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International Semiconductor Device Research Symposium, 2003最新文献

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Temperature dependency of MOSFET device characteristics in 4H- and 6H-silicon carbide (SiC) 4H-和6h -碳化硅中MOSFET器件特性的温度依赖性
Pub Date : 2003-12-10 DOI: 10.1109/ISDRS.2003.1272029
M. Hasanuzzama, S. Islam, L. Tolbert, M.T. Alam
An analytical model for lateral MOSFET that includes the effects of temperature variation in 4H- and 6H-SiC poly-type is presented in this paper. The model includes the effect of temperature variation on the threshold voltage, the carrier mobility, the body leakage current, and the drain and source contact region resistances. MOSFET device behavior in 4H-SiC is also simulated and compared with 6H-SiC material system.
本文提出了一个包含4H-和6H-SiC多晶型温度变化影响的横向MOSFET解析模型。该模型包括温度变化对阈值电压、载流子迁移率、体漏电流以及漏极和源极接触区电阻的影响。模拟了4H-SiC材料体系中MOSFET器件的性能,并与6H-SiC材料体系进行了比较。
{"title":"Temperature dependency of MOSFET device characteristics in 4H- and 6H-silicon carbide (SiC)","authors":"M. Hasanuzzama, S. Islam, L. Tolbert, M.T. Alam","doi":"10.1109/ISDRS.2003.1272029","DOIUrl":"https://doi.org/10.1109/ISDRS.2003.1272029","url":null,"abstract":"An analytical model for lateral MOSFET that includes the effects of temperature variation in 4H- and 6H-SiC poly-type is presented in this paper. The model includes the effect of temperature variation on the threshold voltage, the carrier mobility, the body leakage current, and the drain and source contact region resistances. MOSFET device behavior in 4H-SiC is also simulated and compared with 6H-SiC material system.","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126374757","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 44
Electron mobility model for silicon carbide inversion layers 碳化硅反转层的电子迁移率模型
Pub Date : 2003-12-10 DOI: 10.1109/ISDRS.2003.1272022
Y. Zeng, M. White
This paper presents, a physically based inversion layer electron mobility model which takes into account the combined effects of surface roughness and coulomb scattering the two main mechanisms limiting the electron mobility in SiC MOSFETs. The MOSFET was fabricated on an aluminium-implanted surface and the transfer characteristics are analysed, then the corresponding transconductance curves are compared.
本文提出了一个基于物理的反演层电子迁移率模型,该模型考虑了表面粗糙度和库仑散射这两种限制碳化硅mosfet中电子迁移率的主要机制的综合影响。在铝注入表面上制备了MOSFET,分析了其转移特性,并比较了相应的跨导曲线。
{"title":"Electron mobility model for silicon carbide inversion layers","authors":"Y. Zeng, M. White","doi":"10.1109/ISDRS.2003.1272022","DOIUrl":"https://doi.org/10.1109/ISDRS.2003.1272022","url":null,"abstract":"This paper presents, a physically based inversion layer electron mobility model which takes into account the combined effects of surface roughness and coulomb scattering the two main mechanisms limiting the electron mobility in SiC MOSFETs. The MOSFET was fabricated on an aluminium-implanted surface and the transfer characteristics are analysed, then the corresponding transconductance curves are compared.","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"50 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124910446","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Multi-functional biochip for biological agent detection 用于生物制剂检测的多功能生物芯片
Pub Date : 2003-12-10 DOI: 10.1109/ISDRS.2003.1272222
T. Vo‐Dinh, G. Griffin, A. Wintenberg, D. Stokes, D. Stratis, J. Mobley, R. Maples
Multifunctional biochip (MFB) is a unique system that allows simultaneous detection of multiple biotargets simultaneously. The MFB is an integrated multi-array biochip, which is designed by combining integrated circuit elements, an electro-optics excitation/detection system, and bioreceptor probes into a self-contained and integrated microdevice. The multi-functional capability of MFB is demonstrated using the biochip as both an antibody-based and DNA sensor. The study indicates that the biochip technology provides an important tool to warn of exposure to pathogenic agents for use in human health protection and homeland defense.
