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2018 IEEE Symposium on VLSI Technology最新文献

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High-sensitivity and low-power inertial MEMS-on-CMOS sensors using low-temperature-deposited poly-SiGe film for the IoT era 高灵敏度、低功耗惯性MEMS-on-CMOS传感器,采用物联网时代的低温沉积聚sige薄膜
Pub Date : 2018-06-01 DOI: 10.1109/VLSIT.2018.8510620
Hideyuki Tomizawa, Y. Kurui, I. Akita, Akira Fujimoto, Tomohiro Saito, A. Kojima, H. Shibata
In this paper, for the first time we demonstrate the material benefits of SiGe for MEMS applications based on the results of fabricated devices. To achieve SiGe inertial MEMS, we develop the deposition process for thick, low-temperature poly-SiGe film with which film stress is controlled precisely, and fabricate SiGe accelerometers having 20µm thickness. We clarify that the SiGe accelerometer shows higher sensor sensitivity and lower power consumption compared to Si one and is thus suitable for future ultra-low-power sensors.
在本文中,我们首次基于制造器件的结果证明了SiGe在MEMS应用中的材料优势。为了实现SiGe惯性MEMS,我们开发了厚的低温聚SiGe薄膜的沉积工艺,可以精确控制薄膜应力,并制造了厚度为20 μ m的SiGe加速度计。我们澄清,与Si 1相比,SiGe加速度计具有更高的传感器灵敏度和更低的功耗,因此适合未来的超低功耗传感器。
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引用次数: 4
InGaAs-on-Insulator MOSFETs Featuring Scaled Logic Devices and Record RF Performance 具有缩放逻辑器件和记录射频性能的InGaAs-on-Insulator mosfet
Pub Date : 2018-06-01 DOI: 10.1109/VLSIT.2018.8510631
C. Zota, C. Convertino, V. Deshpande, T. Merkle, M. Sousa, D. Caimi, L. Czomomaz
We demonstrate scaled InGaAs-on-insulator FinFETs and planar MOSFETs on Si substrate for low power logic and RF applications. This Si-CMOS compatible technology implements SiNx source-drain spacers and doped extensions for reduced overlap capacitances. FinFETs with performance for logic applications matching state-of-the-art are demonstrated. Simultaneously, ft and fmax of 400 and 100 GHz are achieved respectively, the highest reported ft for a III-V MOSFET on Si. Finally, we explore the use of an extended gate line to reduce gate resistance, offering balanced ft/fmax of 215/300 GHz, the first report of III-V RF devices on Si matching state of the art Si-CMOS.
我们展示了用于低功耗逻辑和射频应用的硅衬底上的InGaAs-on-insulator finfet和平面mosfet。这种Si-CMOS兼容技术实现了SiNx源漏间隔器和掺杂扩展,以减少重叠电容。finfet与性能的逻辑应用匹配的最新技术进行了演示。同时,ft和fmax分别达到400 GHz和100 GHz,这是硅基III-V MOSFET的最高ft。最后,我们探索了使用扩展门线来降低门电阻,提供215/300 GHz的平衡ft/fmax,这是III-V RF器件关于Si匹配最先进Si- cmos状态的第一份报告。
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引用次数: 14
Selector Requirements for Tera-Bit Ultra-High-Density 3D Vertical RRAM 兆位超高密度3D垂直RRAM的选择器要求
Pub Date : 2018-06-01 DOI: 10.1109/VLSIT.2018.8510689
Zizhen Jiang, S. Qin, Haitong Li, S. Fujii, Dongjin Lee, S. Wong, H. Wong
Selector requirements for tera-bit class, ultra-high-density 3D vertical resistive random access memory (VRRAM) are presented, including practical design considerations such as array efficiency (AE), pillar driver transistors (pillar drivers), and wire/metal plane resistances. We design a novel chip architecture that is different from 3D NAND: (a) separated, square and large wordplane (WP) connected by global wordplane connections (WPC) within a block to minimize influence of leakage currents, (b) compact staircase. An accurate, computationally efficient resistor network is developed to model the parasitic resistances of the architecture. Through the resistor network simulations, selector requirements for 3D VRRAM are examined. To achieve tera-bit class 3D VRRAM with density higher than the most advanced 3D NAND flash (> 4.3 Gb/mm2), selector nonlinearity (NL) ≥ 102 is required.
