised via the entropy method and GRA were used to obtain sapphire wafers lapping with an MRR of 4.26 µm/min, Ra of 0.141 µm and η of 25.08, and the lapping effect was significantly improved.Originality/valueTherefore, GRA can provide new ideas for ultra-precision processing and process optimisation of semiconductor materials such as sapphire wafers.
铺平是提高单晶蓝宝石等半导体晶圆加工质量的重要铺平工艺。本研究旨在优化蓝宝石晶圆固定磨料研磨板的研磨工艺,使其具有良好的综合性能[即材料去除率(MRR)高,研磨后晶圆表面粗糙度(Ra)小,研磨板磨损比(η)小]。研究了研磨时间、磨料粒度、研磨浓度、研磨压力和研磨速度等工艺参数对蓝宝石晶圆MRR、Ra和η的影响,并将结果与实验数据相结合,建立了回归模型。通过熵值法和灰色关联分析(GRA)对各参数的性能进行综合评价,将多评价指标优化问题转化为单指标优化问题。结果表明:研磨时间、磨料粒度、研磨浓度、研磨压力和研磨速度对MRR、Ra和η均有不同程度的影响。其中,研磨时间、研磨速度和磨料粒度对MRR、Ra和η的影响最为显著,建立的回归方程预测MRR、Ra和η的响应值分别为99.56%、99.51%和93.88%,预测值与实测值的相对误差均小于12%。随着研磨时间的延长,MRR、Ra和η值逐渐降低。随着磨粒尺寸的增大,MRR呈线性增加,Ra和η先减小后增大。随着磨料浓度的增加,MRR、Ra和η先增大后减小。随着研磨压力的增加,MRR和η呈线性连续增加,Ra呈线性连续下降。随着研磨速度的增加,Ra先急剧减小后逐渐增大,η先急剧增大后逐渐减小;然而,MRR的变化并不显著。通过对影响规律分析得到的优化结果进行比较,将优化后的参数与GRA相结合,得到了MRR为4.26µm/min、Ra为0.141µm、η为25.08的蓝宝石晶圆研磨,研磨效果显著提高。因此,GRA可以为蓝宝石晶圆等半导体材料的超精密加工和工艺优化提供新的思路。
{"title":"Surface quality prediction and lapping process optimisation on the fixed-abrasive lapping plate of sapphire wafers","authors":"Yanfu Wang, X. Wang, Lifei Liu","doi":"10.1108/mi-01-2022-0007","DOIUrl":"https://doi.org/10.1108/mi-01-2022-0007","url":null,"abstract":"\u0000Purpose\u0000Lapping is a vital flattening process to improve the quality of processed semiconductor wafers such as single-crystal sapphire wafers. This study aims to optimise the lapping process of the fixed-abrasive lapping plate of sapphire wafers with good overall performance [i.e. high material removal rate (MRR), small surface roughness (Ra) of the wafers after lapping and small lapping plate wear ratio (η)].\u0000\u0000\u0000Design/methodology/approach\u0000The influence of process parameters such as lapping time, abrasive size, abrasive concentration, lapping pressure and lapping speed on MRR, Ra and η of lapping-processed sapphire wafers was studied, and the results were combined with experimental data to establish a regression model. The multi-evaluation index optimisation problem was transformed into a single-index optimisation problem via an entropy method and the grey relational analysis (GRA) to comprehensively evaluate the performance of each parameter.\u0000\u0000\u0000Findings\u0000The results revealed that lapping time, abrasive size, abrasive concentration, lapping pressure and lapping speed had different influence degrees on MRR, Ra and η. Among these parameters, lapping time, lapping speed and abrasive size had the most significant effects on MRR, Ra and η, and the established regression equations predicted the response values of MRR, Ra and η to be 99.56%, 99.51% and 93.88% and the relative errors between the predicted and actual measured values were <12%, respectively. With increased lapping time, MRR, Ra and η gradually decreased. With increased abrasive size, MRR increased nearly linearly, whereas Ra and η initially decreased but subsequently increased. With an increase in abrasive concentration, MRR, Ra and η initially increased but subsequently decreased. With increased lapping pressure, MRR and η increased nearly linearly and continuously, whereas Ra decreased nearly linearly and continuously. With increased lapping speed, Ra initially decreased sharply but subsequently increased gradually, whereas η initially increased sharply but subsequently decreased gradually; however, the change in MRR was not significant. Comparing the optimised results obtained via the analysis of influence law, the parameters optimised via the entropy method and GRA were used to obtain sapphire wafers lapping with an MRR of 4.26 µm/min, Ra of 0.141 µm and η of 25.08, and the lapping effect was significantly improved.\u0000\u0000\u0000Originality/value\u0000Therefore, GRA can provide new ideas for ultra-precision processing and process optimisation of semiconductor materials such as sapphire wafers.\u0000","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":null,"pages":null},"PeriodicalIF":1.1,"publicationDate":"2022-08-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45828207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of UV ZnO NRS photodetector based on seeded silicon substrate via the drop-casting technique 基于籽晶硅衬底的液滴浇铸法制备紫外ZnO NRS光电探测器
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-08-23 DOI: 10.1108/mi-03-2022-0046
S. M. Abed, S. M. Mohammad, Z. Hassan, A. Muhammad, Suvindraj Rajamanickam
PurposeThe purpose of this study is to fabricate an ultraviolet (UV) metal-semiconductor-metal (MSM) photodetector based on zinc oxide nanorods (ZnO NRs) grown on seeded silicon (Si) substrate that was prepared by a low-cost method (drop-casting technique).Design/methodology/approachThe drop-casting method was used for the seed layer deposition, the hydrothermal method was used for the growth of ZnO NRs and subsequent fabrication of UV MSM photodetector was done using the direct current sputtering technique. The performance of the fabricated MSM devices was investigated by current–voltage (I–V) measurements. The photodetection mechanism of the fabricated device was discussed.FindingsSemi-vertically high-density ZnO (NRs) were effectively produced with a preferential orientation along the (002) direction, and increased crystallinity is confirmed by X-ray diffraction analysis. Photoluminescence results show a high UV region. The fabricated MSM UV photodetector showed that the ZnO (NRs) MSM device has great stability over time, high photocurrent, good sensitivity and high responsivity under 365 nm wavelength illumination and 0 V, 1 V, 2 V and 3 V applied bias. The responsivity and sensitivity for the fabricated ZnO NRs UV photodetector are 0.015 A W-1, 0.383 A W-1, 1.290 A W-1 and 1.982 A W-1 and 15,030, 42.639, 100.173 and 334.029, respectively, under UV light (365 nm) illumination at (0 V, 1 V, 2 V and 3 V).Originality/valueThis paper uses the drop-casting technique and the hydrothermal method as simple and low-cost methods to fabricate and improve the ZnO NRs photodetector.
