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2017 IEEE International Electron Devices Meeting (IEDM)最新文献

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Smart GaN platform: Performance & challenges 智能GaN平台:性能与挑战
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268488
C. Tsai, Yun-Hsiang Wang, M. Kwan, P.-C. Chen, F. Yao, S.-C. Liu, J.-L. Yu, C. Yeh, R. Su, W. Wang, W. Yang, K.Y. Wong, Y.-S. Lin, M. Lin, H.-Y Wu, C.-M. Chen, C. Yu, C.-B. Wu, M. Chang, J.-S. You, T.M. Huang, S.P. Wang, L. Tsai, Chan-Hong Chern, H. Tuan, A. Kalnitsky
This paper explores the next stage of GaN power devices with 2-level integration of peripheral low voltage active and passive devices. The 1st level consists of protection/control/driving circuits, which potentially improves the performance and overcomes the challenges to the power devices. The 2nd level integration has high-low side on-chip integration on a 100V technology platform. The challenge of channel modulation due to substrate bias sharing is effectively eliminated by the invented new scheme. The system efficiency of DC-DC buck converter using such scheme is enhanced with lower on-state resistance and good stability.
本文探讨了外围低压有源和无源器件两级集成的GaN功率器件的下一阶段。第一级由保护/控制/驱动电路组成,这有可能提高性能并克服功率器件的挑战。第二级集成在100V技术平台上实现高低侧片上集成。该方案有效地解决了基片偏置共享导致的信道调制难题。采用该方案可提高DC-DC降压变换器的系统效率,且具有较低的导通电阻和良好的稳定性。
{"title":"Smart GaN platform: Performance & challenges","authors":"C. Tsai, Yun-Hsiang Wang, M. Kwan, P.-C. Chen, F. Yao, S.-C. Liu, J.-L. Yu, C. Yeh, R. Su, W. Wang, W. Yang, K.Y. Wong, Y.-S. Lin, M. Lin, H.-Y Wu, C.-M. Chen, C. Yu, C.-B. Wu, M. Chang, J.-S. You, T.M. Huang, S.P. Wang, L. Tsai, Chan-Hong Chern, H. Tuan, A. Kalnitsky","doi":"10.1109/IEDM.2017.8268488","DOIUrl":"https://doi.org/10.1109/IEDM.2017.8268488","url":null,"abstract":"This paper explores the next stage of GaN power devices with 2-level integration of peripheral low voltage active and passive devices. The 1st level consists of protection/control/driving circuits, which potentially improves the performance and overcomes the challenges to the power devices. The 2nd level integration has high-low side on-chip integration on a 100V technology platform. The challenge of channel modulation due to substrate bias sharing is effectively eliminated by the invented new scheme. The system efficiency of DC-DC buck converter using such scheme is enhanced with lower on-state resistance and good stability.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126595197","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 49
System scaling for intelligent ubiquitous computing 智能普适计算的系统扩展
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268308
Jack Sun
Wafer based 3D×3D system scaling revolutionizes machine learning (ML) and artificial intelligence (AI) as well as mobile computing. It may trigger a big bang in intelligent ubiquitous computing. 3D CMOS scaling continues with many challenges and opportunities for relentless innovation in materials, processes, devices, circuits, design, EDA, computing architectures, algorithms, and software. 3D stacking and heterogeneous system integration, e.g., CoWoS® and InFO, not only augments but also amplifies the benefits of 3D CMOS logic, 3D memory, integrated specialty technologies and 3D sensors for intelligent ubiquitous computing. The virtuous cycles of 3D×3D system scaling innovation may expand like a galaxy or universe. The aggregate transistor count in a 3D×3D sub-system may reach the equivalent of human brain in the 2020s to provide brain-like augmented intelligence.
