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A novel S-shaped frequency and pattern reconfigurable patch antenna for 4G LTE, WLAN/Wi-Max application 一种新型的s形频率和模式可重构贴片天线,适用于4G LTE、WLAN/Wi-Max应用
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-12-06 DOI: 10.1108/mi-09-2022-0162
Pallav Rawal, S. Rawat
PurposeIn wireless communication system, use of multiple antennas for different requirements of system will increase the system complexity. However, reconfigurable antenna is maximizing the connectivity to cover different wireless services that operate different frequency range. Pattern reconfigurable antenna can improve security, avoid noise and save energy. Due to their compactness and better performance at different applications, reconfigurable antennas are very popular among the researchers. The purpose of this work, is to propose a novel design of S-shaped antenna with frequency and pattern diversity. The pattern and frequency reconfiguration are controlled via ON/OFF states of the PIN diode.Design/methodology/approachThe geometrical structure of the proposed antenna dimension is 18 × 18 × 0.787 mm3 with εr = 2.2 dielectric constant. Three S-shaped patches are connected to a ring patch through PIN diodes. The approximate circumference of ring patch is 18.84 mm and length of patch is 5 mm, so approximate length of radiating patch is 14.42 mm and effective dielectric constant is 1.93. Conductor backed coplanar waveguide (CPW) is used for feeding. The proposed antenna is designed and simulated on CST microwave studio and fabricated using photolithography process. Measurements have been done in anechoic chamber.FindingsAntenna shows the dual band operation at 2.1 and 3.4 GHz frequency. The first band remains constant at 2.1 GHz resonant frequency and 200–400 MHz impedance bandwidth. Second band is switched at seven different resonant frequencies as 3.14, 3.45, 3.46, 3.68, 3.69, 3.83 and 3.86 GHz with switching of the diodes. The −10 dB bandwidth is more than 1.4 GHz.Research limitations/implicationsPattern reconfigurability can be achieved using mechanical movement of antenna easily but it is not a reliable approach for planar antennas. Electronic switching method is used in proposed antenna. Antenna size is very small so fabrication is very crucial task. Measured results are deviated from simulation results due to fabrication error and effect of leads of diodes, connecting wires and battery.Practical implicationsThe reconfiguration of the proposed antenna is controlled via ON/OFF states of the three PIN diodes. The lower band of 2.1 GHz is fixed, while second band is switched at five different resonant frequencies as 3.27, 3.41, 3.45, 3.55 and 3.88 GHz, with switching of the PIN diodes with all state of diodes and exhibit pattern reconfigurability at 2.1 GHz frequency. At second band center frequency is significantly changed with state of diodes and at 3.4 GHz pattern is also changed with state of diodes, hence antenna exhibits frequency and pattern reconfigurability.Originality/valueA novel design of pattern and frequency reconfigurable antenna is proposed. Here, work is divided into two parts: first is frequency reconfiguration and second is radiation pattern reconfiguration. PIN diodes as switch are used to select the
