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2017 IEEE International Electron Devices Meeting (IEDM)最新文献

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Modeling-based design of brain-inspired spiking neural networks with RRAM learning synapses 基于建模的RRAM学习突触脑激发脉冲神经网络设计
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268467
G. Pedretti, S. Bianchi, V. Milo, A. Calderoni, N. Ramaswamy, D. Ielmini
Brain-inspired computing is currently gaining momentum as a viable technology for artificial intelligence enabling recognition, language processing and online unsupervised learning. Brain-inspired circuit design is currently hindered by 2 fundamental limits: (i) understanding the event-driven spike processing in the human brain, and (ii) developing predictive models to design and optimize cognitive circuits. Here we present a comprehensive model for spiking neural networks based on spike-timing dependent plasticity (STDP) in resistive switching memory (RRAM) synapses. Both a Monte Carlo (MC) model and an analytical model are presented to describe experimental data from a state-of-the-art neuromorphic hardware. The model can predict the learning efficiency and time as a function of the input noise and pattern size, thus paving the way for model-based design of cognitive brain-like circuits.
以大脑为灵感的计算作为一种可行的人工智能技术,目前正获得越来越多的动力,这种技术可以实现识别、语言处理和在线无监督学习。以大脑为灵感的电路设计目前受到两个基本限制的阻碍:(1)理解人类大脑中事件驱动的尖峰处理;(2)开发预测模型来设计和优化认知电路。在这里,我们提出了一个基于电阻开关记忆(RRAM)突触中spike-timing dependent plasticity (STDP)的spike神经网络综合模型。蒙特卡罗(MC)模型和分析模型都提出了描述实验数据从最先进的神经形态硬件。该模型可以预测学习效率和时间作为输入噪声和模式大小的函数,从而为基于模型的类脑认知电路设计铺平了道路。
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引用次数: 19
14nm Ferroelectric FinFET technology with steep subthreshold slope for ultra low power applications 14nm铁电FinFET技术,具有陡峭的亚阈值斜率,适用于超低功耗应用
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268393
Z. Krivokapic, U. Rana, R. Galatage, A. Razavieh, A. Aziz, J. Liu, J. Shi, H. Kim, R. Sporer, C. Serrao, A. Busquet, P. Polakowski, J. Müller, W. Kleemeier, A. Jacob, D. Brown, A. Knorr, R. Carter, S. Banna
Doped hafnia ferroelectric layers with thicknesses from 3 to 8nm are integrated into state-of-the-art 14nm FinFET technology without any further process modification. Ferroelectric devices show improved subthreshold slope (as low as 54mV/dec) and Idsat (up to 165% increase). C-V curves show slight ferroelectric hysteresis. For the first time, we show that ring oscillators with ferroelectric devices can operate at frequencies similar to regular dielectrics, while improved subthreshold slope reduces their active power. We also propose a model for ferroelectric MOSFETs that spans both negative (NCFET) and positive (PCFET) ferroelectric capacitance (CFE) devices. By carefully designed capacitance matching ferroelectric devices can provide significant power savings without sacrificing the speed.
厚度从3到8nm的掺杂半氟铁电层被集成到最先进的14nm FinFET技术中,无需进一步的工艺修改。铁电器件显示出改善的亚阈值斜率(低至54mV/dec)和Idsat(高达165%)。C-V曲线显示出轻微的铁电滞后。我们首次证明了带有铁电器件的环形振荡器可以在与常规电介质相似的频率下工作,而改进的亚阈值斜率降低了它们的有功功率。我们还提出了一个铁电mosfet模型,该模型涵盖了负(NCFET)和正(PCFET)铁电电容(CFE)器件。通过精心设计电容匹配的铁电器件,可以在不牺牲速度的情况下显著节省功耗。
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引用次数: 150
Highly robust oxide thin film transistors with split active semiconductor and source/drain electrodes 具有拆分有源半导体和源极/漏极的高鲁棒性氧化薄膜晶体管
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268350
Suhui Lee, Di Geng, Ling Li, Ming Liu, Jin Jang
We report extremely stable and high performance etch-stopper (E/S) a-IGZO TFT on plastic substrate by using split active oxide semiconductor and source/drain electrodes. The a-IGZO TFTs exhibit high mobility over 70cm2/Vs and extremely stable under positive bias stress and mechanical stress. Therefore, this technology can be used for the manufacturing of high resolution flexible AMOLED displays.