基于晶圆的3D×3D系统扩展彻底改变了机器学习(ML)和人工智能(AI)以及移动计算。它可能会引发智能普适计算的大爆炸。3D CMOS扩展在材料、工艺、器件、电路、设计、EDA、计算架构、算法和软件方面不断创新,面临着许多挑战和机遇。3D堆叠和异构系统集成,例如coos®和InFO,不仅增强而且放大了3D CMOS逻辑,3D存储器,集成专业技术和3D传感器的优势,用于智能无处不在的计算。3D×3D系统规模创新的良性循环可能会像星系或宇宙一样扩展。到21世纪20年代,3D×3D子系统的晶体管总数可能会达到相当于人类大脑的水平,从而提供类似大脑的增强智能。
{"title":"System scaling for intelligent ubiquitous computing","authors":"Jack Sun","doi":"10.1109/IEDM.2017.8268308","DOIUrl":"https://doi.org/10.1109/IEDM.2017.8268308","url":null,"abstract":"Wafer based 3D×3D system scaling revolutionizes machine learning (ML) and artificial intelligence (AI) as well as mobile computing. It may trigger a big bang in intelligent ubiquitous computing. 3D CMOS scaling continues with many challenges and opportunities for relentless innovation in materials, processes, devices, circuits, design, EDA, computing architectures, algorithms, and software. 3D stacking and heterogeneous system integration, e.g., CoWoS® and InFO, not only augments but also amplifies the benefits of 3D CMOS logic, 3D memory, integrated specialty technologies and 3D sensors for intelligent ubiquitous computing. The virtuous cycles of 3D×3D system scaling innovation may expand like a galaxy or universe. The aggregate transistor count in a 3D×3D sub-system may reach the equivalent of human brain in the 2020s to provide brain-like augmented intelligence.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116103009","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Ultra fast (<1 ns) electrical characterization of self-heating effect and its impact on hot carrier injection in 14nm FinFETs 14nm finfet中超快(< 1ns)自热效应的电学特性及其对热载流子注入的影响
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268520
Y. Qu, Xi Lin, Junkang Li, R. Cheng, Xiao Yu, Z. Zheng, Jiwu Lu, Bing Chen, Yi Zhao
We demonstrate electrical characterizations within sub-1 ns to investigate the self-heating effect (SHE) in 14 nm FinFETs, for the first time. Thanks to the extremely fast I-V measurement speed (∼500 ps), the heat generation and dissipation process in the transistor channel are precisely captured. Furthermore, the unique correlation between channel temperature and drain current at different gate and drain biases is obtained. With this correlation, the transient and static channel temperatures could be extracted for devices with any working conditions and switching speeds. The impact of SHE on HCI degradation under real circuit stress is also investigated, showing that even under high frequency working conditions (GHz with random signals), SHE still has significant impact on HCI degradation in 14 nm FinFETs.
我们首次展示了sub- 1ns内的电特性,以研究14nm finfet的自热效应(SHE)。由于极快的I-V测量速度(~ 500 ps),可以精确捕获晶体管通道中的热量产生和耗散过程。此外,在不同的栅极和漏极偏置下,通道温度与漏极电流之间具有独特的相关性。利用这种相关性,可以提取任何工作条件和开关速度下的器件的瞬态和静态通道温度。在实际电路应力下,SHE对HCI退化的影响也进行了研究,表明即使在高频工作条件下(随机信号的GHz), SHE仍然对14nm finfet的HCI退化有显著影响。
{"title":"Ultra fast (<1 ns) electrical characterization of self-heating effect and its impact on hot carrier injection in 14nm FinFETs","authors":"Y. Qu, Xi Lin, Junkang Li, R. Cheng, Xiao Yu, Z. Zheng, Jiwu Lu, Bing Chen, Yi Zhao","doi":"10.1109/IEDM.2017.8268520","DOIUrl":"https://doi.org/10.1109/IEDM.2017.8268520","url":null,"abstract":"We demonstrate electrical characterizations within sub-1 ns to investigate the self-heating effect (SHE) in 14 nm FinFETs, for the first time. Thanks to the extremely fast I-V measurement speed (∼500 ps), the heat generation and dissipation process in the transistor channel are precisely captured. Furthermore, the unique correlation between channel temperature and drain current at different gate and drain biases is obtained. With this correlation, the transient and static channel temperatures could be extracted for devices with any working conditions and switching speeds. The impact of SHE on HCI degradation under real circuit stress is also investigated, showing that even under high frequency working conditions (GHz with random signals), SHE still has significant impact on HCI degradation in 14 nm FinFETs.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121742141","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 31
Predicting World Energy Consumption: Comparison of ANN and Regression Analysis 世界能源消费预测:人工神经网络与回归分析的比较
Pub Date : 2017-12-01 DOI: 10.1109/IEDM19572.2017.9110625
O. Olanrewaju, C. Mbohwa
World energy consumption is responsible for the growth of the economy. Having it in abundant will do more to the continuous global growth. Fundamental factors to how energy is consumed are population and gross domestic product (GDP). This study focusses on predicting the global energy consumption from 1995 to 2009 using the fundamental factors as inputs. Statistical and evolutionary algorithm in the form of regression analysis and artificial neural network (ANN) were compared in their prediction performance. Both techniques performed brilliantly as indicated by the coefficient of correlation and visual inspection, however, ANN performed better. Analyzing the factors through the connection weights of ANN reported population to be the significant factor contributing more to how energy is consumed globally. It is important to have policies that can influence population positively in order to have abundant supply of energy whenever there is demand for it.
