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2013 IEEE International Conference of Electron Devices and Solid-state Circuits最新文献

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A high self-resonant and quality factor transformer using novel geometry for silicon based RFICs 一种高自谐振和质量因数变压器,采用新颖的几何形状用于硅基rfic
Pub Date : 2013-06-03 DOI: 10.1109/EDSSC.2013.6628223
Hua-Bin Zhang, M. Cai, Xiao-Yong He, Gui-Hui Chen, Haijun Wu
A novel 24-sided concave-convex geometry monolithic transformer that has high self-resonant frequency and quality factor is presented. It is implemented with the top level thick Cu metal and multiple geometrical structures in 0.13 um CMOS mixed-signal 1P6M salicide back-end process. Compared to those with conventional square, hexagonal and octagonal geometry structure, the novel transformer achieves better quality factor, self-resonant frequency and less chip area. The simulation results show that 1.12, 1 and 0.58 GHz improvements in SRF, and 2.4, 0.9 and 0.3 enhancements in quality factor are obtained respectively when compared to typical square, hexagonal and octagonal transformer with the same inductance of the primary and secondary winding.
提出了一种具有高自谐振频率和高品质因数的24面凹凸几何单片变压器。它是在0.13 um CMOS混合信号1P6M salicide后端工艺中采用顶级厚铜金属和多种几何结构实现的。与传统的方形、六角形和八角形结构的变压器相比,该变压器具有更好的质量因数、自谐振频率和更小的芯片面积。仿真结果表明,与主、次绕组电感相同的典型方形、六角形和八角形变压器相比,SRF分别提高了1.12、1和0.58 GHz,品质因子分别提高了2.4、0.9和0.3。
{"title":"A high self-resonant and quality factor transformer using novel geometry for silicon based RFICs","authors":"Hua-Bin Zhang, M. Cai, Xiao-Yong He, Gui-Hui Chen, Haijun Wu","doi":"10.1109/EDSSC.2013.6628223","DOIUrl":"https://doi.org/10.1109/EDSSC.2013.6628223","url":null,"abstract":"A novel 24-sided concave-convex geometry monolithic transformer that has high self-resonant frequency and quality factor is presented. It is implemented with the top level thick Cu metal and multiple geometrical structures in 0.13 um CMOS mixed-signal 1P6M salicide back-end process. Compared to those with conventional square, hexagonal and octagonal geometry structure, the novel transformer achieves better quality factor, self-resonant frequency and less chip area. The simulation results show that 1.12, 1 and 0.58 GHz improvements in SRF, and 2.4, 0.9 and 0.3 enhancements in quality factor are obtained respectively when compared to typical square, hexagonal and octagonal transformer with the same inductance of the primary and secondary winding.","PeriodicalId":333267,"journal":{"name":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","volume":"331 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133015335","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Multi-gate pHEMT modeling for high-power operation 高功率工作的多栅极pHEMT建模
Pub Date : 2013-06-03 DOI: 10.1109/EDSSC.2013.6628227
Cejun Wei, Yu Zhu, D. Bartle
Multi-gate pHEMTs are key elements in switch circuits in wireless communication applications due to their low loss and high power capacity with relatively small sizes. A great concern on their high power operation is the power step-back at on-state and at certain power level with harmonics deteriorated. In this paper we discuss the mechanism of power step-back. The power that can pass through an on-state pHEMT is dependent on saturation current, or the maximum available channel current. A premature power step-back or gain collapse in a multi-gate pHEMT is due to largely reduced saturation channel current caused by self-heating in center gate or gates. We developed a self-heating thermal model for multi-gate pHEMTs that can predict power level at that the power step-back and related hysteresis occur.