目的在无线通信系统中,根据系统的不同要求使用多个天线会增加系统的复杂性。然而,可重新配置天线正在最大限度地提高连接性,以覆盖操作不同频率范围的不同无线服务。方向图可重构天线可以提高安全性,避免噪声,节省能源。由于其紧凑性和在不同应用中的更好性能,可重构天线在研究人员中非常受欢迎。本工作的目的是提出一种具有频率和方向图分集的S形天线的新颖设计。通过PIN二极管的开/关状态来控制模式和频率重新配置。设计/方法/方法所提出的天线尺寸的几何结构为18×18×0.787 mm3,εr=2.2介电常数。三个S形贴片通过PIN二极管连接到一个环形贴片。环形补片的近似周长为18.84 mm,贴片长度为5 mm,因此辐射贴片的近似长度为14.42 mm,有效介电常数为1.93。导体背对共面波导(CPW)用于馈电。所提出的天线是在CST微波工作室上设计和模拟的,并使用光刻工艺制造。已经在消声室中进行了测量。FindingsAntenna显示2.1和3.4频段的双频操作 GHz频率。第一个频带保持恒定在2.1 GHz谐振频率和200–400 MHz阻抗带宽。第二频带在3.14、3.45、3.46、3.68、3.69、3.83和3.86这七个不同的谐振频率下切换 GHz,带二极管开关。−10 dB带宽大于1.4 GHz.研究局限性/含义使用天线的机械运动可以很容易地实现模式重新配置,但对于平面天线来说,这不是一种可靠的方法。在所提出的天线中使用了电子切换方法。天线尺寸非常小,因此制造是一项非常关键的任务。由于制造误差以及二极管引线、连接线和电池的影响,测量结果与模拟结果存在偏差。实际意义所提出的天线的重新配置是通过三个PIN二极管的开/关状态来控制的。2.1的低频段 GHz是固定的,而第二频带在3.27、3.41、3.45、3.55和3.88这五个不同的谐振频率下切换 GHz,PIN二极管与二极管的所有状态切换,并在2.1时表现出模式可重新配置性 GHz频率。在第二频带,中心频率随着二极管的状态而显著变化,在3.4 GHz方向图也随着二极管的状态而变化,因此天线表现出频率和方向图的可重构性。独创性/价值提出了一种新颖的方向图和频率可重构天线设计。这里,工作分为两部分:第一部分是频率重构,第二部分是辐射方向图重构。PIN二极管作为开关用于选择频带和重新配置辐射模式。所提出的天线设计是一种新型的双频带频率和方向图可重构天线。它在两个不同的频率上共振,即2.1和3.4 GHz,并且具有从0°到355°的图案倾斜。导体背对CPW馈电技术用于阻抗匹配。
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引用次数: 1
A DFT+U study of structural, electronic and optical properties of Ag- and Cu-doped ZnO Ag和Cu掺杂ZnO结构、电子和光学性能的DFT+U研究
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-11-03 DOI: 10.1108/mi-05-2022-0088
N. Hamzah, M. H. Samat, N. A. Johari, A. Faizal, O. H. Hassan, A.M.M. Ali, R. Zakaria, N. H. Hussin, M. Yahya, M. Taib
PurposeThe purpose of this paper is to investigate the structural, electronic and optical properties of pure zinc oxide (ZnO) and transition metal (Tm)-doped ZnO using Tm elements from silver (Ag) and copper (Cu) by a first-principles study based on density functional theory (DFT) as implemented in the pseudo-potential plane wave in CASTEP computer code.Design/methodology/approachThe calculations based on the generalized gradient approximation for Perdew-Burke-Ernzerhof for solids with Hubbard U (GGA-PBEsol+U) were performed by applying Hubbard corrections Ud = 5 eV for Zn 3d state, Up = 9 eV for O 2p state, Ud = 6 eV for Ag 4d state and Ud = 9.5 eV for Cu 3d state. The crystal structure used in this calculation was hexagonal wurtzite ZnO with a space group of P63mc and supercell 2 × 2 × 2.FindingsThe total energy was calculated to determine the best position for Ag and Cu dopants. The band structures and density of states show that Tm-doped ZnO has a lower bandgaps value than pure ZnO because of impurity energy levels from Ag 4d and Cu 3d states. In addition, Ag-doped ZnO exhibits a remarkable enhancement in visible light absorption over pure ZnO and Cu-doped ZnO because of its lower energy region and extended wavelength spectrum.Originality/valueThe results of this paper are important for the basic understanding of the 3d and 4d Tm doping effect ZnO and have a wide range of applications in designing high-efficiency energy harvesting solar cells.