世界能源消费对经济增长负有责任。拥有丰富的石油资源将对全球经济的持续增长起到更大的作用。能源消耗的基本因素是人口和国内生产总值(GDP)。本文以基本要素为输入,对1995 - 2009年全球能源消费进行了预测。比较了回归分析形式的统计进化算法和人工神经网络(ANN)的预测性能。从相关系数和目视检查可以看出,这两种技术都表现出色,但人工神经网络的表现更好。通过人工神经网络报告人口的连接权来分析这些因素,认为它们是对全球能源消耗贡献更大的重要因素。重要的是要制定能够对人口产生积极影响的政策,以便在有需求的时候获得充足的能源供应。
{"title":"Predicting World Energy Consumption: Comparison of ANN and Regression Analysis","authors":"O. Olanrewaju, C. Mbohwa","doi":"10.1109/IEDM19572.2017.9110625","DOIUrl":"https://doi.org/10.1109/IEDM19572.2017.9110625","url":null,"abstract":"World energy consumption is responsible for the growth of the economy. Having it in abundant will do more to the continuous global growth. Fundamental factors to how energy is consumed are population and gross domestic product (GDP). This study focusses on predicting the global energy consumption from 1995 to 2009 using the fundamental factors as inputs. Statistical and evolutionary algorithm in the form of regression analysis and artificial neural network (ANN) were compared in their prediction performance. Both techniques performed brilliantly as indicated by the coefficient of correlation and visual inspection, however, ANN performed better. Analyzing the factors through the connection weights of ANN reported population to be the significant factor contributing more to how energy is consumed globally. It is important to have policies that can influence population positively in order to have abundant supply of energy whenever there is demand for it.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114627386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Improvement of positive bias temperature instability characteristic in GaN MOSFETs by control of impurity density in SiO2 gate dielectric 通过控制SiO2栅极介质中的杂质密度改善GaN mosfet的正偏置温度不稳定性
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268490
T. Yonehara, Y. Kajiwara, D. Kato, K. Uesugi, T. Shimizu, Y. Nishida, H. Ono, A. Shindome, A. Mukai, A. Yoshioka, M. Kuraguchi
Threshold voltage shift of GaN MOSFET in positive bias temperature instability test was drastically suppressed by reducing certain impurity densities in SiO2 gate dielectric. An analysis to estimate the charge trap level showed electron traps in the gate dielectric caused the threshold voltage shift in GaN MOSFETs. Moreover, impurities, which formed the electron traps in SiO2, were controlled by heat treatment after SiO2 deposition, and the threshold voltage shift characteristic was improved by the reduction of the impurity densities.