目的本研究的目的是基于在籽晶硅(Si)衬底上生长的氧化锌纳米棒(ZnO-NRs),通过低成本的方法(滴注技术)制备紫外(UV)金属半导体金属(MSM)光电探测器,使用水热法生长ZnO NRs,随后使用直流溅射技术制造UV MSM光电探测器。通过电流-电压(I–V)测量研究了所制造的MSM器件的性能。讨论了该器件的光电探测机理。发现半垂直高密度ZnO(NRs)在(002)方向上具有优先取向,并通过X射线衍射分析证实了结晶度的提高。光致发光结果显示出高UV区域。所制备的MSM紫外光电探测器表明,ZnO(NRs)MSM器件具有良好的时间稳定性、高光电流、良好的灵敏度和高响应度 nm波长照明和0 V、 1伏,2 V和3 V施加偏压。所制备的ZnO NRs紫外光电探测器的响应度和灵敏度为0.015 A W-1,0.383 W-1,1.290 A W-1和1.982 在紫外线(365 nm)照明 V、 1 V、 2 V和3 V) .独创性/价值本文采用液滴铸造技术和水热法作为简单、低成本的方法来制备和改进ZnO NRs光电探测器。
{"title":"Fabrication of UV ZnO NRS photodetector based on seeded silicon substrate via the drop-casting technique","authors":"S. M. Abed, S. M. Mohammad, Z. Hassan, A. Muhammad, Suvindraj Rajamanickam","doi":"10.1108/mi-03-2022-0046","DOIUrl":"https://doi.org/10.1108/mi-03-2022-0046","url":null,"abstract":"\u0000Purpose\u0000The purpose of this study is to fabricate an ultraviolet (UV) metal-semiconductor-metal (MSM) photodetector based on zinc oxide nanorods (ZnO NRs) grown on seeded silicon (Si) substrate that was prepared by a low-cost method (drop-casting technique).\u0000\u0000\u0000Design/methodology/approach\u0000The drop-casting method was used for the seed layer deposition, the hydrothermal method was used for the growth of ZnO NRs and subsequent fabrication of UV MSM photodetector was done using the direct current sputtering technique. The performance of the fabricated MSM devices was investigated by current–voltage (I–V) measurements. The photodetection mechanism of the fabricated device was discussed.\u0000\u0000\u0000Findings\u0000Semi-vertically high-density ZnO (NRs) were effectively produced with a preferential orientation along the (002) direction, and increased crystallinity is confirmed by X-ray diffraction analysis. Photoluminescence results show a high UV region. The fabricated MSM UV photodetector showed that the ZnO (NRs) MSM device has great stability over time, high photocurrent, good sensitivity and high responsivity under 365 nm wavelength illumination and 0 V, 1 V, 2 V and 3 V applied bias. The responsivity and sensitivity for the fabricated ZnO NRs UV photodetector are 0.015 A W-1, 0.383 A W-1, 1.290 A W-1 and 1.982 A W-1 and 15,030, 42.639, 100.173 and 334.029, respectively, under UV light (365 nm) illumination at (0 V, 1 V, 2 V and 3 V).\u0000\u0000\u0000Originality/value\u0000This paper uses the drop-casting technique and the hydrothermal method as simple and low-cost methods to fabricate and improve the ZnO NRs photodetector.\u0000","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":null,"pages":null},"PeriodicalIF":1.1,"publicationDate":"2022-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49093657","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microstructure and properties of ZnO-Bi2O3-based varistor ceramics via flash sintering 闪速烧结ZnO-Bi2O3基压敏陶瓷的组织与性能
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-08-16 DOI: 10.1108/mi-05-2022-0079
Ming-Xun Jiang, Mengyang Shi, Jiamao Li, Juan Liu, Lei Zhang, Jianyu Qin, Yongtao Jiu, Bin Tang, Dong Xu
PurposeThis paper aims to study the effects of MnO2 on the ZnO–Bi2O3-based varistor prepared via flash sintering (FS)Design/methodology/approachMnO2-doped ZnO–Bi2O3-based varistors were successfully prepared by the FS with a step-wise increase of the .current in 60 s at the furnace temperature <750°C under the direct current electric field of 300 V cm−1. The FS process, microstructure and the electrical performance of ZnO–Bi2O3-based varistors were systematically investigated.FindingsThe doping of MnO2 significantly decreased the onset temperature of FS and improved the electrical performance of FS ZnO varistor ceramic. The sample with 0.5 mol% MnO2 doping shows the highest improvement, with the nonlinear coefficient of 18, the leakage current of 16.82 µA, the threshold voltage of 459 V/mm and the dielectric constant of 1,221 at 1 kHz.Originality/valueFS is a wonderful technology to enhance ZnO varistors for its low energy consumption, and a short sintering time can reduce grain growth and inhabit Bi2O3 volatilize, yet few research studies work on that. In this research, the authors analyzed the FS process and improved the electrical characteristics through MnO2 doping.