目的利用密度泛函理论(DFT)的第一性原理研究纯氧化锌(ZnO)和过渡金属(Tm)掺杂的ZnO的结构、电子和光学性能。设计/方法/方法基于Perdew-Burke-Ernzerhof的广义梯度近似,通过应用Hubbard修正Ud=5对Hubbard U固体(GGA-PBEsol+U)进行计算 Zn3d态为eV,O2p态为Up=9eV,Ud=6 Ag 4d态的eV和Ud=9.5 对于Cu3d态为eV。计算中使用的晶体结构为六方纤锌矿ZnO,空间群为P63mc,超晶胞为2×2×2。结果计算了总能量以确定Ag和Cu掺杂剂的最佳位置。能带结构和态密度表明,由于Ag 4d和Cu 3d态的杂质能级,Tm掺杂的ZnO具有比纯ZnO更低的带隙值。此外,与纯ZnO和Cu掺杂的ZnO相比,Ag掺杂的ZnO表现出显著的可见光吸收增强,因为其具有较低的能量区域和扩展的波长光谱。原创性/价值本文的结果对于基本理解3d和4d Tm掺杂效应ZnO具有重要意义,并在设计高效集能太阳能电池方面具有广泛的应用。
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引用次数: 0
Model of boron diffusion in silicon used for solar cell fabrication based on boric acid solutions 基于硼酸溶液的太阳能电池用硅中硼扩散模型
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-10-24 DOI: 10.1108/mi-07-2021-0065
W. Filipowski
PurposeThe purpose of this paper is to develop a model that allows determining the boron concentration profile in silicon based on duration and temperature of the diffusion process.Design/methodology/approachThe model was developed on the basis of the Fick’s second law, which is fundamental for describing the diffusion process. The explicit scheme of the finite difference method was used in the conducted simulations. Results of measurements made using the secondary ion mass spectrometry (SIMS) were used as template dopant concentration profiles. Solution of boric acid in ethanol is the dopant source for which this model was developed.FindingsBased on the conducted simulations, it was proposed that besides the influence of electric field of ionized dopants, which is already described in literature, an appropriate factor reflecting the influence of the threshold concentration on the coefficient of diffusion of boron in silicone should also be introduced.Originality/valueThe developed model enables determination of the boron concentration profile in silicon consistent with the results of SIMS measurements. A factor taking into account the influence of threshold concentration on the coefficient of diffusion was introduced. The influence of concentration of boric acid in the dopant solution on the concentration profile was also considered.
本文的目的是建立一个模型,可以根据扩散过程的持续时间和温度来确定硅中的硼浓度分布。这个模型是根据菲克第二定律建立的,而菲克第二定律是描述扩散过程的基础。数值模拟采用有限差分法的显式格式。用二次离子质谱法(SIMS)测量的结果作为模板掺杂剂浓度谱。硼酸乙醇溶液是建立该模型的掺杂源。结果在模拟的基础上,提出除了文献中已经描述的电离掺杂剂电场的影响外,还应该引入一个合适的因子来反映阈值浓度对硼在硅中的扩散系数的影响。原创性/价值开发的模型能够确定硅中的硼浓度剖面与SIMS测量结果一致。介绍了一种考虑阈值浓度对扩散系数影响的因子。同时考虑了掺杂溶液中硼酸浓度对浓度分布的影响。
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引用次数: 0
Two-step flash sintering of (Mg1/3Ta2/3)0.01Ti0.99O2 giant dielectric ceramics (Mg1/3Ta2/3)0.01Ti0.99O2巨介电陶瓷的两步闪速烧结
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-10-20 DOI: 10.1108/mi-06-2022-0116
Zhentao Wang, Pai Peng, Sujuan Zhong, Yafang Cheng, Dong Xu
PurposeThe purpose of this paper on the one hand is to reduce the sintering temperature, shorten the sintering time and improve the electrical properties of the sample through the two-step flash sintering method and on the other hand is to study the effect of electric field on the phase structure, microstructure and electrical properties of the flash sintering sample.Design/methodology/approachIn this paper, (Mg1/3Ta2/3)0.01Ti0.99O2 giant dielectric ceramics were prepared by conventional sintering and two-step flash sintering, respectively. Further, the effect of electric field (600–750 V/cm) on the electrical properties of (Mg1/3Ta2/3)0.01Ti0.99O2 giant dielectric ceramics was studied.FindingsThe results show that compared with the conventional sintering, the sintering temperature of the two-step flash