多功能生物芯片(MFB)是一种独特的系统,可以同时检测多种生物靶点。MFB是一种集成的多阵列生物芯片,它是通过将集成电路元件、电光激励/检测系统和生物受体探针结合到一个独立的集成微器件中而设计的。利用生物芯片作为抗体和DNA传感器,证明了MFB的多功能能力。研究表明,生物芯片技术为人类健康保护和国土防御提供了一种重要的病原体暴露预警工具。
{"title":"Multi-functional biochip for biological agent detection","authors":"T. Vo‐Dinh, G. Griffin, A. Wintenberg, D. Stokes, D. Stratis, J. Mobley, R. Maples","doi":"10.1109/ISDRS.2003.1272222","DOIUrl":"https://doi.org/10.1109/ISDRS.2003.1272222","url":null,"abstract":"Multifunctional biochip (MFB) is a unique system that allows simultaneous detection of multiple biotargets simultaneously. The MFB is an integrated multi-array biochip, which is designed by combining integrated circuit elements, an electro-optics excitation/detection system, and bioreceptor probes into a self-contained and integrated microdevice. The multi-functional capability of MFB is demonstrated using the biochip as both an antibody-based and DNA sensor. The study indicates that the biochip technology provides an important tool to warn of exposure to pathogenic agents for use in human health protection and homeland defense.","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"113 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124118470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Si/SiGe terahertz quantum cascade emitters Si/SiGe太赫兹量子级联发射器
Pub Date : 2003-12-10 DOI: 10.1109/ISDRS.2003.1271976
D. Paul, S. Lynch, P. Townsend, Z. Ikonić, R. Kelsall, P. Harrison, S. Liew, D. Norris, A. Cullis, J. Zhang, H. Gamble, W. Tribe, D. D. Arnone
In this paper, we demonstrated electroluminescence in strain-symmetrised structures with up to 600 active periods. The wafer also demonstrates for the first time growth of a strain symmetrised Si/SiGe superlattice on top of a silicon-on-silicide wafer where the silicide is designed to be a bottom reflector in waveguide cavity. TEM images of the structure demonstrated excellent planarity and uniformity of the active periods.
在本文中,我们证明了电致发光在应变对称结构中具有多达600个活跃周期。该晶片还首次展示了在硅化硅晶片顶部生长应变对称Si/SiGe超晶格,硅化硅被设计为波导腔中的底部反射器。TEM图像显示,该结构具有良好的平面性和均匀性。
{"title":"Si/SiGe terahertz quantum cascade emitters","authors":"D. Paul, S. Lynch, P. Townsend, Z. Ikonić, R. Kelsall, P. Harrison, S. Liew, D. Norris, A. Cullis, J. Zhang, H. Gamble, W. Tribe, D. D. Arnone","doi":"10.1109/ISDRS.2003.1271976","DOIUrl":"https://doi.org/10.1109/ISDRS.2003.1271976","url":null,"abstract":"In this paper, we demonstrated electroluminescence in strain-symmetrised structures with up to 600 active periods. The wafer also demonstrates for the first time growth of a strain symmetrised Si/SiGe superlattice on top of a silicon-on-silicide wafer where the silicide is designed to be a bottom reflector in waveguide cavity. TEM images of the structure demonstrated excellent planarity and uniformity of the active periods.","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122592725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Simulation study of InP/GaAsSb double heterojunction bipolar transistors InP/GaAsSb双异质结双极晶体管的仿真研究
Pub Date : 2003-12-10 DOI: 10.1109/ISDRS.2003.1272056
P. Balaraman, K. Roenker
Device modeling using a two dimensional, drift-diffusion approach utilizing a commercial numerical device simulator has been used to investigate the operation and performance of InP/GaAsSb heterojunction bipolar transistors (HBTs). GaAsSb lattice matched to InP has an energy bandgap (0.72 eV) that is similar to that of InGaAs (0.75 eV) so that Sb-based HBTs have been proposed as a replacement for InGaAs-based HBTs. In particular, the conduction band lineup is more favorable at the base-collector, which makes the GaAsSb-based HBTs especially attractive for double heterojunction bipolar transistors (DHBTs) where higher breakdown voltages are desired. In this work, the results of device modeling will be compared initially with recent experimental reports to validate the modeling approach. Subsequently, the design and operation of the devices will be examined to investigate the factors controlling device performance in order to facilitate improvements in device design.