目的研究MnO2对闪速烧结(FS)制备的ZnO–Bi2O3基压敏电阻的影响。设计/方法/方法在60 在300的直流电场下,炉温<750°C时的s V cm−1。系统地研究了ZnO–Bi2O3基压敏电阻的FS工艺、微观结构和电学性能。结果MnO2的掺杂显著降低了FS的起始温度,改善了FS-ZnO压敏陶瓷的电学性能。0.5的样品 mol%MnO2掺杂表现出最高的改善,非线性系数为18,漏电流为16.82 µA,阈值电压459 V/mm,介电常数为1221 kHz。Originality/valueFS是一种很好的增强ZnO压敏电阻的技术,因为它能耗低,而且短的烧结时间可以减少晶粒生长并抑制Bi2O3的挥发,但很少有研究对此进行研究。在本研究中,作者分析了FS工艺,并通过掺杂MnO2改善了电学特性。
{"title":"Microstructure and properties of ZnO-Bi2O3-based varistor ceramics via flash sintering","authors":"Ming-Xun Jiang, Mengyang Shi, Jiamao Li, Juan Liu, Lei Zhang, Jianyu Qin, Yongtao Jiu, Bin Tang, Dong Xu","doi":"10.1108/mi-05-2022-0079","DOIUrl":"https://doi.org/10.1108/mi-05-2022-0079","url":null,"abstract":"\u0000Purpose\u0000This paper aims to study the effects of MnO2 on the ZnO–Bi2O3-based varistor prepared via flash sintering (FS)\u0000\u0000\u0000Design/methodology/approach\u0000MnO2-doped ZnO–Bi2O3-based varistors were successfully prepared by the FS with a step-wise increase of the .current in 60 s at the furnace temperature <750°C under the direct current electric field of 300 V cm−1. The FS process, microstructure and the electrical performance of ZnO–Bi2O3-based varistors were systematically investigated.\u0000\u0000\u0000Findings\u0000The doping of MnO2 significantly decreased the onset temperature of FS and improved the electrical performance of FS ZnO varistor ceramic. The sample with 0.5 mol% MnO2 doping shows the highest improvement, with the nonlinear coefficient of 18, the leakage current of 16.82 µA, the threshold voltage of 459 V/mm and the dielectric constant of 1,221 at 1 kHz.\u0000\u0000\u0000Originality/value\u0000FS is a wonderful technology to enhance ZnO varistors for its low energy consumption, and a short sintering time can reduce grain growth and inhabit Bi2O3 volatilize, yet few research studies work on that. In this research, the authors analyzed the FS process and improved the electrical characteristics through MnO2 doping.\u0000","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":null,"pages":null},"PeriodicalIF":1.1,"publicationDate":"2022-08-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"41786443","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An improved parallel five-level reinjection CSC for self-commutation of thyristor converter 一种用于晶闸管变换器自换流的改进并联五电平回注CSC
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-07-29 DOI: 10.1108/mi-05-2022-0093
Yumei Song, Jianzhang Hao, Changhao Dong, Xizheng Guo, Li Wang
PurposeThis paper aims to study a multi-level reinjection current source converter (MLR-CSC) that adds attracting properties such as the self-commutation and pulse multiplication to the thyristor converter, which is of great significance for increasing the device capacity and reducing current harmonics on the grid side. Particularly, designing advantageous driving methods of the reinjection circuit is a critical issue that impacts the harmonic reduction and operation reliability of the MLR-CSC.Design/methodology/approachTo deal with the mentioned issue, this paper takes the five-level reinjection current source converter (FLR-CSC), which is a type of the MLR-CSC, as the research object. Then, a method that can fully use combinations of five-level reinjection switching functions based on the concept of decomposition and recombination is proposed. It is worthy to mention that the proposed method can be easily extended to other multi-level reinjection circuits. Moreover, the working principle of the three-phase bridge circuit based on semi-controlled thyristors in the FLR-CSC that can achieve the four-quadrant power conversion is analyzed in detail.FindingsFinally, the simulation and experimental results of FLR-CSC verify the effectiveness of the proposed reinjection circuit driving method and the operating principle of four-quadrant power conversion in this paper.Originality/valueThe outstanding features of the proposed driving method for FLR-CSC in this paper include combinations of reinjection switching functions that are fully exploited through three simple steps and can be conveniently extended to other multi-level reinjection circuits.
目的研究在晶闸管变换器基础上增加自换流、脉冲倍增等吸引特性的多级回喷电流源变换器(MLR-CSC),对提高器件容量和降低电网侧电流谐波具有重要意义。其中,设计有利的回喷回路驱动方式是影响多管并联电动机减谐波和运行可靠性的关键问题。为了解决上述问题,本文以MLR-CSC的一种五电平回喷电流源变换器(FLR-CSC)为研究对象。然后,基于分解和重组的概念,提出了一种充分利用五级回注切换函数组合的方法。值得一提的是,该方法可以很容易地扩展到其他多级回注电路。详细分析了FLR-CSC中基于半控制晶闸管的三相桥式电路实现四象限功率转换的工作原理。最后,FLR-CSC的仿真和实验结果验证了本文提出的回喷电路驱动方法和四象限功率转换工作原理的有效性。本文提出的FLR-CSC驱动方法的突出特点包括通过三个简单步骤充分利用回注开关功能的组合,并且可以方便地扩展到其他多级回注电路。
{"title":"An improved parallel five-level reinjection CSC for self-commutation of thyristor converter","authors":"Yumei Song, Jianzhang Hao, Changhao Dong, Xizheng Guo, Li Wang","doi":"10.1108/mi-05-2022-0093","DOIUrl":"https://doi.org/10.1108/mi-05-2022-0093","url":null,"abstract":"\u0000Purpose\u0000This paper aims to study a multi-level reinjection current source converter (MLR-CSC) that adds attracting properties such as the self-commutation and pulse multiplication to the thyristor converter, which is of great significance for increasing the device capacity and reducing current harmonics on the grid side. Particularly, designing advantageous driving methods of the reinjection circuit is a critical issue that impacts the harmonic reduction and operation reliability of the MLR-CSC.\u0000\u0000\u0000Design/methodology/approach\u0000To deal with the mentioned issue, this paper takes the five-level reinjection current source converter (FLR-CSC), which is a type of the MLR-CSC, as the research object. Then, a method that can fully use combinations of five-level reinjection switching functions based on the concept of decomposition and recombination is proposed. It is worthy to mention that the proposed method can be easily extended to other multi-level reinjection circuits. Moreover, the working principle of the three-phase bridge circuit based on semi-controlled thyristors in the FLR-CSC that can achieve the four-quadrant power conversion is analyzed in detail.\u0000\u0000\u0000Findings\u0000Finally, the simulation and experimental results of FLR-CSC verify the effectiveness of the proposed reinjection circuit driving method and the operating principle of four-quadrant power conversion in this paper.\u0000\u0000\u0000Originality/value\u0000The outstanding features of the proposed driving method for FLR-CSC in this paper include combinations of reinjection switching functions that are fully exploited through three simple steps and can be conveniently extended to other multi-level reinjection circuits.\u0000","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":null,"pages":null},"PeriodicalIF":1.1,"publicationDate":"2022-07-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48630410","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Key techniques of ultra-low-power ADC and miniaturized RF transceiver circuits for 4G/LTE applications 4G/LTE超低功耗ADC和小型化射频收发电路关键技术