sintering can be reduced by 200°C and the sintering time can be shortened by 12 times. All sintered samples were single rutile TiO2 structure. Compared with conventional sintering, two-step flash sintering samples have finer grain size. The two-step flash sintered sample has similar dielectric properties to the conventional sintered sample. The dielectric constant of flash sintered samples decreases with the increase of electric field. When the electric field is 700 V/cm, the ceramic sample has the optimal dielectric properties, where the dielectric constant is approximately 5.5 × 103 and the dielectric loss is about 0.18 at 1 kHz. Impedance spectroscopy analysis shows that the excellent dielectric properties are attributed to the internal barrier layer capacitance model.Originality/valueThis paper not only provides a new method for the preparation of co-doped TiO2 giant dielectric ceramics but also has great potential in greatly improving efficiency and saving energy.
本论文的目的一方面是通过两步闪烧法降低烧结温度,缩短烧结时间,提高样品的电性能,另一方面是研究电场对闪烧样品的相结构、微观结构和电性能的影响。本文分别采用常规烧结和两步闪蒸法制备了(Mg1/3Ta2/3)0.01Ti0.99O2巨型介电陶瓷。进一步研究了电场(600 ~ 750 V/cm)对(Mg1/3Ta2/3)0.01Ti0.99O2巨介电陶瓷电学性能的影响。结果表明:与常规烧结相比,两步闪速烧结的烧结温度可降低200℃,烧结时间可缩短12倍;所有烧结样品均为单一金红石型TiO2结构。与常规烧结相比,两步闪速烧结试样具有更细的晶粒尺寸。两步闪蒸烧结样品具有与常规烧结样品相似的介电性能。闪蒸烧结试样的介电常数随电场的增大而减小。当电场为700 V/cm时,陶瓷样品的介电性能最佳,在1 kHz时介电常数约为5.5 × 103,介电损耗约为0.18。阻抗谱分析表明,优异的介电性能归功于内部阻挡层电容模型。独创性/价值本文不仅为共掺杂TiO2巨介电陶瓷的制备提供了一种新的方法,而且在大幅提高效率和节能方面具有很大的潜力。
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引用次数: 1
Design of radio frequency power amplifier for 2.45 GHz IoT application using 0.18 µm CMOS technology 使用0.18µm CMOS技术设计2.45GHz物联网应用的射频功率放大器
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-10-18 DOI: 10.1108/mi-03-2022-0040
Nuha A. Rhaffor, Wei Keat Ang, Mohamed Fauzi Packeer Mohamed, J. Rajendran, N. Mohd Noh, M. T. Mustaffa, M. Hairi
PurposeThe purpose of this study is to show that due to the emergence of the Internet of Things (IoT) industry in recent years, the demand for the higher integration of wireless communication systems with a higher data rate of transmission capacity and lower power consumption has increased tremendously. The radio frequency power amplifier (PA) design is getting more challenging and crucial. A PA for a 2.45 GHz IoT application using 0.18 µm complementary metal oxide semiconductor (CMOS) technology is presented in this paper.Design/methodology/approachThe design consists of two stages, the driver and output stage, where both use a single-stage common source transistor configuration. In view of performance, the PA can deliver more than 20 dB gain from 2.4 GHz to 2.5 GHz.FindingsThe maximum output power achieved by PA is 13.28 dBm. As the PA design is targeted for Bluetooth low energy (BLE) transmitter use, a minimum of 10 dBm output power should be achieved by PA to transmit the signal in BLE standard. The PA exhibits a constant output third-order interception point of 18 dBm before PA becomes saturated after 10 dBm output power. The PA shows a peak power added efficiency of 17.82% at the 13.24 dBm output power.Originality/valueThe PA design exhibits good linearity up to 10 dBm out the PA design exhibits good linearity up to 10 dBm output power without sacrificing efficiency. At the operating frequency of 2.45 GHz, the PA exhibits a stability k-factor, the value of more than 1; thus, the PA design is considered unconditional stable. Besides, the PA shows the s-parameters performance of –7.91 dB for S11, –11.07 dB for S22 and 21.5 dB for S21.