介绍了兆位级超高密度3D垂直电阻随机存取存储器(VRRAM)的选择器要求,包括实际设计考虑因素,如阵列效率(AE)、柱驱动晶体管(柱驱动)和导线/金属平面电阻。我们设计了一种不同于3D NAND的新型芯片架构:(a)在一个块内通过全局字面连接(WPC)连接的分离、方形和大字面(WP),以最大限度地减少泄漏电流的影响;(b)紧凑的阶梯。开发了一个精确的、计算效率高的电阻网络来模拟该结构的寄生电阻。通过电阻器网络仿真,研究了三维VRRAM的选择器要求。要实现比最先进的3D NAND闪存(> 4.3 Gb/mm2)密度更高的太比特级3D VRRAM,需要选择器非线性(NL)≥102。
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引用次数: 12
Low Thermal Budget Amorphous Indium Tungsten Oxide Nano-Sheet Junctionless Transistors with Near Ideal Subthreshold Swing 近理想亚阈值摆幅的低热预算非晶氧化铟钨纳米片无结晶体管
Pub Date : 2018-06-01 DOI: 10.1109/VLSIT.2018.8510684
P. Kuo, Chien-Min Chang, Po-Tsun Liu
Amorphous indium tungsten oxide (a-IWO) nano-sheet (NS) junctionless (JL) transistors (a-IWO NS-JLTs) have been successfully fabricated and demonstrated in the category of indium oxide based thin film transistors (TFTs). We have scaled down thickness of a-IWO channel to 4nm. The proposed a-IWO NS-JLTs with low operation voltages exhibit good electrical characteristics: near ideal peak subthreshold swing (S.S.) ~ 63mV/dec., high field-effect mobility (μFE) ~ 25.3 cm2/V-s. The novel a-IWO NS-JLTs with low temperature processes are promising candidates for monolithic three-dimensional integrated circuits (3-D ICs), vertical stacked (VS) hybrid CMOS technology, and large-scale integration (LSI) applications in the future.
无定形氧化铟钨(a-IWO)纳米片无结(JL)晶体管(a-IWO NS- jlt)在氧化铟基薄膜晶体管(TFTs)中得到了成功的制备和演示。我们已经将a-IWO通道的厚度缩小到4nm。所提出的低工作电压的a-IWO NS-JLTs具有良好的电特性:接近理想的峰值亚阈值摆幅(S.S.) ~ 63mV/dec。,高场效应迁移率(μFE) ~ 25.3 cm2/V-s。具有低温工艺的新型a-IWO ns - jlt是未来单片三维集成电路(3d - ic),垂直堆叠(VS)混合CMOS技术和大规模集成电路(LSI)应用的有希望的候选者。
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引用次数: 5
Selective Pore-Sealing of Highly Porous Ultralow-k dielectrics for ULSI Interconnects by Cyclic Initiated Chemical Vapor Deposition Process 循环引发化学气相沉积工艺制备超低k高孔隙介质的选择性封孔研究
Pub Date : 2018-06-01 DOI: 10.1109/VLSIT.2018.8510630
Seong Jun Yoon, Kwanyong Pak, Hyun Jun Ahn, A. Yoon, S. Im, Byung Jin Cho
A selective pore-sealing of highly porous ultralow-k (pULK) dielectrics by a cyclic initiated CVD (iCVD) process has been successfully developed. A negligible increase of the pULK thickness and the k value was achieved even after the hermetic pore-sealing. The pore-sealed pULK films show low leakage current and excellent dielectric reliability, comparable to the commercialized low-k dielectric. The selective pore-sealing process does not deposit the pore-sealing layer on Cu surface. The porosity difference between pULK and Cu surfaces is attributed to the origin of the selectivity in the cyclic iCVD process.