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-07-15 DOI: 10.1108/mi-06-2021-0054
M. Faheem, Muhammad Basit Azeem, A. A. Minhas, Shun'an Zhong, Xinghua Wang
PurposeRF transceiver module is considered a vital part of any wireless communication system. This module consists of two important parts the RF transceiver and analog-to-digital converter (ADC). Usually, both these parts – RF transceiver and ADC – are used to enhance the perspective of size and power. The data processing in 4G communication makes hurdles and need research attention to make it faster and smaller in size. Accuracy and fast processing are the critical challenges in the modern communication system.Design/methodology/approachAfter theoretical and practical investigations, this research work proposes key new techniques for the RF transceiver module. These techniques will make RF transceiver small, power-efficient and on the other hand, make dual SAR-ADC more effective as well. The proposed design has no intermediate frequency where the RF transceiver is reduced its major blocks from five to four, which includes crystal oscillator, phase lock loop, power amplifier and low noise amplifier. Moreover, the shared circuitry is introduced in the architecture of the SAR-ADC for the production of dual outputs, specifically in bootstrapped switch and comparator.FindingsThe miniaturized RF transceiver and SAR-ADC are well tested separately before the plantation on the printed circuit board (PCB). The operating voltage and frequency of the RF transceiver module are 1.2 V and 5.8 GHz, where the sampling rate, bandwidth and output power are 25 MHz, 200 MHz and 5 dBm, respectively. The core area of the PCB is 58.13 mm2. The bandwidth efficiency is 93% using surface acoustic wave less transmitter. The circuit is based on the library of 90 nm CMOS technology.Originality/valueThe entire circuit is highly synchronized with the input and reference clocks to avoid self-interference.
收发模块被认为是任何无线通信系统的重要组成部分。该模块由射频收发器和模数转换器(ADC)两个重要部分组成。通常,这两个部分-射频收发器和ADC -用于增强尺寸和功率的视角。4G通信中的数据处理存在障碍,需要研究如何使其更快、更小。准确和快速处理是现代通信系统面临的关键挑战。设计/方法/方法经过理论和实践研究,本研究提出了射频收发模块的关键新技术。这些技术将使射频收发器体积小,功耗低,另一方面使双SAR-ADC更有效。提出的设计没有中频,将射频收发器的主要模块从5个减少到4个,包括晶体振荡器、锁相环、功率放大器和低噪声放大器。此外,在SAR-ADC的体系结构中引入了用于产生双输出的共享电路,特别是在自举开关和比较器中。小型化射频收发器和SAR-ADC在安装在印刷电路板(PCB)上之前分别进行了良好的测试。射频收发模块的工作电压为1.2 V,工作频率为5.8 GHz,采样率为25 MHz,带宽为200 MHz,输出功率为5 dBm。PCB的核心面积为58.13 mm2。采用无表面声波发射机,带宽效率可达93%。该电路基于90纳米CMOS技术库。独创性/价值整个电路与输入时钟和参考时钟高度同步,避免自干扰。
{"title":"Key techniques of ultra-low-power ADC and miniaturized RF transceiver circuits for 4G/LTE applications","authors":"M. Faheem, Muhammad Basit Azeem, A. A. Minhas, Shun'an Zhong, Xinghua Wang","doi":"10.1108/mi-06-2021-0054","DOIUrl":"https://doi.org/10.1108/mi-06-2021-0054","url":null,"abstract":"\u0000Purpose\u0000RF transceiver module is considered a vital part of any wireless communication system. This module consists of two important parts the RF transceiver and analog-to-digital converter (ADC). Usually, both these parts – RF transceiver and ADC – are used to enhance the perspective of size and power. The data processing in 4G communication makes hurdles and need research attention to make it faster and smaller in size. Accuracy and fast processing are the critical challenges in the modern communication system.\u0000\u0000\u0000Design/methodology/approach\u0000After theoretical and practical investigations, this research work proposes key new techniques for the RF transceiver module. These techniques will make RF transceiver small, power-efficient and on the other hand, make dual SAR-ADC more effective as well. The proposed design has no intermediate frequency where the RF transceiver is reduced its major blocks from five to four, which includes crystal oscillator, phase lock loop, power amplifier and low noise amplifier. Moreover, the shared circuitry is introduced in the architecture of the SAR-ADC for the production of dual outputs, specifically in bootstrapped switch and comparator.\u0000\u0000\u0000Findings\u0000The miniaturized RF transceiver and SAR-ADC are well tested separately before the plantation on the printed circuit board (PCB). The operating voltage and frequency of the RF transceiver module are 1.2 V and 5.8 GHz, where the sampling rate, bandwidth and output power are 25 MHz, 200 MHz and 5 dBm, respectively. The core area of the PCB is 58.13 mm2. The bandwidth efficiency is 93% using surface acoustic wave less transmitter. The circuit is based on the library of 90 nm CMOS technology.\u0000\u0000\u0000Originality/value\u0000The entire circuit is highly synchronized with the input and reference clocks to avoid self-interference.\u0000","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":null,"pages":null},"PeriodicalIF":1.1,"publicationDate":"2022-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48155245","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Packaging design and thermal analysis for 1 mm2 high power VCSEL 1mm2大功率VCSEL的封装设计和热分析
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-07-15 DOI: 10.1108/mi-03-2022-0048
Khairul Mohd Arshad, Muhamad Mat Noor, A. A. Manaf, Kawarada H., F. S., Syamsul M.