通过降低SiO2栅极介质中一定杂质密度,可以显著抑制GaN MOSFET正偏置温度不稳定性测试的阈值电压偏移。估计电荷阱能级的分析表明,栅极介质中的电子阱引起GaN mosfet的阈值电压偏移。此外,SiO2沉积后通过热处理控制了在SiO2中形成电子陷阱的杂质,并通过降低杂质密度改善了阈值电压漂移特性。
{"title":"Improvement of positive bias temperature instability characteristic in GaN MOSFETs by control of impurity density in SiO2 gate dielectric","authors":"T. Yonehara, Y. Kajiwara, D. Kato, K. Uesugi, T. Shimizu, Y. Nishida, H. Ono, A. Shindome, A. Mukai, A. Yoshioka, M. Kuraguchi","doi":"10.1109/IEDM.2017.8268490","DOIUrl":"https://doi.org/10.1109/IEDM.2017.8268490","url":null,"abstract":"Threshold voltage shift of GaN MOSFET in positive bias temperature instability test was drastically suppressed by reducing certain impurity densities in SiO2 gate dielectric. An analysis to estimate the charge trap level showed electron traps in the gate dielectric caused the threshold voltage shift in GaN MOSFETs. Moreover, impurities, which formed the electron traps in SiO2, were controlled by heat treatment after SiO2 deposition, and the threshold voltage shift characteristic was improved by the reduction of the impurity densities.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"328 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115874565","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Cluster-preforming-deposited amorphous WSin (n = 12) insertion film of low SBH and high diffusion barrier for direct Cu contact 团簇预成形沉积了具有低SBH和高扩散势垒的无定形WSin (n = 12)插入膜,用于Cu直接接触
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268442
N. Okada, N. Uchida, S. Ogawa, K. Endo, T. Kanayama
The insertion of an amorphous WSin (n = 12) film composed of W-atom-encapsulated Sin cage clusters is demonstrated to reduce the SBH to 0.32 eV at W/n-Si and to 0.51 eV at W/Ge/p-Si junctions, while significantly extending the estimated TDDB lifetime to > 10 years at 100 °C under 5 MV/cm stress for Cu MOS capacitors. This film was formed with an excellent contact hole coverage by using WF6 and SiH4 gas sources in a hot-wall thermal reactor. These film properties enable the direct Cu contact at S/D in CMOS.
由W原子封装的Sin笼团簇组成的非晶WSin (n = 12)薄膜的插入证明,在W/n- si结处的SBH降至0.32 eV,在W/Ge/p-Si结处的SBH降至0.51 eV,同时显著延长Cu MOS电容器在100°C下5 MV/cm应力下的TDDB寿命至> 10年。在热壁反应器中使用WF6和SiH4气源形成了具有良好接触孔覆盖率的薄膜。这些薄膜特性使得在CMOS中S/D处铜直接接触成为可能。
{"title":"Cluster-preforming-deposited amorphous WSin (n = 12) insertion film of low SBH and high diffusion barrier for direct Cu contact","authors":"N. Okada, N. Uchida, S. Ogawa, K. Endo, T. Kanayama","doi":"10.1109/IEDM.2017.8268442","DOIUrl":"https://doi.org/10.1109/IEDM.2017.8268442","url":null,"abstract":"The insertion of an amorphous WSin (n = 12) film composed of W-atom-encapsulated Sin cage clusters is demonstrated to reduce the SBH to 0.32 eV at W/n-Si and to 0.51 eV at W/Ge/p-Si junctions, while significantly extending the estimated TDDB lifetime to > 10 years at 100 °C under 5 MV/cm stress for Cu MOS capacitors. This film was formed with an excellent contact hole coverage by using WF6 and SiH4 gas sources in a hot-wall thermal reactor. These film properties enable the direct Cu contact at S/D in CMOS.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"148 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122131480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Advanced packaging saves the day! — How TSV technology will enable continued scaling 先进的包装挽救了这一天!- TSV技术将如何实现持续扩展
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268320
L. England, I. Arsovski
Technology scaling is becoming more difficult and costly with each generation. As we scale below 7nm, there is uncertainty in the methodology that will be used for device formation and integration. Now, more than ever, the use of advanced packaging technologies is needed to help extend the lifetimes of our most advanced fab technologies. In this “More Than Moore” era, transistor density can be considered in terms of volume rather than area, and the proliferation of TSV integration is the key enabling technology.