利用商业数值器件模拟器,采用二维漂移扩散方法进行器件建模,研究了InP/GaAsSb异质结双极晶体管(HBTs)的工作和性能。与InP匹配的GaAsSb晶格具有与InGaAs (0.75 eV)相似的能带隙(0.72 eV),因此sb基HBTs被提议作为InGaAs基HBTs的替代品。特别是,导带排列在基极集电极处更有利,这使得基于gaassb的hbt对需要更高击穿电压的双异质结双极晶体管(dhbt)特别有吸引力。在这项工作中,器件建模的结果将首先与最近的实验报告进行比较,以验证建模方法。随后,将检查设备的设计和操作,以调查控制设备性能的因素,以促进设备设计的改进。
{"title":"Simulation study of InP/GaAsSb double heterojunction bipolar transistors","authors":"P. Balaraman, K. Roenker","doi":"10.1109/ISDRS.2003.1272056","DOIUrl":"https://doi.org/10.1109/ISDRS.2003.1272056","url":null,"abstract":"Device modeling using a two dimensional, drift-diffusion approach utilizing a commercial numerical device simulator has been used to investigate the operation and performance of InP/GaAsSb heterojunction bipolar transistors (HBTs). GaAsSb lattice matched to InP has an energy bandgap (0.72 eV) that is similar to that of InGaAs (0.75 eV) so that Sb-based HBTs have been proposed as a replacement for InGaAs-based HBTs. In particular, the conduction band lineup is more favorable at the base-collector, which makes the GaAsSb-based HBTs especially attractive for double heterojunction bipolar transistors (DHBTs) where higher breakdown voltages are desired. In this work, the results of device modeling will be compared initially with recent experimental reports to validate the modeling approach. Subsequently, the design and operation of the devices will be examined to investigate the factors controlling device performance in order to facilitate improvements in device design.","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121706687","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A new spin on electronics - spintronics 电子学的新进展——自旋电子学
Pub Date : 2003-12-10 DOI: 10.1109/ISDRS.2003.1272106
S. Wolf
This paper describes about the discovery of the giant magnetoresistance effect in magnetic multilayers in 1998 and the subsequent development of sensors based on it and the introduction of a new nonvolatile magnetic memory based on a spin dependent tunneling structure that potentially can be a universal replacement for existing semiconductor memories both volatile and nonvolatile. The development of the new field of spin electronics or spintronics is also discussed.
本文介绍了1998年磁性多层材料中巨磁电阻效应的发现,以及基于该效应的传感器的后续发展,以及基于自旋相关隧道结构的新型非易失性磁存储器的引入,该结构有可能成为现有的易失性和非易失性半导体存储器的普遍替代品。讨论了自旋电子学或自旋电子学这一新领域的发展。
{"title":"A new spin on electronics - spintronics","authors":"S. Wolf","doi":"10.1109/ISDRS.2003.1272106","DOIUrl":"https://doi.org/10.1109/ISDRS.2003.1272106","url":null,"abstract":"This paper describes about the discovery of the giant magnetoresistance effect in magnetic multilayers in 1998 and the subsequent development of sensors based on it and the introduction of a new nonvolatile magnetic memory based on a spin dependent tunneling structure that potentially can be a universal replacement for existing semiconductor memories both volatile and nonvolatile. The development of the new field of spin electronics or spintronics is also discussed.","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124771914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Reliability challenges of high performance PD SOI CMOS with ultra-thin gate dielectrics 采用超薄栅电介质的高性能PD SOI CMOS的可靠性挑战
Pub Date : 2003-12-10 DOI: 10.1109/ISDRS.2003.1272134
E. Zhao, A. Salman, J. Zhang, N. Subba, J. Chan, A. Marathe, S. Beebe, K. Taylor
In this paper we have discussed various reliability issues in developing cutting edge SOI technologies with ultra-thin gate dielectrics such as DC-HCI (hot carrier injection), TDDB, NBTI, and ESD. Floating body and body tied structures on partially depleted SOI substrate are investigated. The correlation between the AC and DC HCI degradation are compared and found to have a larger voltage scaling factor that can be explained by self-heating. The reliability of the gate dielectric is evaluated by time dependent dielectric breakdown (TDDB). The results imply that the addition of a T-gate shortens gate dielectric lifetime, this is because part of the gate dielectric is biased in accumulation and thus has shorter lifetime. Negative bias temperature instability (NBTI) lifetime improves with higher nitrogen concentration in the GOX but it is found that it can cause more positive charge generation during NBTI stress. Electrostatic discharge (ESD) is the major reliability issue, ESD failure mechanism is thermal runaway that is due to the increased self-heating. A typical protection of the increased self-heating is the lateral diode. Change in design of the lateral diode to floating gate electrode enhanced the charged device model (CDM) protection capability.