PurposeVertical-cavity surface-emitting laser (VCSEL) is a high-performance semiconductor device made of unique epitaxial layers grown on n-type GaAs or InP substrates. The VCSEL’s thermal resistance, Rth, is an essential metric that reflects its thermal properties and dependability. The purpose of this paper is to develop packaging for 1 mm2 VCSEL chips made of a variety of materials, such as ceramic, lead frame and printed circuit board (PCB)-based packaging, as well as provide an idea or design that can withstand and perform well in terms of Rth and heat dissipation during operation. SolidWorks 2017 and AutoCAD Mechanical 2017 software were used to publish all thoughts and ideas, including the size dimensions (x, y and z) and material choices for each package.Design/methodology/approachFollowing the modelling and material selection, the next step is to use the Ansys Mechanical Structural FEA Analysis software to simulate all packaging for Rth and determine which packaging produced the best result, therefore, determining the heat dissipation for each packing. All parameters were used based on the standard cleanroom requirement for the industrial manufacturing backend process, where the cleanroom classification is 10,000 particles (ISO 7). The results demonstrated that the ceramic and lead frame provided good Rth values of 7.3 and 7.0 K/W, respectively, when compared to the PCB, which provided more than 80 K/W; thus, the heat dissipation for PCB packaging also increased.FindingsAs a result of the research, it was determined that ceramic and lead frame packaging are appropriate and capable of delivering good Rth and heat dissipation values when compared to PCB. In comparison to PCB, which requires numerous modifications, such as adding via holes and a thermal bar in an attempt to lower the Rth value, neither packaging requires improvement. Ceramic was chosen for development based on Rth's highest performance, with the actual device consisting of a lead frame and PCB. The Zth measurement test was carried out on a ceramic package, and the Rth result was comparable to the simulation result of 7.6 K/W, indicating that simulation was already proved for research and development.Originality/valueThe purpose of this study is to determine which proposed packaging design would give the highest Rth performance of a 1 mm2 chip as well as the best heat dissipation. In comparison to other studies, VCSEL packaging used the header and window cap as package components with a wavelength of 850 nm, and other VCSEL packaging developments used the sub mount on ceramic package with an output power ranging from 500 mW to 2 W, whereas this study used a huge wavelength and an output power of 4 W.
摘要多腔表面发射激光器(VCSEL)是一种在n型GaAs或InP衬底上生长的独特外延层构成的高性能半导体器件。VCSEL的热阻Rth是反映其热性能和可靠性的重要指标。本文的目的是为由陶瓷、引线框架和印刷电路板(PCB)等多种材料制成的1mm2 VCSEL芯片开发封装,并提供一种在运行过程中能够承受和表现良好的辐射和散热的想法或设计。使用SolidWorks 2017和AutoCAD Mechanical 2017软件发布所有想法和想法,包括每个包装的尺寸尺寸(x, y和z)和材料选择。设计/方法/方法在建模和材料选择之后,下一步是使用Ansys机械结构有限元分析软件模拟Rth的所有包装,并确定哪种包装产生最佳效果,从而确定每种包装的散热。所有参数都是根据工业制造后端工艺的标准洁净室要求使用的,其中洁净室分类为10,000个颗粒(ISO 7)。结果表明,与提供超过80 K/W的PCB相比,陶瓷和引线框架的Rth值分别为7.3和7.0 K/W;因此,PCB封装的散热也增加了。研究结果表明,与PCB相比,陶瓷和引线框架封装是合适的,并且能够提供良好的辐射和散热值。与PCB相比,PCB需要进行许多修改,例如增加通孔和热棒以试图降低Rth值,两种封装都不需要改进。基于Rth的最高性能,陶瓷被选择用于开发,实际设备由引线框架和PCB组成。在陶瓷封装上进行了第z次测量试验,第th次测量结果与7.6 K/W的仿真结果相当,表明仿真已经为研发提供了依据。原创性/价值本研究的目的是确定哪种拟议的封装设计将提供1mm2芯片的最高Rth性能以及最佳散热。与其他研究相比,VCSEL封装使用头部和窗盖作为封装组件,波长为850 nm,其他VCSEL封装开发使用陶瓷封装上的子安装,输出功率从500 mW到2 W,而本研究使用的是巨大的波长和4 W的输出功率。
{"title":"Packaging design and thermal analysis for 1 mm2 high power VCSEL","authors":"Khairul Mohd Arshad, Muhamad Mat Noor, A. A. Manaf, Kawarada H., F. S., Syamsul M.","doi":"10.1108/mi-03-2022-0048","DOIUrl":"https://doi.org/10.1108/mi-03-2022-0048","url":null,"abstract":"\u0000Purpose\u0000Vertical-cavity surface-emitting laser (VCSEL) is a high-performance semiconductor device made of unique epitaxial layers grown on n-type GaAs or InP substrates. The VCSEL’s thermal resistance, Rth, is an essential metric that reflects its thermal properties and dependability. The purpose of this paper is to develop packaging for 1 mm2 VCSEL chips made of a variety of materials, such as ceramic, lead frame and printed circuit board (PCB)-based packaging, as well as provide an idea or design that can withstand and perform well in terms of Rth and heat dissipation during operation. SolidWorks 2017 and AutoCAD Mechanical 2017 software were used to publish all thoughts and ideas, including the size dimensions (x, y and z) and material choices for each package.\u0000\u0000\u0000Design/methodology/approach\u0000Following the modelling and material selection, the next step is to use the Ansys Mechanical Structural FEA Analysis software to simulate all packaging for Rth and determine which packaging produced the best result, therefore, determining the heat dissipation for each packing. All parameters were used based on the standard cleanroom requirement for the industrial manufacturing backend process, where the cleanroom classification is 10,000 particles (ISO 7). The results demonstrated that the ceramic and lead frame provided good Rth values of 7.3 and 7.0 K/W, respectively, when compared to the PCB, which provided more than 80 K/W; thus, the heat dissipation for PCB packaging also increased.