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[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials最新文献

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Low temperature deposition of SiO/sub 2/ on InP substrates by DECR PECVD 用DECR PECVD在InP衬底上低温沉积SiO/ sub2 /
F. Plais, B. Agius, N. Proust, S. Cassette, G. Ravel, M. Puech
The low temperature deposition of SiO/sub 2/ thin films onto InP substrates is discussed. It is shown that the physical and chemical properties of SiO/sub 2/ thin films are stable over a three month period. X-ray photoelectron spectroscopy (XPS) analysis of the chemistry of the SiO/sub 2/-InP interface reveals the presence of an interfacial substrate oxide. The MIS C(V) characteristics exhibit low frequency dispersion and a deep depletion regime, but it is shown that the measurement procedure can significantly affect the fixed charge and interface state density determination.<>
讨论了在InP衬底上低温沉积SiO/ sub2 /薄膜的方法。结果表明,SiO/ sub2 /薄膜的物理和化学性质在三个月的时间内是稳定的。x射线光电子能谱(XPS)分析了SiO/sub 2/-InP界面的化学性质,揭示了界面衬底氧化物的存在。MIS C(V)的特性表现为低频色散和深耗竭状态,但研究表明,测量过程会显著影响固定电荷和界面态密度的测定。
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引用次数: 0
Growth of high purity InP and fabrication of high sensitivity InP/GaInAs heterojunction phototransistors on silicon by OMVPE 用OMVPE在硅上生长高纯度InP和制备高灵敏度InP/GaInAs异质结光电晶体管
L. Aina, M. Mattingly, M. Burgess, J. O'connor, S. Shastry, D. Hill, J. Salerno, A. Davis, J. P. Lorenzo
The growth of high-purity InP on Si and the fabrication of high-speed and high-sensitivity InP/GaInAs heterojunction phototransistors using InP grown on Si by organometallic vapor-phase epitaxy (OMVPE) are described. It is shown that high-quality InP can be grown on Si by optimizing the thickness of a GaAs intermediate layer between the InP and Si. A combination of high speed and high sensitivity can be achieved with small-area InP/GaInAs heterojunction phototransistors grown on Si. High-purity InP-on-Si was grown with an electron mobility as high as 4000 cm/sup 2//V-s at 300 K and 25000 cm/sup 2//V-s at 77 K. The residual concentrations are as low as 6*10/sup 14/ cm/sup -3/. The quality of the material is confirmed by the fabrication of InP/GaInAs heterojunction phototransistors (HPTs) with optical gains of 125 A/W, dark currents as low as 300 pA, and bandwidths of 4.4 GHz.<>
介绍了利用有机金属气相外延(OMVPE)技术在Si上生长高纯度InP和制备高速高灵敏度InP/GaInAs异质结光电晶体管的方法。结果表明,通过优化InP和Si之间的GaAs中间层的厚度,可以在Si上生长出高质量的InP。在硅上生长的小面积InP/GaInAs异质结光电晶体管可以实现高速和高灵敏度的结合。高纯度InP-on-Si在300 K和77 K下的电子迁移率分别高达4000 cm/sup 2/ V-s和25000 cm/sup 2/ V-s。残留浓度低至6*10/sup 14/ cm/sup -3/ sup。通过制作出光学增益为125 A/W、暗电流低至300 pA、带宽为4.4 GHz的InP/GaInAs异质结光电晶体管(hpt),证实了该材料的质量
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引用次数: 0
Photoluminescence lifetime measurements in InP wafers InP晶圆的光致发光寿命测量
G. Landis, P. Jenkins, I. Weinberg
An apparatus that measures the minority carrier lifetime in InP is described. The technique stimulates the sample with a short pulse of light from a diode laser and measures the photoluminescence (PL) decay to extract the minority carrier lifetime. The photoluminescence lifetime in InP as a function of doping on both n- and p-type material was examined. The results show a marked difference in the lifetime on n-type InP and p-type InP of similar doping levels. N-type InP shows a lifetime considerably longer than the expected radiative limited lifetime.<>
介绍了一种测量InP中少数载流子寿命的装置。该技术用二极管激光器的短脉冲光刺激样品,测量光致发光(PL)衰减,提取少数载流子寿命。研究了InP在n型和p型材料上掺杂的光致发光寿命。结果表明,相似掺杂水平的n型InP和p型InP的寿命有显著差异。n型InP的寿命明显长于预期的辐射极限寿命。
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引用次数: 6
Small-scale production of 4-cm/sup 2/ ITO/InP photovoltaic solar cells 小规模生产4cm /sup 2/ ITO/InP光伏太阳能电池
T. Gessert, X. Li, T. Coutts, P. W. Phelps, N. Tzafaras
