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2019 Symposium on VLSI Technology最新文献

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Microscopic Crystal Phase Inspired Modeling of Zr Concentration Effects in Hf1-xZrxO2Thin Films hf1 - xzrxo2薄膜中Zr浓度效应的微观晶相模拟
Pub Date : 2019-06-09 DOI: 10.23919/VLSIT.2019.8776533
A. Saha, B. Grisafe, S. Datta, S. Gupta
In this paper, we theoretically and experimentally investigate the Zr concentration dependent crystal phase transition of Hf1-xZxO2 (HZO) and the corresponding evolution of dielectric (DE), ferroelectric (FE) and anti-ferroelectric (AFE) characteristics. Providing the microscopic insights of strain induced crystal phase transformations, we propose a physics based model that shows good agreement with our experimental results for 10nm Hf1-xZxO2 (with $text{x}=0$ through 1). Utilizing our model, we analyze HZO-FET operation as a non-volatile memory device for different x.
本文从理论上和实验上研究了Zr浓度对Hf1-xZxO2 (HZO)晶体相变的影响,以及相应的介电(DE)、铁电(FE)和反铁电(AFE)特性的演变。为了提供应变诱导晶体相变的微观见解,我们提出了一个基于物理的模型,该模型与我们在10nm Hf1-xZxO2 ($text{x}=0$至1)的实验结果非常吻合。利用我们的模型,我们分析了HZO-FET作为不同x的非易失性存储器件的工作。
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引用次数: 6
Ferroelectric and Anti-Ferroelectric Hafnium Zirconium Oxide: Scaling Limit, Switching Speed and Record High Polarization Density 铁电和反铁电氧化铪锆:结垢极限、开关速度和创纪录的高极化密度
Pub Date : 2019-06-09 DOI: 10.23919/VLSIT.2019.8776548
X. Lyu, M. Si, X. Sun, M. Capano, H. Wang, Peide D. Ye
The ferroelectric (FE) and anti-ferroelectric (AFE) properties of hafuium zirconium oxide (HZO) are investigated systematically down to 3 nm. The ferroelectric polarization, switching speed and the impact of atomic layer deposited (ALD) tungsten nitride (WN) electrodes are studied. Record high remnant polarization $(text{P}_{r})$, on FE HZO and record high saturation polarization $(text{P}_{s})$ on AFE HZO are achieved with WN electrodes, especially in ultrathin sub-10 nm regime. A high dielectric constant of 30.4 is achieved on AFE HZO. The polarization switching speed of FE and AFE HZO, associated with C-V frequency dispersion, are also studied. For the first time, it is found polarization switching speed is faster in AFE HZO than FE HZO, suggesting AFE-FET could be more promising for high speed memory devices.
系统地研究了氧化锆(HZO)的铁电(FE)和反铁电(AFE)性能。研究了原子层沉积(ALD)氮化钨(WN)电极的铁电极化、开关速度及其影响。用WN电极在FE HZO上实现了创纪录的高残余极化$(text{P}_{r})$,在AFE HZO上实现了创纪录的高饱和极化$(text{P}_{s})$,特别是在10 nm以下的超薄区。在AFE HZO上获得了30.4的高介电常数。研究了FE和AFE HZO的极化开关速度与C-V频散的关系。首次发现AFE- HZO的极化开关速度比FE- HZO快,这表明AFE- fet在高速存储器件中更有前景。
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引用次数: 34
2nm Node: Benchmarking FinFET vs Nano-Slab Transistor Architectures for Artificial Intelligence and Next Gen Smart Mobile Devices 2nm节点:用于人工智能和下一代智能移动设备的FinFET与纳米板晶体管架构的基准
Pub Date : 2019-06-09 DOI: 10.23919/VLSIT.2019.8776478
S. Song, B. Colombeau, M. Bauer, V. Moroz, X. Lin, P. Asenov, D. Sherlekar, M. Choi, J. Huang, B. Cheng, C. Chidambaram, S. Natarajan
We explore four different technology and design options for transistors and library cells for a low power supply voltage of 0.4 V and circuit statistics representative of artificial intelligence (AI) applications. The design rules correspond to 2nm node with cell heights of 100~110 nm and 30 nm gate pitch. Holistic analysis of the RO (Ring Oscillator) behavior, including MOL parasitics, all major variability sources, and stress proximity effects suggests that different FinFET and nanoslab transistor design options exhibit a wide range of power and performance differences. The key to improve FinFET PPA is to avoid fin cuts to maintain strong PMOS performance, and a key to improve SS corner delay is to use nanoslabs with tighter variability control.