\u0000\u0000\u0000Findings\u0000As a result of the research, it was determined that ceramic and lead frame packaging are appropriate and capable of delivering good Rth and heat dissipation values when compared to PCB. In comparison to PCB, which requires numerous modifications, such as adding via holes and a thermal bar in an attempt to lower the Rth value, neither packaging requires improvement. Ceramic was chosen for development based on Rth's highest performance, with the actual device consisting of a lead frame and PCB. The Zth measurement test was carried out on a ceramic package, and the Rth result was comparable to the simulation result of 7.6 K/W, indicating that simulation was already proved for research and development.\u0000\u0000\u0000Originality/value\u0000The purpose of this study is to determine which proposed packaging design would give the highest Rth performance of a 1 mm2 chip as well as the best heat dissipation. In comparison to other studies, VCSEL packaging used the header and window cap as package components with a wavelength of 850 nm, and other VCSEL packaging developments used the sub mount on ceramic package with an output power ranging from 500 mW to 2 W, whereas this study used a huge wavelength and an output power of 4 W.\u0000","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":null,"pages":null},"PeriodicalIF":1.1,"publicationDate":"2022-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47805695","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polyimide substrate textured by copper-seeding technique for enhanced light absorption in flexible black silicon 柔性黑硅中增强光吸收的铜籽晶聚酰亚胺衬底
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-07-15 DOI: 10.1108/mi-03-2022-0038
Halo D. Omar, Auwal Abdulkadir, M. Hashim, M. Z. Pakhuruddin
PurposeThis paper aims to present investigation on textured polyimide (PI) substrate for enhanced light absorption in flexible black silicon (bSi).Design/methodology/approachFlexible bSi with thickness of 60 µm is used in this work. To texture the PI substrate, copper-seeding technique is used. A copper (Cu) layer with a thickness of 100 nm is deposited on PI substrate by sputtering. The substrate is then annealed at 400°C in air ambient for different durations of 60, 90 and 120 min.FindingsWith 90 min of annealing, root mean square roughness as large as 130 nm, peak angle of 24° and angle distribution of up to 87° are obtained. With this texturing condition, the flexible bSi exhibits maximum potential short-circuit current density (Jmax) of 40.33 mA/cm2, or 0.45 mA/cm2 higher compared to the flexible bSi on planar PI. The improvement is attributed to enhanced light scattering at the flexible bSi/textured PI interface. The findings from this work demonstrate that the optimization of the PI texturing via Cu-seeding process leads to an enhancement in the long wavelengths light absorption and potential Jmax in the flexible bSi absorber.Originality/valueDemonstrated enhanced light absorption and potential Jmax in flexible bSi on textured PI substrate (compared to planar PI substrate) by Cu-seeding with different annealing durations.
目的本文旨在研究用于增强柔性黑硅(bSi)光吸收的织构化聚酰亚胺(PI)衬底。设计/方法学/方法厚度为60的柔性bSi µm用于这项工作。为了使PI衬底纹理化,使用了铜籽晶技术。厚度为100的铜(Cu)层 nm通过溅射沉积在PI衬底上。然后在400°C的空气环境中对基板进行退火,退火时间分别为60、90和120 min.FindingsWith 90 最小退火时间,均方根粗糙度高达130 获得了24°的峰角和高达87°的角度分布。在这种织构化条件下,柔性bSi表现出40.33的最大潜在短路电流密度(Jmax) mA/cm2,或0.45 mA/cm2比平面PI上的柔性bSi高。这种改进归因于在柔性bSi/纹理PI界面处增强的光散射。这项工作的发现表明,通过Cu晶种工艺优化PI织构导致柔性bSi吸收体中长波长光吸收和电势Jmax的增强。独创性/价值通过不同退火持续时间的Cu晶种,在纹理化PI衬底上(与平面PI衬底相比)展示了柔性bSi中增强的光吸收和电势Jmax。
{"title":"Polyimide substrate textured by copper-seeding technique for enhanced light absorption in flexible black silicon","authors":"Halo D. Omar, Auwal Abdulkadir, M. Hashim, M. Z. Pakhuruddin","doi":"10.1108/mi-03-2022-0038","DOIUrl":"https://doi.org/10.1108/mi-03-2022-0038","url":null,"abstract":"\u0000Purpose\u0000This paper aims to present investigation on textured polyimide (PI) substrate for enhanced light absorption in flexible black silicon (bSi).\u0000\u0000\u0000Design/methodology/approach\u0000Flexible bSi with thickness of 60 µm is used in this work. To texture the PI substrate, copper-seeding technique is used. A copper (Cu) layer with a thickness of 100 nm is deposited on PI substrate by sputtering. The substrate is then annealed at 400°C in air ambient for different durations of 60, 90 and 120 min.\u0000\u0000\u0000Findings\u0000With 90 min of annealing, root mean square roughness as large as 130 nm, peak angle of 24° and angle distribution of up to 87° are obtained. With this texturing condition, the flexible bSi exhibits maximum potential short-circuit current density (Jmax) of 40.33 mA/cm2, or 0.45 mA/cm2 higher compared to the flexible bSi on planar PI. The improvement is attributed to enhanced light scattering at the flexible bSi/textured PI interface. The findings from this work demonstrate that the optimization of the PI texturing via Cu-seeding process leads to an enhancement in the long wavelengths light absorption and potential Jmax in the flexible bSi absorber.\u0000\u0000\u0000Originality/value\u0000Demonstrated enhanced light absorption and potential Jmax in flexible bSi on textured PI substrate (compared to planar PI substrate) by Cu-seeding with different annealing durations.\u0000","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":null,"pages":null},"PeriodicalIF":1.1,"publicationDate":"2022-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49077724","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of fluorine and silver co-doped ZnO photodetector using modified hydrothermal method 改性水热法制备氟银共掺杂ZnO光电探测器