每一代技术扩展都变得更加困难和昂贵。当我们的尺寸小于7nm时,将用于器件形成和集成的方法存在不确定性。现在,比以往任何时候都更需要使用先进的封装技术来帮助延长我们最先进的晶圆厂技术的使用寿命。在这个“超越摩尔”的时代,晶体管密度可以从体积而不是面积来考虑,TSV集成的扩散是关键的使能技术。
{"title":"Advanced packaging saves the day! — How TSV technology will enable continued scaling","authors":"L. England, I. Arsovski","doi":"10.1109/IEDM.2017.8268320","DOIUrl":"https://doi.org/10.1109/IEDM.2017.8268320","url":null,"abstract":"Technology scaling is becoming more difficult and costly with each generation. As we scale below 7nm, there is uncertainty in the methodology that will be used for device formation and integration. Now, more than ever, the use of advanced packaging technologies is needed to help extend the lifetimes of our most advanced fab technologies. In this “More Than Moore” era, transistor density can be considered in terms of volume rather than area, and the proliferation of TSV integration is the key enabling technology.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114953960","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 18
A novel PUF against machine learning attack: Implementation on a 16 Mb RRAM chip 针对机器学习攻击的新型PUF:在16mb RRAM芯片上的实现
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268376
Yachuan Pang, Huaqiang Wu, B. Gao, Dong Wu, An Chen, H. Qian
Physical unclonable function (PUF) is an important hardware security primitive. This paper proposes a novel PUF design based on a double-layer RRAM array architecture and digital RRAM programming achieved by splitting resistance distribution after a continuous distribution was formed. The proposed PUF was implemented on a 16 Mb RRAM test chip and its randomness was verified with NIST test suite. The experimental results demonstrate strong reliability and significantly enhanced resistance against machine-learning attack of this novel PUF design.
物理不可克隆函数(PUF)是一个重要的硬件安全原语。本文提出了一种基于双层RRAM阵列结构的PUF设计,并在形成连续分布后,通过分裂电阻分布实现数字RRAM编程。提出的PUF在16mb RRAM测试芯片上实现,并通过NIST测试套件验证了其随机性。实验结果表明,这种新型PUF设计具有较强的可靠性和较强的抗机器学习攻击能力。
{"title":"A novel PUF against machine learning attack: Implementation on a 16 Mb RRAM chip","authors":"Yachuan Pang, Huaqiang Wu, B. Gao, Dong Wu, An Chen, H. Qian","doi":"10.1109/IEDM.2017.8268376","DOIUrl":"https://doi.org/10.1109/IEDM.2017.8268376","url":null,"abstract":"Physical unclonable function (PUF) is an important hardware security primitive. This paper proposes a novel PUF design based on a double-layer RRAM array architecture and digital RRAM programming achieved by splitting resistance distribution after a continuous distribution was formed. The proposed PUF was implemented on a 16 Mb RRAM test chip and its randomness was verified with NIST test suite. The experimental results demonstrate strong reliability and significantly enhanced resistance against machine-learning attack of this novel PUF design.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122879565","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 21
Body PiN diode inactivation with low on-resistance achieved by a 1.2 kV-class 4H-SiC SWITCH-MOS 通过1.2 kv级4H-SiC开关mos实现低导通电阻的体引脚二极管灭活
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268356
Yusuke Kobayashi, N. Ohse, T. Morimoto, Makoto Kato, T. Kojima, M. Miyazato, M. Takei, Hiroshi Kimura, S. Harada
Integration of SBD into SiC-MOSFET is promising to solve body-PiN-diode related problems known such as forward degradation and reverse recovery loss. Particularly in lower breakdown-voltage-class SBD-integrated MOSFET, cell pitch reduction has a greater impact on inactivating the body-PiN-diode. Here, we developed a novel device called an SBD-wall-integrated trench MOSFET (SWITCH-MOS), in which small cell pitch of 5p.m was realized by utilizing trench side walls both for SBD and MOS channel with buried p+ layer. The fabricated 1.2 kV SWITCH-MOS successfully suppressed the forward degradation under extremely high current density condition with low switching loss, low specific on-resistance, and low leakage current.