我们报告了在塑料衬底上使用分裂活性氧化物半导体和源极/漏极的极其稳定和高性能的a-IGZO TFT腐蚀阻蚀剂(E/S)。a-IGZO TFTs具有超过70cm2/Vs的高迁移率,并且在正偏置应力和机械应力下非常稳定。因此,该技术可用于制造高分辨率柔性AMOLED显示器。
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引用次数: 5
Breakthrough of selector technology for cross-point 25-nm ReRAM 交叉点25nm ReRAM选择器技术的突破
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268309
S. Kim, Jong Chul Lee, T. J. Ha, Jong Ho Lee, Jae Yeon Lee, Yong Taek Park, K. Kim, W. Ju, Younghyun Ko, H. Hwang, B. Lee, J. Y. Moon, W. Park, B. Gyun, B. Lee, D. Yim, S. Hong
In this paper, the authors report for the first time the outstanding selector performance from an innovative oxide selector. SiO2, one of conventional and common materials in semiconductor industry, was chosen as a matrix oxide material. Metal atoms which are non-mobile and easy to handle were injected into the oxide films. Off-current and threshold voltage (Vth) could be controlled by using arsenic (As), which doping method and concentration were carefully investigated to achieve threshold switching behavior. Finally ReRAM (Resistance switching Random Access Memory) cell array consisted of one selector-one resistor (1S1R) was successfully demonstrated with the full integration of the newly developed selector.
本文首次报道了一种新型氧化物选择器的优异性能。选择半导体工业中常用的材料之一SiO2作为基质氧化物材料。将不易移动且易于处理的金属原子注入氧化膜中。通过砷(As)的掺杂方式和掺杂浓度的研究,实现了阈值开关行为。最后成功地演示了由一个选择器-一个电阻(1S1R)组成的ReRAM(电阻开关随机存取存储器)单元阵列,并充分集成了新开发的选择器。
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引用次数: 12
Towards cube-sized compute nodes: Advanced packaging concepts enabling extreme 3D integration 面向立方体大小的计算节点:先进的封装概念实现了极致的3D集成
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268322
T. Brunschwiler, G. Schlottig, A. Sridhar, P. Bezerra, P. Ruch, N. Ebejer, H. Oppermann, J. Kleff, W. Steller, M. Jatlaoui, F. Voiron, Z. Pavlović, P. McCloskey, D. Bremner, P. Parida, F. Krismer, J. Kolar, B. Michel
Novel heat removal and power delivery topologies are required to enable ‘extreme 3D integration’ with cube-sized compute nodes. Therefore, a technology roadmap is presented supporting memory-on-logic and logic-on-logic in the medium and long-term, by (i) dual-side cooling and integrated voltage regulators, and (ii) interlayer cooling and electrochemical power delivery.
为了实现与立方体大小的计算节点的“极端3D集成”,需要新颖的散热和供电拓扑。因此,本文提出了一项技术路线图,通过(i)双面冷却和集成稳压器,以及(ii)层间冷却和电化学供电,在中长期内支持逻辑上的存储和逻辑上的逻辑。
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引用次数: 9
Development of high-frequency bulk acoustic wave (BAW) resonators as biosensors and bioactuators 高频体声波(BAW)谐振器作为生物传感器和生物致动器的发展
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268362
X. Duan, S. Pan, W. Pang
Using of bulk acoustic wave resonators for biosensing applications grows rapidly in recent years. In this review, we summarized the recent trend developing of these devices for biodetection from two aspects: 1) as biosensors to provide label-free measurement of biomarkers. 2) as bioacutuators to manipulate biomolecules and enhance biosensing performance.
体声波谐振器在生物传感领域的应用近年来发展迅速。本文从两个方面综述了近年来生物检测设备的发展趋势:1)作为生物传感器,提供无标记生物标志物的测量;2)作为操纵生物分子和增强生物传感性能的生物致动器。
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引用次数: 1
2D molybdenum disulfide (MoS2) transistors driving RRAMs with 1T1R configuration 2D二硫化钼(MoS2)晶体管驱动1T1R结构的随机存储器
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268423
Rui Yang, Haitong Li, K. Smithe, T. R. Kim, Kye L. Okabe, E. Pop, Jonathan A. Fan, H. Wong
We demonstrate the first 1-transistor-1-resistor (1T1R) memory cell using the atomically thin molybdenum disulfide (MoS2) field-effect transistor (FET) and resistive random access memory (RRAM). This 1T1R demonstration realizes a key milestone for tight integration of memory with logic in a monolithic 3D integrated chip. The monolayer MoS2 is grown by chemical vapor deposition (CVD), suitable for wafer-scale fabrication. The MoS2 FETs have ON-state current of 190 μA/μm at Vd = 2.5 V, showing strong driving capability for RRAM. Metal-oxide RRAMs are fabricated at low process temperature, compatible with MoS2 FET fabrication. 1T1R measurements show higher resistances, and less resistance and voltage variation compared with measurements using only the RRAM. The multiple resistance states obtained for pulsed reset measurements show promise for in-memory computing and neuromorphic computing applications.