The procedures and results of a project that produced large-area (4-cm/sup 2/) cells using the sputtering process used to form small-area indium tin oxide (ITO)/InP solar cells are described. Although only a small number of the 4-cm/sup 2/ ITO/InP cells (approximately 10 cells total) were fabricated, the efficiency of the best cell compares favorably with the best result reported from a larger production of approximately 1300 2-cm/sup 2/ cells in which the junction was fabricated through a closed-ampoule diffusion process. The average cell efficiency is determined to be 15.5%, with a standard deviation of 0.35%. The highest cell performance obtained is 16.1% AM0 (SERI measurement). Preliminary dark I-V data analysis indicates that the cells demonstrate near-ideal characteristics, with a diode-ideality factor and reverse-saturation current density of 1.02 and 1.1 *10/sup -12/ mAcm/sup -2/, respectively.<>
描述了一个项目的程序和结果,该项目使用用于形成小面积氧化铟锡(ITO)/InP太阳能电池的溅射工艺生产大面积(4厘米/sup 2/)电池。虽然只制造了少量的4-cm/sup 2/ ITO/InP细胞(总共约10个细胞),但最佳细胞的效率与通过封闭安瓿扩散过程制造的约1300个2-cm/sup 2/细胞的最大产量的最佳结果相比是有利的。测定的电池平均效率为15.5%,标准差为0.35%。获得的最高电池性能为16.1% AM0 (SERI测量)。初步的暗I-V数据分析表明,电池具有接近理想的特性,二极管理想系数和反饱和电流密度分别为1.02和1.1 *10/sup -12/ mAcm/sup -2/
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引用次数: 1
Processing- and radiation-produced defects in InP solar cells InP太阳能电池的加工和辐射缺陷
P. Drevinsky, C. E. Caefer, C. Keavney
The detection and characterization of processing- and radiation-induced defects in p-type InP using deep level transient spectroscopy (DLTS) are described. Annealing effects are discussed and initial recovery of critical cell parameters is correlated with anneal of dominant defects. It is shown that DLTS spectra differ for implanted and epitaxial junctions. The implanted diodes do not show the H4 (0.38 eV) level, casting doubt on the Frenkel pair, V/sub p/-P/sub i/, identity assignment. Carrier loss and degradation of V/sub oc/, I/sub sc/, and cell efficiency correlate with the production of dominant hole traps H4 and H3. Observed recovery correlates with anneal of H4 and H3.<>
描述了用深能级瞬态光谱(DLTS)检测和表征p型InP中加工和辐射诱导缺陷的方法。讨论了退火效应,关键胞参数的初始恢复与主要缺陷的退火有关。结果表明,植入结和外延结的dts光谱存在差异。植入的二极管不显示H4 (0.38 eV)水平,对Frenkel对,V/sub p/ p/ sub i/身份分配产生怀疑。载流子损耗、V/sub oc/、I/sub sc/的降解以及电池效率与优势空穴陷阱H4和H3的产生有关。观察到的回收率与H4和H3的退火有关。
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引用次数: 3
Cost effective manufacturing of high quality 高质量的高性价比制造
M. Shahid, F. Simchock
A cost-effective process for growing
一种经济有效的生长过程
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引用次数: 0
Determination of the interface structure of very thin GaInAs/InP quantum wells 极薄GaInAs/InP量子阱界面结构的测定
K. Streubel, F. Scholz, V. Harle, M. Bode, M. Grundmann, J. Christen, D. Bimberg
GaInAs/InP quantum wells with thicknesses between two and ten monolayers were grown in order to study the interface structures in the vertical and lateral directions. The vertical structures and optical properties are shown to be strongly dependent on the growth interruptions used. The optical transitions are described by a theoretical model of the quantum well, which takes the interfaces into account. The monolayer splitting of very thin quantum wells was used to characterize the interface structures in the lateral plane. Scanning cathodoluminescence (SCL) images provide information on the size and lateral distribution of the growth islands. High resolution transmission electron microscopy (HRTEM) measurements show an internal interface roughness on both sides of the quantum wells.<>
为了研究垂直方向和横向方向上的界面结构,生长了厚度在2 ~ 10层单层之间的GaInAs/InP量子阱。垂直结构和光学性质与所使用的生长中断密切相关。光学跃迁由量子阱的理论模型描述,该模型考虑了界面。利用极薄量子阱的单层分裂来表征横向界面结构。扫描阴极发光(SCL)图像提供了生长岛的大小和横向分布的信息。高分辨率透射电子显微镜(HRTEM)测量显示量子阱两侧的内部界面粗糙度。
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引用次数: 1
High precision characterization in In/sub x/Ga/sub 1-x/As on InP InP上in /sub -x/ Ga/sub - 1-x/As的高精度表征
J.P. Estrera, W. Duncan, Y. Kao, H. Liu
Results of Fourier transform photoluminescence (FTPL), X-ray diffraction (XRD), micro-Raman spectroscopy, and photoreflectance (PR) nondestructive characterization measurements of In/sub x/Ga/sub 1-x/As grown by molecular beam epitaxy (MBE) on semi-insulating InP:Fe substates are presented. FTPL identified recombination processes at low and room temperature and carrier types of InGaAs films through correlation of 4.2 K and 293 K PL emissions. XRD measurements determine the extent of film relaxation and the composition. The strained nature of the InGaAs films is suggested by the correlation of low temperature PL bandgap energy and XRD composition. GaAs-like LO and TO modes and an InAs-like LO mode are identified by Raman scattering. Room temperature PR and PL bandgap energies show correlation within experimental error.<>