利用循环引发CVD (iCVD)工艺成功开发了一种高孔超低钾(pULK)介电材料的选择性封孔方法。即使在密封孔隙后,pULK厚度和k值的增加也可以忽略不计。多孔密封的pULK薄膜具有低泄漏电流和优异的介电可靠性,可与商品化的低k介电材料相媲美。选择性封孔工艺不会在铜表面沉积封孔层。pULK和Cu表面孔隙率的差异归因于循环iCVD过程的选择性。
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引用次数: 0
Space Program Scheme for 3-D NAND Flash Memory Specialized for the TLC Design 专为TLC设计的三维NAND闪存空间规划方案
Pub Date : 2018-06-01 DOI: 10.1109/VLSIT.2018.8510660
Ho-Jung Kang, Nagyong Choi, Dong Hwan Lee, Tackhwi Lee, Sungyong Chung, J. Bae, Byung-Gook Park, Jong-Ho Lee
A new space program (PGM) scheme is proposed to achieve reliable triple-level-cell (TLC) 3-D NAND flash memory. Considering the lateral diffusion issue of stored electrons in the nitride storage layer, the proposed scheme stores electrons in the nitride layer of the space region between adjacent cells to suppress the lateral movement of trapped electrons in the programmed target cells. The effect of the space PGM can be sustained until 104 s at 90 °C and up to 1k read cycles at 25 °C. The programmed space region of the nitride layer improves the retention characteristics of the cells in the PGM state by 40% and remarkably reduces the Vth redistribution.
为实现可靠的三电平单元(TLC)三维NAND闪存,提出了一种新的空间计划(PGM)方案。考虑到氮化存储层中存储电子的横向扩散问题,该方案将电子存储在相邻单元之间空间区域的氮化层中,以抑制编程靶单元中捕获电子的横向移动。空间PGM的效果可以在90°C下持续104 s,在25°C下持续1k的读取周期。氮化物层的程序化空间区使PGM状态下电池的保留特性提高了40%,并显著降低了Vth再分布。
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引用次数: 11
Significant Performance Enhancement of UTB GeOI pMOSFETs by Advanced Channel Formation Technologies 先进沟道形成技术对UTB GeOI pmosfet性能的显著提升
Pub Date : 2018-06-01 DOI: 10.1109/VLSIT.2018.8510664
W. Chang, T. Irisawa, H. Ishii, H. Hattori, N. Uchida, T. Maeda
Advanced channel formation technologies, such as precise control of GeOI body thickness (Tbody), surface roughness and interfacial quality, utilizing Si-passivation/Ge-channel/SiGe hetero-epitaxy and Ge digital etching (DE) techniques were implemented for UTB GeOI structure. Si passivation for Ge/BOX interface has been verified to suppress Coulomb scattering owing to better interfacial quality. Insertion of SiGe etching stop (ES) layer and dozens DE (DDE) were found to be quite effective to reduce Tbody fluctuation as well as surface roughness, resulting in the significant improvement of mobility. As a result, we have demonstrated record high hole mobility of ~200 cm2/Vs in UTB GeOI pMOSFETs without the strain technology, which outperforms Si universal mobility by 2 times even under Tbody of 9 nm.
利用si钝化/Ge通道/SiGe异质外延和Ge数字刻蚀(DE)技术对UTB GeOI结构实现了先进的沟道形成技术,如精确控制GeOI体厚度(Tbody)、表面粗糙度和界面质量。由于界面质量较好,Ge/BOX界面的Si钝化可以抑制库仑散射。发现SiGe刻蚀停止层(ES)和数十个DE (DDE)的插入对降低体波动和表面粗糙度非常有效,从而显著提高了迁移率。因此,我们在没有应变技术的情况下,在UTB GeOI pmosfet中展示了创纪录的~200 cm2/Vs的高空穴迁移率,即使在9 nm下也比Si的通用迁移率高出2倍。
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引用次数: 3
10μW/cm2-Class High Power Density Planar Si-Nanowire Thermoelectric Energy Harvester Compatible with CMOS-VLSI Technology 兼容CMOS-VLSI技术的10μW/cm2级高功率密度平面硅纳米线热电能量采集器
Pub Date : 2018-06-01 DOI: 10.1109/VLSIT.2018.8510659
M. Tomita, S. Oba, Y. Himeda, R. Yamato, K. Shima, T. Kumada, M. Xu, H. Takezawa, K. Mesaki, K. Tsuda, S. Hashimoto, T. Zhan, H. Zhang, Y. Kamakura, Y. Suzuki, H. Inokawa, H. Ikeda, T. Matsukawa, T. Matsuki, T. Watanabe
A best benchmark of Si-nanowire (NW) thermoelectric (TE) power generator has been achieved by our proposed planar device architecture compatible with CMOS process technology. The TE power density corresponds to 12 μW/cm2, which is recorded at an externally applied temperature difference of only 5 K. The demonstration opens up a pathway to cost effective autonomous internet of things (IoT) application utilizing environmental and body heats.