目的本研究的目的是表明,由于近年来物联网(IoT)行业的出现,对具有更高数据传输速率和更低功耗的无线通信系统的更高集成度的需求急剧增加。射频功率放大器(PA)的设计变得越来越具有挑战性和关键性。2.45的PA 使用0.18的GHz物联网应用 μm互补金属氧化物半导体(CMOS)技术。设计/方法/方法设计由两个阶段组成,驱动器和输出阶段,两者都使用单级共源晶体管配置。就性能而言,PA可以提供20多种 2.4的dB增益 GHz至2.5 GHz.Findings PA实现的最大输出功率为13.28 dBm。由于PA设计的目标是蓝牙低能耗(BLE)发射器的使用,因此至少需要10 在BLE标准中,PA传输信号需要达到dBm的输出功率。PA表现出18的恒定输出三阶拦截点 10后PA饱和前的dBm dBm输出功率。PA显示在13.24 dBm输出功率。创意/价值PA设计显示出良好的线性度,最高可达10 dBm外,PA设计显示出高达10的良好线性 dBm输出功率而不牺牲效率。工作频率为2.45 GHz时,PA表现出稳定的k因子,该值大于1;因此,PA设计被认为是无条件稳定的。此外,PA的s参数性能为–7.91 S11的dB,–11.07 S22和21.5的dB S21的dB。
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引用次数: 0
Influence of Ag particle shape on mechanical and thermal properties of TIM joints Ag颗粒形状对TIM接头力学和热性能的影响
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-10-13 DOI: 10.1108/mi-06-2022-0108
M. Myśliwiec, R. Kisiel, M. Kruszewski
PurposeThe purpose of this paper is to develop and test the thermal interface materials (TIM) for application in assembly of semiconductor chips to package. Good adhesion properties (>5 MPa shear strength) and low thermal interface resistance (better than for SAC solders) are the goal of this research.Design/methodology/approachMechanical and thermal properties of TIM joints between gold plated contacts of chip and substrate were investigated. Sintering technique based on Ag pastes was applied for purpose of this study. Performance properties were assessed by shear force tests and thermal measurements. Scanning electron microscopy was used for microstructural observations of cross-section of formed joints.FindingsIt was concluded that the best properties are achieved for pastes containing spherical Ag particles of dozens of micrometer size with flake shaped Ag particles of few micrometers size. Sintering temperature at 230°C and application of 1 MPa force on the chip during sintering gave the higher adhesion and the lowest thermal interface resistance.Originality/valueThe new material based on Ag paste containing mixtures of Ag particles of different size (form nanometer to dozens of microns) and shape (spherical, flake) suspended in resin was proposed. Joints prepared using sintering technique and Ag pastes at 230°C with applied pressure shows better mechanical and thermal than other TIM materials such as thermal grease, thermal gel or thermally conductive adhesive. Those material could enable electronic device operation at temperatures above 200°C, currently unavailable for Si-based power electronics.