多栅极phemt具有低损耗、高功率、体积小等优点,是无线通信中开关电路的关键元件。在导通状态和一定功率下谐波劣化时的功率退阶是其大功率运行的一个重要问题。本文讨论了权力退步的机制。可以通过通态pHEMT的功率取决于饱和电流或最大可用通道电流。在多栅极pHEMT中,由于中心栅极或栅极的自热导致饱和通道电流大大降低,从而导致功率过早退步或增益崩溃。我们开发了一个多栅极phemt的自加热热模型,该模型可以预测功率步进和相关滞后发生时的功率水平。
{"title":"Multi-gate pHEMT modeling for high-power operation","authors":"Cejun Wei, Yu Zhu, D. Bartle","doi":"10.1109/EDSSC.2013.6628227","DOIUrl":"https://doi.org/10.1109/EDSSC.2013.6628227","url":null,"abstract":"Multi-gate pHEMTs are key elements in switch circuits in wireless communication applications due to their low loss and high power capacity with relatively small sizes. A great concern on their high power operation is the power step-back at on-state and at certain power level with harmonics deteriorated. In this paper we discuss the mechanism of power step-back. The power that can pass through an on-state pHEMT is dependent on saturation current, or the maximum available channel current. A premature power step-back or gain collapse in a multi-gate pHEMT is due to largely reduced saturation channel current caused by self-heating in center gate or gates. We developed a self-heating thermal model for multi-gate pHEMTs that can predict power level at that the power step-back and related hysteresis occur.","PeriodicalId":333267,"journal":{"name":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133832929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Split-output miller-compensated two-stage amplifiers 分路输出米勒补偿两级放大器
Pub Date : 2013-06-03 DOI: 10.1109/EDSSC.2013.6628234
Min Tan, W. Ki
In this paper we identify the defining characteristic of a class of split-output miller-compensated (SOM) amplifiers. Existing amplifiers implementing this defining feature are identified, and new two-stage SOM amplifiers are proposed. Various transistor-level implementations of SOM amplifiers are designed in UMC130 CMOS technology and their small-signal circuits are analyzed. Simulation results show that the proposed designs outperform the simple miller-compensated two-stage amplifier in terms of both small-signal performance and large-signal performance.
本文确定了一类分路输出米勒补偿(SOM)放大器的定义特性。现有的放大器实现了这一定义特征,并提出了新的两级SOM放大器。采用UMC130 CMOS技术设计了各种晶体管级的SOM放大器,并对其小信号电路进行了分析。仿真结果表明,所提设计在小信号性能和大信号性能方面都优于简单的米勒补偿两级放大器。
{"title":"Split-output miller-compensated two-stage amplifiers","authors":"Min Tan, W. Ki","doi":"10.1109/EDSSC.2013.6628234","DOIUrl":"https://doi.org/10.1109/EDSSC.2013.6628234","url":null,"abstract":"In this paper we identify the defining characteristic of a class of split-output miller-compensated (SOM) amplifiers. Existing amplifiers implementing this defining feature are identified, and new two-stage SOM amplifiers are proposed. Various transistor-level implementations of SOM amplifiers are designed in UMC130 CMOS technology and their small-signal circuits are analyzed. Simulation results show that the proposed designs outperform the simple miller-compensated two-stage amplifier in terms of both small-signal performance and large-signal performance.","PeriodicalId":333267,"journal":{"name":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130325858","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A ring oscillator based reliability structure for NBTI & PBTI measurement 一种基于环形振荡器的NBTI和PBTI测量可靠性结构
Pub Date : 2013-06-03 DOI: 10.1109/EDSSC.2013.6628048
Xiqing Wang, J. Hong, Yandong He, Ganggang Zhang, Lin Han, Xing Zhang
A ring oscillator based structure in digital circuits is presented for measuring NBTI and PBTI effects. The proposed test structure enables simultaneous stress of all devices under tests in either NBTI or PBTI mode and measures frequency degradation or the threshold voltage shift. The threshold voltage shift due to NBTI or PBTI can be directly read out in the proposed circuit which has been designed in a 1.2V, 90nm technology.