介绍了分子束外延(MBE)在半绝缘InP:Fe基体上生长In/sub x/Ga/sub 1-x/As的傅立叶变换光致发光(FTPL)、x射线衍射(XRD)、微拉曼光谱(microraman)和光反射率(PR)无损表征结果。FTPL通过4.2 K和293 K PL发射的相关性确定了低温和室温下的重组过程和InGaAs薄膜的载流子类型。XRD测定了薄膜松弛的程度和成分。低温PL带隙能与XRD组成的相关性表明了InGaAs薄膜的应变性质。通过拉曼散射确定了类gaas的LO和TO模式以及类inas的LO模式。室温PR和PL带隙能在实验误差范围内具有相关性
{"title":"High precision characterization in In/sub x/Ga/sub 1-x/As on InP","authors":"J.P. Estrera, W. Duncan, Y. Kao, H. Liu","doi":"10.1109/ICIPRM.1991.147424","DOIUrl":"https://doi.org/10.1109/ICIPRM.1991.147424","url":null,"abstract":"Results of Fourier transform photoluminescence (FTPL), X-ray diffraction (XRD), micro-Raman spectroscopy, and photoreflectance (PR) nondestructive characterization measurements of In/sub x/Ga/sub 1-x/As grown by molecular beam epitaxy (MBE) on semi-insulating InP:Fe substates are presented. FTPL identified recombination processes at low and room temperature and carrier types of InGaAs films through correlation of 4.2 K and 293 K PL emissions. XRD measurements determine the extent of film relaxation and the composition. The strained nature of the InGaAs films is suggested by the correlation of low temperature PL bandgap energy and XRD composition. GaAs-like LO and TO modes and an InAs-like LO mode are identified by Raman scattering. Room temperature PR and PL bandgap energies show correlation within experimental error.<<ETX>>","PeriodicalId":6444,"journal":{"name":"[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials","volume":"74 1","pages":"507-510"},"PeriodicalIF":0.0,"publicationDate":"1991-04-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86367762","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Buried grating distributed feedback laser at lambda =1.51 mu m 埋地光栅分布反馈激光器,λ =1.51 μ m
J. Andrews, E. Vangieson, R. Enstrom, J.R. Appert, J. Kirk, N. Carlson
The growth of a distributed feedback (DFB) laser by two steps of organometallic chemical vapor deposition (OMCVD) epitaxy in which the feedback grating is a series of higher index of refraction InGaAsP segments (first growth) completely embedded in lower index InP (second growth) is reported. In the buried grating DFB (BG-DFB) laser, the coupling coefficient (Kl) of the laser optical mode to the feedback grating can be reproducibly and accurately adjusted by changing the thickness of the grating layer or the distance of the grating from the active region. The coupling coefficient can be adjusted over a large range without altering the waveguide parameters of the laser. The duty cycle (ratio of InGaAsP grating segment width to grating period) of the grating can be changed by adjusting the grating etch parameters. This provides another means to optimize the reflectivity and output coupling of second order gratings for grating surface emitter lasers.<>
报道了采用两步有机金属化学气相沉积(OMCVD)外延生长分布式反馈(DFB)激光器,其中反馈光栅是一系列高折射率InGaAsP段(第一次生长)完全嵌入低折射率InP(第二次生长)。在埋地光栅DFB (BG-DFB)激光器中,通过改变光栅层厚度或光栅与有源区的距离,可以精确地调整激光光模与反馈光栅的耦合系数Kl。在不改变激光器波导参数的情况下,耦合系数可以在较大范围内调节。通过调整光栅蚀刻参数,可以改变光栅的占空比(InGaAsP光栅段宽度与光栅周期的比值)。这为优化光栅表面发射器激光器的二阶光栅的反射率和输出耦合提供了另一种方法
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引用次数: 1
Two-terminal monolithic InP/InGaAsP tandem solar cells with tunneling intercell ohmic connections 具有电池间隧道欧姆连接的双端单片InP/InGaAsP串联太阳能电池
C.C. Shen, P. Chang, K. A. Emory
The structure, epitaxial growth, and fabrication of a InP-based two-terminal monolithic tandem solar cell are described. The tandem solar cell consists of a p/n InP upper cell and a 0.95 eV p/n InGaAsP lower cell. A InGaAsP tunnel junction acts as the intercell ohmic contacts for the series connection of the two subcells. Evaluation results showing conversion efficiency as high as 14.8% obtained under 1 sun global AM 1.5 conditions are presented.<>
介绍了一种基于inp的双端单片串联太阳能电池的结构、外延生长和制造方法。串联太阳能电池由p/n InP上电池和0.95 eV p/n InGaAsP下电池组成。InGaAsP隧道结作为两个子单元串联连接的单元间欧姆接触。评价结果表明,在1个太阳全球AM 1.5条件下,转换效率高达14.8%。
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引用次数: 5
期刊
[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials
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