目的开发和测试用于半导体芯片封装的热界面材料(TIM)。良好的粘接性能(bbb50mpa剪切强度)和低热界面阻力(优于SAC焊料)是本研究的目标。设计/方法/方法研究了芯片与衬底镀金触点之间的TIM接头的力学和热性能。本研究采用银糊烧结技术。通过剪切力测试和热测量来评估性能。采用扫描电镜对成形接头的横截面进行了显微组织观察。结果表明,含有几十微米大小的球形银颗粒和几微米大小的片状银颗粒的膏体具有最佳的性能。烧结温度为230℃,在烧结过程中施加1 MPa的力,晶片的附着力较高,热界面阻力最小。提出了一种基于银浆的新材料,该材料由不同尺寸(纳米至几十微米)和形状(球形、片状)的银颗粒混合而成,悬浮在树脂中。在230°C的压力下,用烧结技术和银糊制备的接头比其他TIM材料(如导热脂、导热凝胶或导热胶)具有更好的力学和热性能。这些材料可以使电子设备在200°C以上的温度下工作,这是目前基于硅的电力电子设备无法实现的。
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引用次数: 0
Atomic structure for AlN grown on different plane orientation of sapphire via numerical study 通过数值研究蓝宝石不同平面取向上生长AlN的原子结构
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-10-11 DOI: 10.1108/mi-04-2022-0065
Mazwan Mansor, Syamsul M., Y. Yusuf, Mohd Nazri Abdul Rahman
PurposeThis study aims to present a numerical study of atomic structure for aluminium nitride (AlN) when the crystal was assumed grown on different orientation of sapphire substrate. The change of the AlN atomic structure with sapphire orientation was associated to the interface between the AlN and the sapphire. The results from this study would provide a guideline in selecting suitable orientation of sapphire for obtaining desirable AlN crystals, in particular, for reducing threading dislocation density in the AlN/sapphire templates for developing UV LEDs.Design/methodology/approachThe approach of atomic structure by visualization for electronic and structural analysis numerical method to develop shape of atomic geometry to evaluate which plane are more suitable for the AlGaN technology UV-LED based.FindingsThe calculation based on ratio on first and second layers can be done by introduction of lattice constant.Research limitations/implicationsWith plane’s color of cutting plane on bulky materials, all the shape looks the same.Practical implicationsBy implementing this method, the authors can save time to find the most suitable plane on the growth structure.Originality/valueAll authors of this research paper have directly participated in the planning, execution or analysis of the study; all authors of this paper have read and approved the final version submitted; the contents of this manuscript have not been copyrighted or published previously; the contents of this manuscript are not now under consideration for publication elsewhere; the contents of this manuscript will not be copyrighted, submitted or published elsewhere, whereas acceptance by the journal is under consideration.
目的对氮化铝(AlN)晶体在蓝宝石衬底不同取向生长时的原子结构进行了数值研究。氮化铝原子结构随蓝宝石取向的变化与氮化铝与蓝宝石的界面有关。该研究结果将为选择合适的蓝宝石取向以获得理想的AlN晶体提供指导,特别是为减少用于开发UV led的AlN/蓝宝石模板中的螺纹位错密度提供指导。设计/方法学/方法原子结构的方法通过电子可视化和结构分析的数值方法来制定原子几何形状,以评估哪个平面的AlGaN技术更适合UV-LED为基础。通过引入晶格常数,可以实现基于第一层和第二层比率的计算。研究局限/启示:在体积较大的材料上使用平面的颜色切割平面,所有的形状看起来都一样。实际意义通过实现该方法,可以节省在生长结构上寻找最合适平面的时间。原创性/价值本研究论文的所有作者均直接参与了本研究的策划、执行或分析;本文的所有作者已阅读并批准了提交的最终版本;这份手稿的内容以前没有版权或出版;这份手稿的内容目前还没有考虑在其他地方发表;本手稿的内容将不受版权保护,也不会在其他地方提交或发表,而期刊正在考虑是否接受。
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引用次数: 0
Optimization of 1-µm gate length InGaAs-InAlAs pHEMT 1µm栅极长度InGaAs-InAlAs pHEMT的优化
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-10-11 DOI: 10.1108/mi-03-2022-0044
Naeem Islam, Nur Syahadah Yusof, Mohamed Fauzi Packeer Mohamed, Syamsul M., Muhammad Firdaus Akbar Jalaludin Khan, N. Ghazali, M. Hairi