我们探索了四种不同的技术和设计方案,用于0.4 V的低电源电压的晶体管和库单元,以及代表人工智能(AI)应用的电路统计。设计规则对应于2nm节点,单元高度为100~110 nm,栅极间距为30 nm。对环形振荡器(RO)行为的整体分析,包括MOL寄生、所有主要变异性源和应力接近效应,表明不同的FinFET和纳米板晶体管设计选项显示出广泛的功率和性能差异。改善FinFET PPA的关键是避免翅片切割以保持较强的PMOS性能,改善SS角延迟的关键是使用具有更严格可变性控制的纳米板。
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引用次数: 9
Confined PCM-based Analog Synaptic Devices offering Low Resistance-drift and 1000 Programmable States for Deep Learning 为深度学习提供低电阻漂移和1000个可编程状态的基于pcm的受限模拟突触器件
Pub Date : 2019-06-09 DOI: 10.23919/VLSIT.2019.8776551
W. Kim, R. Bruce, T. Masuda, G. Fraczak, N. Gong, P. Adusumilli, S. Ambrogio, H. Tsai, J. Bruley, J.-P. Han, M. Longstreet, F. Carta, K. Suu, M. BrightSky
We have demonstrated, for the first time, a combination of outstanding linearity of analog programming with matched PCM pairs, small analog programming noise, an extremely low resistance drift (R-drift) coefficient (0.005, median) and high endurance for a CVD-based confined phase change memory (PCM) with a thin metallic liner. In-depth analysis of linear analog programming is also presented. MNIST simulations using a pair of these confined PCM devices as a synaptic element yield a high test accuracy of 95%.
我们首次证明了具有匹配PCM对的模拟编程的出色线性,小的模拟编程噪声,极低的电阻漂移(r -漂移)系数(0.005,中位数)和具有薄金属衬里的基于cvd的受限相变存储器(PCM)的高耐用性。对线性模拟编程进行了深入的分析。使用一对这些受限PCM器件作为突触元件的MNIST模拟产生了高达95%的测试精度。
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引用次数: 42
High Performance Heterogeneous Integration on Fan-out RDL Interposer 扇出式RDL中介器的高性能异构集成
Pub Date : 2019-06-09 DOI: 10.23919/VLSIT.2019.8776543
Shuo-Mao Chen, M. Yew, F. Hsu, Y.J. Huang, Y. Lin, M.S. Liu, K.C. Lee, P. Lai, T. Lai, Shin-Puu Jen
The fan-out packaging technology has recently been adopted in mobile application processors due to its advantages in form factor, fine pitch traces, and efficient thermal dissipation. This paper demonstrates heterogeneous integration on a fan-out redistribution layer (RDL) interposer. The package has a full-reticle size Si die and two HBMs. Si die and memory modules are attached to a fanout RDL and are then attached to a multilayer substrate. This advanced package meets both electrical and mechanical requirements. The fanout RDL interposer is comprised of polymer and copper traces, and it is relatively mechanically flexible. Such flexibility enhances C4 joint integrity, and allows the new package to scale up its size to meet more complex functional demands.