在本文中,我们讨论了使用超薄栅极电介质(如DC-HCI(热载流子注入)、TDDB、NBTI和ESD)开发尖端SOI技术的各种可靠性问题。研究了部分耗尽SOI衬底上的浮体和绑体结构。比较了交流和直流HCI退化之间的相关性,发现具有更大的电压比例因子,可以用自加热来解释。采用时间相关介质击穿法(TDDB)对栅极介质的可靠性进行了评价。结果表明,t栅极的加入缩短了栅极介电寿命,这是因为部分栅极介电在积累中有偏置,因此具有较短的寿命。GOX中氮浓度越高,负偏置温度不稳定性(NBTI)寿命越长,但NBTI胁迫过程中产生的正电荷越多。静电放电(ESD)是主要的可靠性问题,静电放电的失效机制是由于自热增加引起的热失控。增加自热的典型保护是侧向二极管。将侧极改为浮栅电极,提高了充电器件模型(CDM)的保护能力。
{"title":"Reliability challenges of high performance PD SOI CMOS with ultra-thin gate dielectrics","authors":"E. Zhao, A. Salman, J. Zhang, N. Subba, J. Chan, A. Marathe, S. Beebe, K. Taylor","doi":"10.1109/ISDRS.2003.1272134","DOIUrl":"https://doi.org/10.1109/ISDRS.2003.1272134","url":null,"abstract":"In this paper we have discussed various reliability issues in developing cutting edge SOI technologies with ultra-thin gate dielectrics such as DC-HCI (hot carrier injection), TDDB, NBTI, and ESD. Floating body and body tied structures on partially depleted SOI substrate are investigated. The correlation between the AC and DC HCI degradation are compared and found to have a larger voltage scaling factor that can be explained by self-heating. The reliability of the gate dielectric is evaluated by time dependent dielectric breakdown (TDDB). The results imply that the addition of a T-gate shortens gate dielectric lifetime, this is because part of the gate dielectric is biased in accumulation and thus has shorter lifetime. Negative bias temperature instability (NBTI) lifetime improves with higher nitrogen concentration in the GOX but it is found that it can cause more positive charge generation during NBTI stress. Electrostatic discharge (ESD) is the major reliability issue, ESD failure mechanism is thermal runaway that is due to the increased self-heating. A typical protection of the increased self-heating is the lateral diode. Change in design of the lateral diode to floating gate electrode enhanced the charged device model (CDM) protection capability.","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125013594","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 20
Barrier-enhanced InGaAs/InAlAs photodetectors using quantum-well intermixing 利用量子阱混合的势垒增强InGaAs/InAlAs光电探测器
Pub Date : 2003-12-10 DOI: 10.1109/ISDRS.2003.1272235
Gregory B. Tait, D. B. Ameen
A thin barrier-enhancement region on quantum well InGaAs/InAlAs MSM photodetector is incorporated in between the two-dimensional quantum channel and the three-dimensional metal contact. One-dimensional and uniform strong electric field throughout the transport direction in the quantum channel is obtained by contacting this quantum channel laterally. This region is modeled by a quantum mechanical boundary condition in the numerical carrier transport simulation. Effects of this thin boundary on InGaAs/InAlAs MSM photodetector dark and transient current responses are presented.
在量子阱InGaAs/InAlAs MSM光电探测器上,在二维量子通道和三维金属触点之间加入了薄的势垒增强区。通过与量子通道横向接触,获得了量子通道内整个输运方向的一维均匀强电场。在数值载流子输运模拟中,用量子力学边界条件对该区域进行了建模。研究了这种薄边界对InGaAs/InAlAs MSM光电探测器暗电流和瞬态电流响应的影响。
{"title":"Barrier-enhanced InGaAs/InAlAs photodetectors using quantum-well intermixing","authors":"Gregory B. Tait, D. B. Ameen","doi":"10.1109/ISDRS.2003.1272235","DOIUrl":"https://doi.org/10.1109/ISDRS.2003.1272235","url":null,"abstract":"A thin barrier-enhancement region on quantum well InGaAs/InAlAs MSM photodetector is incorporated in between the two-dimensional quantum channel and the three-dimensional metal contact. One-dimensional and uniform strong electric field throughout the transport direction in the quantum channel is obtained by contacting this quantum channel laterally. This region is modeled by a quantum mechanical boundary condition in the numerical carrier transport simulation. Effects of this thin boundary on InGaAs/InAlAs MSM photodetector dark and transient current responses are presented.","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125014219","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Physical characterization of HfO/sub 2/ deposited on Ge substrates by MOCVD 通过 MOCVD 在 Ge 基底上沉积的 HfO/sub 2/ 的物理特性
Pub Date : 2003-12-10 DOI: 10.1109/ISDRS.2003.1271981
S. Van Elshocht, B. Brijs, M. Caymax, T. Conard, S. De Gendt, S. Kubicek, M. Meuris, B. Onsia, O. Richard, I. Teerlinck, J. Van Steenbergen, C. Zhao, M. Heyns
In this paper, we study the growth properties of HfO/sub 2/ on Ge by MOCVD, using TDEAH and O/sub 2/ precursors and compare the results to similar layers deposited on silicon substrates. Analysis techniques include ellipsometry, Rutherford Backscattering Spectra (RBS), transmission electron microscopy (TEM),X-ray diffraction (XRD), and time of flight secondary ion mass spectroscopy (TOFSIMS).