PurposeThe purpose of this study is to demonstrate a pseudomorphic High Electron Mobility Transistor (pHEMT) cutoff frequency (fT) and maximum oscillation frequency (fmax) are determined by the role of its gate length (Lg). Theoretically, to obtain an Lg of 1 µm, the gate’s resist opening must be 1 µm wide. However, after the coat-expose-develop (C-E-D) process, the Lg became 13% larger after metal evaporation. This enlargement is due to both resist thickness and its profile.Design/methodology/approachThis research aims to optimize the 1-µm Lg InGaAs-InAlAs pHEMT C-E-D process, where the diluted AZ®nLOF™ 2070 resist with AZ® EBR solvent technique has been used to solve the Lg enlargement problem. The dilution theoretically allows the changing of a resist thickness to different film thickness using the same coating parameters. Here, for getting a new resist, which is simply called AZ 0.5 µm, the experiment’s important parameters such as the coater’s spin speed of 3,000 rpm and soft bake at 110°C for 5 min are executed.FindingsThe newly mixed AZ 0.5 µm resist has presented a high resolution and undercut profile rather than standard AZ 1 µm resist. Hence, the Lg metallization after using AZ 0.5 µm optimized process showed better results than AZ 1 µm which used the standard process.Originality/valueThe outcome of the optimization has reached that it is possible to get a nearly sub-µm range gate’s opening using a diluted resist, and at the same time retaining a high resolution and undercut profile.
本研究的目的是证明伪晶高电子迁移率晶体管(pHEMT)的截止频率(fT)和最大振荡频率(fmax)是由其栅极长度(Lg)的作用决定的。理论上,为了获得1 μ m的Lg,栅极的电阻开口必须为1 μ m宽。然而,经过涂层曝光显影(C-E-D)工艺后,金属蒸发后Lg增大了13%。这种增大是由于抗蚀剂的厚度和它的轮廓。本研究旨在优化1 μ m Lg InGaAs-InAlAs pHEMT C-E-D工艺,其中使用稀释的AZ®nLOF™2070抗蚀剂与AZ®EBR溶剂技术来解决Lg放大问题。稀释理论上允许使用相同的涂层参数改变抗蚀剂厚度到不同的薄膜厚度。在这里,为了获得新的抗蚀剂,简称az0.5µm,实验的重要参数,如涂布机的旋转速度为3,000 rpm和在110°C下软烘烤5分钟。新混合的az0.5µm抗蚀剂具有高分辨率和凹边轮廓,而不是标准的az1µm抗蚀剂。因此,采用az0.5µm优化工艺后的Lg金属化效果优于采用az1µm标准工艺的Lg金属化效果。原创性/价值优化的结果已经达到,可以使用稀释的抗蚀剂获得近亚微米范围的栅极开口,同时保持高分辨率和凹边轮廓。
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引用次数: 0
W-band antenna in package module with hybrid glass-compound WLFO process 混合玻璃复合WLFO工艺封装模块中的W波段天线
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-09-30 DOI: 10.1108/mi-06-2022-0111
G. Wang, Chenhui Xia, Bo Wang, Xinran Zhao, Yang Li, Ning Yang
Purpose A W-band antennas-in-packages (AIP) module with a hybrid stacked glass-compound wafer level fan-out process was presented. Heterogeneous radio frequency (RF) chips were integrated into one single module with a microscale fan-out process. This paper aims to find a new strategy for 5G communication with 3D integration of multi-function chips. Design/methodology/approach The AIP module was composed of two stacked layers: the antenna layer and RF layer. After architecture design and performance simulation, the module was fabricated, The 8 × 8 antenna array was lithography patterned on the 12 inch glass wafer to reduce the parasitic parameters effect, and the signal feeding interface was fabricated on the backside of the glass substrate. Findings AIP module demonstrates a size of 180 mm × 180mm × 1mm, and its function covers the complete RF front-end chain from the antenna to signal to process and can be applied in 5 G communication and automotive components. Originality/value With three RF multi-function chips and two through silicon via (TSV) chips were embedded in the 12 inch compound wafer through the fan-out packaging process; two layers were interconnected with TSV and re-distributed layers.