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-06-14 DOI: 10.1108/mi-03-2022-0045
A. Muhammad, S. M. Mohammad, Z. Hassan, Suvindraj Rajamanickam, S. M. Abed, M. Ashiq
PurposeThe purpose of this study is to dope silver (Ag) and fluorine (F) in zinc oxide (ZnO) for the enhancement of electrical and optical properties of ZnO, as previous studies reported the improvement of these properties using individual doping of F and Ag. In this paper, F and Ag co-doped ZnO nanorods were synthesized using a modified hydrothermal method.Design/methodology/approachThe hydrothermal method was modified and used for the synthesis of the doped ZnO nanostructures, where stainless autoclave and oven were replaced with the Duran laboratory bottle and water boiler system in the process. The ultraviolet metal-semiconductor-metal photodetector (PD) was fabricated using DC sputtering method.FindingsVertically aligned nanorods images were captured from field emission scanning electron microscopy. XPS analysis confirmed greater spin-orbital interaction in the F and Ag co-doped ZnO sample and revealed the presence of F, Ag, Zn and O in the samples, indicating a successful doping process. X-ray diffraction revealed a hexagonal wurtzite structure with enhanced crystal quality upon co-doping. The bandgap decreased from 3.19 to 3.14 eV upon co-doping because of reduced defects density in the sample. Finally, an ultra-violet PD was fabricated with enhanced sensitivity and response times upon co-doping.Originality/valueThe low-cost, less energy-consuming Duran laboratory bottle and water boiler system were used as the substitute of expensive, more energy-consuming stainless autoclave and oven in a hydrothermal method for synthesis of F and Ag co-doped ZnO and subsequent fabrication of PD.
目的本研究的目的是在氧化锌(ZnO)中掺杂银(Ag)和氟(F),以提高ZnO的电学和光学性能,因为先前的研究报道了通过单独掺杂F和Ag来改善这些性能。设计/方法/方法对水热法进行了改进,并将其用于合成掺杂的ZnO纳米结构,在此过程中,用杜兰实验室的瓶子和水锅炉系统取代了不锈钢高压釜和烘箱。采用直流溅射法制备了紫外金属半导体金属光电探测器。发现垂直排列的纳米棒图像是通过场发射扫描电子显微镜拍摄的。XPS分析证实,在F和Ag共掺杂的ZnO样品中存在更大的自旋轨道相互作用,并揭示了样品中F、Ag、Zn和O的存在,表明掺杂过程是成功的。X射线衍射显示,共掺杂后,六方纤锌矿结构具有增强的晶体质量。由于样品中的缺陷密度降低,在共掺杂时带隙从3.19eV降低到3.14eV。最后,制备了一种在共掺杂时具有增强的灵敏度和响应时间的紫外线PD。独创性/价值在水热法中,使用低成本、低能耗的杜兰实验室瓶和水锅炉系统代替昂贵、高能耗的不锈钢高压釜和烘箱,合成了F和Ag共掺杂的ZnO,并随后制备了PD。
{"title":"Fabrication of fluorine and silver co-doped ZnO photodetector using modified hydrothermal method","authors":"A. Muhammad, S. M. Mohammad, Z. Hassan, Suvindraj Rajamanickam, S. M. Abed, M. Ashiq","doi":"10.1108/mi-03-2022-0045","DOIUrl":"https://doi.org/10.1108/mi-03-2022-0045","url":null,"abstract":"\u0000Purpose\u0000The purpose of this study is to dope silver (Ag) and fluorine (F) in zinc oxide (ZnO) for the enhancement of electrical and optical properties of ZnO, as previous studies reported the improvement of these properties using individual doping of F and Ag. In this paper, F and Ag co-doped ZnO nanorods were synthesized using a modified hydrothermal method.\u0000\u0000\u0000Design/methodology/approach\u0000The hydrothermal method was modified and used for the synthesis of the doped ZnO nanostructures, where stainless autoclave and oven were replaced with the Duran laboratory bottle and water boiler system in the process. The ultraviolet metal-semiconductor-metal photodetector (PD) was fabricated using DC sputtering method.\u0000\u0000\u0000Findings\u0000Vertically aligned nanorods images were captured from field emission scanning electron microscopy. XPS analysis confirmed greater spin-orbital interaction in the F and Ag co-doped ZnO sample and revealed the presence of F, Ag, Zn and O in the samples, indicating a successful doping process. X-ray diffraction revealed a hexagonal wurtzite structure with enhanced crystal quality upon co-doping. The bandgap decreased from 3.19 to 3.14 eV upon co-doping because of reduced defects density in the sample. Finally, an ultra-violet PD was fabricated with enhanced sensitivity and response times upon co-doping.\u0000\u0000\u0000Originality/value\u0000The low-cost, less energy-consuming Duran laboratory bottle and water boiler system were used as the substitute of expensive, more energy-consuming stainless autoclave and oven in a hydrothermal method for synthesis of F and Ag co-doped ZnO and subsequent fabrication of PD.\u0000","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":null,"pages":null},"PeriodicalIF":1.1,"publicationDate":"2022-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45961032","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Effects of indium composition on the surface morphological and optical properties of InGaN/GaN heterostructures 铟成分对InGaN/GaN异质结构表面形貌和光学性质的影响
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-06-10 DOI: 10.1108/mi-03-2022-0042
Nur Atiqah Hamzah, Mohd Ann Amirul Zulffiqal Md Sahar, Aik Kwan Tan, Mohd Anas Ahmad, Muhammad Fadhirul Izwan Abdul Malik, Chin Chyi Loo, Wei Sea Chang, Sha Shiong Ng

Purpose

This study aims to investigate the effects of indium composition on surface morphology and optical properties of indium gallium nitride on gallium nitride (InGaN/GaN) heterostructures.