在本文中,我们使用 TDEAH 和 O/sub 2/ 前驱体,通过 MOCVD 技术研究了 HfO/sub 2/ 在 Ge 上的生长特性,并将结果与沉积在硅衬底上的类似层进行了比较。分析技术包括椭偏仪、卢瑟福背散射光谱 (RBS)、透射电子显微镜 (TEM)、X 射线衍射 (XRD) 和飞行时间二次离子质谱 (TOFSIMS)。
{"title":"Physical characterization of HfO/sub 2/ deposited on Ge substrates by MOCVD","authors":"S. Van Elshocht, B. Brijs, M. Caymax, T. Conard, S. De Gendt, S. Kubicek, M. Meuris, B. Onsia, O. Richard, I. Teerlinck, J. Van Steenbergen, C. Zhao, M. Heyns","doi":"10.1109/ISDRS.2003.1271981","DOIUrl":"https://doi.org/10.1109/ISDRS.2003.1271981","url":null,"abstract":"In this paper, we study the growth properties of HfO/sub 2/ on Ge by MOCVD, using TDEAH and O/sub 2/ precursors and compare the results to similar layers deposited on silicon substrates. Analysis techniques include ellipsometry, Rutherford Backscattering Spectra (RBS), transmission electron microscopy (TEM),X-ray diffraction (XRD), and time of flight secondary ion mass spectroscopy (TOFSIMS).","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131474050","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
32 GHz and 40 GHz bandwidth distributed amplifier MMICs based on N-channel SiGe MODFETs 基于n通道SiGe modfet的32ghz和40ghz带宽分布式放大器mmic
Pub Date : 2003-12-10 DOI: 10.1109/ISDRS.2003.1271993
P. Abele, I. Kallfass, H. Schumacher, M. Zeuner, T. Muller, T. Hackbarth, U. Konig, D. Chrastina, H. von Kanel
Two distributed amplifiers using n-type SiGe MODFETs as active devices and a coplanar waveguide topology on high resistivity silicon substrate were fabricated. Each of the amplifiers consist of six identical stages, one using a cascode transistor configuration and the other a common source transistor configuration. The distributed amplifier in cascode configuration has an increased bandwidth of 40 GHz and a gain of 4 dB with a ripple of /spl plusmn/0.4 dB. The other amplifier has a bandwidth of 32 GHz and a gain of 5.5 dB with a ripple of /spl plusmn/0.8 dB.
采用n型SiGe modfet作为有源器件和高阻硅衬底共面波导拓扑结构制备了两个分布式放大器。每个放大器由六个相同的级组成,一个使用级联晶体管配置,另一个使用公共源晶体管配置。级联码配置的分布式放大器带宽增加了40 GHz,增益为4 dB,纹波为/spl + /0.4 dB。另一个放大器的带宽为32 GHz,增益为5.5 dB,纹波为/spl plusmn/0.8 dB。
{"title":"32 GHz and 40 GHz bandwidth distributed amplifier MMICs based on N-channel SiGe MODFETs","authors":"P. Abele, I. Kallfass, H. Schumacher, M. Zeuner, T. Muller, T. Hackbarth, U. Konig, D. Chrastina, H. von Kanel","doi":"10.1109/ISDRS.2003.1271993","DOIUrl":"https://doi.org/10.1109/ISDRS.2003.1271993","url":null,"abstract":"Two distributed amplifiers using n-type SiGe MODFETs as active devices and a coplanar waveguide topology on high resistivity silicon substrate were fabricated. Each of the amplifiers consist of six identical stages, one using a cascode transistor configuration and the other a common source transistor configuration. The distributed amplifier in cascode configuration has an increased bandwidth of 40 GHz and a gain of 4 dB with a ripple of /spl plusmn/0.4 dB. The other amplifier has a bandwidth of 32 GHz and a gain of 5.5 dB with a ripple of /spl plusmn/0.8 dB.","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125467903","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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International Semiconductor Device Research Symposium, 2003
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