将SBD集成到SiC-MOSFET中有望解决体- pin二极管相关的问题,例如正向退化和反向恢复损耗。特别是在较低击穿电压等级的sbd集成MOSFET中,单元间距减小对灭活体- pin二极管有更大的影响。在这里,我们开发了一种称为sbd壁集成沟槽MOSFET (SWITCH-MOS)的新型器件,其中小单元间距为5p。m是通过埋设p+层的SBD和MOS通道的沟槽侧壁来实现的。制备的1.2 kV SWITCH-MOS具有低开关损耗、低比导通电阻和低漏电流等特点,成功抑制了超高电流密度条件下的正向退化。
{"title":"Body PiN diode inactivation with low on-resistance achieved by a 1.2 kV-class 4H-SiC SWITCH-MOS","authors":"Yusuke Kobayashi, N. Ohse, T. Morimoto, Makoto Kato, T. Kojima, M. Miyazato, M. Takei, Hiroshi Kimura, S. Harada","doi":"10.1109/IEDM.2017.8268356","DOIUrl":"https://doi.org/10.1109/IEDM.2017.8268356","url":null,"abstract":"Integration of SBD into SiC-MOSFET is promising to solve body-PiN-diode related problems known such as forward degradation and reverse recovery loss. Particularly in lower breakdown-voltage-class SBD-integrated MOSFET, cell pitch reduction has a greater impact on inactivating the body-PiN-diode. Here, we developed a novel device called an SBD-wall-integrated trench MOSFET (SWITCH-MOS), in which small cell pitch of 5p.m was realized by utilizing trench side walls both for SBD and MOS channel with buried p+ layer. The fabricated 1.2 kV SWITCH-MOS successfully suppressed the forward degradation under extremely high current density condition with low switching loss, low specific on-resistance, and low leakage current.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126490842","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 45
Key parameters affecting STT-MRAM switching efficiency and improved device performance of 400°C-compatible p-MTJs 影响STT-MRAM切换效率和提高400°c兼容p-MTJs器件性能的关键参数
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268515
Guohan Hu, Matthias Georg Gottwald, Qing He, Joon-Min Park, G. Lauer, Janusz J. Nowak, S. Brown, B. Doris, D. Edelstein, E. Evarts, Pouya Hashemi, B. Khan, Young-Hwan Kim, C. Kothandaraman, P. MarchackNathan, E. O'Sullivan, M. Reuter, R. Robertazzi, Jonathan Z. Sun, T. Suwannasiri, P. Trouilloud, Y. Zhu, D. Worledge
We report the impact of four key parameters on switching efficiency of STT-MRAM devices with perpendicular magnetic anisotropy: device size, device resistance-area product (RA), blanket film Gilbert damping constant (a), and process temperature. Performance degradation observed in 400°C-processed devices was eliminated by optimizing the perpendicular magnetic tunnel junction (p-MTJ) materials. Furthermore, 400°C-compatible double MTJs were developed for the first time and showed 1.5x improvement in switching efficiency compared to single MTJs with identical free layers.
我们报告了四个关键参数对垂直磁各向异性STT-MRAM器件开关效率的影响:器件尺寸,器件电阻面积积(RA),毯膜吉尔伯特阻尼常数(a)和工艺温度。通过优化垂直磁隧道结(p-MTJ)材料,消除了在400°c加工器件中观察到的性能下降。此外,首次开发了兼容400°c的双mtj,与具有相同自由层的单mtj相比,其开关效率提高了1.5倍。
{"title":"Key parameters affecting STT-MRAM switching efficiency and improved device performance of 400°C-compatible p-MTJs","authors":"Guohan Hu, Matthias Georg Gottwald, Qing He, Joon-Min Park, G. Lauer, Janusz J. Nowak, S. Brown, B. Doris, D. Edelstein, E. Evarts, Pouya Hashemi, B. Khan, Young-Hwan Kim, C. Kothandaraman, P. MarchackNathan, E. O'Sullivan, M. Reuter, R. Robertazzi, Jonathan Z. Sun, T. Suwannasiri, P. Trouilloud, Y. Zhu, D. Worledge","doi":"10.1109/IEDM.2017.8268515","DOIUrl":"https://doi.org/10.1109/IEDM.2017.8268515","url":null,"abstract":"We report the impact of four key parameters on switching efficiency of STT-MRAM devices with perpendicular magnetic anisotropy: device size, device resistance-area product (RA), blanket film Gilbert damping constant (a), and process temperature. Performance degradation observed in 400°C-processed devices was eliminated by optimizing the perpendicular magnetic tunnel junction (p-MTJ) materials. Furthermore, 400°C-compatible double MTJs were developed for the first time and showed 1.5x improvement in switching efficiency compared to single MTJs with identical free layers.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129559503","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
期刊
2017 IEEE International Electron Devices Meeting (IEDM)
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