提出了一种基于环形振荡器的数字电路结构,用于测量NBTI和PBTI效应。所提出的测试结构能够在NBTI或PBTI模式下同时测试所有设备的应力,并测量频率退化或阈值电压偏移。该电路采用1.2V、90nm工艺设计,可直接读出由NBTI或PBTI引起的阈值电压偏移。
{"title":"A ring oscillator based reliability structure for NBTI & PBTI measurement","authors":"Xiqing Wang, J. Hong, Yandong He, Ganggang Zhang, Lin Han, Xing Zhang","doi":"10.1109/EDSSC.2013.6628048","DOIUrl":"https://doi.org/10.1109/EDSSC.2013.6628048","url":null,"abstract":"A ring oscillator based structure in digital circuits is presented for measuring NBTI and PBTI effects. The proposed test structure enables simultaneous stress of all devices under tests in either NBTI or PBTI mode and measures frequency degradation or the threshold voltage shift. The threshold voltage shift due to NBTI or PBTI can be directly read out in the proposed circuit which has been designed in a 1.2V, 90nm technology.","PeriodicalId":333267,"journal":{"name":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125591929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A charge pump with reduced current variation and mismatch in low-voltage low-power PLLs 在低压低功率锁相环中减少电流变化和失配的电荷泵
Pub Date : 2013-06-03 DOI: 10.1109/EDSSC.2013.6628140
Jia Yaoyao, Fang Jian, Qiao Ming, Zhou Ze-kun, Yan Wentao, Zhang Bo
A charge pump with excellent current matching and negligible current variation characteristics over wide output voltage dynamic range is proposed, which is simulated in the 0.18μm standard CMOS process with the power supply 1.8V. The proposed charge pump circuit improves current matching by applying a high gain operational trans-conductance amplifier. Negligible current variation is achieved by inducing a negative feedback loop to suppress the channel modulation effect. Compared with conventional charge pump circuit, the current mismatch of the proposed charge pump circuit is less than 0.5% within the output voltage dynamic range from 0.2V to 1.7V, and the current variation is reduced to 0.8% over the output voltage dynamic range from 0.32V to 1.7V. Besides, the average power consumption of the proposed charge pump circuit is about 0.48mW making it suitable for low voltage and low power PLLs.
提出了一种在宽输出电压动态范围内具有良好电流匹配和可忽略电流变化特性的电荷泵,并在0.18μm标准CMOS工艺中,以1.8V电源对其进行了仿真。所提出的电荷泵电路通过应用高增益运算跨导放大器来改善电流匹配。可忽略的电流变化是通过诱导一个负反馈回路来抑制通道调制效应来实现的。与传统电荷泵电路相比,本文提出的电荷泵电路在0.2V ~ 1.7V输出电压动态范围内电流失配小于0.5%,在0.32V ~ 1.7V输出电压动态范围内电流变异减小至0.8%。此外,所提出的电荷泵电路的平均功耗约为0.48mW,适用于低压低功率锁相环。
{"title":"A charge pump with reduced current variation and mismatch in low-voltage low-power PLLs","authors":"Jia Yaoyao, Fang Jian, Qiao Ming, Zhou Ze-kun, Yan Wentao, Zhang Bo","doi":"10.1109/EDSSC.2013.6628140","DOIUrl":"https://doi.org/10.1109/EDSSC.2013.6628140","url":null,"abstract":"A charge pump with excellent current matching and negligible current variation characteristics over wide output voltage dynamic range is proposed, which is simulated in the 0.18μm standard CMOS process with the power supply 1.8V. The proposed charge pump circuit improves current matching by applying a high gain operational trans-conductance amplifier. Negligible current variation is achieved by inducing a negative feedback loop to suppress the channel modulation effect. Compared with conventional charge pump circuit, the current mismatch of the proposed charge pump circuit is less than 0.5% within the output voltage dynamic range from 0.2V to 1.7V, and the current variation is reduced to 0.8% over the output voltage dynamic range from 0.32V to 1.7V. Besides, the average power consumption of the proposed charge pump circuit is about 0.48mW making it suitable for low voltage and low power PLLs.","PeriodicalId":333267,"journal":{"name":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115851142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
High-gain amplifier with n-type transistors 带有n型晶体管的高增益放大器
Pub Date : 2013-06-03 DOI: 10.1109/EDSSC.2013.6628203
P. Bahubalindruni, Vítor M. Grade Tavares, P. Guedes de Oliveira, P. Barquinha, R. Martins, E. Fortunato
A high-gain amplifier topology, with all single n-type enhancement transistors, is proposed in this paper. This type of circuits are essential in transparent TFT technologies, such as GIZO and ZnO that lack complementary type transistor. All circuits were simulated using BSIM3V3 model of a 0.35 μm CMOS technology, due to the absence of a complete electrical model for the TFTs. Results reveal that the proposed circuit promise more gain, lower power consumption and higher bandwidth than the existing solutions under identical bias conditions.