采用与CMOS工艺技术兼容的平面器件结构,实现了硅纳米线热电发电机的最佳基准测试。TE的功率密度为12 μW/cm2,在外加温差仅为5 K的情况下测得。此次示范为利用环境和人体热量,实现具有成本效益的自主物联网(IoT)应用开辟了道路。
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引用次数: 6
Leakage aware Si/SiGe CMOS FinFET for low power applications 漏感Si/SiGe CMOS FinFET低功耗应用
Pub Date : 2018-06-01 DOI: 10.1109/VLSIT.2018.8510639
G. Tsutsui, C. Durfee, Miaomiao Wang, A. Konar, Heng Wu, S. Mochizuki, R. Bao, S. Bedell, Juntao Li, Huimei Zhou, D. Schmidt, Chun Ju Yang, J. Kelly, Koji Watanabe, T. Levin, W. Kleemeier, D. Guo, D. Sadana, D. Gupta, A. Knorr, H. Bu
Leakage in Si/SiGe CMOS FinFET is examined. Si cap passivation effectively improves SiGe pFET Dit, subthreshold slope, and mobility, which improves pFET DC performance by 20%. SiGe GIDL is higher than Si by a factor of 9, though GIDL is limited to 50pA/um. SiGe GIDL reduction knobs to meet Si counterpart are demonstrated. The results open the door to the next stage of Si/SiGe CMOS FinFET such as low power and low leakage applications.
研究了Si/SiGe CMOS FinFET的泄漏。Si帽钝化有效地改善了SiGe pet Dit、亚阈值斜率和迁移率,使pet直流性能提高了20%。SiGe GIDL比Si高9倍,但GIDL限制在50pA/um。SiGe GIDL减少旋钮,以满足Si对应的演示。该结果为Si/SiGe CMOS FinFET的下一阶段打开了大门,例如低功耗和低泄漏应用。
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引用次数: 6
Analog Spike Processing with High Scalability and Low Energy Consumption Using Thermal Degree of Freedom in Phase Transition Materials 基于相变材料热自由度的高可扩展性和低能耗模拟尖峰处理
Pub Date : 2018-06-01 DOI: 10.1109/VLSIT.2018.8510649
T. Yajima, T. Nishimura, A. Toriumi
Spike integration and threshold processing are the basic signal processing in brain-inspired computing, such as deep learning, reservoir computing etc. In such processes, analog technology is essential for suppressing energy consumption. However, analog technology often faces problems in miniaturization due to deteriorated noise tolerance by scaling and intrinsically large analog elements such as capacitors. Here, we propose to exploit a thermal degree of freedom in phase transition materials for scalable and noise-tolerant analog spike processing. We focus on a two-terminal metal-insulator-transition VO2 device, where quasi-adiabatic Joule heating enables efficient spike integration, and metal-insulator transition implements threshold processing. This VO2 device is highly scalable, consuming only ~1fJ/spike (smallest so far) according to the simulation. By using this device, fully autonomous spike integration and threshold processing are also demonstrated. Exploiting the quasi-adiabatic thermal degree of freedom will facilitate scalable and energy-efficient analog implementation for a wide range of brain-inspired computing.
尖峰积分和阈值处理是深度学习、储层计算等脑启发计算中的基本信号处理方法。在这样的过程中,模拟技术是必不可少的,以抑制能源消耗。然而,模拟技术往往面临小型化的问题,由于缩放和本质上较大的模拟元件,如电容器的噪声容限恶化。在这里,我们建议利用相变材料的热自由度来进行可扩展和耐噪声的模拟尖峰处理。我们重点研究了一种双端金属-绝缘体过渡VO2器件,其中准绝热焦耳加热实现了高效的尖峰集成,金属-绝缘体过渡实现了阈值处理。该VO2器件具有高度可扩展性,根据模拟,仅消耗~1fJ/spike(迄今为止最小)。利用该装置,还演示了完全自主的脉冲集成和阈值处理。利用准绝热自由度将促进可扩展和节能的模拟实现,用于广泛的脑启发计算。
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引用次数: 4
期刊
2018 IEEE Symposium on VLSI Technology
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