扇形封装技术由于其在外形尺寸、细间距走线和高效散热方面的优势,最近被应用于移动应用处理器中。本文演示了扇形再分布层(RDL)中介器上的异构集成。该封装有一个全光栅尺寸的Si芯片和两个hbm。硅芯片和存储模块连接到扇出RDL,然后连接到多层衬底。这种先进的封装满足电气和机械要求。扇出式RDL中间层由聚合物和铜线组成,具有相对的机械柔性。这种灵活性增强了C4关节的完整性,并允许新封装扩大其尺寸以满足更复杂的功能需求。
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引用次数: 6
Transient Negative Capacitance as Cause of Reverse Drain-induced Barrier Lowering and Negative Differential Resistance in Ferroelectric FETs 瞬态负电容是导致铁电场效应管反向漏极势垒降低和负差分电阻的原因
Pub Date : 2019-06-09 DOI: 10.23919/VLSIT.2019.8776583
C. Jin, T. Saraya, T. Hiramoto, M. Kobayashi
We have investigated transient $I_{text{d}}-V_{text{g}}$ and $I_{text{d}}-V_{text{d}}$ characteristics of ferroelectric FET (FeFET) by simulation with ferroelectric (FE) model considering polarization switching dynamics. For the first time, we show transient negative capacitance (TNC) with polarization reversal and depolarization effect results in sub-60 SS, reverse drain-induced barrier lowering (R-DIBL), and negative differential resistance (NDR) without traversing the quasi-static negative capacitance (QSNC) region in S-shaped P-Vbased on Landau theory. The mechanism demonstrated in this work can be a possible explanation for the previously reported negative capacitance FET (NCFET) with steep SS, R-DIBL, and NDR.
利用考虑极化开关动力学的铁电模型,对铁电场效应管(FeFET)的瞬态特性$I_{text{d}}-V_{text{g}}$和$I_{text{d}}-V_{text{d}}$进行了仿真研究。基于朗道理论,首次揭示了具有极化反转和退极化效应的瞬态负电容(TNC)、反向漏极诱导势垒降低(R-DIBL)和负差分电阻(NDR),而无需穿越s形p - v型准静态负电容(QSNC)区域。这项工作所证明的机制可能是先前报道的具有陡SS, R-DIBL和NDR的负电容FET (nfet)的可能解释。
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引用次数: 17
High performance strained Germanium Gate All Around p-channel devices with excellent electrostatic control for sub-Jtlnm LG 用于亚jtlnm LG的高性能应变锗栅极全环p沟道器件,具有优异的静电控制性能
Pub Date : 2019-06-09 DOI: 10.23919/VLSIT.2019.8776558
E. Capogreco, H. Arimura, L. Witters, A. Vohra, C. Porret, R. Loo, A. De Keersgieter, E. Dupuy, D. Marinov, A. Hikavyy, F. Sebaai, G. Mannaert, L. Ragnarsson, Y. Siew, C. Vrancken, A. Opdebeeck, J. Mitard, R. Langer, E. Sanchez, F. Holstetns, S. Demuynck, K. Barla, V. De Heyn, D. Mocuta, N. Collaert, N. Horiguchi
This paper demonstrates high performance strained p-type double stacked Ge Gate-AlI-Around (GAA) devices at significantly reduced gate lengths $(text{L}_{text{G}}sim 25text{nm})$ compared to our previous work. Excellent electrostatic control is maintained down to $text{L}_{text{G}}=25$ nm by using extension-less scheme, while the performance is kept by appropriate spacer scaling and implementation of highly B-doped Ge or GeSn as source/drain (S/D) material.