本文提出了一种高增益放大器拓扑结构,其中所有的n型增强晶体管都是单个的。这种类型的电路在透明TFT技术中是必不可少的,例如缺乏互补型晶体管的GIZO和ZnO。由于tft没有完整的电学模型,所有电路都使用0.35 μm CMOS技术的BSIM3V3模型进行仿真。结果表明,在相同偏置条件下,该电路比现有方案具有更高的增益、更低的功耗和更高的带宽。
{"title":"High-gain amplifier with n-type transistors","authors":"P. Bahubalindruni, Vítor M. Grade Tavares, P. Guedes de Oliveira, P. Barquinha, R. Martins, E. Fortunato","doi":"10.1109/EDSSC.2013.6628203","DOIUrl":"https://doi.org/10.1109/EDSSC.2013.6628203","url":null,"abstract":"A high-gain amplifier topology, with all single n-type enhancement transistors, is proposed in this paper. This type of circuits are essential in transparent TFT technologies, such as GIZO and ZnO that lack complementary type transistor. All circuits were simulated using BSIM3V3 model of a 0.35 μm CMOS technology, due to the absence of a complete electrical model for the TFTs. Results reveal that the proposed circuit promise more gain, lower power consumption and higher bandwidth than the existing solutions under identical bias conditions.","PeriodicalId":333267,"journal":{"name":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134218831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Band offsets of AlxGa1−xAs/GaAs heterojunction from atomistic first principles 基于原子第一性原理的AlxGa1−xAs/GaAs异质结带偏移
Pub Date : 2013-06-03 DOI: 10.1109/EDSSC.2013.6628136
Yin Wang, F. Zahid, Y. Zhu, Lei Liu, Jian Wang, Hong Guo
The properties of III-V compound semiconductors and their heterojunctions have been relentlessly investigated due to their wide-ranging applications in electronic and optoelectronic technologies. One of most important electronic property of heterojunctions is the band offset which describes the relative alignment of the electronic bands across the junction interface. Accurate determination of band offsets is critical for understanding quantum transport properties of the heterojuncton. For many III-V materials systems, the band offset has been carefully measured experimentally.[1]
III-V型化合物半导体及其异质结的性质由于其在电子和光电子技术中的广泛应用而得到了不断的研究。异质结最重要的电子特性之一是能带偏移量,它描述了电子能带在异质结界面上的相对排列。准确确定带偏对于理解异质结的量子输运特性至关重要。对于许多III-V材料体系,波段偏移已经在实验中被仔细测量过
{"title":"Band offsets of AlxGa1−xAs/GaAs heterojunction from atomistic first principles","authors":"Yin Wang, F. Zahid, Y. Zhu, Lei Liu, Jian Wang, Hong Guo","doi":"10.1109/EDSSC.2013.6628136","DOIUrl":"https://doi.org/10.1109/EDSSC.2013.6628136","url":null,"abstract":"The properties of III-V compound semiconductors and their heterojunctions have been relentlessly investigated due to their wide-ranging applications in electronic and optoelectronic technologies. One of most important electronic property of heterojunctions is the band offset which describes the relative alignment of the electronic bands across the junction interface. Accurate determination of band offsets is critical for understanding quantum transport properties of the heterojuncton. For many III-V materials systems, the band offset has been carefully measured experimentally.[1]","PeriodicalId":333267,"journal":{"name":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114866201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
All GaN-on-Si high power module design and performance evaluation 全氮化硅高功率模块设计及性能评估
Pub Date : 2013-06-03 DOI: 10.1109/EDSSC.2013.6628150
Stone Cheng, Chieh-An Wang, Po-Chien Chou, W. Chieng, E. Chang
This paper presents a 270-V, 56-A GaN power module with three AlN substrates are prepared for the module. Each substrate is composed of three parallel connected GaN chips which incorporates six 2-A AlGaN/GaN-on-Si high electron mobility transistors (HEMTs) cells. The substrate layout inside the module is designed to reduce package parasitic. The devices are wire-bonded in parallel connection to increase the power rating. The packaged GaN HEMTs exhibit the pulsed drain current of 0.435 A/mm. Both DC and pulsed current-voltage (ID-VDS) characteristics are measured for different connection and sizes of devices, at various of power densities, pulse lengths, and duty factors. The other static parameters like threshold voltage and leakage currents were extracted to show how these parameters would scale as the devices are paralleled. Performance of multiple chip GaN power module package is studied. Experimental results demonstrated the ability to parallel nine GaN HEMTs die together and to verify the current sharing during the dynamic switching to attain high-current capacities.