我们展示了第一个使用原子薄二硫化钼(MoS2)场效应晶体管(FET)和电阻随机存取存储器(RRAM)的1-晶体管-1-电阻(1T1R)存储单元。此1T1R演示实现了在单片3D集成芯片中存储器与逻辑紧密集成的关键里程碑。采用化学气相沉积(CVD)法制备了适于晶圆级制备的MoS2单层。在Vd = 2.5 V时,MoS2 fet的导通电流为190 μA/μm,具有较强的RRAM驱动能力。金属氧化物rram是在低工艺温度下制造的,与MoS2 FET制造兼容。与仅使用RRAM的测量相比,1T1R测量显示更高的电阻,更小的电阻和电压变化。脉冲复位测量获得的多重电阻状态显示了在内存计算和神经形态计算应用中的前景。
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引用次数: 15
Thermal effects in 3D sequential technology 三维序列技术中的热效应
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268348
K. Triantopoulos, M. Cassé, L. Brunet, P. Batude, C. Fenouillet-Béranger, B. Mathieu, M. Vinet, G. Ghibaudo, G. Reimbold
We present for the first time an experimental study of thermal effects in 3D sequential integration, including Self-Heating Effect (SHE) and thermal coupling between the two levels of ultra-thin body FDSOI transistors. We extracted a large set of experimental data using different thermometry techniques, and different heater-sensor configurations allowed by this specific stacked integration. We described SHE in top and bottom transistor levels, as well as the influence of a transistor in ON state on a transistor stacked above or below. At the same time, we provide for the first time an experimental validation that the temperature increase given by gate resistance thermometry technique is equal to the temperature in the channel given by the subthreshold slope. Finally, this work can be also used to manage thermal effects for logic or analog applications, and help further optimization of 3D sequential integrated circuits through both technology and design solutions.
我们首次对三维顺序集成中的热效应进行了实验研究,包括自热效应(SHE)和两级超薄体FDSOI晶体管之间的热耦合。我们使用不同的测温技术提取了大量的实验数据,以及这种特定堆叠集成允许的不同加热器传感器配置。我们描述了顶部和底部晶体管电平的SHE,以及处于ON状态的晶体管对堆叠在上面或下面的晶体管的影响。同时,我们首次提供了一个实验验证,即栅极电阻测温技术给出的温升等于亚阈值斜率给出的通道内温度。最后,这项工作还可用于管理逻辑或模拟应用的热效应,并通过技术和设计解决方案帮助进一步优化3D顺序集成电路。
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引用次数: 4
Data-aware NAND flash memory for intelligent computing with deep neural network 基于深度神经网络的智能计算数据感知NAND闪存
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268470
K. Takeuchi
This paper presents the data-aware NAND flash memories for intelligent computing. By recognizing the “value” of data stored in NAND flash, sophisticated data management such as storing important data in the higher reliable memory cell or adaptively optimizing the read reference voltage depending on the stress of each memory cell are realized. As a result, intelligent computing such as image recognition with deep neural network [1], data compression [2], data center storage [3] and disaggregated hybrid storage [4,5] are achieved.
提出了一种用于智能计算的数据感知型NAND闪存。通过识别存储在NAND闪存中的数据的“价值”,实现了将重要数据存储在可靠性更高的存储单元中或根据每个存储单元的应力自适应优化读取参考电压等复杂的数据管理。从而实现了深度神经网络图像识别[1]、数据压缩[2]、数据中心存储[3]、分解混合存储[4,5]等智能计算。
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引用次数: 3
Sub-10 nm diameter InGaAs vertical nanowire MOSFETs 直径小于10nm的InGaAs垂直纳米线mosfet
Pub Date : 2017-12-01 DOI: 10.1109/IEDM.2017.8268407
X. Zhao, C. Heidelberger, E. Fitzgerald, W. Lu, A. Vardi, J. D. del Alamo
We present the first sub-10 nm diameter vertical nanowire transistors of any kind in any semiconductor system. These devices are InGaAs MOSFETs fabricated by a top-down approach using reactive ion etching, alcohol-based digital etch and Ni alloyed contacts. A record Ion of 350 μA/μm at Ioff = 100 nA/μm and Vdd = 0.5 V is obtained in a 7 nm diameter device. The same device exhibits a peak transconductance (gm, pk) of 1.7 mS/μm and minimal subthreshold swing (S) of 90 mV/dec at Vds = 0.5 V, achieving the highest quality factor (defined as the ratio gm, pk/S) of 19 reported in vertical nanowire transistors. Excellent scaling behavior is observed with gm, pk and Ion increasing as the diameter is shrunk down to 7 nm.
我们提出了第一个在任何半导体系统中直径低于10纳米的垂直纳米线晶体管。这些器件是InGaAs mosfet,通过自上而下的方法使用反应离子蚀刻,醇基数字蚀刻和Ni合金触点制造。在直径为7 nm的器件中,在off = 100 nA/μm, Vdd = 0.5 V时,获得了350 μA/μm的记录离子。该器件在Vds = 0.5 V时的峰值跨导(gm, pk)为1.7 mS/μm,最小亚阈值摆幅(S)为90 mV/dec,实现了垂直纳米线晶体管中最高的质量因子(定义为比值gm, pk/S)为19。当直径缩小到7 nm时,gm、pk和Ion均增加,表现出良好的结垢行为。
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引用次数: 20
期刊
2017 IEEE International Electron Devices Meeting (IEDM)
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