Design/methodology/approach

The InGaN/GaN heterostructures were grown on flat sapphire substrates using a metal-organic chemical vapour deposition reactor with a trimethylindium flow rate of 368 sccm. The indium composition of the InGaN epilayers was controlled by applying different substrate temperatures. The surface morphology and topography were observed using field emission scanning electron microscope (F.E.I. Nova NanoSEM 450) and atomic force microscopy (Bruker Dimension Edge) with a scanning area of 10 µm × 10 µm, respectively. The compositional analysis was done by Energy Dispersive X-Ray Analysis. Finally, the ultraviolet-visible (UV-Vis) spectrophotometer (Agilent Technology Cary Series UV-Vis-near-infrared spectrometer) was measured from 200 nm to 1500 nm to investigate the optical properties of the samples.

Findings

The InGaN/GaN thin films have been successfully grown at three different substrate temperatures. The indium composition reduced as the temperature increased. At 760 C, the highest indium composition was obtained, 21.17%. This result was acquired from the simulation fitting of ω−2θ scan on (0002) plane using LEPTOS software by Bruker D8 Discover. The InGaN/GaN shows significantly different surface morphologies and topographies as the indium composition increases. The thickness of InGaN epilayers of the structure was ∼300 nm estimated from the field emission scanning electron microscopy. The energy bandgap of the InGaN was 2.54 eV – 2.79 eV measured by UV-Vis measurements.

Originality/value

It can be seen from this work that changes in substrate temperature can affect the indium composition. From all the results obtained, this work can be helpful towards efficiency improvement in solar cell applications.

目的研究铟的组成对氮化镓(InGaN/GaN)异质结构的表面形貌和光学性质的影响。设计/方法/方法采用金属-有机化学气相沉积反应器,在368 sccm的三甲基linum流速下,在扁平蓝宝石衬底上生长InGaN/GaN异质结构。通过施加不同的衬底温度来控制InGaN脱膜中铟的组成。采用场发射扫描电子显微镜(F.E.I. Nova NanoSEM 450)和原子力显微镜(Bruker Dimension Edge)分别观察表面形貌和形貌,扫描面积为10µm × 10µm。成分分析采用能量色散x射线分析。最后,使用Agilent Technology Cary系列紫外-可见-近红外分光光度计(UV-Vis)在200 ~ 1500 nm范围内测量样品的光学性质。在三种不同的衬底温度下成功地生长了InGaN/GaN薄膜。铟成分随着温度的升高而降低。在760℃时,铟含量最高,为21.17%。这一结果是由Bruker D8 Discover利用LEPTOS软件对(0002)平面上的ω−2θ扫描进行模拟拟合得到的。随着铟含量的增加,InGaN/GaN表现出明显不同的表面形态和形貌。从场发射扫描电镜估计该结构的InGaN涂层厚度为~ 300 nm。通过UV-Vis测量,InGaN的能带隙为2.54 eV ~ 2.79 eV。独创性/价值从这项工作中可以看出,衬底温度的变化会影响铟的成分。从所获得的结果来看,这项工作有助于提高太阳能电池的应用效率。
{"title":"Effects of indium composition on the surface morphological and optical properties of InGaN/GaN heterostructures","authors":"Nur Atiqah Hamzah, Mohd Ann Amirul Zulffiqal Md Sahar, Aik Kwan Tan, Mohd Anas Ahmad, Muhammad Fadhirul Izwan Abdul Malik, Chin Chyi Loo, Wei Sea Chang, Sha Shiong Ng","doi":"10.1108/mi-03-2022-0042","DOIUrl":"https://doi.org/10.1108/mi-03-2022-0042","url":null,"abstract":"<h3>Purpose</h3>\u0000<p>This study aims to investigate the effects of indium composition on surface morphology and optical properties of indium gallium nitride on gallium nitride (InGaN/GaN) heterostructures.</p><!--/ Abstract__block -->\u0000<h3>Design/methodology/approach</h3>\u0000<p>The InGaN/GaN heterostructures were grown on flat sapphire substrates using a metal-organic chemical vapour deposition reactor with a trimethylindium flow rate of 368 sccm. The indium composition of the InGaN epilayers was controlled by applying different substrate temperatures. The surface morphology and topography were observed using field emission scanning electron microscope (F.E.I. Nova NanoSEM 450) and atomic force microscopy (Bruker Dimension Edge) with a scanning area of 10 µm × 10 µm, respectively. The compositional analysis was done by Energy Dispersive X-Ray Analysis. Finally, the ultraviolet-visible (UV-Vis) spectrophotometer (Agilent Technology Cary Series UV-Vis-near-infrared spectrometer) was measured from 200 nm to 1500 nm to investigate the optical properties of the samples.</p><!--/ Abstract__block -->\u0000<h3>Findings</h3>\u0000<p>The InGaN/GaN thin films have been successfully grown at three different substrate temperatures. The indium composition reduced as the temperature increased. At 760 C, the highest indium composition was obtained, 21.17%. This result was acquired from the simulation fitting of ω−2θ scan on (0002) plane using LEPTOS software by Bruker D8 Discover. The InGaN/GaN shows significantly different surface morphologies and topographies as the indium composition increases. The thickness of InGaN epilayers of the structure was ∼300 nm estimated from the field emission scanning electron microscopy. The energy bandgap of the InGaN was 2.54 eV – 2.79 eV measured by UV-Vis measurements.</p><!--/ Abstract__block -->\u0000<h3>Originality/value</h3>\u0000<p>It can be seen from this work that changes in substrate temperature can affect the indium composition. From all the results obtained, this work can be helpful towards efficiency improvement in solar cell applications.</p><!--/ Abstract__block -->","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":null,"pages":null},"PeriodicalIF":1.1,"publicationDate":"2022-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"138513981","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Microelectronics International
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