本文提出了一种270 v, 56 a的GaN电源模块,该模块采用三个AlN衬底。每个衬底由三个并行连接的GaN芯片组成,其中包含六个2-A AlGaN/GaN-on- si高电子迁移率晶体管(hemt)电池。模块内部的基板布局旨在减少封装寄生。这些器件采用线键并联,以增加额定功率。封装的GaN hemt的脉冲漏极电流为0.435 A/mm。在不同的功率密度、脉冲长度和占空比下,测量了不同连接方式和器件尺寸的直流和脉冲电流-电压(ID-VDS)特性。提取其他静态参数,如阈值电压和泄漏电流,以显示这些参数如何随着器件并联而缩放。研究了多芯片GaN功率模块封装的性能。实验结果证明了将9个GaN hemt芯片并联在一起的能力,并验证了动态开关过程中的电流共享以获得大电流容量。
{"title":"All GaN-on-Si high power module design and performance evaluation","authors":"Stone Cheng, Chieh-An Wang, Po-Chien Chou, W. Chieng, E. Chang","doi":"10.1109/EDSSC.2013.6628150","DOIUrl":"https://doi.org/10.1109/EDSSC.2013.6628150","url":null,"abstract":"This paper presents a 270-V, 56-A GaN power module with three AlN substrates are prepared for the module. Each substrate is composed of three parallel connected GaN chips which incorporates six 2-A AlGaN/GaN-on-Si high electron mobility transistors (HEMTs) cells. The substrate layout inside the module is designed to reduce package parasitic. The devices are wire-bonded in parallel connection to increase the power rating. The packaged GaN HEMTs exhibit the pulsed drain current of 0.435 A/mm. Both DC and pulsed current-voltage (ID-VDS) characteristics are measured for different connection and sizes of devices, at various of power densities, pulse lengths, and duty factors. The other static parameters like threshold voltage and leakage currents were extracted to show how these parameters would scale as the devices are paralleled. Performance of multiple chip GaN power module package is studied. Experimental results demonstrated the ability to parallel nine GaN HEMTs die together and to verify the current sharing during the dynamic switching to attain high-current capacities.","PeriodicalId":333267,"journal":{"name":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115041730","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fabrication of monolithic integrated MEMS resonator with wet-release-monitoring array 带湿释放监测阵列的单片集成MEMS谐振器的研制
Pub Date : 2013-06-03 DOI: 10.1109/EDSSC.2013.6628207
D. Zhao, Jun He, Xian Huang, Li Zhang, Fang Yang, Dacheng Zhang
In this work, a monolithic integrated MEMS resonator was fabricated and tested. Surface micromachining method was employed to fabricate the cantilever MEMS resonator after a standard 3 μm CMOS process. The wet release method with dilute HF solution was chosen and compared to the anhydrous HF vapor release process. A release-monitoring structure with polysilicon/Au cantilever array was used to determine the corrosion time of the sacrificial material. Results showed that the MOSFETs function well after proposed release process.