本文展示了高性能的张力p型双堆叠Ge gate - ali - around (GAA)器件,与我们之前的工作相比,栅极长度$(text{L}_{text{G}}sim 25text{nm})$显著减少。通过采用无扩展方案,在$text{L}_{text{G}}=25$ nm的范围内保持良好的静电控制,同时通过适当的间隔缩放和采用高b掺杂的Ge或GeSn作为源/漏极(S/D)材料来保持性能。
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引用次数: 10
Enhanced Reliability of 7nm Process Technology featuring EUV 采用EUV技术的7nm制程技术可靠性增强
Pub Date : 2019-06-09 DOI: 10.23919/VLSIT.2019.8776580
Kihyun Choi, H. Sagong, Wonchang Kang, Hyunjin Kim, J. Hai, Miji Lee, Bomi Kim, Miji Lee, Soonyoung Lee, H. Shim, Junekyun Park, Youngwoo Cho, H. Rhee, S. Pae
In this paper, we report the reliability characterization of 7nm FinFET technology, in which the highly scaled 6th generation of FinFETs and 256Mbit SRAM cells was newly developed by utilizing EUV. The single EUV patterning of MOL and BEOL resulted in significantly improved reliability distribution as compared to the previous nodes with multiple patterning techniques. The successful demonstration on product reliability including SRAM, Logic HTOL, and SER as technology evaluation was performed, indicating the 7nm technology+EUV is ready for high volume manufacturing.
在本文中,我们报告了7nm FinFET技术的可靠性表征,其中利用EUV新开发了高尺寸的第六代FinFET和256Mbit SRAM单元。MOL和BEOL的单EUV模式与之前使用多模式技术的节点相比,显著改善了可靠性分布。通过对SRAM、Logic HTOL和SER等产品可靠性的技术评估,表明7nm技术+EUV已经准备好进行大批量生产。
{"title":"Enhanced Reliability of 7nm Process Technology featuring EUV","authors":"Kihyun Choi, H. Sagong, Wonchang Kang, Hyunjin Kim, J. Hai, Miji Lee, Bomi Kim, Miji Lee, Soonyoung Lee, H. Shim, Junekyun Park, Youngwoo Cho, H. Rhee, S. Pae","doi":"10.23919/VLSIT.2019.8776580","DOIUrl":"https://doi.org/10.23919/VLSIT.2019.8776580","url":null,"abstract":"In this paper, we report the reliability characterization of 7nm FinFET technology, in which the highly scaled 6th generation of FinFETs and 256Mbit SRAM cells was newly developed by utilizing EUV. The single EUV patterning of MOL and BEOL resulted in significantly improved reliability distribution as compared to the previous nodes with multiple patterning techniques. The successful demonstration on product reliability including SRAM, Logic HTOL, and SER as technology evaluation was performed, indicating the 7nm technology+EUV is ready for high volume manufacturing.","PeriodicalId":6752,"journal":{"name":"2019 Symposium on VLSI Technology","volume":"13 1","pages":"T16-T17"},"PeriodicalIF":0.0,"publicationDate":"2019-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78919494","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Self-Heating Temperature Behavior Analysis for DC - GHz Design Optimization in Advanced FinFETs 高级finfet中DC - GHz设计优化的自热温度行为分析
Pub Date : 2019-06-09 DOI: 10.23919/VLSIT.2019.8776496
S. L. Liu, J. Horng, Amit Akundu, Y. Hsu, B. Lien, S. F. Liu, C. W. Chang, H. Hsieh, D. Huang, Y. C. Peng, Sally Liu, Mark Chen
This paper presents a 3D thermal impedance network approach to study self-heating effects in advanced FinFETs that are difficult to be analyzed in conventional models: (i) temperature distribution analysis for large FinFET devices used in high current drivers (ii) transient thermal modeling for heat accumulation in GHz digital circuits, and (iii) investigation for layout methods to reduce FinFET self-heating temperature.