目的提出了一种采用混合堆叠玻璃-复合晶圆级扇出工艺的w波段封装天线(AIP)模块。异质射频(RF)芯片集成到一个单一的模块与微尺度扇出工艺。本文旨在寻找一种多功能芯片三维集成的5G通信新策略。AIP模块由两层堆叠组成:天线层和射频层。经过结构设计和性能仿真后,制作了该模块,将8 × 8天线阵列光刻在12英寸的玻璃晶圆上以减小寄生参数的影响,并将信号馈电接口制作在玻璃基板背面。FindingsAIP模块演示尺寸为180mm × 180mm × 1mm,其功能涵盖了从天线到信号再到处理的完整射频前端链,可应用于5g通信和汽车零部件。独创性/价值将3颗射频多功能芯片和2颗TSV (through silicon via)芯片通过扇出封装工艺嵌入12英寸复合晶圆中;两层与TSV和重分布层相互连接。
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引用次数: 0
Effects of 60Co γ ray radiation on the transmission characteristics of interconnection structures for 3D packaging 60Coγ射线辐射对三维封装互连结构传输特性的影响
IF 1.1 4区 工程技术 Q3 Engineering Pub Date : 2022-09-22 DOI: 10.1108/mi-07-2022-0120
Youxin Zhang, Yang Liu, Rongxing Cao, Xianghua Zeng, Yuxiong Xue
PurposeConcerning the radiation effects on the three-dimensional (3D) packaging in space environment, this study aims to investigate the influence of the total dose effect on the transmission characteristics of high-frequency electrical signals using experimental and simulation methods.Design/methodology/approachThis work carries out the irradiation test of the specimens and measures their S21 parameters before and after irradiation. A simulation model describing the total dose effect was built based on the experimental test results. And, the radiation hardening design is evaluated by the simulation method.FindingsThe experimental results demonstrate that the S21 curve of the interconnection decreases with the increase of the irradiation dose, indicating that the total dose effect leads to the decline of its signal transmission characteristics. According to the simulation results, decreasing the height of the through silicon via (TSV), increasing the radius of the TSV, reducing the length of Si and increasing the number of grounded through silicon via have positive effects on improving the radiation resistance of the interconnection structure.Originality/valueThis work investigates the effect of radiation on the transmission characteristics of interconnection structures for 3D packaging and proposes the hardening design methods. It is meaningful for improving the reliability of 3D packaging in space applications.
目的针对空间环境中三维封装的辐射效应,采用实验和仿真方法,研究总剂量效应对高频电信号传输特性的影响。设计/方法/方法本工作对试样进行辐照试验,并在辐照前后测量其S21参数。基于实验测试结果,建立了描述总剂量效应的仿真模型。并采用仿真方法对辐射硬化设计进行了评价。实验结果表明,互连的S21曲线随着辐照剂量的增加而减小,表明总剂量效应导致其信号传输特性的下降。根据模拟结果,减小硅通孔的高度、增加硅通孔半径、减小硅的长度和增加接地的硅通孔数量对提高互连结构的抗辐射性能有积极作用。原创性/价值本工作研究了辐射对三维封装互连结构传输特性的影响,并提出了硬化设计方法。这对于提高空间应用中三维封装的可靠性具有重要意义。
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引用次数: 0
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Microelectronics International
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