在这项工作中,制作了一个单片集成MEMS谐振器并进行了测试。采用表面微加工的方法,采用标准的3 μm CMOS工艺制作悬臂式MEMS谐振器。选择了稀释HF溶液的湿释放法,并与无水HF蒸汽释放法进行了比较。采用多晶硅/金悬臂阵列释放监测结构来测定牺牲材料的腐蚀时间。实验结果表明,采用该释放工艺后,mosfet的性能良好。
{"title":"Fabrication of monolithic integrated MEMS resonator with wet-release-monitoring array","authors":"D. Zhao, Jun He, Xian Huang, Li Zhang, Fang Yang, Dacheng Zhang","doi":"10.1109/EDSSC.2013.6628207","DOIUrl":"https://doi.org/10.1109/EDSSC.2013.6628207","url":null,"abstract":"In this work, a monolithic integrated MEMS resonator was fabricated and tested. Surface micromachining method was employed to fabricate the cantilever MEMS resonator after a standard 3 μm CMOS process. The wet release method with dilute HF solution was chosen and compared to the anhydrous HF vapor release process. A release-monitoring structure with polysilicon/Au cantilever array was used to determine the corrosion time of the sacrificial material. Results showed that the MOSFETs function well after proposed release process.","PeriodicalId":333267,"journal":{"name":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121214363","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Design optimization of gate-all-around vertical nanowire transistors for future memory applications 面向未来存储器应用的栅极全能垂直纳米线晶体管的设计优化
Pub Date : 2013-06-03 DOI: 10.1109/EDSSC.2013.6628113
T. Agarwal, O. Badami, S. Ganguly, S. Mahapatra, D. Saha
This paper investigates the application of gate-all-around (GAA) vertical nanowire transistors (VNWFET) as an access element in future non-volatile memories (NVM) such as resistive random-access memory (RRAM), phase-change random access memory (PCRAM) and spin-torque-transfer memory (STT-RAM or MRAM). We primarily choose direct-current (DC) parameters ION and ION/IOFF as our figure of merit (FOM) and optimize the vertical nanowire FET by taking various critical process parameters into account such as channel length, fin doping, gate overlap, and cross-sectional shape of the nanowire transistor. Further, using the optimized device in a 3×3 cross-bar array arrangement, we evaluate the read/write disturb due to the active device on it's neighboring inactive devices. We show that the optimized access device can be used for a range of currents ratings required by different memory devices, ION being as high as 0.19 A/μm2 and IOFF being as low as 2 nA/μm2.
本文研究了栅极全能(GAA)垂直纳米线晶体管(VNWFET)作为未来非易失性存储器(NVM)如电阻随机存取存储器(RRAM)、相变随机存取存储器(PCRAM)和自旋转矩传输存储器(STT-RAM或MRAM)中的存取元件的应用。我们主要选择直流(DC)参数ION和ION/IOFF作为我们的优值(FOM),并通过考虑各种关键工艺参数(如沟道长度、鳍片掺杂、栅极重叠和纳米线晶体管的横截面形状)来优化垂直纳米线场效应管。此外,使用优化后的器件在3×3交叉棒阵列中,我们评估了由于有源器件对相邻非活动器件的读/写干扰。我们发现,优化后的存取器件可用于不同存储器件所需的电流额定值范围,离子最高可达0.19 a /μm2, IOFF低至2 nA/μm2。
{"title":"Design optimization of gate-all-around vertical nanowire transistors for future memory applications","authors":"T. Agarwal, O. Badami, S. Ganguly, S. Mahapatra, D. Saha","doi":"10.1109/EDSSC.2013.6628113","DOIUrl":"https://doi.org/10.1109/EDSSC.2013.6628113","url":null,"abstract":"This paper investigates the application of gate-all-around (GAA) vertical nanowire transistors (VNWFET) as an access element in future non-volatile memories (NVM) such as resistive random-access memory (RRAM), phase-change random access memory (PCRAM) and spin-torque-transfer memory (STT-RAM or MRAM). We primarily choose direct-current (DC) parameters ION and ION/IOFF as our figure of merit (FOM) and optimize the vertical nanowire FET by taking various critical process parameters into account such as channel length, fin doping, gate overlap, and cross-sectional shape of the nanowire transistor. Further, using the optimized device in a 3×3 cross-bar array arrangement, we evaluate the read/write disturb due to the active device on it's neighboring inactive devices. We show that the optimized access device can be used for a range of currents ratings required by different memory devices, ION being as high as 0.19 A/μm2 and IOFF being as low as 2 nA/μm2.","PeriodicalId":333267,"journal":{"name":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121393519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
期刊
2013 IEEE International Conference of Electron Devices and Solid-state Circuits
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