本文提出了一种三维热阻抗网络方法来研究传统模型难以分析的先进FinFET的自热效应:(i)用于大电流驱动器的大型FinFET器件的温度分布分析;(ii) GHz数字电路中热积累的瞬态热建模;(iii)研究降低FinFET自热温度的布局方法。
{"title":"Self-Heating Temperature Behavior Analysis for DC - GHz Design Optimization in Advanced FinFETs","authors":"S. L. Liu, J. Horng, Amit Akundu, Y. Hsu, B. Lien, S. F. Liu, C. W. Chang, H. Hsieh, D. Huang, Y. C. Peng, Sally Liu, Mark Chen","doi":"10.23919/VLSIT.2019.8776496","DOIUrl":"https://doi.org/10.23919/VLSIT.2019.8776496","url":null,"abstract":"This paper presents a 3D thermal impedance network approach to study self-heating effects in advanced FinFETs that are difficult to be analyzed in conventional models: (i) temperature distribution analysis for large FinFET devices used in high current drivers (ii) transient thermal modeling for heat accumulation in GHz digital circuits, and (iii) investigation for layout methods to reduce FinFET self-heating temperature.","PeriodicalId":6752,"journal":{"name":"2019 Symposium on VLSI Technology","volume":"1 1","pages":"T200-T201"},"PeriodicalIF":0.0,"publicationDate":"2019-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85740636","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
First Demonstration of a Fully-Printed Mos2Rram on Flexible Substrate with Ultra-Low Switching Voltage and its Application as Electronic Synapse 柔性基板上超低开关电压全印刷Mos2Rram的首次演示及其在电子突触中的应用
Pub Date : 2019-06-09 DOI: 10.23919/VLSIT.2019.8776520
Xuewei Feng, Yida Li, Lin Wang, Z. Yu, Shuai Chen, W. Tan, Nasiruddin Macadam, G. Hu, X. Gong, T. Hasan, Yong-Wei Zhang, A. Thean, K. Ang
We demonstrate the first fully-printed resistive random access memory (RRAM) on flexible substrate using 2D layered dichalcogenides, exhibiting ultra-low switching voltage down to 0.18 V and an on/off ratio up to 107. The novel switching medium is printed by formulating multilayer molybdenum disulfide (MoS2) into 3D-printable ink. Both volatile and non-volatile resistive switching are achieved within a single device by varying current compliance, which enables the implementation of electronic synapse with neuromorphic functionality including short-term plasticity (STP) and long-term plasticity (LTP).
我们展示了第一个使用二维层状二硫化物在柔性衬底上完全印刷的电阻式随机存取存储器(RRAM),具有低至0.18 V的超低开关电压和高达107的开关比。这种新型开关介质是通过将多层二硫化钼(MoS2)配制成可3d打印的油墨来打印的。通过改变电流顺应性,在单个器件内实现挥发性和非挥发性电阻开关,从而实现具有神经形态功能的电子突触,包括短期可塑性(STP)和长期可塑性(LTP)。
{"title":"First Demonstration of a Fully-Printed Mos2Rram on Flexible Substrate with Ultra-Low Switching Voltage and its Application as Electronic Synapse","authors":"Xuewei Feng, Yida Li, Lin Wang, Z. Yu, Shuai Chen, W. Tan, Nasiruddin Macadam, G. Hu, X. Gong, T. Hasan, Yong-Wei Zhang, A. Thean, K. Ang","doi":"10.23919/VLSIT.2019.8776520","DOIUrl":"https://doi.org/10.23919/VLSIT.2019.8776520","url":null,"abstract":"We demonstrate the first fully-printed resistive random access memory (RRAM) on flexible substrate using 2D layered dichalcogenides, exhibiting ultra-low switching voltage down to 0.18 V and an on/off ratio up to 107. The novel switching medium is printed by formulating multilayer molybdenum disulfide (MoS2) into 3D-printable ink. Both volatile and non-volatile resistive switching are achieved within a single device by varying current compliance, which enables the implementation of electronic synapse with neuromorphic functionality including short-term plasticity (STP) and long-term plasticity (LTP).","PeriodicalId":6752,"journal":{"name":"2019 Symposium on VLSI Technology","volume":"1 1","pages":"T88-T89"},"PeriodicalIF":0.0,"publicationDate":"2019-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88209727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
期刊
2019 Symposium on VLSI Technology
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